Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2003
10/07/2003US6630074 Etching composition and use thereof
10/07/2003US6630059 Workpeice proximity plating apparatus
10/07/2003US6630053 Semiconductor processing module and apparatus
10/07/2003US6630052 Apparatus for etching glass substrate
10/07/2003US6630031 Apparatus comprising means for generating superheated or saturated steam, means for spraying steam onto surface of substrates, and means for irradiating with ultraviolet rays
10/07/2003US6630030 Method and apparatus for growing thin films
10/07/2003US6630024 Method for the production of an epitaxially grown semiconductor wafer
10/07/2003US6629883 Polishing apparatus
10/07/2003US6629882 Precise polishing apparatus and method
10/07/2003US6629880 Rotary mechanical buffing method for deflashing of molded integrated circuit packages
10/07/2003US6629879 Method of controlling barrier metal polishing processes based upon X-ray fluorescence measurements
10/07/2003US6629876 Apparatus for grinding wafers using a grind chuck having a high elastic modulus
10/07/2003US6629875 Machine for grinding-polishing of a water edge
10/07/2003US6629813 Microelectronic fabrication tool loading method providing enhanced microelectronic fabrication tool operating efficiency
10/07/2003US6629812 Method and apparatus for circulating pallets in an elevator unit of the module IC handler
10/07/2003US6629640 Holographic laser scanning method and system employing visible scanning-zone indicators identifying a three-dimensional omni-directional laser scanning volume for package transport navigation
10/07/2003US6629627 Level control systems for high purity chemical delivery systems
10/07/2003US6629553 Method and system for mounting semiconductor device, semiconductor device separating system, and method for fabricating IC card
10/07/2003US6629540 Wet treatment apparatus
10/07/2003US6629539 Sample processing system
10/07/2003US6629538 Method for cleaning semiconductor wafers in a vacuum environment
10/07/2003US6629484 Cutter wheel for brittle sheets
10/07/2003US6629423 Processor and temperature control method therefor
10/07/2003US6629367 Punching apertures through alumina or zirconia layers, filling with curable and conductor pastes, then hardening and sintering to form monolithic structures; connecting electrical and electronic apparatus
10/07/2003US6629351 Apparatus and method for separating cull in a package assembly process
10/07/2003CA2290723C A high tunability cmos delay element
10/07/2003CA2286019C Recovery of surface-ready silicon carbide substrates
10/07/2003CA2212002C Uncooled ybacuo thin film infrared detector
10/02/2003WO2003081974A2 Electronic component mounting apparatus and electronic component mounting method
10/02/2003WO2003081833A2 Floating-gate analog circuit
10/02/2003WO2003081715A2 Wave interrogated near field array system and method for detection of subwavelength scale anomalies
10/02/2003WO2003081712A2 Grating element for filtering wavelengths ≤ 100nm
10/02/2003WO2003081685A1 Visible light emitting device
10/02/2003WO2003081684A1 Compound thin-film solar cell and process for producing the same
10/02/2003WO2003081681A1 Semiconductor element and method for fabricating the same
10/02/2003WO2003081679A1 Semi-conductor structure comprising a switch element and an edge element
10/02/2003WO2003081678A1 Doping methods for fully-depleted soi structures, and device comprising the resulting doped regions
10/02/2003WO2003081677A1 Based, triple-well fully depleted soi structure, and various methods of making and operating same
10/02/2003WO2003081676A1 Thin film transistor, circuit device and liquid crystal display
10/02/2003WO2003081675A1 Method for producing an soi field effect transistor and corresponding field effect transistor
10/02/2003WO2003081674A1 Field effect transistor
10/02/2003WO2003081672A1 Magnetic memory device and manufacturing method thereof
10/02/2003WO2003081671A2 Logic components from organic field effect transistors
10/02/2003WO2003081669A1 Integrated circuit module and method for making same
10/02/2003WO2003081668A1 Semiconductor device with a protective security coating and method of manufacturing the same
10/02/2003WO2003081667A1 Semiconductor device and production method therefor
10/02/2003WO2003081666A1 Production method for a contact in a semiconductor structure and corresponding contact
10/02/2003WO2003081665A1 Process for producing semiconductor device and semiconductor device
10/02/2003WO2003081664A2 Method for transferring elements between substrates
10/02/2003WO2003081663A2 Correlation of end-of-line data mining with process tool data mining
