Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2003
12/04/2003WO2003100858A2 Surface mounted decoupling capacitor system and process of making the same
12/04/2003WO2003100856A1 Compliant component for supporting electrical interface component
12/04/2003WO2003100854A2 Electronic component module and method for the production thereof
12/04/2003WO2003100850A1 Substrate, wiring board, semiconductor package-use substrate, semiconductor package and production methods for them
12/04/2003WO2003100849A1 Semiconductor processor
12/04/2003WO2003100848A1 Substrate processing device and substrate processing method
12/04/2003WO2003100847A1 Probe card carrying equipment and connected body moving mechanism
12/04/2003WO2003100846A2 Glass material for use at high frequencies
12/04/2003WO2003100845A1 Method of fabrication sige heterojunction bipolar transistor
12/04/2003WO2003100844A1 Method for forming silicon dioxide film on silicon substrate, method for forming oxide film on semiconductor substrate, and method for producing semiconductor device
12/04/2003WO2003100843A2 Etching gas and method for dry etching
12/04/2003WO2003100842A1 Conveying type substrate treating device
12/04/2003WO2003100841A2 Method for the production of a memory cell, memory cell and memory cell arrangement
12/04/2003WO2003100840A1 Vaporizer, various apparatuses including the same and method of vaporization
12/04/2003WO2003100839A2 Method for epitaxial growth of a gallium nitride film separated from its substrate
12/04/2003WO2003100837A2 Large substrate test system
12/04/2003WO2003100836A1 Reduced cross-contamination between chambers in a semiconductor processing tool
12/04/2003WO2003100835A2 Gate oxide process methods for high performance mos transistors by reducing remote scattering
12/04/2003WO2003100834A2 Method of forming semiconductor device with sidewall access gate
12/04/2003WO2003100833A2 Method of forming quantum dots for extended wavelength operation
12/04/2003WO2003100829A2 Forming a multi segment integrated circuit with isolated substrates
12/04/2003WO2003100828A2 Method of depositing an oxide film by chemical vapor deposition
12/04/2003WO2003100827A2 Organic semiconductor device and method
12/04/2003WO2003100826A2 Lithography laser with beam delivery and beam pointing control
12/04/2003WO2003100825A2 Multiple thickness semiconductor interconnect and method therefor
12/04/2003WO2003100824A2 Ferroelectric capacitor and method of manufacturing the same
12/04/2003WO2003100823A2 Control of contact resistance in quantum well intermixed devices
12/04/2003WO2003100818A1 Capacitively coupled plasma reactor with magnetic plasma control
12/04/2003WO2003100817A1 Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a mutli-part electrode
12/04/2003WO2003100790A1 Method of erasing a flashing memory using a pre-erasing step
12/04/2003WO2003100725A1 Wafer mapping apparatus and method
12/04/2003WO2003100668A2 Integrated circuit design method
12/04/2003WO2003100525A2 Method for determining wavefront aberrations
12/04/2003WO2003100523A1 Negative resist composition
12/04/2003WO2003100512A1 A thin film transistor panel for a liquid crystal display
12/04/2003WO2003100446A2 High performance probe system for testing semiconductor wafers
12/04/2003WO2003100404A1 System and method for process variation monitor
12/04/2003WO2003100249A1 Methods of handling wind turbine blades and mounting said blades on a wind turbine, system and gripping unit for handling a wind turbine blade
12/04/2003WO2003099915A1 Porous nanocomposite thin film and method of forming the same
12/04/2003WO2003099782A2 Acetal protected polymers and photoresists compositions thereof
12/04/2003WO2003099708A1 Process for producing nanoparticle and nanoparticle produced by the process
12/04/2003WO2003099707A2 Method of altering the properties of a thin film and substrate implementing said method
12/04/2003WO2003099536A1 Methods and apparatus of field-induced pressure imprint lithography
12/04/2003WO2003099518A1 Microporous polishing pad
12/04/2003WO2003090792A3 Method and apparatus for treating a substrate with an ozone-solvent solution iii
12/04/2003WO2003085720A3 Diffusion and activation control of implanted dopants with athermales annealing
12/04/2003WO2003083947A3 Folded bit line dram with vertical ultra thin body transistors
12/04/2003WO2003083937A3 Source-side stacking fault body-tie for partially-depleted soi mosfet hysteresis control
12/04/2003WO2003083912A3 Field-assisted fusion bonding
12/04/2003WO2003083522A3 System and method of broad band optical end point detection for film change indication
