Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2013
10/29/2013US8569736 Light emitting diode
10/29/2013US8569734 Forming resistive random access memories together with fuse arrays
10/29/2013US8569723 Extreme ultraviolet light source apparatus
10/29/2013US8569718 Charged particle beam system
10/29/2013US8569650 Laser material removal methods and apparatus
10/29/2013US8569187 Thermal processing apparatus
10/29/2013US8569186 Plasma CVD method, method for forming silicon nitride film and method for manufacturing semiconductor device
10/29/2013US8569185 Method of fabricating gate electrode using a treated hard mask
10/29/2013US8569184 Method for forming single-phase multi-element film by PEALD
10/29/2013US8569183 Low temperature dielectric flow using microwaves
10/29/2013US8569182 Methods of fabricating three-dimensional semiconductor device
10/29/2013US8569181 Manufacturing method of semiconductor apparatus and semiconductor apparatus
10/29/2013US8569180 Method and structure of wafer level encapsulation of integrated circuits with cavity
10/29/2013US8569179 Method for etching organic hardmasks
10/29/2013US8569178 Plasma processing method and plasma processing apparatus
10/29/2013US8569177 Plasma processing apparatus and plasma processing method
10/29/2013US8569176 Substrate processing method
10/29/2013US8569175 Method for dry chemical treatment of substrates and also use thereof
10/29/2013US8569174 Using spectra to determine polishing endpoints
10/29/2013US8569173 Methods of protecting elevated polysilicon structures during etching processes
10/29/2013US8569172 Noble metal/non-noble metal electrode for RRAM applications
10/29/2013US8569171 Mask-based silicidation for FEOL defectivity reduction and yield boost
10/29/2013US8569170 Manufacturing method of semiconductor device comprising silicide layer with varied thickness
10/29/2013US8569169 Bottom source power MOSFET with substrateless and manufacturing method thereof
10/29/2013US8569168 Dual-metal self-aligned wires and vias
10/29/2013US8569167 Methods for forming a semiconductor structure
10/29/2013US8569166 Methods of modifying interlayer adhesion
10/29/2013US8569165 Self-aligned barrier and capping layers for interconnects
10/29/2013US8569164 Through substrate structure, device package having the same, and methods for manufacturing the same
10/29/2013US8569163 Ultrasonic wire bonding method for a semiconductor device
10/29/2013US8569162 Conductive bump structure on substrate and fabrication method thereof
10/29/2013US8569161 Semiconductor device with copper wirebond sites and methods of making same
10/29/2013US8569160 Device fabrication
10/29/2013US8569159 CMOS structure including non-planar hybrid orientation substrate with planar gate electrodes and method for fabrication
10/29/2013US8569158 Method for forming ultra-shallow doping regions by solid phase diffusion
10/29/2013US8569157 Stepped masking for patterned implantation
10/29/2013US8569156 Reducing or eliminating pre-amorphization in transistor manufacture
10/29/2013US8569155 Flash lamp annealing crystallization for large area thin films
10/29/2013US8569154 Three dimensional integration and methods of through silicon via creation
10/29/2013US8569153 Method and system for carbon doping control in gallium nitride based devices
10/29/2013US8569152 Cut-very-last dual-epi flow
10/29/2013US8569151 Method of formation of nanowires and method of manufacture of associated optical component
10/29/2013US8569150 Method for producing a semiconductor device with a semiconductor body
10/29/2013US8569149 Method of treating a semiconductor device
10/29/2013US8569148 Final polishing method for silicon single crystal wafer and silicon single crystal wafer
10/29/2013US8569147 Semiconductor device and manufacturing method thereof
10/29/2013US8569146 Isolation structure for strained channel transistors
10/29/2013US8569145 Semiconductor device and method of producing the same
10/29/2013US8569144 Method of manufacturing semiconductor integrated circuit device
10/29/2013US8569143 Methods of fabricating a semiconductor IC having a hardened shallow trench isolation (STI)
10/29/2013US8569142 Multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same
10/29/2013US8569141 Polysilicon resistor formation in a gate-last process
10/29/2013US8569140 Method of fabricating semiconductor device
10/29/2013US8569139 Method of manufacturing strained source/drain structures
