Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2003
09/11/2003US20030170993 Semiconductor device and method of manufacturing the same
09/11/2003US20030170992 Method of passivating and/or removing contaminants on a low-k dielectric/copper surface
09/11/2003US20030170991 Method of polishing a multi-layer substrate
09/11/2003US20030170990 Process for manufacturing a semiconductor substrate as well as a semiconductor thin film, and multilayer structure
09/11/2003US20030170989 Etched oxide layer forming interconnect metallization trench within the oxide layer, after etching via, second inductor trench, interconnect metallization trench and first inductor trench are filled with copper
09/11/2003US20030170988 Substrate treatment apparatus and substrate treatment method
09/11/2003US20030170987 Method for manufacturing slurry
09/11/2003US20030170986 Method of plasma etching of high-K dielectric materials with high selectivity to underlying layers
09/11/2003US20030170984 Plasma processing apparatus and method
09/11/2003US20030170982 Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers
09/11/2003US20030170981 Method for forming film
09/11/2003US20030170980 Semiconductor device and method of manufacturing the same
09/11/2003US20030170979 Semiconductor device capable of preventing ring defect and method of manufacturing the same
09/11/2003US20030170978 Method of fabricating a dual damascene structure on a semiconductor substrate
09/11/2003US20030170976 Method of applying cladding material on conductive lines of MRAM devices
09/11/2003US20030170975 Method for forming a metal extrusion free via
09/11/2003US20030170974 Method of fabricating a semiconductor device
09/11/2003US20030170973 Thermal low k dielectrics
09/11/2003US20030170972 Dynamic solder attach
09/11/2003US20030170971 Alloying method, and wiring forming method, display device forming method, and image display unit fabricating method
09/11/2003US20030170970 Semiconductor device and method of manufacturing the same
09/11/2003US20030170969 Semiconductor processing employing a semiconducting spacer
09/11/2003US20030170968 Multi-layer structure for reducing capacitance and manufacturing method thereof
09/11/2003US20030170967 Process for fabricating a semiconductor device
09/11/2003US20030170965 Semiconductor integrated circuit and method for manufacturing semiconductor integrated circuit
09/11/2003US20030170964 Oxidation of ion implanted semiconductors
09/11/2003US20030170963 Substrate and method for producing variable quality substrate material
09/11/2003US20030170962 Semiconductor device and manufacturing method thereof
09/11/2003US20030170961 Etching processes for integrated circuit manufacturing including methods of forming capacitors
09/11/2003US20030170960 Optimized blocking impurity placement for SiGe HBTs
09/11/2003US20030170958 6780723 not granted per o.g.errata of 9-28-04
09/11/2003US20030170957 Novel self aligned channel implant, elevated S/D process by gate electrode damascene
09/11/2003US20030170956 Ultra-thin gate oxide through post decoupled plasma nitridation anneal
09/11/2003US20030170955 Trench-gate semiconductor device and its manufacturing method
09/11/2003US20030170954 Advanced metallization approach for forming self-aligned contacts and local area interconnects for memory and logic devices
09/11/2003US20030170953 Method for forming the self-aligned buried n+ type to diffusion process in etox flash cell
09/11/2003US20030170952 Increased capacitance trench capacitor
09/11/2003US20030170951 Novel method to achieve increased trench depth, independent of CD as defined by lithography
09/11/2003US20030170950 Thin film capacitor having multi-layer dielectric film including silicon dioxide and tantalum pentoxide
09/11/2003US20030170949 Substrate processing apparatus and substrate processing method
09/11/2003US20030170947 Methods of forming memory cell arrays
09/11/2003US20030170946 Semiconductor integrated circuit and method for manufacturing semiconductor integrated circuit
09/11/2003US20030170945 Radical processing of a sub-nanometer insulation film
09/11/2003US20030170943 Electrostatic discharge protection in double diffused MOS transistors
09/11/2003US20030170942 Semiconductor device having a low-resistance gate electrode
09/11/2003US20030170941 Method for low topography semiconductor device formation
09/11/2003US20030170940 Simox substrate production process and simox substrate
09/11/2003US20030170939 Method of manufacturing gate insulated field effects transistors
09/11/2003US20030170938 Thin film semiconductor device and method for manufacturing same
09/11/2003US20030170937 Method of electronic component fabrication and an electronic component
09/11/2003US20030170936 Silicon-on-insulator (soi) semiconductor structure for implementing transistor source connections using buried dual rail distribution
09/11/2003US20030170935 Method and apparatus for encapsulating articles by stencil printing
