| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 10/01/2013 | US8546163 Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device |
| 10/01/2013 | US8546162 Method for forming light guide layer in semiconductor substrate |
| 10/01/2013 | US8546161 Manufacturing method of thin film transistor and liquid crystal display device |
| 10/01/2013 | US8546160 Method for packaging light emitting diodes |
| 10/01/2013 | US8546159 Phosphor film, method of forming the same, and method of coating phosphor layer on LED chips |
| 10/01/2013 | US8546158 Method for distributing phosphor particulates on LED chip |
| 10/01/2013 | US8546157 Bifacial solar cell using ion implantation |
| 10/01/2013 | US8546156 High efficiency light-emitting diode and method for manufacturing the same |
| 10/01/2013 | US8546154 Apparatus and method to inspect defect of semiconductor device |
| 10/01/2013 | US8546153 Resin dispensing apparatus for light emitting device package and method of manufacturing light emitting device package using the same |
| 10/01/2013 | US8546152 Enhanced endpoint detection in non-volatile memory fabrication processes |
| 10/01/2013 | US8546151 Method for manufacturing magnetic storage device and magnetic storage device |
| 10/01/2013 | US8546065 Mask for crystallizing a semiconductor layer and method of crystallizing a semiconductor layer using the same |
| 10/01/2013 | US8546060 Chemically amplified positive resist composition and pattern forming process |
| 10/01/2013 | US8545979 Wafer-processing tape and method of producing the same |
| 10/01/2013 | US8545790 Cross-linked carbon nanotubes |
| 10/01/2013 | US8545712 Semiconductor wafer manufacturing method |
| 10/01/2013 | US8545672 Plasma processing apparatus |
| 10/01/2013 | US8545671 Plasma processing method and plasma processing apparatus |
| 10/01/2013 | US8545670 Plasma processing apparatus and plasma processing method |
| 10/01/2013 | US8545669 Sensor array for measuring plasma characteristics in plasma processing environments |
| 10/01/2013 | US8545668 Substrate processing apparatus and substrate processing method |
| 10/01/2013 | US8545663 Process for manufacturing semiconductor devices |
| 10/01/2013 | US8545631 Mask device, method of fabricating the same, and method of fabricating organic light emitting display device using the same |
| 10/01/2013 | US8545627 Zirconium and hafnium boride alloy templates on silicon for nitride integration applications |
| 10/01/2013 | US8545292 Two-component urethane resin composition for polishing pad, polyurethane polishing pad, and method for producing polyurethane polishing pad |
| 10/01/2013 | US8545291 Polishing pad, manufacturing method thereof and polishing method |
| 10/01/2013 | US8545165 High speed substrate aligner apparatus |
| 10/01/2013 | US8545160 Substrate transfer apparatus and substrate transfer method |
| 10/01/2013 | US8545159 Apparatus having conveyor and method of transferring substrate using the same |
| 10/01/2013 | US8545090 LED night light with interchangeable display unit |
| 10/01/2013 | US8544411 Batch-type remote plasma processing apparatus |
| 10/01/2013 | US8544159 Methods of manufacturing parts using a manufacturing cell |
| 10/01/2013 | CA2454845C Nanotube films and articles |
| 09/26/2013 | WO2013142863A1 Through-silicon via filling |
| 09/26/2013 | WO2013142806A1 Laterally driven probes for semiconductor testing |
| 09/26/2013 | WO2013142713A1 Memory cells, semiconductor device structures, systems including such cells, and methods of fabrication |
| 09/26/2013 | WO2013142699A1 Method for reducing damage to low-k gate spacer during etching |
| 09/26/2013 | WO2013142688A1 Finfet device fabrication using thermal implantation |
| 09/26/2013 | WO2013142484A2 Apparatus and method for remotely determining the structural intergrity of a well or similar structure |
| 09/26/2013 | WO2013142442A1 Electron beam polishing of aluminum |
| 09/26/2013 | WO2013142250A1 Post-cmp formulation having improved barrier layer compatibility and cleaning performance |
| 09/26/2013 | WO2013142207A1 Electroless copper alloy capping |
| 09/26/2013 | WO2013142175A1 Methods and apparatus for selectively modulating azimuthal non-uniformity in a plasma processing system |
| 09/26/2013 | WO2013142102A1 Electroless gap fill |
| 09/26/2013 | WO2013142079A1 Using reflected and transmission maps to detect reticle degradation |
| 09/26/2013 | WO2013142054A1 Laminate body, method, and materials for temporary substrate support and support separation |
| 09/26/2013 | WO2013142036A1 Kelvin sense probe calibration |
| 09/26/2013 | WO2013142030A1 Keyed wafer carrier |
| 09/26/2013 | WO2013141968A1 Compact three dimensional vertical nand and method of making thereof |
| 09/26/2013 | WO2013141914A1 Method of cutting an ingot for solar cell fabrication |
| 09/26/2013 | WO2013141747A1 Method for producing a multi-layered nano-structure |
| 09/26/2013 | WO2013141637A1 Susceptor and wafer holder |
| 09/26/2013 | WO2013141618A1 Gallium nitride-based semiconductor device |
| 09/26/2013 | WO2013141617A1 Method of fabricating non-polar gallium nitride-based semiconductor layer, nonpolar semiconductor device, and method of fabricating the same |
