Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2013
10/03/2013WO2013145606A1 System for monitoring failure of substrate processing apparatus, and method for monitoring failure of substrate processing apparatus
10/03/2013WO2013145555A1 Integrated device
10/03/2013WO2013145509A1 Wafer processing method, wafer processing device and semiconductor light-emitting element manufacturing method
10/03/2013WO2013145471A1 Method for manufacturing power module, and power module
10/03/2013WO2013145412A1 Semiconductor device and method for manufacturing same
10/03/2013WO2013145404A1 Laminated substate of silicon single crystal and group iii nitride single crystal with off angle
10/03/2013WO2013145390A1 Flexible printed circuit board and fabrication process for same
10/03/2013WO2013145371A1 Substrate processing device and substrate processing method
10/03/2013WO2013145348A1 Warp correction device and warp correction method for semiconductor element substrate
10/03/2013WO2013145258A1 Composite nanometal paste containing copper filler and bonding method
10/03/2013WO2013145202A1 Wafer map data collation system and wafer map data collation method
10/03/2013WO2013145139A1 Method for manufacturing electronic device
10/03/2013WO2013145114A1 Die supply device
10/03/2013WO2013145050A1 Plasma processing apparatus and substrate processing system
10/03/2013WO2013145044A1 Photomask, method for forming pattern using same and exposure device
10/03/2013WO2013144801A1 Sealed semiconductor light emitting device.
10/03/2013WO2013144782A2 Apparatus and method for liquid treatment of wafer-shaped articles
10/03/2013WO2013144709A2 Method of forming a freestanding semiconductor wafer
10/03/2013WO2013144375A1 Semiconductor device and method for producing a glass-like layer
10/03/2013WO2013144108A1 Device for removing a coating from a substrate and method
10/03/2013WO2013143854A1 Manufacture of multijunction solar cell devices
10/03/2013WO2013143852A1 Manufacture of multijunction solar cell devices
10/03/2013WO2013143851A1 Manufacture of multijunction solar cell devices
10/03/2013WO2013143850A1 Manufacture of multijunction solar cell devices
10/03/2013WO2013143795A1 Processing station for planar substrates and method for processing planar substrates
10/03/2013WO2013143724A1 Method for producing at least one contacting surface of an element and sensor for recording a directional component of a directed measured value
10/03/2013WO2013143677A1 Handling unit for wafers and method for picking up a wafer
10/03/2013WO2013143633A1 Device for irradiating a substrate
10/03/2013WO2013143389A1 Etching time detection device and method used for etching device
10/03/2013WO2013143312A1 Array substrate and manufacturing method thereof
10/03/2013WO2013143311A1 Manufacturing method for transistor, transistor, array substrate and display device
10/03/2013WO2013143294A1 Array substrate and manufacturing method thereof, and display device
10/03/2013WO2013143289A1 Gan substrate, semiconductor device and manufacturing method thereof
10/03/2013WO2013143183A1 Photoetching method and exposure system
10/03/2013WO2013143115A1 Nozzle for stress-free polishing metal layers on semiconductor wafers
10/03/2013WO2013143081A1 Vacuum chuck
10/03/2013WO2013143079A1 Vacuum chuck for electropolishing and/or electroplating
10/03/2013WO2013143038A1 Method for manufacturing light-emitting diode wafer directly emitting white light
10/03/2013WO2013143036A1 Semiconductor device and manufacturing method therefor
10/03/2013WO2013143035A1 Mos device approaching source/drain region to channel region and manufacturing method therefor
10/03/2013WO2013143034A1 Semiconductor device and manufacturing method thereof
10/03/2013WO2013143033A1 Semiconductor device and manufacturing method thereof
10/03/2013WO2013143032A1 Semiconductor device and manufacturing method thereof
10/03/2013WO2013143031A1 Method for manufacturing semiconductor device
10/03/2013WO2013143018A1 Iiiα-va group semiconductor single crystal substrate and method for preparing same
10/03/2013WO2013142892A1 Formation of localised molten regions in silicon containing multiple impurity types
10/03/2013WO2013117438A3 Connection arrangement of an electric and/or electronic component
10/03/2013WO2013086432A4 High throughput load lock for solar wafers
10/03/2013US20130260576 Method of forming boron-containing silicon oxycarbonitride film and method of forming silicon oxycarbonitride film
10/03/2013US20130260575 Silicon precursors and compositions comprising same for depositing low dielectric constant films
