Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2013
10/08/2013US8550875 Method of operating substrate processing apparatus and substrate processing apparatus
10/08/2013US8550031 Cluster tool architecture for processing a substrate
10/08/2013US8549719 Method of generating electrical energy in an integrated circuit, corresponding integrated circuit and method of fabrication
10/08/2013CA2722639C Ultra low melt metal nanoparticle composition for thick-film applications
10/03/2013WO2013148974A1 Double-sided circuit board and method for preparing the same
10/03/2013WO2013148927A1 Universal interconnect footprint for bonding semiconductor substrates
10/03/2013WO2013148890A1 Methods and apparatuses for cleaning electroplating substrate holders
10/03/2013WO2013148880A1 Tungsten feature fill
10/03/2013WO2013148608A1 Method and apparatus for detecting buried defects
10/03/2013WO2013148564A1 Substrate support with radio frequency (rf) return path
10/03/2013WO2013148529A1 Methods and apparatuses for effectively reducing gas residence time in a plasma processing chamber
10/03/2013WO2013148490A1 Method of enabling seamless cobalt gap-fill
10/03/2013WO2013148468A1 Substrate processing system having susceptorless substrate support with enhanced substrate heating control
10/03/2013WO2013148444A1 Tungsten feature fill with nucleation inhibition
10/03/2013WO2013148406A1 Substrate support with feedthrough structure
10/03/2013WO2013148396A1 Methods and apparatus for generating and delivering a process gas for processing a substrate
10/03/2013WO2013148395A1 Gas delivery systems and methods of use thereof
10/03/2013WO2013148287A1 Hybrid electrostatic lens for improved beam transmission
10/03/2013WO2013148127A1 Passive devices for finfet integrated circuit technologies
10/03/2013WO2013148119A1 Laser noise elimination in transmission thermometry
10/03/2013WO2013148090A2 Inline method to monitor ono stack quality
10/03/2013WO2013148066A1 Laser noise elimination in transmission thermometry
10/03/2013WO2013148065A1 Method for forming group iii/v conformal layers on silicon substrates
10/03/2013WO2013147706A1 Multi-layer substrate for semiconductor packaging
10/03/2013WO2013147694A1 Method of providing a via hole and routing structure
10/03/2013WO2013147481A1 Apparatus and cluster equipment for selective epitaxial growth
10/03/2013WO2013147437A1 Hybrid radical plasma graphene etching apparatus
10/03/2013WO2013147417A1 Method for manufacturing mvp probe board for semiconductor test
10/03/2013WO2013147377A1 Vapor deposition apparatus
10/03/2013WO2013147359A1 Semiconductor package and method for manufacturing same
10/03/2013WO2013147358A1 Semiconductor package and method for manufacturing same
10/03/2013WO2013147325A1 Pattern forming method, method for selecting heating temperature in pattern forming method, extreme ultraviolet-sensitive resin composition, resist film, manufacturing method of electronic device using the same, and electronic device
10/03/2013WO2013147315A1 Method of forming pattern, photomask and nanoimprint mold master
10/03/2013WO2013147311A1 Pattern forming method, actinic ray-sensitive or radiation-sensitive composition used therein, resist film, manufacturing method of electronic device using the same, and electronic device
10/03/2013WO2013147286A1 Actinic ray-sensitive or radiation-sensitive resin composition, and, actinic ray-sensitive or radiation-sensitive film and pattern forming method, each using the same
10/03/2013WO2013147276A1 Vertical, high-voltage-resistant semiconductor device, and method for producing vertical, high-voltage-resistant semiconductor device
10/03/2013WO2013147275A1 Method for manufacturing semiconductor device
10/03/2013WO2013147274A1 Manufacturing method for semiconductor device
10/03/2013WO2013147203A1 Periodic table group 13 metal nitride crystals and method for manufacturing periodic table group 13 metal nitride crystals
10/03/2013WO2013147202A1 Semiconductor laminate and method for manufacturing same, method for manufacturing semiconductor device, semiconductor device, dopant composition, dopant injection layer, and method for forming doped layer
10/03/2013WO2013147122A1 Maskless exposure device
10/03/2013WO2013147105A1 Roller-shaped mold and method for producing roller-shaped mold and element
10/03/2013WO2013147052A1 Lighting device provided with discharge lamp
10/03/2013WO2013147046A1 Polishing composition
10/03/2013WO2013147037A1 Flow cannel member, heat exchanger provided with flow channel member, and semiconductor manufacturing apparatus provided with flow channel member
10/03/2013WO2013147019A1 Light source device
10/03/2013WO2013146991A1 Substrate for mask blank, substrate with multilayer reflective film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and method for manufacturing semiconductor device
10/03/2013WO2013146990A1 Mask blank substrate, substrate with multilayer reflection film, transparent mask blank, reflecting mask, transparent mask, and reflecting mask and semiconductor fabrication method
10/03/2013WO2013146982A1 Trap mechanism, exhaust system, and film formation device
10/03/2013WO2013146892A1 Polishing pad and method for manufacturing polishing pad