| 09/26/2013 | WO2013141580A1 Extreme ultraviolet light generating device for stabilization and improving energy efficiency through laser beam correction |
| 09/26/2013 | WO2013141578A1 Apparatus for generating extreme ultraviolet light using plasma |
| 09/26/2013 | WO2013141490A1 Substrate-processing apparatus and substrate-processing method |
| 09/26/2013 | WO2013141473A1 Multi-crucible silicon ingot growing apparatus |
| 09/26/2013 | WO2013141472A1 Silicon ingot growing apparatus provided with probing rod |
| 09/26/2013 | WO2013141471A1 Silicon ingot growing apparatus provided with feed unit |
| 09/26/2013 | WO2013141395A1 Actinic ray-sensitive or radiation-sensitive composition, resist film using the same, pattern forming method, method for manufacturing electronic device, and electronic device |
| 09/26/2013 | WO2013141388A1 Device and method for mounting electronic component |
| 09/26/2013 | WO2013141376A1 Protectant, method for producing compound protected by protectant, resin protected by protectant, photosensitive resin composition containing resin protected by protectant, pattern-forming material, photosensitive film, cured relief pattern, method for producing same, and semiconductor device |
| 09/26/2013 | WO2013141371A1 Substrate processing device and substrate processing method |
| 09/26/2013 | WO2013141370A1 Method for manufacturing semiconductor device, method for processing substrate, substrate processing device and recording medium |
| 09/26/2013 | WO2013141360A1 Curable composition, cured product, and method for using curable composition |
| 09/26/2013 | WO2013141337A1 Very thin perpendicularly magnetized film exhibiting high perpendicular magnetic anisotropy, method for manufacturing same, and application |
| 09/26/2013 | WO2013141330A1 Electroconductive thin film, coating liquid for forming electroconductive thin film, field-effect transistor, and method for producing field-effect transistor |
| 09/26/2013 | WO2013141287A1 Semiconductor device and method for manufacturing same |
| 09/26/2013 | WO2013141268A1 Substrate with multilayer reflective film, reflective mask blank for euv lithography, method for producing reflective mask for euv lithography, and method for manufacturing semiconductor device |
| 09/26/2013 | WO2013141265A1 Photoresist composition, resist pattern forming method, and polymer |
| 09/26/2013 | WO2013141251A1 Film, sheet substrate for processing workpiece, and sheet for processing workpiece |
| 09/26/2013 | WO2013141232A1 Solar cell and method for manufacturing same |
| 09/26/2013 | WO2013141231A1 Tantalum sputtering target, method for manufacturing same, and barrier film for semiconductor wiring formed by using target |
| 09/26/2013 | WO2013141225A1 Polishing material for lapping and method for manufacturing substrate using same |
| 09/26/2013 | WO2013141222A1 Resist pattern forming method and photoresist composition |
| 09/26/2013 | WO2013141221A1 Production method for semiconductor device |
| 09/26/2013 | WO2013141197A1 Thin film transistor and method for manufacturing thin film transistor |
| 09/26/2013 | WO2013141181A1 Semiconductor device and semiconductor device manufacturing method |
| 09/26/2013 | WO2013141166A1 Solder-coated ball and method for manufacturing same |
| 09/26/2013 | WO2013141159A1 Substrate processing device, method for manufacturing semiconductor device, and method for processing substrate |
| 09/26/2013 | WO2013141149A1 Method for manufacturing semiconductor device |
| 09/26/2013 | WO2013141141A1 Production method for semiconductor device |
| 09/26/2013 | WO2013141131A1 Method for manufacturing connecting body, and method for connecting electronic component |
| 09/26/2013 | WO2013141099A1 Self-supporting gallium nitride crystal substrate and method for manufacturing same |
| 09/26/2013 | WO2013141084A1 Trap device and film formation device |
| 09/26/2013 | WO2013141072A1 Pressure-sensitive adhesive tape for protecting semiconductor wafer surface |
| 09/26/2013 | WO2013141062A1 Semiconductor device and semiconductor device manufacturing method |
| 09/26/2013 | WO2013141052A1 Semiconductor device manufacturing method, semiconductor device, and display device |
| 09/26/2013 | WO2013141046A1 Resist upper layer film-forming composition for lithography |
| 09/26/2013 | WO2013141015A1 Composition for forming resist lower layer film for euv lithography |
| 09/26/2013 | WO2013141003A1 Bonded body, method for manufacturing same and member to be bonded |
| 09/26/2013 | WO2013140955A1 Substrate processing apparatus and heater cleaning method |
| 09/26/2013 | WO2013140936A1 Semiconductor element, semiconductor device, method for manufacturing semiconductor device, and connection material |
| 09/26/2013 | WO2013140886A1 Semiconductor device and semiconductor module |
| 09/26/2013 | WO2013140871A1 Method for producing silicon carbide semiconductor device |
| 09/26/2013 | WO2013140838A1 SINTERED In-Ga-Zn-O-BASED OXIDE COMPACT AND METHOD FOR PRODUCING SAME, SPUTTERING TARGET, AND OXIDE SEMICONDUCTOR FILM |
| 09/26/2013 | WO2013140815A1 Method of molding a thermoplastic resin article and apparatus for molding same |
| 09/26/2013 | WO2013140764A1 Semiconductor device and method for manufacturing same |