Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2003
10/02/2003US20030186491 Method for manufacturing a semiconductor device
10/02/2003US20030186490 Semiconductor circuit and method of fabricating the same
10/02/2003US20030186489 Semiconductor device and method for preparing the same
10/02/2003US20030186488 Method for manufacturing thin film transistor panel
10/02/2003US20030186487 Method for producing a semiconductor wafer, semiconductor chip, and intermediate semiconductor product
10/02/2003US20030186486 Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme
10/02/2003US20030186485 Micro C-4 semiconductor die and method for depositing connection sites thereon
10/02/2003US20030186482 Integrated sensor packages and methods of making the same
10/02/2003US20030186480 Method for manufacturing thin-film structure
10/02/2003US20030186479 Zn3P2-ZnO mixture thin film for photoluminescence and method of fabricating the same
10/02/2003US20030186478 Thin film transistor array, fabrication method thereof, and liquid crystal display device employing the same
10/02/2003US20030186477 Removable amorphous carbon CMP stop
10/02/2003US20030186475 Method for manufacturing semiconductor thin film
10/02/2003US20030186473 Electrical print resolution test die
10/02/2003US20030186472 Semiconductor device manufacturing method capable of reliable inspection for hole opening and semiconductor devices manufactured by method
10/02/2003US20030186469 Method and system for magnetically assisted statistical assembly of wafers
10/02/2003US20030186466 Passivation layer for molecular electronic device fabrication
10/02/2003US20030186228 Portable sensor array system
10/02/2003US20030186183 Ceramic plate for a semiconductor producing/inspecting apparatus
10/02/2003US20030186175 For use in fabricating circuits or forming electrodes on semiconductor devices for semiconductor integrated circuits or liquid crystal displays
10/02/2003US20030186173 Forming a high melting-point metal on an SOI (Silicon-on-Insulator) layer; transforming a layer of the high melting-point metal into a metal silicide layer by heat treatment; forming an interlayer insulating film; dry etching
10/02/2003US20030186172 Producing low k inter-layer dielectric films using Si-containing resists
10/02/2003US20030186171 Transparency to light with wavelengths in the deep ultraviolet region such as KrF or ArF laser light, and exhibits high sensitivity and definition
10/02/2003US20030186170 Method of forming resist pattern
10/02/2003US20030186169 Disposing on a substrate surface a B-staged dielectric matrix comprising dielectric matrix materials and a removable porogen; curing; patterning the dielectric matrix material; depositing a metal layer; removing porogen
10/02/2003US20030186168 Disposing on a substrate surface a B-staged dielectric matrix comprising dielectric matrix materials and a removable porogen; curing; patterning the dielectric matrix material; depositing a metal layer; removing porogen
10/02/2003US20030186167 Coating resist layer onto a substrate; depositing carbon nanotube; coating a second resist layer over first resist layer and nanotube forming a trilayer component; forming pattern in resist layers; depositing metal layer; dissolving
10/02/2003US20030186160 Copolymer for use in chemical amplification resists
10/02/2003US20030186141 Multi-exposure lithography method and system providing increased overlay accuracy
10/02/2003US20030186138 Resolution of a stepper
10/02/2003US20030186135 Halftone phase shift photomask and blank for halftone phase shift photomask
10/02/2003US20030186134 Interferometrically measuring first and second optical path lengths to a measurement object along respective first and second paths; compensating the first measured optical path length for time-varying optical properties of gas
10/02/2003US20030186088 Crystal-growth substrate and a zno-containing compound semiconductor device
10/02/2003US20030186087 Gradient barrier layer for copper back-end-of-line technology
10/02/2003US20030186074 Metal electrode using molybdenum-tungsten alloy as barrier layers and the fabrication method of the same
10/02/2003US20030186073 Heterointegration of materials using deposition and bonding
10/02/2003US20030186072 Electron device and semiconductor device
10/02/2003US20030186071 Used in oil wells; core of carbon steel coated with a copper alloy
10/02/2003US20030186028 Epitaxially coated semiconductor wafer and process for producing it
10/02/2003US20030186022 Charge-giving body, and pattern-formed body using the same
10/02/2003US20030186000 Depositing a low dielectric constant film comprising silicon, carbon, and hydrogen; treating the deposited film with a plasma of helium, hydrogen, or a mixture thereof at conditions sufficient to increase the hardness of film
10/02/2003US20030185999 Method for forming dielectric layers
10/02/2003US20030185989 Method of forming smooth polycrystalline silicon electrodes for molecular electronic devices
10/02/2003US20030185983 Particles are exposed in location-selective manner to external adjustment forces and/or plasma conditions are subjected to location-selective change to apply particles onto a substrate surface mask-free and/ or subject it to plasma treatment
10/02/2003US20030185981 Chemical vapor deposition method using alcohol for forming metal oxide thin film
10/02/2003US20030185980 Supplying a compound containing at least one kind of metal element onto a substrate, irradiating substrate with energy particles in order to introduce metal element into substrates
10/02/2003US20030185975 Spin coating solution composed of silica precursor, water, alcohol, single proton acid, and polyoxyethylene (20) sorbitan compounds into a film; removing water and alcohol, baking; calcining; dehydroxylating
10/02/2003US20030185738 Glass containing SiO2-Al2O3-CaO, SiO2-Al2O3-MgO, SiO2-BaO-CaO, SiO2-ZrO2-CaO, and/or SiO2-TiO2-BaO; the ratio of the compound components is within the vitrification range.
