Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2013
10/09/2013CN103346058A Cavity lining of plasma etching equipment
10/09/2013CN103345130A Photoresist reworking etching process
10/09/2013CN103345124A Method for confirming photoetching technique window through accurate and quantitative defect detection
10/09/2013CN103345093A Pixel unit, array substrate, manufacturing and restoring method of array substrate and display device
10/09/2013CN103345092A Array substrate, manufacturing method thereof and display device
10/09/2013CN103344896A Test path selection method and corresponding wafer test method
10/09/2013CN103344794A Multifunctional semiconductor sample fixture
10/09/2013CN103344660A Electron microscope analysis method for defect detection according to circuit pattern
10/09/2013CN103343193A Aluminum alloy conductor annealing furnace
10/09/2013CN103342986A Polishing solution for CMP and polishing method using same
10/09/2013CN103341457A Silicon wafer rotating speed measuring device and measuring method thereof
10/09/2013CN102723287B Packaging-first and etching-later manufacturing method for chip formal double-surface three-dimensional circuit and packaging structure of chip formal double-surface three-dimensional circuit
10/09/2013CN102723283B Etching-first and packaging-later manufacturing method for chip formal double-surface three-dimensional circuit and packaging structure of chip formal double-surface three-dimensional circuit
10/09/2013CN102723282B Etching-first and packaging-later manufacturing method for chip formal double-surface three-dimensional circuit and packaging structure of chip formal double-surface three-dimensional circuit
10/09/2013CN102668039B 激光退火装置及激光退火方法 Laser annealing apparatus and a laser annealing method
10/09/2013CN102487048B Method for forming semiconductor device
10/09/2013CN102468149B Method for making a metal gate electrode
10/09/2013CN102456622B Preparation method of trench-type MOS (metal oxide semiconductor) barrier schottky groove
10/09/2013CN102455593B Method for forming photoresist pattern and manufacturing method of array substrate
10/09/2013CN102446893B Metal-oxide-metal capacitor
10/09/2013CN102446726B Method for forming metal gate
10/09/2013CN102437016B Integration method for realizing capacitors with two different insulating layer thicknesses
10/09/2013CN102420256B Structure for improving density of MIM (metal injection molding) capacitor and manufacturing technology thereof
10/09/2013CN102420244B One-dimensional metal/semiconductor nanometer heterojunction transistor and preparation method thereof
10/09/2013CN102420190B Method for improving reliability of high-K gate dielectric CMOS (Complementary Metal-Oxide-Semiconductor Transistor) by adopting gate-first process
10/09/2013CN102420184B Manufacturing method of semiconductor device
10/09/2013CN102420115B Method for reducing overlap capacitance in semiconductor device
10/09/2013CN102420099B Test method used for monitoring active region damage caused by wet etching
10/09/2013CN102412206B Manufacture method of flash memory
10/09/2013CN102412144B Plasma etching method, device thereof and plasma etching method for diffusion barrier layers
10/09/2013CN102412116B Method for forming resistor layout graphics
10/09/2013CN102375336B Manufacturing method of photosensitive resin composition and solidified embossing pattern, and semiconductor device
10/09/2013CN102341760B Fluid control apparatus
10/09/2013CN102299183B Junction field effect transistor (JFET) and forming method thereof
10/09/2013CN102244069B Semiconductor structure having concave part and manufacturing thereof
10/09/2013CN102239539B Methods of fabricating substrates
10/09/2013CN102229792B Solar silicon wafer cutting mortar
10/09/2013CN102210014B Surface processing apparatus
10/09/2013CN102147574B Lithographic apparatus and device manufacturing method
10/09/2013CN102106193B Plasma processing device and method for monitoring state of discharge in plasma processing device
10/09/2013CN102088001B Flash memory and manufacturing method thereof
10/09/2013CN102087991B Methods for manufacturing bit line and nonvolatile memory
10/09/2013CN102074495B Forming method for shallow trench isolation (STI)
10/09/2013CN102017116B Device characterisation utilising spatially resolved luminescence imaging
10/09/2013CN102017063B Wafer stack cleaning device and method
10/09/2013CN101978017B Method for preparing cerium carbonate
10/09/2013CN101971314B Gas delivery system for reducing oxidation in wire bonding operations