10/02/2003WO2003081662A1 Method and structure for calibrating scatterometry-based metrology tool used to measure dimensions of features on a semiconductor device
10/02/2003WO2003081660A1 Integrated circuit device and method therefor
10/02/2003WO2003081658A1 Etchant composition
10/02/2003WO2003081657A1 Treating device, electrode, electrode plate, and treating method
10/02/2003WO2003081656A1 Method of plasma etching
10/02/2003WO2003081655A1 Method of plasma etching
10/02/2003WO2003081654A1 On-wafer monitoring system
10/02/2003WO2003081653A1 Pressure-sensitive adhesive film for the surface protection of semiconductor wafers and method for protection of semiconductor wafers with the film
10/02/2003WO2003081652A1 Cvd apparatus and method of cleaning the cvd apparatus
10/02/2003WO2003081651A1 Cvd apparatus and method of cleaning the cvd apparatus
10/02/2003WO2003081650A1 Plasma processing device and production method of thin-film forming substrate
10/02/2003WO2003081647A1 Material supply system in semiconductor device manufacturing plant
10/02/2003WO2003081646A2 System and method for heating and cooling wafer at accelerated rates
10/02/2003WO2003081645A2 An integrated in-situ etch process performed in a multichamber substrate processing system
10/02/2003WO2003081644A2 Electronic component mounting method and apparatus and ultrasondic bonding head
10/02/2003WO2003081642A2 Power semiconductor device
10/02/2003WO2003081640A2 Strained fin fets structure and method
10/02/2003WO2003081633A2 Tandem etch chamber plasma processing system
10/02/2003WO2003081616A1 Coil on a semiconductor substrate and method for production thereof
10/02/2003WO2003081606A1 Conductive particle and adhesive agent
10/02/2003WO2003081602A1 A volumetric data storage apparatus comprising a plurality of stacked matrix-addressable memory devices
10/02/2003WO2003081601A1 Ferroelectric storage device, drive method and drive circuit thereof
10/02/2003WO2003081599A1 In-pixel memory for display devices
10/02/2003WO2003081531A1 A morphological inspection method based on skeletonization
10/02/2003WO2003081513A1 Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements
10/02/2003WO2003081338A1 Method and apparatus for printing large data flows
10/02/2003WO2003081337A2 Device for manipulation of the angular position of an object relative to a fixed structure
10/02/2003WO2003081269A1 Scatterometry structure with embedded ring oscillator, and methods of using same
10/02/2003WO2003080899A1 Electropolishing apparatus, electropolishing method, and method for manaufacturing semiconductor device
10/02/2003WO2003080898A1 Electrochemical machine and electrochemical machining method
10/02/2003WO2003080893A1 Method for coating a substrate and device for carrying out the method
10/02/2003WO2003080892A1 Low contamination components for semiconductor processing apparatus and methods for making components
10/02/2003WO2003080889A1 Band gap engineering of amorphous al-ga-n alloys
10/02/2003WO2003080887A2 Methods and apparatus for annealing in physical vapor deposition systems
10/02/2003WO2003080796A2 Ordered biological nanostructures formed from chaperonin polypeptides
10/02/2003WO2003080282A1 Simultaneous laser soldering method
10/02/2003WO2003080262A1 A chemical etching process and system
10/02/2003WO2003079754A2 Method for stacking chips within a multichip module package
10/02/2003WO2003058686A3 Device and method for the treatment of disk-shaped substrates
10/02/2003WO2003058684A3 High voltage power mosfet having a voltage sustaining region and diffusion from regions of oppositely doped polysilicon
10/02/2003WO2003047037A9 Fabrication of a high resolution biological molecule detection device with aluminum electrical conductors
10/02/2003WO2003043092A3 Ohmic contact structure and method for the production of the same
10/02/2003WO2003041127A3 Process for forming metallized contacts to periphery transistors
10/02/2003WO2003040338A3 Micro-scale interconnect device with internal heat spreader and method for fabricating same
10/02/2003WO2003035814A3 Improved post plasma ashing wafer cleaning formulation
10/02/2003WO2003032366A3 Metal-insulator-metal (mim) capacitor structure and methods of fabricating same
10/02/2003WO2003032351A3 Method and device for aligning a charged particle beam column
10/02/2003WO2003030267A3 Umosfet device and method of making the same
10/02/2003WO2003025980A3 Method of examining a wafer of semiconductor material by means of x-rays
10/02/2003WO2003024091A8 Photodiode cmos imager with column-feedback soft-reset
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