Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2003
07/02/2003CN1113391C Method for boron contamination reduction between silicon substrate and epitaxial Si or Si1-x Gex layer
07/02/2003CN1113390C Method of checking for presence of connection balls
07/02/2003CN1113363C Semiconductor memory device with reduced power consumption and stable operation in data holding state
07/02/2003CN1113228C Method and apparatus for pre-processing of semiconductor substrate surface analysis
07/02/2003CN1113113C Process for growing gallium nitride and its compound film
07/02/2003CN1113032C Pick and place apparatus for transferring objects
07/02/2003CN1112977C Method for producing cooling element and cooling element
07/01/2003US6588007 Use of endpoint system to match individual processing stations within a tool
07/01/2003US6588004 Graphic editor for block diagram level design of circuits
07/01/2003US6587995 Enhanced programmable core model with integrated graphical debugging functionality
07/01/2003US6587976 Semiconductor device tester for measuring skew between output pins of a semiconductor device
07/01/2003US6587801 Abnormality-cause identifying apparatus and method
07/01/2003US6587744 Run-to-run controller for use in microelectronic fabrication
07/01/2003US6587396 Structure of horizontal surrounding gate flash memory cell
07/01/2003US6587384 Multi-function serial I/O circuit
07/01/2003US6587371 Memory device having wide margin of data reading operation, for storing data by change in electric resistance value
07/01/2003US6587353 Semiconductor device
07/01/2003US6587344 Mounting system for high-voltage semiconductor device
07/01/2003US6587320 Apparatus for current ballasting ESD sensitive devices
07/01/2003US6587277 Apparatus and method for laser radiation
07/01/2003US6587201 Aligning apparatus and method for aligning mask patterns with regions on a substrate
07/01/2003US6587194 Method of and apparatus for article inspection including speckle reduction
07/01/2003US6587193 Inspection systems performing two-dimensional imaging with line light spot
07/01/2003US6587192 Surface inspecting apparatus and method
07/01/2003US6587182 Illumination apparatus
07/01/2003US6587181 One optical member of silica glass having sustantially no chlorine (1 ppm or less) and another of fluorine content of 0.01 to 0.5 wt %; semiconductor mask pattern using an excimer laser
07/01/2003US6587086 Electro-optical device
07/01/2003US6586982 Semiconductor circuit having a combination circuit being switched between an active and inactive state
07/01/2003US6586975 Semiconductor device
07/01/2003US6586962 Semiconductor device
07/01/2003US6586958 Voltage converter having switching element with variable substrate potential
07/01/2003US6586956 Probe contract system having planarity adjustment mechanism
07/01/2003US6586952 Method of inspecting pattern and inspecting instrument
07/01/2003US6586921 Method and circuit for testing DC parameters of circuit input and output nodes
07/01/2003US6586847 Die; addition polymer expanding and contracting so as to reduce a range of temperature excursions occurring in power dissipation areas
07/01/2003US6586846 Low cost decal material used for packaging
07/01/2003US6586842 Dual damascene integration scheme for preventing copper contamination of dielectric layer
07/01/2003US6586839 Approach to structurally reinforcing the mechanical performance of silicon level interconnect layers
07/01/2003US6586838 Semiconductor device
07/01/2003US6586837 Sputtering target and method of manufacturing a semiconductor device
07/01/2003US6586836 Encapsulated die assembly; packaging
07/01/2003US6586833 Packaged power devices having vertical power mosfets therein that are flip-chip mounted to slotted gate electrode strip lines
07/01/2003US6586832 Semiconductor device and fabrication process thereof
07/01/2003US6586830 Semiconductor device with an interposer
07/01/2003US6586828 Integrated circuit bus grid having wires with pre-selected variable widths
07/01/2003US6586823 Semiconductor device that can have a defective bit found during or after packaging process repaired
07/01/2003US6586821 Lead-frame forming for improved thermal performance
07/01/2003US6586820 Treatment for film surface to reduce photo footing
07/01/2003US6586819 Single crystal, InN, GaN, or AlN or a mixed crystal InGaAlN
07/01/2003US6586818 Self-aligned silicon germanium heterojunction bipolar transistor device with electrostatic discharge crevice cover for salicide displacement
07/01/2003US6586815 In a fuse window
07/01/2003US6586814 Bis-Tertiary-Butyl-Amino-Silane nitride (BTBAS) layer that is etch resistant to a hot phosphoric acid etch over the insulating material of the isolating trench
07/01/2003US6586813 High-speed compound semiconductor device operable at large output power with minimum leakage current
07/01/2003US6586811 Microlens, solid state imaging device, and production process thereof