10/29/2013US8569138 Drain extended MOS transistor and method for fabricating the same
10/29/2013US8569137 Method of improving PMOS performance in a contact etch stop layer process
10/29/2013US8569136 Manufacturing method of semiconductor device
10/29/2013US8569135 Replacement gate electrode with planar work function material layers
10/29/2013US8569134 Method to fabricate a closed cell trench power MOSFET structure
10/29/2013US8569133 Nonvolatile semiconductor memory device and method of manufacturing the same
10/29/2013US8569132 Semiconductor device and manufacturing method thereof
10/29/2013US8569131 Source/drain-to-source/drain recessed strap and methods of manufacture of same
10/29/2013US8569130 Forming air gaps in memory arrays and memory arrays with air gaps thus formed
10/29/2013US8569129 Device-manufacturing scheme for increasing the density of metal patterns in inter-layer dielectrics
10/29/2013US8569128 Semiconductor structure and method of fabrication thereof with mixed metal types
10/29/2013US8569127 Semiconductor device and method for fabricating the same
10/29/2013US8569126 Semiconductor device and manufacturing method thereof
10/29/2013US8569125 FinFET with improved gate planarity
10/29/2013US8569124 Method of manufacturing compound semiconductor device with gate electrode forming before source electrode and drain electrode
10/29/2013US8569123 Method for manufacturing silicon carbide semiconductor device
10/29/2013US8569122 Manufacturing method for LTPS TFT array substrate
10/29/2013US8569121 Graphene and nanotube/nanowire transistor with a self-aligned gate structure on transparent substrates and method of making same
10/29/2013US8569120 Method for manufacturing thin film transistor
10/29/2013US8569119 Method for producing semiconductor device and display device
10/29/2013US8569118 Thin film transistor liquid crystal display array substrate and manufacturing method thereof
10/29/2013US8569117 Systems and methods integrating trench-gated thyristor with trench-gated rectifier
10/29/2013US8569116 Integrated circuit with a fin-based fuse, and related fabrication method
10/29/2013US8569115 Method of forming a compliant bipolar micro device transfer head with silicon electrodes
10/29/2013US8569114 Method of forming a semiconductor device package
10/29/2013US8569112 Integrated circuit packaging system with encapsulation and leadframe etching and method of manufacture thereof
10/29/2013US8569111 Manufacturing method for semiconductor devices
10/29/2013US8569110 Pre-bonded substrate for integrated circuit package and method of making the same
10/29/2013US8569109 Method for attaching a metal surface to a carrier, a method for attaching a chip to a chip carrier, a chip-packaging module and a packaging module
10/29/2013US8569108 Coating for a microelectronic device, treatment comprising same, and method of managing a thermal profile of a microelectronic die
10/29/2013US8569107 Semiconductor integrated circuit device and process for manufacturing the same
10/29/2013US8569106 Method for manufacturing silicon carbide semiconductor device
10/29/2013US8569105 Passivating glue layer to improve amorphous carbon to metal adhesion
10/29/2013US8569102 Method of manufacturing high density CIS thin film for solar cell and method of manufacturing thin film solar cell using the same
10/29/2013US8569100 Solar cell and manufacturing method thereof
10/29/2013US8569099 Enhanced methods for fabricating solar cells with textured surfaces
10/29/2013US8569098 Method for manufacturing photoelectric conversion device
10/29/2013US8569097 Flexible III-V solar cell structure
10/29/2013US8569096 Free-standing metallic article for semiconductors
10/29/2013US8569095 Optical device, optical equipment and method for manufacturing Optical Device
10/29/2013US8569093 Microelectronic devices and methods for manufacturing microelectronic devices
10/29/2013US8569092 Method for fabricating a microelectromechanical sensor with a piezoresistive type readout
10/29/2013US8569091 Integrated circuit switches, design structure and methods of fabricating the same
10/29/2013US8569090 Wafer level structures and methods for fabricating and packaging MEMS
10/29/2013US8569089 Nano-devices formed with suspended graphene membrane
10/29/2013US8569087 Method for manufacturing organic electronic element
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