| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/25/2002 | US20020096757 Semiconductor device and method of manufacturing the same |
| 07/25/2002 | US20020096756 Semiconductor device and method of making the same |
| 07/25/2002 | US20020096755 Semiconductor device |
| 07/25/2002 | US20020096751 Integrated circuit structure having an adhesive agent and method for manufacturing the same |
| 07/25/2002 | US20020096750 Package for semiconductor chip having thin recess portion and thick plane portion |
| 07/25/2002 | US20020096746 Method and apparatus for assembling a conformal chip carrier to a flip chip |
| 07/25/2002 | US20020096745 Use of selective oxidation conditions for dielectric conditioning |
| 07/25/2002 | US20020096743 Method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 07/25/2002 | US20020096740 Logic apparatus and logic circuit |
| 07/25/2002 | US20020096739 Semiconductor device |
| 07/25/2002 | US20020096738 Silicided undoped polysilicon for capacitor bottom plate |
| 07/25/2002 | US20020096737 Semiconductor device and method for manufacturing the same |
| 07/25/2002 | US20020096736 Versatile system for integrated circuit containing shielded inductor |
| 07/25/2002 | US20020096734 Semiconductor memory device and manufacturing method thereof |
| 07/25/2002 | US20020096732 Semiconductor device |
| 07/25/2002 | US20020096726 Semiconductor device and manufacturing method thereof |
| 07/25/2002 | US20020096725 Semiconductor device and method for manufacturing the same |
| 07/25/2002 | US20020096724 Complementary metal gate electrode technology |
| 07/25/2002 | US20020096721 Semiconductor device including a MIS transistor |
| 07/25/2002 | US20020096717 Transferable device-containing layer for silicon-on-insulator applications |
| 07/25/2002 | US20020096716 Structure and method of MOS transistor having increased substrate resistance |
| 07/25/2002 | US20020096714 Low voltage dual-well trench MOS device |
| 07/25/2002 | US20020096712 Semiconductor device and method for manufacturing the same |
| 07/25/2002 | US20020096711 Integrated circuit devices providing improved short prevention and methods of fabricating the same |
| 07/25/2002 | US20020096710 Semiconductor device and method for fabricating the same |
| 07/25/2002 | US20020096707 Modified source/drain re-oxidation method and system |
| 07/25/2002 | US20020096706 Modified source/drain re-oxidation method and system |
| 07/25/2002 | US20020096705 NAND type flash memory device having dummy region |
| 07/25/2002 | US20020096704 Nonvolatile semiconductor memory device and method of manufacturing the same |
| 07/25/2002 | US20020096703 Vertically integrated flash eeprom for greater density and lower cost |
| 07/25/2002 | US20020096702 Semiconductor memory device |
| 07/25/2002 | US20020096701 Semiconductor device and process for manufacturing the same |
| 07/25/2002 | US20020096700 Non-volatile semiconductor memory device and method of manufacturing the same |
| 07/25/2002 | US20020096699 MOS transistor and method for fabricating it, and DRAM cell configuration and method for fabricating it |
| 07/25/2002 | US20020096695 Low dielectric constant sidewall spacer using notch gate process |
| 07/25/2002 | US20020096694 Semiconductor device |
| 07/25/2002 | US20020096693 Sti pull-down to control SiGe facet growth |
| 07/25/2002 | US20020096692 Insulating nitirde layer and process for its forming, and semiconductor device and process for its production |
| 07/25/2002 | US20020096691 High-voltage transistor with buried conduction layer |
| 07/25/2002 | US20020096690 Manufacture of semiconductor capacitively-coupled NDR device for applications such as high-density high-speed memories and power switches |
| 07/25/2002 | US20020096689 Semiconductor capacitively-coupled NDR device and related applications in high-density high-speed memories and in power switches |
| 07/25/2002 | US20020096684 Amorphous silicon carbide thin film articles |
| 07/25/2002 | US20020096683 Structure and method for fabricating GaN devices utilizing the formation of a compliant substrate |
| 07/25/2002 | US20020096682 Semiconductor device and process for producing the same |
| 07/25/2002 | US20020096681 Semiconductor device and method of manufacturing the semiconductor device |
| 07/25/2002 | US20020096680 Process for producing thin film semiconductor device and laser irradiation apparatus |
| 07/25/2002 | US20020096678 Bipolar device and method of fabrication |
| 07/25/2002 | US20020096677 Semiconductor integrated circuit having noise detect circuits detecting noise on power supply nets |
| 07/25/2002 | US20020096674 Nucleation layer growth and lift-up of process for GaN wafer |
| 07/25/2002 | US20020096659 Polishing composition and polishing method employing it |
| 07/25/2002 | US20020096656 Single shaft, dual cradle vacuum slot valve |
| 07/25/2002 | US20020096651 Charged particle beam lithography apparatus for forming pattern on semi-conductor |