10/09/2013CN101900939B Negative resist composition and patterning process using the same
10/09/2013CN101884016B Lithography system, method of clamping and wafer table
10/09/2013CN101875492B Simplified industrial method for recovering silicon carbide from mortar generated in cutting process of silicon wafers
10/09/2013CN101855721B Semiconductor structure and method of manufacture
10/09/2013CN101848915B Epoxy group-containing organosiloxane compound, curable composition for transfer material, and fine pattern forming method using the composition
10/09/2013CN101842856B Methods of treating a surface to promote binding of molecule(s) of interest, coatings and devices formed therefrom
10/09/2013CN101842166B Apparatus for anisotropic focusing
10/09/2013CN101819386B Exposure apparatus and device manufacturing method
10/09/2013CN101752291B Method for making shallow groove isolation structure
10/09/2013CN101714511B Method and apparatus for joining adhesive tape
10/09/2013CN101673770B Thin film field-effect transistor and display using the same
10/09/2013CN101650505B Thin film transistor display panel and method of manufacturing the same
10/09/2013CN101645436B Semiconductor device packages with electromagnetic interference shielding and forming method thereof
10/09/2013CN101546720B Method for detecting residue of photoresist in orifice and corresponding method for measuring strip width of orifice
10/09/2013CN101533760B Cleaning equipment of semiconductor silicon chip and cleaning method thereof
10/08/2013USRE44531 Manufacturing process of thin film transistor
10/08/2013USRE44524 Bump-on-lead flip chip interconnection
10/08/2013US8554356 Processing end point detection method, polishing method, and polishing apparatus
10/08/2013US8554355 System and method for cutting substrate into workpieces
10/08/2013US8553321 Imaging optical system
10/08/2013US8553201 Lithographic apparatus and device manufacturing method
10/08/2013US8553198 Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure
10/08/2013US8552708 Monolithic DC/DC power management module with surface FET
10/08/2013US8552568 Methods for forming three-dimensional memory devices, and related structures
10/08/2013US8552562 Profiled contact for semiconductor device
10/08/2013US8552560 Alternate pad structures/passivation inegration schemes to reduce or eliminate IMC cracking in post wire bonded dies during Cu/Low-K BEOL processing
10/08/2013US8552557 Electronic component package fabrication method and structure
10/08/2013US8552545 Manufacturing method for semiconductor device, semiconductor device and semiconductor chip
10/08/2013US8552544 Package structure
10/08/2013US8552541 Power device packages having thermal electric modules using peltier effect and methods of fabricating the same
10/08/2013US8552537 Semiconductor device and method for fabricating the same
10/08/2013US8552531 Nitride-based compound semiconductor and nitride-based compound semiconductor device
10/08/2013US8552529 Semiconductor device
10/08/2013US8552525 Semiconductor structures and devices and methods of forming the same
10/08/2013US8552524 Semiconductor component with trench insulation and corresponding production method
10/08/2013US8552523 Semiconductor device and method for manufacturing
10/08/2013US8552522 Dishing-free gap-filling with multiple CMPs
10/08/2013US8552515 Method for fabricating a damascene self-aligned ferroelectric random access memory (F-RAM) device structure employing reduced processing steps
10/08/2013US8552507 Semiconductor device and method of manufacturing the same
10/08/2013US8552505 Integrated circuits having improved metal gate structures and methods for fabricating same
10/08/2013US8552504 Semiconductor device and method for forming the same
10/08/2013US8552498 Semiconductor device and method for manufacturing the same
10/08/2013US8552496 High-voltage vertical transistor with edge termination structure
10/08/2013US8552495 Dummy gate for a high voltage transistor device
10/08/2013US8552478 Corner transistor and method of fabricating the same
10/08/2013US8552463 Electronic devices with yielding substrates
10/08/2013US8552448 Light emitting device
10/08/2013US8552439 Light-emitting diode package
10/08/2013US8552436 Light emitting diode structure
10/08/2013US8552434 Semiconductor device and method for manufacturing the same
10/08/2013US8552431 Semiconductor device comprising pixel portion
10/08/2013US8552427 Fuse part of semiconductor device and method of fabricating the same
10/08/2013US8552414 Electronically scannable multiplexing device
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