10/02/2003US20030185729 Electrode assembly for processing a semiconductor substrate and processing apparatus having the same
10/02/2003US20030185715 Chamber elements defining a movable internal chamber
10/02/2003US20030185664 Alignment apparatus for substrates
10/02/2003US20030185655 Method and apparatus for transferring substrate
10/02/2003US20030185561 Substrate treating apparatus
10/02/2003US20030185432 Method and system for image registration based on hierarchical object modeling
10/02/2003US20030185431 Method and system for golden template image extraction
10/02/2003US20030185108 Head for recording and reading optical data and method of manufacturing the same
10/02/2003US20030185089 Synchronous dynamic random access memory
10/02/2003US20030185086 Semiconductor memory device including ferroelectric memory formed using ferroelectric capacitor
10/02/2003US20030185085 Memory embedded logic integrated circuit mounting memory circuits having different performances on the same ship
10/02/2003US20030185073 Nonvolatile memory cells having split gate structure and methods of fabricating the same
10/02/2003US20030185071 Nonvolatile semiconductor memory device and method of manufacturing same
10/02/2003US20030185069 Semiconductor memory and method for applying voltage to semiconductor memory device
10/02/2003US20030185068 Semiconductor device
10/02/2003US20030185065 Thin film magnetic memory device selecting access to a memory cell by a transistor of a small gate capacitance
10/02/2003US20030185062 Proximity lookup for large arrays
10/02/2003US20030185055 Nonvolatile semiconductor memory cell with electron-trapping erase state and methods for operating the same
10/02/2003US20030185054 File storage type non-volatile semiconductor memory device
10/02/2003US20030185053 Fast program to program verify method
10/02/2003US20030185052 Method and apparatus of a read scheme for non-volatile memory
10/02/2003US20030185049 Cubic memory array
10/02/2003US20030185048 Cubic memory array
10/02/2003US20030185046 Magnetoresistive effect element and magnetic memory having the same
10/02/2003US20030185044 Semiconductor memory device
10/02/2003US20030185041 Semiconductor memory device
10/02/2003US20030185040 FeRAM with a single access/ multiple-comparison operation
10/02/2003US20030185038 Diode for use in MRAM devices and method of manufacture
10/02/2003US20030185034 Memory structures
10/02/2003US20030184987 Multi-layer integrated circuit package
10/02/2003US20030184985 Electronic device manufacturing method, electronic device and resin filling method
10/02/2003US20030184952 Thin film capacitor and method of manufacturing the same
10/02/2003US20030184950 Capacitor and method for fabricating the same and semiconductor device
10/02/2003US20030184924 Methods of manufacturing a tunnel magnetoresistive element, thin-film magnetic head and memory element
10/02/2003US20030184921 Excellent in MR ratio and thermal stability
10/02/2003US20030184759 Interferometer with dynamic beam steering element
10/02/2003US20030184744 Surface inspection method and surface inspection system
10/02/2003US20030184742 Wafer metrology apparatus and method
10/02/2003US20030184732 System and method of broad band optical end point detection for film change indication
10/02/2003US20030184722 Laser repair system and glass mask used for the same
10/02/2003US20030184721 Mask substrate and its manufacturing method
10/02/2003US20030184720 Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby
10/02/2003US20030184719 Exposure apparatus
10/02/2003US20030184707 Process for producing reflection type liquid crystal display device
10/02/2003US20030184704 Display device and method of manufacturing the same
10/02/2003US20030184699 In-plane switching mode liquid crystal display device
10/02/2003US20030184697 Substrate with a flattening film, display substrate, and method of manufacturing the substrates
10/02/2003US20030184696 Reflection plate for semiconductor heat treatment and manufacturing method thereof
10/02/2003US20030184507 Protection circuit for input and output of liquid crystal display
10/02/2003US20030184405 Symmetric microwave filter and microwave integrated circuit merging the same
10/02/2003US20030184364 Semiconductor integrated circuit with leak current cut-off circuit
10/02/2003US20030184352 Circuit with variation correction function
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