Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2003
06/26/2003US20030116849 Sputter target, barrier film and electronic component
06/26/2003US20030116848 MEMS device having a trilayered beam and related methods
06/26/2003US20030116847 Magnetic random access memory using schottky diode
06/26/2003US20030116845 Waferlevel method for direct bumping on copper pads in integrated circuits
06/26/2003US20030116842 Semiconductor device and manufacturing method thereof
06/26/2003US20030116840 Dielectric layer joining substrate; isothermal solidification
06/26/2003US20030116839 Multilayer; substrate, dielectric, metallized layer; corrosion resistant protective coating
06/26/2003US20030116837 Semiconductor device and manufacturing method thereof
06/26/2003US20030116835 Memory-module and a method of manufacturing the same
06/26/2003US20030116833 Lead-frame strip and method of manufacturing semiconductor packages using the same
06/26/2003US20030116832 Apparatus for reversing lead frame
06/26/2003US20030116825 Wafer-level package with silicon gasket
06/26/2003US20030116823 Semiconductor device and fabrication method thereof
06/26/2003US20030116822 Bipolar transistor and method for manufacturing the same
06/26/2003US20030116821 Semiconductor device and a process for producing same
06/26/2003US20030116820 Post-fuse blow corrosion prevention structure for copper fuses
06/26/2003US20030116819 Connecting active transistors using slit in isolation zone; prevent leakage current
06/26/2003US20030116816 Image sensor and manufacturing method thereof
06/26/2003US20030116812 Silicon-on-insulator structure and method of reducing backside drain-induced barrier lowering
06/26/2003US20030116811 Semiconductor device and method for fabricating the same
06/26/2003US20030116810 Programmable impedance control circuit
06/26/2003US20030116808 Semiconductor device having contact electrode to semiconductor substrate
06/26/2003US20030116806 Input protection circuit connected to protection circuit power source potential line
06/26/2003US20030116805 Semiconductor device and method of fabricating the same
06/26/2003US20030116804 Bilayer deposition to avoid unwanted interfacial reactions during high K gate dielectric processing
06/26/2003US20030116803 Cylinder type transistor with vertical silicon-on-insulator structure and fabrication method thereof
06/26/2003US20030116802 Method of manufacturing semiconductor substrate, semiconductor substrate, electro-optical apparatus and electronic equipment
06/26/2003US20030116801 Semiconductor device, semiconductor gate array, electro-optical device, and electronic equipment
06/26/2003US20030116800 Semiconductor device and method for fabricating the same
06/26/2003US20030116799 Semiconductor device with capacitor electrodes
06/26/2003US20030116798 Semiconductor device having trench capacitor and method for fabricating the same
06/26/2003US20030116797 Semiconductor device and fabricating method thereof
06/26/2003US20030116796 Trench capacitor with expanded area and method of making the same
06/26/2003US20030116795 Method of manufacturing a tantalum pentaoxide - aluminum oxide film and semiconductor device using the film
06/26/2003US20030116792 Submicron MOSFET having asymmetric channel profile
06/26/2003US20030116790 Semiconductor chip and semiconductor device using the semiconductor chip
06/26/2003US20030116789 Semiconductor memory and method for fabricating the same
06/26/2003US20030116787 Semiconductor integrated circuit using the same
06/26/2003US20030116785 Multiple conductive plug structure for lateral RF MOS devices
06/26/2003US20030116784 DRAM array bit contact with relaxed pitch pattern
06/26/2003US20030116783 Semiconductor device
06/26/2003US20030116782 Multilayer; forming diode
06/26/2003US20030116781 Semiconductor device and method of manufacturing the same
06/26/2003US20030116780 Field effect transistor switch circuit
06/26/2003US20030116774 Nitride-based semiconductor light-emitting device and manufacturing method thereof
06/26/2003US20030116768 Semiconductor device and manufacturing method thereof
06/26/2003US20030116766 Semiconductor device and electronic device
06/26/2003US20030116764 Thin film transistor substrate and liquid crystal display
06/26/2003US20030116761 Ferroelectric capacitor plasma charging monitor
06/26/2003US20030116726 Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site
06/26/2003US20030116721 Electron beam drawing apparatus
06/26/2003US20030116720 Analyzer/observer
