Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2013
10/17/2013WO2013155108A1 N-polar iii-nitride transistors
10/17/2013WO2013155073A1 Susceptor for improved epitaxial wafer flatness and methods for fabricating a semiconductor wafer processing device
10/17/2013WO2013155019A1 Systems and methods for sample inspection and review
10/17/2013WO2013155008A1 Variable polarization wafer inspection
10/17/2013WO2013154987A1 Current peak spreading schemes for multiplexed heated array
10/17/2013WO2013154963A2 Vertical nand device with low capacitance and silicided word lines
10/17/2013WO2013154913A1 Polishing pad with light-stable light-transmitting region
10/17/2013WO2013154909A1 Translators coupleable to opposing surfaces of microelectronic substrates for testing, and associated systems and methods
10/17/2013WO2013154887A1 Multiplexing euv sources in reticle inspection
10/17/2013WO2013154867A1 Layer-layer etch of non volatile materials
10/17/2013WO2013154863A1 Robot systems, apparatus, and methods having independently rotatable waists
10/17/2013WO2013154859A1 Wafer dicing using hybrid multi-step laser scribing process with plasma etch
10/17/2013WO2013154842A1 Aspect ratio dependent deposition to improve gate spacer profile, fin-loss and hardmask-loss for finfet scheme
10/17/2013WO2013154819A1 Wafer level packaging of light emitting diodes (leds)
10/17/2013WO2013154796A1 Static deposition profile modulation for linear plasma source
10/17/2013WO2013154574A1 Conversion of strain-inducing buffer to electrical insulator
10/17/2013WO2013154536A1 Interchamber adapter for cluster tool
10/17/2013WO2013154531A1 Optical device having an alignment mechanism
10/17/2013WO2013154501A1 End handler
10/17/2013WO2013154485A1 A method for manufacturing a semiconductor method device based on epitaxial growth.
10/17/2013WO2013154297A1 Heater-elevatable substrate processing apparatus
10/17/2013WO2013154248A1 Method for transferring graphene thin films, and device using same
10/17/2013WO2013154236A1 Polishing slurry and method of polishing using the same
10/17/2013WO2013154222A1 Pressure reduction apparatus comprising multi-stage suction nozzle
10/17/2013WO2013154195A1 Semiconductor device
10/17/2013WO2013154150A1 Light extraction body for semiconductor light-emitting element, and light-emitting element
10/17/2013WO2013154144A1 Flow rate sensor and method for making same
10/17/2013WO2013154115A1 Semiconductor device
10/17/2013WO2013154112A1 Resin mold material composition for imprinting
10/17/2013WO2013154075A1 Method for manufacturing article having fine pattern on surface thereof
10/17/2013WO2013153998A1 Electronic device, method for manufacturing same, and image display device
10/17/2013WO2013153979A1 Moving stage
10/17/2013WO2013153950A1 Coating dispersant composition, method for producing coating dispersant composition, solar cell, and method for manufacturing solar cell
10/17/2013WO2013153942A1 Magneto-resistance effect element and magnetic memory
10/17/2013WO2013153937A1 Semiconductor diode device
10/17/2013WO2013153927A1 Nitride semiconductor device
10/17/2013WO2013153909A1 Wide band gap semiconductor device and manufacturing method therefor
10/17/2013WO2013153904A1 Adhesive composition, adhesive film, and bonding method
10/17/2013WO2013153891A1 Charged particle beam apparatus
10/17/2013WO2013153875A1 Laminated polishing pad and method for producing same
10/17/2013WO2013153873A1 Photosensitive compound, photosensitive resin, and photosensitive composition
10/17/2013WO2013153870A1 Silicon carbide semiconductor device
10/17/2013WO2013153856A1 Power semiconductor device and method for producing same
10/17/2013WO2013153853A1 Semiconductor recording device
10/17/2013WO2013153852A1 Method for placing and routing reconfigurable semiconductor device, program therefor, and placing and routing device
10/17/2013WO2013153850A1 Reconfigurable semiconductor device
10/17/2013WO2013153835A1 Silicon carbide semiconductor device and method for producing same
10/17/2013WO2013153777A1 Method for manufacturing semiconductor device, semiconductor device, and apparatus for producing semiconductor
10/17/2013WO2013153744A1 Mobile body device, exposure device, and device production method
10/17/2013WO2013153724A1 Epitaxial wafer and method for manufacturing same
10/17/2013WO2013153721A1 Resin sealing device and resin sealing method
