| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/23/2002 | US6424001 Flash memory with ultra thin vertical body transistors |
| 07/23/2002 | US6424000 Floating gate memory apparatus and method for selected programming thereof |
| 07/23/2002 | US6423999 Semiconductor device and capacitor with means to prevent deterioration due to hydrogen |
| 07/23/2002 | US6423998 Semiconductor device capacitor and method of manufacturing the same |
| 07/23/2002 | US6423997 Semiconductor integrated circuit having a non-volatile semiconductor memory and a capacitor |
| 07/23/2002 | US6423996 Process for fabricating a metal-metal capacitor within an integrated circuit, and corresponding integrated circuit |
| 07/23/2002 | US6423992 Semiconductor integrated circuit device |
| 07/23/2002 | US6423990 Vertical heterojunction bipolar transistor |
| 07/23/2002 | US6423989 Semiconductor device and method of manufacturing the same |
| 07/23/2002 | US6423982 Diamond interconnection substrate and a manufacturing method therefor |
| 07/23/2002 | US6423978 System for detecting disk-shaped object such as semiconductor wafer or magnetic disk |
| 07/23/2002 | US6423977 Pattern size evaluation apparatus |
| 07/23/2002 | US6423976 Ion implanter and a method of implanting ions |
| 07/23/2002 | US6423975 Wafer holder for simox processing |
| 07/23/2002 | US6423973 X-ray image sensor and method for fabricating the same |
| 07/23/2002 | US6423967 Detection apparatus and detection method to be used for scanning probe and observation apparatus and observation method |
| 07/23/2002 | US6423949 Multi-zone resistive heater |
| 07/23/2002 | US6423947 Thermal processing chamber for heating and cooling wafer-like objects |
| 07/23/2002 | US6423939 Micro soldering method and apparatus |
| 07/23/2002 | US6423938 Method for the electrical and/or mechanical interconnection of components of a microelectronic system |
| 07/23/2002 | US6423927 Laser system |
| 07/23/2002 | US6423797 Anti-reflective coating polymers from p-tosylmethylacrylamide and preparation method |
| 07/23/2002 | US6423654 Method of manufacturing a semiconductor device having silicon oxynitride passavation layer |
| 07/23/2002 | US6423653 Reduction of plasma damage for HDP-CVD PSG process |
| 07/23/2002 | US6423652 Forming dielectric layer over substrate, implanting dopants including hydrogen ions into dielectric layer to form compact layer on surface, performing annealing operation |
| 07/23/2002 | US6423651 Insulating film of semiconductor device and coating solution for forming insulating film and method of manufacturing insulating film |
| 07/23/2002 | US6423650 Ultra-thin resist coating quality by increasing surface roughness of the substrate |
| 07/23/2002 | US6423649 Method and apparatus for stabilizing high pressure oxidation of a semiconductor device |
| 07/23/2002 | US6423648 Controllable oxidation technique for the formation of high-quality ultra-thin gate oxide using carbon dioxide as the oxidizing agent |
| 07/23/2002 | US6423647 Formation of dielectric regions of different thicknesses at selective location areas during laser thermal processes |
| 07/23/2002 | US6423646 Exposing silicon surface having fluoropolymer contaminating films and damaged silicon layers formed thereon, to ethanolamine-containing cleaning solution for time to remove films and layers, rinsing to remove cleaning solution |
| 07/23/2002 | US6423645 Method for forming a self-aligned contact |
| 07/23/2002 | US6423644 Method of etching tungsten or tungsten nitride electrode gates in semiconductor structures |
| 07/23/2002 | US6423643 Process of making carrier substrate and semiconductor device |
| 07/23/2002 | US6423642 Reactor for processing a semiconductor wafer |
| 07/23/2002 | US6423641 Method of making self-aligned bit-lines |
| 07/23/2002 | US6423640 Headless CMP process for oxide planarization |
| 07/23/2002 | US6423639 Planarization method of insulating layer for semiconductor device |
| 07/23/2002 | US6423638 Filter apparatus and method therefor |
| 07/23/2002 | US6423637 A diffusion prevention film is formed on a damascene pattern, a first copper film is formed by a physical vapor depositon, a second copper film is formed by spin-on coating and third copper film is formed by electrochemical deposition |
| 07/23/2002 | US6423636 Process sequence for improved seed layer productivity and achieving 3mm edge exclusion for a copper metalization process on semiconductor wafer |
| 07/23/2002 | US6423635 Method of filling a recess |
| 07/23/2002 | US6423634 Method of forming low resistance metal silicide region on a gate electrode of a transistor |
| 07/23/2002 | US6423633 Implanting plurality of atoms into surface of patterned copper layer using implantation gas which comprises one selected from group consisting of nitrogen, oxygen, nitrogen dioxide and nitrous oxide, heat treating |
| 07/23/2002 | US6423632 Semiconductor device and a process for forming the same |
| 07/23/2002 | US6423631 Isolation using an antireflective coating |
| 07/23/2002 | US6423630 Process for forming low K dielectric material between metal lines |
| 07/23/2002 | US6423629 Multilevel copper interconnects with low-k dielectrics and air gaps |
| 07/23/2002 | US6423628 Method of forming integrated circuit structure having low dielectric constant material and having silicon oxynitride caps over closely spaced apart metal lines |
| 07/23/2002 | US6423627 Method for forming memory array and periphery contacts using a same mask |