| 07/25/2002 | US20020096650 Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof |
| 07/25/2002 | US20020096647 Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby |
| 07/25/2002 | US20020096646 Electron beam proximity exposure apparatus and method |
| 07/25/2002 | US20020096645 Electron-beam lithography method and electron-beam lithography system |
| 07/25/2002 | US20020096640 Magnetic shielding for charged-particle-beam optical systems |
| 07/25/2002 | US20020096635 Mask defect repair method |
| 07/25/2002 | US20020096578 Megasonic cleaning device and process |
| 07/25/2002 | US20020096555 System for forming bumps on wafers |
| 07/25/2002 | US20020096552 Workpiece retainer for a bonding apparatus |
| 07/25/2002 | US20020096551 Dissipative ceramic bonding tool tip |
| 07/25/2002 | US20020096512 Resistive heaters and uses thereof |
| 07/25/2002 | US20020096508 Method and apparatus for processing a microelectronic workpiece at an elevated temperature |
| 07/25/2002 | US20020096507 Heat treatment method and heat treatment apparatus |
| 07/25/2002 | US20020096496 Patterning of GaN crystal films with ion beams and subsequent wet etching |
| 07/25/2002 | US20020096495 Apparatus and method for monitoring backflow vapors |
| 07/25/2002 | US20020096494 Post-cleaning method of a via etching process |
| 07/25/2002 | US20020096493 Dry etching method, microfabrication process and dry etching mask |
| 07/25/2002 | US20020096491 Method and apparatus for marking a bare semiconductor die |
| 07/25/2002 | US20020096490 Photolithographic and etching method |
| 07/25/2002 | US20020096487 Method of etching and cleaning using fluorinated carbonyl compounds |
| 07/25/2002 | US20020096435 Causing a first impregnated member containing a plating solution in electrical contact with an anode to face the conductive layer on a substrate and moving it; preferentially forming a thin film in a depression, e.g. groove or hole |
| 07/25/2002 | US20020096433 Radiating with a pulse laser (pulse width < picosecond) to excite solely electrons on the substrate surface to generate a nonequilibrium state in either temperature or energy and deposit a thin film; metal plating; energy conservation |
| 07/25/2002 | US20020096359 Method and apparatus for globally aligning the front and back sides of a substrate |
| 07/25/2002 | US20020096349 Electronic component with a semiconductor chip and method of producing the electronic component |
| 07/25/2002 | US20020096348 Circuit encapsulation |
| 07/25/2002 | US20020096313 Heat sink and process and molding tool for production of same |
| 07/25/2002 | US20020096259 Regenerative thermal oxidizer process and so2 scrubbing |
| 07/25/2002 | US20020096258 Systems and methods for enhancing plasma processing of a semiconductor substrate |
| 07/25/2002 | US20020096256 Application of an ozonated DI water spray to resist residue removal processes |
| 07/25/2002 | US20020096254 Optical device module and method of fabrication |
| 07/25/2002 | US20020096253 Methods Of Attaching A Sheet Of An Adhesive Film To A Substrate In The Course Of Making Integrated Circuit Packages |
| 07/25/2002 | US20020096227 Liner for use in processing chamber |
| 07/25/2002 | US20020096206 Photovoltaic apparatus and mass-producing apparatus for mass-producing spherical semiconductor particles |
| 07/25/2002 | US20020096202 Wafer container cleaning system |
| 07/25/2002 | US20020096200 Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module |
| 07/25/2002 | US20020096196 Substrate processing apparatus and substrate processing method |
| 07/25/2002 | US20020096195 Pump for gas flow into tube or slot in juxtaposition with first end and surface to be cleaned, so gas flow forms shock wave to dislodge particles from surface of semiconductor wafers, reticles |
| 07/25/2002 | US20020096191 Apparatus and method for wafer cleaning |
| 07/25/2002 | US20020096190 Vapor phase condensation with a thermally vaporized cleaning agent, a hydrocarbon vaporized by pressure variation, or a combination of the two |
| 07/25/2002 | US20020096189 Front surface of the substrate is cleaned while ultrasonic waves are radiated from an ultrasonic oscillator onto the back surface of the substrate |
| 07/25/2002 | US20020096188 Chemical vapor deposition (CVD); generating active seeds of cleaning gas by applying high-frequency electric power to plasma-generator, feeding the active species into the processing space through holes in the partition plate |
| 07/25/2002 | US20020096187 Cleaner for cleaning a capillary tube for use in a wire bonding tool |
| 07/25/2002 | US20020096117 Gas processing apparatus for object to be processed |
| 07/25/2002 | US20020096116 Paper with ketene dimer and polyvinyl alcohol |
| 07/25/2002 | US20020096115 Method for manufacturing semiconductor device |
| 07/25/2002 | US20020096114 Series chamber for substrate processing |
| 07/25/2002 | US20020096113 Apparatus and method for the removal of backflow vapors |
| 07/25/2002 | US20020096106 Electronic device with composite substrate |