09/11/2003US20030170934 Top layers of metal for high performance IC's
09/11/2003US20030170933 System for providing an open-cavity low profile encapsulated semiconductor package
09/11/2003US20030170931 Electronic device and method of manufacturing the same, and electronic instrument
09/11/2003US20030170930 Memory device utilizing carbon nanotubes and method of fabricating the memory device
09/11/2003US20030170929 Robust electrode patterning in OLED devices
09/11/2003US20030170928 Production method for solid imaging device
09/11/2003US20030170926 Liquid crystal display and method of manufacturing the same
09/11/2003US20030170925 Method of silver (Ag) electroless plating on ITO electrode
09/11/2003US20030170924 Method for manufacturing semiconductor laser device
09/11/2003US20030170921 Methods for forming semiconductor devices so as to stabilize the same when positioned face-down over test substrates
09/11/2003US20030170919 Ferroelectric memory device using via etch-stop layer and method for manufacturing the same
09/11/2003US20030170918 Low temperature melt-processing of organic-inorganic hybrid
09/11/2003US20030170583 A reaction furnace for making semiconductor wafers, connecting substrates togather with a glassy carbon or graphite
09/11/2003US20030170571 A curable protective coatings for reducing an edge roughness during forming a small and fine pattern
09/11/2003US20030170565 Method of removing assist features utilized to improve process latitude
09/11/2003US20030170563 Photosensitive polymer and chemically amplified photoresist composition containing the same
09/11/2003US20030170562 A polymer having a silicon atom in a side chain, which is insoluble in aqueous alkali solution and becomes soluble in aqueous alkali solution by the action of an acid, generated by acid generator on exposure to active light radiation
09/11/2003US20030170561 An acid- dissociable group-containing polysiloxane and a photoacid generator containing a trifluoromethane sulfonic acid or other fluoroalkyl sulfonic acid compounds
09/11/2003US20030170551 Proximity effect correction apparatus, proximity effect correction method, storage medium , and computer program product
09/11/2003US20030170503 III nitride epitaxial substrate, epitaxial substrate for III nitride element and III nitride element
09/11/2003US20030170444 Attachment of surface mount devices to printed circuit boards using a thermoplastic adhesive
09/11/2003US20030170440 Transport member
09/11/2003US20030170433 Layered structure of wire (s) formed in contact hole, a manufacturing method therefor, and a display apparatus having the same
09/11/2003US20030170424 Method for bonding and debonding films using a high-temperature polymer
09/11/2003US20030170415 Ceramic substrate
09/11/2003US20030170403 Atomic layer deposition apparatus and method
09/11/2003US20030170402 Method of cleaning CVD equipment processing chamber
09/11/2003US20030170388 Method for forming thin film and appatus for forming thin film
09/11/2003US20030170153 Method and apparatus for generating H20 to be used in a wet oxidation process to form SiO2 on a silicon surface
09/11/2003US20030169916 Wafer inspection apparatus
09/11/2003US20030169629 Semiconductor memory cell configuration and a method for producing the configuration
09/11/2003US20030169616 Ferroelectric memory wherein bit line capacitance can be maximized
09/11/2003US20030169560 High power capacitors from thin layers of metal powder or metal sponge particles
09/11/2003US20030169553 High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications
09/11/2003US20030169551 Semiconductor integrated circuit with voltage-detecting circuit and signal transmitting and receiving system
09/11/2003US20030169524 System and methods for imaging employing a levitating conveyor
09/11/2003US20030169423 Method and system for overlay measurement
09/11/2003US20030169408 Exposure apparatus and manufacturing method using the same
09/11/2003US20030169394 Method for fabricating liquid crystal display
09/11/2003US20030169382 Semipermeable liquid crystal display device and manufacturing method thereof
09/11/2003US20030169381 Liquid crystal display device having gate electrode with two conducting layers, one used for self-aligned formation of the TFT semiconductor regions
09/11/2003US20030169358 Change transfer device
09/11/2003US20030169218 Transistor circuit, display panel and electronic apparatus
09/11/2003US20030169147 Magnetoresistive effect element and magnetic memory device
09/11/2003US20030169101 Semiconductor integrated circuit including a filter
09/11/2003US20030169098 Resistance division circuit and semiconductor device
09/11/2003US20030169093 Circuit arrangement for controlling a constant current through a load
09/11/2003US20030169092 Drain activated/deactivated AC coupled bandpass RF switch
1 ... 4570 4571 4572 4573 4574 4575 4576 4577 4578 4579 4580 4581 4582 4583 4584 4585 4586 4587 4588 4589 4590 ... 6590