| 07/23/2002 | US6423626 Removal of metal cusp for improved contact fill |
| 07/23/2002 | US6423625 Method of improving the bondability between Au wires and Cu bonding pads |
| 07/23/2002 | US6423622 Lead-bond type chip package and manufacturing method thereof |
| 07/23/2002 | US6423620 Semiconductor processing methods of forming contact openings, methods of forming memory circuitry, methods of forming electrical connections, and methods of forming dynamic random access memory dram circuitry |
| 07/23/2002 | US6423619 Transistor metal gate structure that minimizes non-planarity effects and method of formation |
| 07/23/2002 | US6423618 Method of manufacturing trench gate structure |
| 07/23/2002 | US6423617 In-situ use of dichloroethene and NH3 in an H2O steam based oxidation system to provide a source of chlorine |
| 07/23/2002 | US6423616 Method for sawing wafers employing multiple indexing techniques for multiple die dimensions |
| 07/23/2002 | US6423615 Silicon wafers for CMOS and other integrated circuits |
| 07/23/2002 | US6423614 Method of delaminating a thin film using non-thermal techniques |
| 07/23/2002 | US6423613 Low temperature silicon wafer bond process with bulk material bond strength |
| 07/23/2002 | US6423612 Method of fabricating a shallow trench isolation structure with reduced topography |
| 07/23/2002 | US6423611 Manufacturing process of capacitor |
| 07/23/2002 | US6423610 Method for forming inner capacitor of semiconductor devices using oxide layers formed through a plurality of radially-arranged injecting holes of a SACVD equipment showerhead |
| 07/23/2002 | US6423609 Methods of forming capacitors on a wafer, photolithographic methods of forming capacitors on a wafer, and semiconductor wafer |
| 07/23/2002 | US6423608 Method of manufacturing a capacitor in a semiconductor integrated circuit and a capacitor fabricated thereby |
| 07/23/2002 | US6423607 Trench capacitor with insulation collar and corresponding fabrication method |
| 07/23/2002 | US6423606 Semiconductor processing methods, methods of forming a resistor and methods of forming a diode |
| 07/23/2002 | US6423605 Method and apparatus for forming ultra-shallow junction for semiconductor device |
| 07/23/2002 | US6423604 Determination of thermal resistance for field effect transistor formed in SOI technology |
| 07/23/2002 | US6423603 Method of forming a microwave array transistor for low-noise and high-power applications |
| 07/23/2002 | US6423602 Circuit manufacturing method and apparatus, anneal control method and apparatus, information storage medium |
| 07/23/2002 | US6423601 Retrograde well structure formation by nitrogen implantation |
| 07/23/2002 | US6423600 Anisotropic etching silicon nitride layer to remove portions and form spacers, also removing portion of underlying oxide layer, cleaning oxide layer, applying dilute hydrogen fluoride solution to make thickness uniform, doping through oxide |
| 07/23/2002 | US6423599 Method for fabricating a field effect transistor having dual gates in SOI (semiconductor on insulator) technology |
| 07/23/2002 | US6423598 Semiconductor device, a method of manufacturing the same, and a semiconductor device protective circuit |
| 07/23/2002 | US6423597 Structure of a DRAM and a manufacturing process thereof |
| 07/23/2002 | US6423596 Method for two-sided fabrication of a memory array |
| 07/23/2002 | US6423595 Method for scribing a semiconductor device |
| 07/23/2002 | US6423594 Method of fabricating deep trench capacitor |
| 07/23/2002 | US6423593 Semiconductor integrated circuit device and process for manufacturing the same |
| 07/23/2002 | US6423592 PZT layer as a temporary encapsulation and hard mask for a ferroelectric capacitor |
| 07/23/2002 | US6423591 Semiconductor device and method for fabricating the same |
| 07/23/2002 | US6423590 High voltage transistor using P+ buried layer |
| 07/23/2002 | US6423589 Methods for fabricating CMOS integrated circuits including source/drain compensating regions |
| 07/23/2002 | US6423588 Method of manufacturing semiconductor integrated circuit device |
| 07/23/2002 | US6423587 Method for fabricating a MOS transistor |
| 07/23/2002 | US6423586 Melting a noncrystal semiconductor film containing silicon, oxygen, nitrogen and carbon by irradiating with a laser beam to crystallize; specified raman shift; thin film transistors |
| 07/23/2002 | US6423585 Heating treatment device, heating treatment method and fabrication method of semiconductor device |
| 07/23/2002 | US6423584 method for forming capacitors and field effect transistors in a semiconductor integrated circuit device |
| 07/23/2002 | US6423583 Methodology for electrically induced selective breakdown of nanotubes |
| 07/23/2002 | US6423582 Use of DAR coating to modulate the efficiency of laser fuse blows |
| 07/23/2002 | US6423580 Method for manufacturing a dual chip package |
| 07/23/2002 | US6423578 Field-effect transistor and manufacture thereof |
| 07/23/2002 | US6423574 Method of manufacturing diodes with ceramic base |
| 07/23/2002 | US6423573 Integrated electronic circuit comprising at least an electronic power component |
| 07/23/2002 | US6423570 Method to protect an encapsulated die package during back grinding with a solder metallization layer and devices formed thereby |
| 07/23/2002 | US6423568 Method of fabricating a silicon solar cell |
| 07/23/2002 | US6423567 Method for producing contact structures in solar cells |
| 07/23/2002 | US6423566 Moisture and ion barrier for protection of devices and interconnect structures |