10/17/2013WO2013153706A1 Cassette apparatus, substrate transfer apparatus, substrate processing apparatus, and substrate processing method
10/17/2013WO2013153695A1 Method for producing photoelectric conversion device and photoelectric conversion device
10/17/2013WO2013153616A1 Ball mounting method and substrate-working machine
10/17/2013WO2013153613A1 Imprint device, pressure applying member, and imprint manufacturing method
10/17/2013WO2013153578A1 Method for manufacturing electroformed component
10/17/2013WO2013153504A1 Method for preparing a coarse-grain crystallised silicon layer
10/17/2013WO2013153031A1 METHOD FOR FORMING TiSin THIN LAYER BY USING ATOMIC LAYER DEPOSITION
10/17/2013WO2013152863A1 Solar cell stack
10/17/2013WO2013152646A1 Bonding structure
10/17/2013WO2013152535A1 Preparation method for finfet in large-scale integrated circuit
10/17/2013WO2013152461A1 Method for manufacturing fin field effect transistor
10/17/2013WO2013152458A1 Thin film transistor memory and preparation method therefor
10/17/2013WO2013152446A1 Functionalization of a substrate
10/17/2013WO2013126033A3 Apparatus and methods for uniformly forming porous semiconductor on a substrate
10/17/2013WO2013109239A3 Atomic layer deposition (ald) of taalc for capacitor integration
10/17/2013WO2013082094A3 Method for depositing materials on a substrate
10/17/2013WO2013082090A3 Material deposition system for depositing materials on a substrate
10/17/2013US20130274915 Transport Method and Transport Apparatus
10/17/2013US20130273814 Polishing apparatus and polishing method
10/17/2013US20130273751 Substrate processing with reduced warpage and/or controlled strain
10/17/2013US20130273750 Layer Alignment in FinFET Fabrication
10/17/2013US20130273749 Laser annealing apparatus and laser annealing method
10/17/2013US20130273748 Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus
10/17/2013US20130273747 Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium
10/17/2013US20130273746 Vapor deposition device and vapor deposition method
10/17/2013US20130273745 Etching paste, production method thereof, and pattern forming method using the same
10/17/2013US20130273744 Substrate processing method and substrate processing apparatus
10/17/2013US20130273743 Wafer backside defectivity clean-up utilizing selective removal of substrate material
10/17/2013US20130273742 Method of forming connection holes
10/17/2013US20130273741 Gap embedding composition, method of embedding gap and method of producing semiconductor device by using the composition
10/17/2013US20130273740 Film portion at wafer edge
10/17/2013US20130273739 Aqueous polishing composition and process for chemically mechanically polishing substrates having patterned or unpatterned low-k dielectric layers
10/17/2013US20130273738 Mask blank, method of manufacturing the same, transfer mask, and method of manufacturing the same
10/17/2013US20130273737 Method for Cleaning Semiconductor Substrate
10/17/2013US20130273736 Method for fabricating mos transistor
10/17/2013US20130273735 Oxidation-Free Copper Metallization Process Using In-situ Baking
10/17/2013US20130273734 Method of manufacturing metal salicide layers
10/17/2013US20130273733 Methods for Depositing Manganese and Manganese Nitrides
10/17/2013US20130273732 Method of and apparatus for active energy assist baking
10/17/2013US20130273729 High-k metal gate electrode structures formed by separate removal of placeholder materials in transistors of different conductivity type
10/17/2013US20130273728 Method of fabricating semiconductor device
10/17/2013US20130273726 Method of fabricating semiconductor device including process monitoring pattern having overlapping input/output pad array area
10/17/2013US20130273725 Method of fabricating a structured semiconductor substrate
10/17/2013US20130273724 Method for crystallizing amorphous silicon thin film and method for fabricating poly crystalline thin film transistor using the same
10/17/2013US20130273723 Graphene layer formation at low substrate temperature on a metal and carbon based substrate
10/17/2013US20130273722 Contact on a heterogeneous semiconductor substrate
10/17/2013US20130273721 Trench Formation Method For Releasing A Thin-Film Substrate From A Reusable Semiconductor Template
10/17/2013US20130273720 Graphene layer formation on a carbon based substrate
10/17/2013US20130273719 Method of manufacturing annealed wafer
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