Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2003
09/18/2003US20030176062 Methods For Treating Pluralities of Discrete Semiconductor Substrates
09/18/2003US20030176061 Apparatuses For Treating Pluralities of Discrete Semiconductor Substrates
09/18/2003US20030176060 Methods For Treating Pluralities Of Discrete Semiconductor Substrates
09/18/2003US20030176059 Small electrode for chalcogenide memories
09/18/2003US20030176058 Method of forming a dual damascene structure using an amorphous silicon hard mask
09/18/2003US20030176057 Methods for treating pluralities of discrete semiconductor substrates
09/18/2003US20030176056 Method for forming metal wiring layer of semiconductor device
09/18/2003US20030176055 Method and structure for reducing capacitance between interconnect lines
09/18/2003US20030176054 Method for contact-connecting a semiconductor component
09/18/2003US20030176053 High permeability thin films and patterned thin films to reduce noise in high speed interconnections
09/18/2003US20030176052 High permeability thin films and patterned thin films to reduce noise in high speed interconnections
09/18/2003US20030176051 High permeability thin films and patterned thin films to reduce noise in high speed interconnections
09/18/2003US20030176050 High permeability thin films and patterned thin films to reduce noise in high speed interconnections
09/18/2003US20030176049 Gate dielectric and method therefor
09/18/2003US20030176047 Methods for treating pluralities of discrete semiconductor substrates
09/18/2003US20030176046 Method for tiling unit cells
09/18/2003US20030176045 Methods for forming a slot with a laterally recessed area at an end thereof through an interposer or other carrier substrate
09/18/2003US20030176044 Method for forming isolation pattern in semiconductor device
09/18/2003US20030176043 Shallow trench isolation approach for improved STI corner rounding
09/18/2003US20030176042 Methods for fabricating a compound semiconductor protection device for low voltage and high speed data lines
09/18/2003US20030176041 Method for fabricating semiconductor device
09/18/2003US20030176040 Evaporation of Y-Si-O films for medium-k dielectrics
09/18/2003US20030176039 Method of farbricating EEPROM having tunnel window area
09/18/2003US20030176038 Method of manufacturing semiconductor device
09/18/2003US20030176037 Method of fabricating semiconductor device
09/18/2003US20030176036 Method of manufacturing MOS semiconductor device having PIP capacitor
09/18/2003US20030176035 Analog capacitor in dual damascene process
09/18/2003US20030176033 Disposable spacer technology for reduced cost CMOS processing
09/18/2003US20030176032 Ferroelectric circuit element that can be fabricated at low temperatures and method for making the same
09/18/2003US20030176030 Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength
09/18/2003US20030176029 Substrate treating apparatus and substrate treating method
09/18/2003US20030176022 Tool and method for welding to IC frames
09/18/2003US20030176018 Assemblies including stacked semiconductor devices separated a distance defined by adhesive material interposed therebetween, packages including the assemblies, and methods
09/18/2003US20030176017 Method of mounting chips
09/18/2003US20030176016 Methods for providing support for conductive structures protruding from semiconductor device components
09/18/2003US20030176015 Chip scale package and method of fabricating the same
09/18/2003US20030176014 Methods of forming patterns for semiconductor constructions; and molds configured to pattern masses associated with semiconductor constructions
09/18/2003US20030176012 Integrated circuit structure including electrodes with PGO ferroelectric thin film thereon
09/18/2003US20030176011 Cat-PECVD method, film forming apparatus for implementing the method, film formed by use of the method and device manufactured using the film
09/18/2003US20030176006 Method for manufacturing semiconductor device
09/18/2003US20030176003 Highly doped III-nitride semiconductors
09/18/2003US20030176001 Single crystalline aluminum nitride film, method of forming the same, base substrate for group III element nitride film, light emitting device and surface acoustic wave device
09/18/2003US20030176000 Measuring apparatus and film formation method
09/18/2003US20030175999 Method for fabricating capacitor device
09/18/2003US20030175998 Method for fabricating capacitor device
09/18/2003US20030175997 Method of fabricating a self-aligned via contact for a magnetic memory element
09/18/2003US20030175650 Process tube support sleeve with circumferential channels
09/18/2003US20030175649 Multilevel pedestal for furnace
09/18/2003US20030175626 Using supercritical fluids; separation
09/18/2003US20030175625 Method for individualised marketing of circuit boards