12/04/2003WO2003083175A3 Method and apparatus for electrochemical processing
12/04/2003WO2003079566A3 Drain activated/deactivated ac coupled bandpass rf switch
12/04/2003WO2003075329A3 Method of forming a semiconductor device having an energy absorbing layer and corresponding structure
12/04/2003WO2003073478A3 Plasma-resistant, welded aluminum structures for use in semiconductor processing apparatus
12/04/2003WO2003069668A3 A method of calibrating and using a semiconductor processing system
12/04/2003WO2003064495A3 Planarized microelectronic substrates
12/04/2003WO2003063243A8 Thin films, structures having thin films, and methods of forming thin films
12/04/2003WO2003063209A3 Copper interconnect doped with carbon and silicon
12/04/2003WO2003063167A3 System and method for programming ono dual bit memory cells
12/04/2003WO2003060447A8 Temperature measurement and heat-treating methods and systems
12/04/2003WO2003057404A3 Method and apparatus for applying downward force on wafer during cmp
12/04/2003WO2003050617A3 Method of enhancing clear field phase shift masks by adding parallel line to phase 0 region
12/04/2003WO2003046973A3 Combined methods of a thermal annealing and rapid thermal annealing
12/04/2003WO2003044853B1 Substrate contact in soi and method therefor
12/04/2003WO2003039195A3 Induction heating devices and methods for controllably heating an article
12/04/2003WO2003031333A3 Divalent metal oxide doped aluminium oxide, produced by flame hydrolysis and aqueous dispersions thereof
12/04/2003WO2003026590A3 Biological control of nanoparticles
12/04/2003WO2003021676A3 Connecting the emitter contacts of a semiconductor device
12/04/2003WO2003021636B1 Electronic devices and methods of manufacture
12/04/2003WO2003017281A3 Memory circuit
12/04/2003WO2003016977A3 Objective with pupil obscuration
12/04/2003WO2003015179A3 Mis device having a trench gate electrode and method of making the same
12/04/2003WO2003015160A3 Dual layer cmos devices
12/04/2003WO2003009398A3 Structure and method for fabricating an optical bus
12/04/2003WO2003009360B1 Method and apparatus for depositing tungsten after surface treatment to improve film characteristics
12/04/2003WO2003008323A3 Lifting and supporting device
12/04/2003WO2003008157A3 Centering double side edge grip end effector with integrated mapping sensor
12/04/2003WO2003006216A8 Substrate transport apparatus with multiple independent end effectors
12/04/2003WO2003001593A3 Sti process for dram
12/04/2003WO2002095801B1 Improved connection assembly for integrated circuit sensors
12/04/2003WO2002084748A3 Method for producing optically transparent regions in a silicon substrate
12/04/2003WO2002078043A3 Beam processing apparatus
12/04/2003WO2002061802A3 Metal-to-metal antifuse structure and fabrication method
12/04/2003WO2002047116A8 Structure and method for forming a body contact for vertical transistor cells
12/04/2003US20030226130 Method for making an OPC mask and an OPC mask manufactured using the same
12/04/2003US20030226128 Basic cell of gate array semiconductor device, gate array semiconductor device, and layout method for gate array semiconductor device
12/04/2003US20030226127 Designing method and a manufacturing method of an electronic device
12/04/2003US20030226126 Delay diagnosis method for semiconductor integrated circuit, computer program product for diagnosing delay of semiconductor integrated circuit and computer readable recording medium recording program thereon
12/04/2003US20030226121 Method of designing interconnects
12/04/2003US20030226084 Semiconductor integrated circuit
12/04/2003US20030226083 Self-synchronous logic circuit having test function and method of testing self-synchronous logic circuit
12/04/2003US20030226079 Scan-path flip-flop circuit for integrated circuit memory
12/04/2003US20030226051 System large scale integrated circuit (LSI), method of designing the same, and program therefor
12/04/2003US20030226010 System and method for on-line diagnostics
12/04/2003US20030225535 Selection of wavelengths for integrated circuit optical metrology
12/04/2003US20030225474 Specialization of active software agents in an automated manufacturing environment
12/04/2003US20030225473 Product management method, program for performing product management, and storage medium having recorded the program therein
12/04/2003US20030224958 Solutions for cleaning polished aluminum-containing layers
12/04/2003US20030224703 Chemical mechanical polishing apparatus having a stepped retaining ring and method for use thereof
12/04/2003US20030224635 Contactor block and apparatus for electrical connection
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