Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2013
10/09/2013CN103348448A Semiconductor laminate, semiconductor device, method for producing semiconductor laminate, and method for manufacturing semiconductor device
10/09/2013CN103348447A Semiconductor wafer comprising gallium nitride layer having one or more silicon nitride interlayer therein
10/09/2013CN103348446A Uniformity tuning capable ESC grounding kit for RF PVD chamber
10/09/2013CN103348445A Epitaxy of high tensile silicon alloy for tensile strain applications
10/09/2013CN103348444A Substrate and separator, grown thin film and method of growth, separation, and heating, epitaxial wafer, and light emitting diode
10/09/2013CN103348443A High density three-dimensional integrated capacitors
10/09/2013CN103348442A High density three-dimensional integrated capacitors
10/09/2013CN103348441A Energy-saving silencer assembly, semiconductor manufacturing vacuum pump with same and method for heating nitrogen gas
10/09/2013CN103348297A Guided transfer car system
10/09/2013CN103348036A Al-based alloy sputtering target and Cu-based alloy sputtering target
10/09/2013CN103347654A Coolant regeneration method
10/09/2013CN103347652A Polishing pad
10/09/2013CN103346212A Phosphorus diffusion method, P-type battery preparation method and N-type battery preparation method
10/09/2013CN103346208A Vacuum nozzle for sucking concentrating photovoltaic battery pieces
10/09/2013CN103346169A Sic junction barrier schottky diode and manufacturing method thereof
10/09/2013CN103346168A Silicon quantum dot floating gate nonvolatile memory and preparing method thereof based on SiCx texture
10/09/2013CN103346167A Columnsyn metal-oxygen-semiconductor field-effect transistor capable of effectively reducing grid resistance and grid capacitance and manufacturing method thereof
10/09/2013CN103346166A Semiconductor device and manufacturing method thereof
10/09/2013CN103346160A Array substrate and manufacturing method thereof and displaying device
10/09/2013CN103346159A Array substrate, manufacturing method thereof and display device thereof
10/09/2013CN103346158A Electrically-erasable and programmable read-only memory
10/09/2013CN103346157A Split-gate type flash memory structure and manufacturing method thereof
10/09/2013CN103346155A Superpotential barrier rectification device and manufacturing method thereof
10/09/2013CN103346150A Eight-layer stackable chip encapsulation structure and manufacturing process thereof
10/09/2013CN103346148A Vertical-type capacitor structure and manufacturing method thereof
10/09/2013CN103346146A Nanometer power source based on carbon nanomaterial friction effect, preparation method of nanometer power source and application of nanometer power source
10/09/2013CN103346144A Artificial magnetic conductor shaped like Chinese character 'jing' and used for 60GHz on-chip antenna and implement method
10/09/2013CN103346142A Test key structure and method for monitoring etching capacity of contact holes in etching process
10/09/2013CN103346141A Semiconductor device integrated with capacitor
10/09/2013CN103346140A Package based on silvering technology adopted for frame and manufacturing process of package
10/09/2013CN103346138A 智能功率模块及其制造方法 Intelligent Power Module and its manufacturing method
10/09/2013CN103346137A Integrated circuit packaging part and technique thereof
10/09/2013CN103346136A 功率模块及其封装方法 Power Modules and packaging method
10/09/2013CN103346134A Coaxial through-chip connection
10/09/2013CN103346131A Fine-pitch POP type sealing structure and sealing method
10/09/2013CN103346129A Ceramic packaging housing and manufacturing method thereof, chip packaging method
10/09/2013CN103346128A Manufacturing method of ONO structure in SONO device
10/09/2013CN103346127A Flash memory device structure and manufacturing method
10/09/2013CN103346126A Method for forming flash memory storage unit
10/09/2013CN103346125A Method for improving uniformity of electrical parameters of GP CMOS components
10/09/2013CN103346124A Method for improving qualified rate of semiconductor devices
10/09/2013CN103346123A Pixel defining layer, manufacturing method thereof, display substrate and display device
10/09/2013CN103346122A High depth-to-width ratio TSV seed layer manufacturing method
10/09/2013CN103346121A Method for manufacturing TSV seed layer with fine pitch and high depth-to-width ratio
10/09/2013CN103346120A Method for exposing TSV heads in chemical etching mode and corresponding device
10/09/2013CN103346119A Method for decreasing critical size of copper-connection groove
10/09/2013CN103346118A Anti-reflection coating filling type ultralow dielectric constant copper connection manufacturing method
10/09/2013CN103346117A TSV wafer reverse side thinning control method and system based on vortex technology