09/18/2003US20030175624 Photolithography; miniaturized semiconductor
09/18/2003US20030175623 Method for forming resist pattern
09/18/2003US20030175620 Containing polyepoxide; semiconductors; lithography
09/18/2003US20030175600 Photomask, method for manufacturing the same, and method for measuring optical characteristics of wafer exposure system using the photomask during operation
09/18/2003US20030175599 Semiconductor substrate; adjustment of patterned mask; laser annealing
09/18/2003US20030175535 Plasma curing process for porous silica thin film
09/18/2003US20030175531 Composite structure with a uniform crystal orientation and the method of controlling the crystal orientation of one such structure
09/18/2003US20030175521 Encapsulant with fluxing properties and method of use in flip-chip surface mount reflow soldering
09/18/2003US20030175487 Ferroelectric thin film element and its manufacturing method, thin film capacitor and piezoelectric actuator using same
09/18/2003US20030175427 Contact printing; fine resolution; transfer layer with pattern stamping surface
09/18/2003US20030175426 Heat treatment apparatus and method for processing substrates
09/18/2003US20030175425 Vapor phase deposition method for metal oxide dielectric film
09/18/2003US20030175411 Precursor compositions and methods for the deposition of passive electrical components on a substrate
09/18/2003US20030175154 Forming electrical contacts to a molecular layer
09/18/2003US20030175142 Rare-earth pre-alloyed PVD targets for dielectric planar applications
09/18/2003US20030175106 Holding device for wafers
09/18/2003US20030175097 Substrate loading/unloading apparatus for manufacturing a liquid crystal display device
09/18/2003US20030174878 Muli-detector defect detection system and a method for detecting defects
09/18/2003US20030174805 X-ray exposure method and semiconductor device manufactured using this X-ray exposure method as well as X-ray mask, X-ray exposure unit and resist material
09/18/2003US20030174571 Semiconductor memory device for reducing chip size
09/18/2003US20030174570 Semiconductor memory device having potential control circuit
09/18/2003US20030174564 Memory macro with modular peripheral circuit elements
09/18/2003US20030174561 Nonvolatile semiconductor memory device
09/18/2003US20030174558 Nonvolatile register and semiconductor device
09/18/2003US20030174553 Semiconductor memory device and method of operation thereof
09/18/2003US20030174530 Memory device array having a pair of magnetic bits sharing a common conductor line
09/18/2003US20030174482 Chip scale package and method of fabricating the same
09/18/2003US20030174458 Thin film structure that may be used with an adhesion layer
09/18/2003US20030174408 Refractive projection objective for immersion lithography
09/18/2003US20030174341 Characterization and compensation of non-cyclic errors in interferometry systems
09/18/2003US20030174340 Method and apparatus to measure fiber optic pickup errors in interferometry systems
09/18/2003US20030174330 Position detection apparatus and method
09/18/2003US20030174304 Method, system, and apparatus for management of reaction loads in a lithography system
09/18/2003US20030174302 Exposure method and apparatus
09/18/2003US20030174301 Photolithography apparatus and exposure method
09/18/2003US20030174298 Exposure apparatus, semiconductor device manufacturing method, maintenance method of exposure apparatus, and semiconductor manufacturing factory
09/18/2003US20030174297 Method of adjusting projection optical apparatus
09/18/2003US20030174275 Thin film-device manufacturing method, and semiconductor device
09/18/2003US20030174273 Liquid crystal display device and the manufacturing method thereof
09/18/2003US20030174267 Reflective electrooptic device and electronic apparatus
09/18/2003US20030174226 Image sensor capable of controlling reset voltage automatically and control method thereof
09/18/2003US20030173995 Level shifting circuit and active matrix driver
09/18/2003US20030173988 High speed threshold voltage and average surface doping measurements
09/18/2003US20030173987 Semiconductor wafer testing system and method
09/18/2003US20030173951 Apparatus for measuring properties of probe card and probing method
09/18/2003US20030173949 Apparatus for recognizing working height of device transfer system in semiconductor device test handler and method thereof
09/18/2003US20030173833 Wafer stage with magnetic bearings
09/18/2003US20030173790 Two level end effector
09/18/2003US20030173720 Methods for forming articles having very small channels therethrough, and such articles, and methods of using such articles
09/18/2003US20030173719 Process for the production of electrical circuits
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