07/01/2003US6586809 Semiconductor device and method for fabricating the same
07/01/2003US6586808 Semiconductor device having multi-work function gate electrode and multi-segment gate dielectric
07/01/2003US6586807 Semiconductor integrated circuit device
07/01/2003US6586806 Method and structure for a single-sided non-self-aligned transistor
07/01/2003US6586805 Non-volatile semiconductor memory device
07/01/2003US6586804 Shallow trench isolation type semiconductor device and method of manufacturing the same
07/01/2003US6586803 Semiconductor device using an SOI substrate
07/01/2003US6586800 Trench-gate semiconductor devices
07/01/2003US6586799 Semiconductor device and method of manufacturing same
07/01/2003US6586798 High voltage MOS-gated power device
07/01/2003US6586797 Graded composition gate insulators to reduce tunneling barriers in flash memory devices
07/01/2003US6586796 Capacitor with high dielectric constant materials
07/01/2003US6586795 DRAM cell configuration whose memory cells can have transistors and capacitors with improved electrical properties
07/01/2003US6586794 Semiconductor device and its manufacture
07/01/2003US6586793 Ferroelectric memory and manufacturing method thereof
07/01/2003US6586792 Structures, methods, and systems for ferroelectric memory transistors
07/01/2003US6586791 Transistor insulator layer incorporating superfine ceramic particles
07/01/2003US6586790 Semiconductor device and method for manufacturing the same
07/01/2003US6586785 Aerosol silicon nanoparticles for use in semiconductor device fabrication
07/01/2003US6586784 Accumulation mode clocking of a charge-coupled device
07/01/2003US6586781 Group III nitride based FETs and HEMTs with reduced trapping and method for producing the same
07/01/2003US6586780 Semiconductor device for supplying output voltage according to high power supply voltage
07/01/2003US6586778 Gallium nitride semiconductor structures fabricated by pendeoepitaxial methods of fabricating gallium nitride semiconductor layers on weak posts
07/01/2003US6586777 A nitride semiconductor thick film substrate and a plurality of nitride nitride semiconductor layers stacked on the substrate
07/01/2003US6586774 Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device
07/01/2003US6586773 Device comprising substrate of one conductivity type, first bonding layer of gallium phosphide, second bonding layer of indium gallium phosphide, light-emitting active layer between two cladding layers, each of indium gallium aluminum phosphide
07/01/2003US6586769 Display array with mutually connected lines that are disconnected at the time of mounting array drivers
07/01/2003US6586768 Multi-layer gate for TFT and method of fabrication
07/01/2003US6586766 Semiconductor device with semiconductor circuit comprising semiconductor units, and method of fabricating it
07/01/2003US6586757 Plasma focus light source with active and buffer gas control
07/01/2003US6586755 Feed-forward control of TCI doping for improving mass-production-wise statistical distribution of critical performance parameters in semiconductor devices
07/01/2003US6586754 Servo control, and its application in a lithographic projection apparatus
07/01/2003US6586753 Electron beam apparatus and electron beam adjusting method
07/01/2003US6586736 Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample
07/01/2003US6586707 Control of laser machining
07/01/2003US6586685 Bump electrode and printed circuit board
07/01/2003US6586677 Package having body of encapsulant material covering first surface and peripheral side surface, including reentrant portion, of die pad and leads, wherein second surface of die pad and leads is exposed at exterior surface of body
07/01/2003US6586349 Integrated process for fabrication of graded composite dielectric material layers for semiconductor devices
07/01/2003US6586348 Method for preventing etching-induced damage to a metal oxide film by patterning the film after a nucleation anneal but while still amorphous and then thermally annealing to crystallize
07/01/2003US6586347 Method and structure to improve the reliability of multilayer structures of FSG (F-doped SiO2) dielectric layers and metal layers in semiconductor integrated circuits
07/01/2003US6586346 Method of forming an oxide film
07/01/2003US6586345 Method of manufacturing a semiconductor device wiring layer having an oxide layer between the polysilicon and silicide layers
07/01/2003US6586344 Mixing zirconium/hafnium chloride with zirconium/hafnium-tetramethylheptanedione complex and benzene, refluxing in argon atmosphere, removing solvents, then sublimating; chemical vapor deposition; semiconductors
07/01/2003US6586343 Method and apparatus for directing constituents through a processing chamber
07/01/2003US6586342 Edge bevel removal of copper from silicon wafers
07/01/2003US6586341 Method of manufacturing semiconductor device