06/26/2003US20030116718 System and method for electron beam irradiation
06/26/2003US20030116652 Gas injector adapted for ALD process
06/26/2003US20030116567 Lot management production method and product carrying container
06/26/2003US20030116544 Method for processing ceramic green sheet and laser beam machine used therefor
06/26/2003US20030116535 Method and apparatus for removing coating layers from alignment marks on a wafer
06/26/2003US20030116534 Method of metal etching post cleaning
06/26/2003US20030116533 Maintaining profile control during etching of dielectrics; depositing photoresist, patterning to form voids, depositing oxidation resistant overlayer capable of depleting etcg chamber
06/26/2003US20030116532 Method for trench etching
06/26/2003US20030116531 Method of forming one or more nanopores for aligning molecules for molecular electronics
06/26/2003US20030116529 Device for x-ray lithography
06/26/2003US20030116446 Mixture containing ammonium hydrogen phosphates
06/26/2003US20030116445 Electrolyte with good planarization capability, high removal rate and smooth surface finish for electrochemically controlled copper CMP
06/26/2003US20030116444 Electrochemical edge and bevel cleaning process and system
06/26/2003US20030116439 Electroless deposition of barrier material; forming aperture pattern by photolithography
06/26/2003US20030116428 Apparatus for cleaning residual material from an article
06/26/2003US20030116427 Self-ionized and inductively-coupled plasma for sputtering and resputtering
06/26/2003US20030116426 Thin film; concurrent sputtering; random access memory
06/26/2003US20030116417 MEMS device having contact and standoff bumps and related methods
06/26/2003US20030116350 Flexible wiring boards and manufacturing processes thereof
06/26/2003US20030116347 Electronic component
06/26/2003US20030116280 Apparatus and method for insulating a seal in a process chamber
06/26/2003US20030116279 Apparatus for chemical vapor deposition
06/26/2003US20030116277 Semiconductor etching apparatus and method of etching semiconductor devices using same
06/26/2003US20030116276 Methods of roughening a ceramic surface
06/26/2003US20030116275 Sample separating apparatus and method, and substrate manufacturing method
06/26/2003US20030116181 Pressurized liquid diffuser
06/26/2003US20030116180 Fluid heating system for processing semiconductor materials
06/26/2003US20030116178 Plenum and slitted plate zones; cleaning semiconductor
06/26/2003US20030116176 Cleaning photoresists; soaking, decompression, flushing cycles
06/26/2003US20030116175 Interior and exterior housing; soaking solution in interior; applying sound wave to exterior
06/26/2003US20030116174 Using aqueous solution of ozone and ammonium hydroxide; applying high frequency sound waves
06/26/2003US20030116173 Electrolysis cleaning using aqueous solution of tetramethylammonium hydroxide
06/26/2003US20030116152 Chuck for holding a workpiece
06/26/2003US20030116091 Chemical vapor deposition vaporizer
06/26/2003US20030116089 Plasma implantation system and method with target movement
06/26/2003US20030116085 Apparatus for modifying the configuration of an exposed surface of a viscous fluid
06/26/2003US20030116083 Enhanced n-type silicon material for epitaxial wafer substrate and method of making same
06/26/2003US20030116082 Silicon single crystal wafer and method for producing silicon single crystal
06/26/2003US20030116019 Comprising vaporizer with heaters on the surfaces to promote heat exchange and evaporate the entrained liquid droplets; use in semiconductor
06/26/2003US20030115978 Apparatus and method for monitoring environment within a container
06/26/2003US20030115956 Apparatus and method for monitoring environment within a container
06/26/2003US20030115806 A mixture contains colloidal silica, one bicarbonate selected from ammonium bicarbonate, lithium bicarbonate, potassium bicarbonate, sodium bicarbonate and water; surface treatment of semiconductor
06/26/2003US20030115770 Heating a semiconductor substrate and vaccuming the removed vapor
06/26/2003US20030115752 Method of making an interposer with contact structures
06/26/2003US20030115750 Forming an insulator to include a recess, depositing a conductor around the insulator, and etching; integrated circuit chips
06/26/2003US20030115749 Inductive heating of microelectronic components
06/26/2003US20030115747 Pick-up tool for mounting semiconductor chips
06/26/2003US20030115698 Wafer cleaning apparatus
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