10/03/2013US20130260574 Substrate processing apparatus and substrate processing method
10/03/2013US20130260573 Method of making a lithography mask
10/03/2013US20130260572 Continuous processing system, continuous processing method, and program
10/03/2013US20130260571 Treatment liquid for inhibiting pattern collapse in microstructure and method of manufacturing microstructure using the same
10/03/2013US20130260570 Substrate processing apparatus and substrate processing method
10/03/2013US20130260569 Apparatus and method for liquid treatment of wafer-shaped articles
10/03/2013US20130260568 Manufacturing method for thin film transistor array panel
10/03/2013US20130260567 Multi-radiofrequency impedance control for plasma uniformity tuning
10/03/2013US20130260566 Method of Manufacturing Semiconductor Device, Cleaning Method, Substrate Processing Apparatus and Non-Transitory Computer Readable Recording Medium
10/03/2013US20130260563 Mask Treatment for Double Patterning Design
10/03/2013US20130260562 Methods for forming fine patterns of a semiconductor device
10/03/2013US20130260561 Aspect Ratio Dependent Deposition to Improve Gate Spacer Profile, Fin-Loss and Hardmask-Loss for FinFET Scheme
10/03/2013US20130260560 Patterning Processes Comprising Amplified Patterns
10/03/2013US20130260559 Methods for forming fine patterns of a semiconductor device
10/03/2013US20130260558 Polishing liquid and method for polishing substrate using the polishing liquid
10/03/2013US20130260557 Process for semiconductor circuit
10/03/2013US20130260556 Bottom-up plating of through-substrate vias
10/03/2013US20130260555 Method of enabling seamless cobalt gap-fill
10/03/2013US20130260554 Semiconductor Devices and Methods of Manufacturing the Same
10/03/2013US20130260553 Self-forming, self-aligned barriers for back-end interconnects and methods of making same
10/03/2013US20130260552 Reverse Damascene Process
10/03/2013US20130260551 Semiconductor device and method of forming the same
10/03/2013US20130260550 Large-area transparent conductive coatings including alloyed carbon nanotubes and nanowire composites, and methods of making the same
10/03/2013US20130260549 Replacement gate with reduced gate leakage current
10/03/2013US20130260548 Techniques for using material substitution processes to form replacement metal gate electrodes of semiconductor devices with self-aligned contacts
10/03/2013US20130260547 Method of fabricating a metal gate semiconductor device
10/03/2013US20130260546 Heat treatment apparatus and heat treatment method for heating substrate by irradiating substrate with flash of light
10/03/2013US20130260545 Methods and compositions for doping silicon substrates with molecular monolayers
10/03/2013US20130260544 Technique for processing a substrate
10/03/2013US20130260543 Technique for processing a substrate
10/03/2013US20130260542 Method for improving write margins of sram cells
10/03/2013US20130260541 METHOD FOR PRODUCING Ga-CONTAINING GROUP III NITRIDE SEMICONDUCTOR
10/03/2013US20130260540 Method of manufacturing semiconductor device
10/03/2013US20130260539 Vapor deposition reactor for forming thin film
10/03/2013US20130260538 Method of manufacturing gallium nitride substrate
10/03/2013US20130260537 System and process for high-density, low-energy plasma enhanced vapor phase epitaxy
10/03/2013US20130260536 Controlling Printed Ink Line Widths using Fluoropolymer Templates
10/03/2013US20130260535 Method and apparatus for reducing package warpage
10/03/2013US20130260534 Stress reduction means for warp control of substrates through clamping
10/03/2013US20130260533 Intrench profile
10/03/2013US20130260532 Method for Manufacturing Semiconductor Device
10/03/2013US20130260531 Semiconductor device and method of fabricating the same
10/03/2013US20130260527 Method of forming a metal chalcogenide material and methods of forming memory cells including same
10/03/2013US20130260526 Soi lateral bipolar junction transistor having a wide band gap emitter contact
10/03/2013US20130260525 Low extension dose implants in sram fabrication
10/03/2013US20130260520 Low resistance embedded strap for a trench capacitor
10/03/2013US20130260519 Strained structure of semiconductor device
10/03/2013US20130260518 Process to improve transistor drive current through the use of strain
10/03/2013US20130260516 Asymmetric FET Formed Through Use of Variable Pitch Gate for Use as Logic Device and Test Structure
10/03/2013US20130260514 System of Dynamic and End-User Configurable Electrical Interconnects
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