Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2003
10/16/2003US20030194839 Polycrystalline silicon thin film transistor and method for fabricating the same
10/16/2003US20030194838 Transistor and associated driving device
10/16/2003US20030194837 Methods for making semiconductor packages with leadframe grid arrays
10/16/2003US20030194836 Method for manufacturing a dynamic quantity detection device
10/16/2003US20030194835 Method for fabricating ceramic chip packages
10/16/2003US20030194833 Method and apparatus for underfilling semiconductor devices
10/16/2003US20030194831 Adhesive die attachment method for a semiconductor die and arrangement for carrying out the method
10/16/2003US20030194828 Methods of fabricating gallium nitride semiconductor layers by lateral growth into trenchers, and gallium nitride semiconductor structures fabricated thereby
10/16/2003US20030194827 Optoelectronic device and method of manufacture thereof
10/16/2003US20030194825 Deposition of gate metallization for active matrix liquid crystal display (AMLCD) applications
10/16/2003US20030194820 Balancing planarization of layers and the effect of underlying structure on the metrology signal
10/16/2003US20030194819 Semiconductor constructions and methods of forming semiconductor constructions
10/16/2003US20030194710 Method for making a molecularly smooth surface
10/16/2003US20030194673 Batch furnace isolation gate
10/16/2003US20030194656 Method of producing compound semiconductor device
10/16/2003US20030194652 Charged-particle-beam microlithography apparatus and methods for exposing a segmented reticle
10/16/2003US20030194647 Composite photoresist for pattern transferring
10/16/2003US20030194641 Resin, which is decomposed by the action of an acid to increase solubility in an alkali developing solution
10/16/2003US20030194640 Positive resist composition
10/16/2003US20030194636 Photoresist compositions comprising acetals and ketals as solvents
10/16/2003US20030194620 Mask blank and method of fabricating phase shift mask from the same
10/16/2003US20030194619 Irradiating in a pattern manner with an electron beam a substrate having a chemical amplification-type resist layer and a conductive film formed on the resist layer that releases an acid by heating
10/16/2003US20030194613 Projecting a laser beam through a mask having a slit pattern comprising a corner region with edges, and a blocking feature with the corner region to reduce energy spikes projected on a substrate.
10/16/2003US20030194569 Phase shifting layer on etch stop layer and capable of producing a photomask with 180 degrees phase shift and an optical transmission of at least 0.001% at a selected wavelength of less-than 500 nm.
10/16/2003US20030194545 Systems and methods for filling voids and improving properties of porous thin films
10/16/2003US20030194510 A dummy gate that includes gate electrode material and gate dielectric material is exposed to a flowing gas; selective etching
10/16/2003US20030194509 Reacting a doped surface layer to form a dielectric film, a metal film or a silicide film having a thickness of 50 angstroms or less.
10/16/2003US20030194508 Deposition methods utilizing microwave excitation, and deposition apparatuses
10/16/2003US20030194503 Application of input waveforms having predetermined energy, frequency and amplitude to produce standing waves at predetermined positions at the interface between a pair of fluids within a container
10/16/2003US20030194495 Crosslink cyclo-siloxane compound with linear bridging group to form ultra low k dielectric
10/16/2003US20030194493 Multi-station deposition apparatus and method
10/16/2003US20030194482 Apparatus and method for processing a substrate
10/16/2003US20030194299 Processing system for semiconductor wafers
10/16/2003US20030194298 Transfer chamber with integral loadlock and staging station
10/16/2003US20030194297 Local store for a wafer processing station
10/16/2003US20030194055 Laser plasma generation method and structure thereof
10/16/2003US20030193827 Two-bit programmable nonvolatile memory device and methods of operating and fabricating the same
10/16/2003US20030193824 Semiconductor memory device
10/16/2003US20030193823 Semiconductor memory device provided with test memory cell unit
10/16/2003US20030193765 Electrostatic breakdown prevention circuit for semiconductor device
10/16/2003US20030193671 Measurement box
10/16/2003US20030193655 Exposure apparatus and method
10/16/2003US20030193639 Liquid crystal display device and method of manufacturing the same
10/16/2003US20030193627 Semiconductor device and method of manufacturing the same
10/16/2003US20030193626 Method of manufacturing array substrate for liquid crystal display device