10/09/2013CN103346116A Apparatus for efficient removal of halogen residues from etched substrates
10/09/2013CN103346115A Clamp for silicon wafer loader
10/09/2013CN103346114A Vacuum suction pen not linked to dust of concentrating photovoltaic battery piece
10/09/2013CN103346113A Vacuum suction pen of concentrating photovoltaic battery piece
10/09/2013CN103346112A Vacuum pipette of photovoltaic cell silicon wafer
10/09/2013CN103346111A Accuracy locating pasting device
10/09/2013CN103346110A Quartz bearing disc for etching wafers
10/09/2013CN103346109A Wet etching device and process
10/09/2013CN103346108A Device and method for improving smoothness of wafer edge
10/09/2013CN103346107A Method for detecting alignment degree between polycrystalline silicon grid and contact hole
10/09/2013CN103346106A Method for detecting integrating degree between photolithography technique and thin film deposition technique
10/09/2013CN103346105A Defect casual inspection method capable of dynamically adjusting according to technology wafer number load
10/09/2013CN103346104A Method for detecting chip defects
10/09/2013CN103346103A Method for detecting alignment degree between polycrystalline silicon grid and contact hole
10/09/2013CN103346102A Method for detecting preprocessing capacity
10/09/2013CN103346101A Chip defect high-accuracy detecting method and scanning method
10/09/2013CN103346100A Method for detecting alignment degree between contact hole and polycrystalline silicon grid
10/09/2013CN103346099A TSV wafer thinning on-line control method and system based on infrared technology
10/09/2013CN103346098A System and method for static scanning of silicon chip position information
10/09/2013CN103346097A Method and structure for three-dimensional packaging based on TSV
10/09/2013CN103346096A Packaging technology for RF device
10/09/2013CN103346095A Lead frame manufacturing method
10/09/2013CN103346094A Etching method of microwave membrane circuit
10/09/2013CN103346093A Top grid self-alignment thin-film transistor with source/drain areas raised and manufacturing method thereof
10/09/2013CN103346092A Preparation method for gate-all-round MOSFET of silicon substrate high mobility InGaAs channel
10/09/2013CN103346091A Method for manufacturing groove type MOS transistor
10/09/2013CN103346090A Method for manufacturing transversely-diffusing metal oxide semiconductor device
10/09/2013CN103346089A Self-aligned double-layer channel metallic oxide thin film transistor and manufacturing method thereof
10/09/2013CN103346088A Method for reducing parasitic resistance of graphene top gate FET device
10/09/2013CN103346087A Method for manufacturing groove-type metal-oxide semiconductor Schottky barrier device
10/09/2013CN103346086A Manufacturing method for embedded type germanium-silicon structures
10/09/2013CN103346085A Technology for improving bipolar transistor BVcbo production
10/09/2013CN103346084A Gallium nitride Schottky diode of novel structure and manufacturing method thereof
10/09/2013CN103346083A 氮化镓肖特基二极管及其制造方法 Schottky diode and a method of manufacturing a gallium nitride
10/09/2013CN103346082A Alkali treatment process before table-board passivation of high-voltage diode
10/09/2013CN103346081A Method for eliminating groove formed in drill etching of metal layer-insulating layer-metal layer structure
10/09/2013CN103346080A Method for reducing defects of metal silicide masking layer
10/09/2013CN103346079A Reusable semiconductor substrate and purification reutilization method thereof
10/09/2013CN103346078A Chemical mechanical polishing method
10/09/2013CN103346077A Preparation method of gate oxide
10/09/2013CN103346076A Method for modifying defects of gate-oxide active region
10/09/2013CN103346075A Method for improving etching process of ion-doped polycrystalline silicon grid electrode
10/09/2013CN103346074A Method for preparing crystalline silicon battery pieces through multistep gradient diffusion method
10/09/2013CN103346073A Method for preparing beta-silicon carbide film
10/09/2013CN103346072A Method for manufacturing polycrystalline silicon thin film
10/09/2013CN103346071A Method for preparing InN semiconductor device containing SiNx inserted layer
10/09/2013CN103346070A Method of silicon substrate III-V group nanowire area selection transverse epitaxial growth
10/09/2013CN103346069A Method for preparing low-boron-doped high-conductivity hydrogenated amorphous silicon film
10/09/2013CN103346068A Method for preparing high In component AlInN thin film
10/09/2013CN103346067A Method for forming semiconductor device and method for forming MIM capacitor
10/09/2013CN103346066A Chemical dry-method etching method and semiconductor device forming method
10/09/2013CN103346065A Laser annealing method and device
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