10/03/2013WO2013146888A1 Circuit connection material and manufacturing method for assembly using same
10/03/2013WO2013146812A1 Active-light-sensitive or radiation-sensitive composition, and resist film, resist coating mask blank, resist pattern formation method, and photomask employing same
10/03/2013WO2013146800A1 Conveyance device, and conveyance method
10/03/2013WO2013146793A1 Substrate processing apparatus
10/03/2013WO2013146763A1 Articulated robot, and conveying device
10/03/2013WO2013146733A1 Polishing pad and method for producing polishing pad
10/03/2013WO2013146715A1 Pattern forming method
10/03/2013WO2013146655A1 Plasma processing apparatus and high frequency generator
10/03/2013WO2013146632A1 Semiconductor device manufacturing method, substrate processing method, substrate processing apparatus, and program
10/03/2013WO2013146611A1 Maintenance system, and substrate processing device
10/03/2013WO2013146603A1 Substrate processing system
10/03/2013WO2013146600A1 Underlayer film forming composition for self-assembled films
10/03/2013WO2013146595A1 Substrate processing apparatus, method for controlling substrate processing apparatus, method for maintaining substrate processing apparatus, and recording medium
10/03/2013WO2013146573A1 Electroconductive particle, circuit connecting material, mounting body, and method for manufacturing mounting body
10/03/2013WO2013146538A1 Periodic pattern forming method and device employing self-assembled block copolymer
10/03/2013WO2013146532A1 Radiation-sensitive resin composition for liquid immersion exposure and resist pattern forming method
10/03/2013WO2013146517A1 Material for holding item to be polished, and laminate plate using same
10/03/2013WO2013146504A1 Conductive paste for die bonding, and die bonding method using conductive paste for die bonding
10/03/2013WO2013146488A1 Method for manufacturing substrate provided with multilayer reflection film, method for manufacturing reflective mask blank, and method for manufacturing reflective mask
10/03/2013WO2013146446A1 Silicon carbide semiconductor element and method for producing same
10/03/2013WO2013146444A1 Silicon carbide semiconductor element and method for producing same
10/03/2013WO2013146372A1 Black resin film, capacitive input device, processes for producing said film and device, and image display device equipped therewith
10/03/2013WO2013146360A1 Photosensitive resin composition
10/03/2013WO2013146329A1 High-voltage-resistant semiconductor
10/03/2013WO2013146328A1 Silicon carbide semiconductor device manufacturing method and silicon carbide semiconductor device manufactured by same
10/03/2013WO2013146327A1 Manufacturing method for silicon carbide semiconductor element
10/03/2013WO2013146326A1 Silicon carbide semiconductor device
10/03/2013WO2013146318A1 Mold manufacturing method and manufacturing device
10/03/2013WO2013146278A1 Semiconductor device manufacturing method, substrate processing method, and substrate processing apparatus
10/03/2013WO2013146197A1 Laser annealing device and laser annealing method
10/03/2013WO2013146184A1 Substrate processing device, processing device, and method for manufacturing device
10/03/2013WO2013146141A1 Circuit connecting material and semiconductor device manufacturing method using same
10/03/2013WO2013146137A1 Deposition prevention plate for vacuum film forming device, vacuum film forming device, and vacuum film forming method
10/03/2013WO2013146118A1 Substrate processing apparatus and semiconductor device manufacturing method
10/03/2013WO2013146060A1 Resist adhesion improver and method for producing copper wiring line
10/03/2013WO2013146039A1 Semiconductor storage device
10/03/2013WO2013146035A1 Semiconductor device and method for manufacturing same, display device, and electronic equipment
10/03/2013WO2013145987A1 Exposure drawing device, recording medium in which program is recorded, and exposure drawing method
10/03/2013WO2013145986A1 Exposure writing device and exposure writing method
10/03/2013WO2013145979A1 Plating method, plating system, and storage medium
10/03/2013WO2013145932A1 Heating mechanism, film-forming device, and film-forming method
10/03/2013WO2013145926A1 Ion milling apparatus
10/03/2013WO2013145924A1 Scanning electron microscope
10/03/2013WO2013145916A1 Microwave irradiating antenna, microwave plasma source, and plasma processing device
10/03/2013WO2013145829A1 Underlayer film composition for imprinting, and method for forming a pattern employing same
10/03/2013WO2013145800A1 Mask conveyance device, mask holding device, mask substrate, substrate processing device, and method for producing device
10/03/2013WO2013145695A1 Resist development method, resist pattern formation method, mold manufacturing method, and developing solution used for same
10/03/2013WO2013145622A1 Substrate bonding apparatus and substrate bonding method
10/03/2013WO2013145610A1 Method for producing chip having water-repellent front surface and hydrophilic back surface
10/03/2013WO2013145609A1 Epoxy resin composition for semiconductor sealing, cured body thereof, and semiconductor device
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