10/16/2003US20030193560 Precise position control apparatus and precise position control method using the same
10/16/2003US20030193349 Semiconductor integrated circuit
10/16/2003US20030193346 Sensor device for determining the layer thickness of a thin layer
10/16/2003US20030193327 Single axis manipulator with controlled compliance
10/16/2003US20030193286 Hermetic encapsulation of organic, electro-optical elements
10/16/2003US20030193284 Flat panel display with black matrix and method of fabricating thereof
10/16/2003US20030193094 Semiconductor device and method for fabricating the same
10/16/2003US20030193092 Solder masks for use on carrier substrates, carrier substrates and semiconductor device assemblies including such solder masks, and methods
10/16/2003US20030193091 Semiconductor packages with leadframe grid arrays and components and methods for making the same
10/16/2003US20030193090 Semiconductor device and method of manufacturing the semiconductor device
10/16/2003US20030193088 Semiconductor integrated circuit package having electrically disconnected solder balls for mounting
10/16/2003US20030193086 Composition for sealing a semiconductor device, semiconductor device and method of manufacturing the same
10/16/2003US20030193084 Semiconductor integrated circuit
10/16/2003US20030193082 Substrate with dam bar structure
10/16/2003US20030193077 Bipolar transistor and method of fabricating the same
10/16/2003US20030193076 Elevated plug ends bond wafers; mating bonding pads; resistant to chemical mechanical polishing
10/16/2003US20030193074 Trench schottky rectifier
10/16/2003US20030193070 Damascene double-gate FET
10/16/2003US20030193069 Thin film transistor and organic electroluminescent device using the same
10/16/2003US20030193068 Thin film transistor (tft) and method for fabricating the tft
10/16/2003US20030193066 Semiconductor device and method of manufacturing the same
10/16/2003US20030193065 Dual double gate transistor and method for forming
10/16/2003US20030193064 Self-aligned multi-bit flash memory cell and its contactless flash memory array
10/16/2003US20030193061 Electronic component and method for producing an electronic component
10/16/2003US20030193060 Semiconductor device and method of manufacturing the same
10/16/2003US20030193058 Integrated circuit with capacitors having fin structure
10/16/2003US20030193056 Light-emitting device, liquid-crystal display device and method for manufacturing same
10/16/2003US20030193054 Purality of pixels electrodes connected to semiconductors; insulating nitride
10/16/2003US20030193052 Semiconductor device and method of manufacturing the same
10/16/2003US20030193050 Test patterns and methods of controlling CMP process using the same
10/16/2003US20030192943 Method of using hydrogen plasma to pre-clean copper surfaces during Cu/Cu or Cu/metal bonding
10/16/2003US20030192920 Chemical mix and delivery systems and methods thereof
10/16/2003US20030192866 Chip scale marker and making method
10/16/2003US20030192864 Plasma processing apparatus and method
10/16/2003US20030192859 Method of manufacturing electronic device
10/16/2003US20030192858 Method of forming high aspect ratio apertures
10/16/2003US20030192857 Method of etching and apparatus for doing same
10/16/2003US20030192856 Method for removing photoresist and etch residues
10/16/2003US20030192778 Method of forming deposited film
10/16/2003US20030192686 Heat processing device
10/16/2003US20030192647 Method of holding substrate and substrate holding system
10/16/2003US20030192645 Method and apparatus for creating circumferential process gas flow in a semiconductor wafer plasma reactor chamber
10/16/2003US20030192644 Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply
10/16/2003US20030192636 Embedded hermetic cavity formation in low temperature cofired ceramic
10/16/2003US20030192577 Method and apparatus for wafer cleaning
10/16/2003US20030192574 Method of reducing water spotting and oxide growth on a semiconductor structure
10/16/2003US20030192571 Apparatus and method for cleaning a semiconductor wafer
10/16/2003US20030192570 Method and apparatus for wafer cleaning
10/16/2003US20030192569 Fluorine process for cleaning semiconductor process chamber
10/16/2003US20030192567 Method of making foreign matter harmless
10/16/2003US20030192478 Plasma CVD apparatus comprising susceptor with ring
10/16/2003US20030192474 Multi-directional scanning of movable member and ion beam monitoring arrangement therefor
10/16/2003US20030192469 Process for controlling denuded zone depth in an ideal oxygen precipitating silicon wafer
10/16/2003US20030192414 Cutting device for bonded wires
10/16/2003US20030192183 Method for constructing a membrane probe using a depression
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