| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/05/2004 | US20040023367 Preparing DNA microarray covered with photoresist for use in medical diagnostics and rational drug design and screening |
| 02/05/2004 | US20040023163 Acrylic ester copolymer; onium (especially sulfonium or iodonium) salt of fluoroalkylsulfonic acid as an acid generator; oxo acid of phosphorus; and a sec. or tert. amine to provide a quenching effect. |
| 02/05/2004 | US20040023162 Stamper, lithographic method of using the stamper and method of forming a structure by a lithographic pattern |
| 02/05/2004 | US20040023161 Using a photomask having both a minute aperture where the main component of a transmitted light is an evanescent light and an aperture where the main component is a propagating light; controlling distance between substrate and photomask |
| 02/05/2004 | US20040023157 Protecting groups in polymers, photoresists and processes for microlithography |
| 02/05/2004 | US20040023153 Resist compostion and patterning process |
| 02/05/2004 | US20040023152 Photoresists, polymers and processes for microlithography |
| 02/05/2004 | US20040023151 Negative resist material and pattern formation method using the same |
| 02/05/2004 | US20040023147 Alkali-soluble resin, photosensitive diazoquinone compound, and a filler; can form patterns with high resolution and high film thickness retention |
| 02/05/2004 | US20040023133 Photoresist pattern and forming method thereof |
| 02/05/2004 | US20040023132 Requires correction of line degeneration during exposure of a miniaturized integrated circuit pattern. |
| 02/05/2004 | US20040023130 Test photomask, flare evaluation method, and flare compensation method |
| 02/05/2004 | US20040023128 Photomask, method for detecting pattern defect of the same, and method for making pattern using the same |
| 02/05/2004 | US20040023126 Lithographic template having a repaired gap defect method of repair and use |
| 02/05/2004 | US20040023125 Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask |
| 02/05/2004 | US20040023123 Improve mask generation by allowing the chrome on the mask to fully define the quartz etch. |
| 02/05/2004 | US20040023057 Patterned thin film and method of forming same |
| 02/05/2004 | US20040023047 Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
| 02/05/2004 | US20040023043 Dicing tape |
| 02/05/2004 | US20040022960 Depositing a reactant gas containing a precursor of the dielectric film using plasma; stopping the gas supply and continuing the plasma treatment to form a dielectric layer; repeating the steps until a desired thickness is obtained. |
| 02/05/2004 | US20040022940 Can reinforce the thin portion of the seed layer and ensures complete filling with copper of the fine recesses, and which is so stable that its performance is not lowered after a long-term continuous use thereof. |
| 02/05/2004 | US20040022884 Resin molding apparatus |
| 02/05/2004 | US20040022694 Processing apparatus, measuring apparatus, and device manufacturing method |
| 02/05/2004 | US20040022664 High heat resistance and a low electrical resistance |
| 02/05/2004 | US20040022607 Apparatus for manufacturing integrated circuit device |
| 02/05/2004 | US20040022528 For isothermally distributing a temperature across a semiconductor device |
| 02/05/2004 | US20040022429 Scanning microscope and inspection method employing the scanning microscope |
| 02/05/2004 | US20040022428 Automatic system-level test apparatus and method |
| 02/05/2004 | US20040022295 High-peak-power laser device and application to the generation of light in the extreme ultraviolet |
| 02/05/2004 | US20040022293 Automatic gas control system for a gas discharge laser |
| 02/05/2004 | US20040022291 Lithography laser with beam delivery and beam pointing control |
| 02/05/2004 | US20040022117 Memory device and method of operating the memory device |
| 02/05/2004 | US20040022114 Semiconductor memory device allowing reduction of an area loss |
| 02/05/2004 | US20040022109 Single data line sensing scheme for TCCT-based memory cells |
| 02/05/2004 | US20040022105 Semiconductor memory device and method of manufacturing the same |
| 02/05/2004 | US20040022102 Thermal conducting trench in a semiconductor structure and method for forming the same |
| 02/05/2004 | US20040022100 Semiconductor memory having a configuration of memory cells |
| 02/05/2004 | US20040022098 Semiconductor memory |
| 02/05/2004 | US20040022090 Ferroelectric memory device |
| 02/05/2004 | US20040022089 Semiconductor integrated circuit |
| 02/05/2004 | US20040022084 Read only memory(ROM) cell, program method of ROM cell, layout method of ROM cell, and ROM device comprising ROM cell |
| 02/05/2004 | US20040022068 Illumination optical system, exposure method and apparatus using the same |
| 02/05/2004 | US20040022037 Electronic part mounting apparatus and method |
| 02/05/2004 | US20040022025 Equipment for communication system and semiconductor integrated circuit device |
| 02/05/2004 | US20040022019 Method for producing input/output permutation of several conductive strips with paralell branches of an integrated circuit and resulting circuit |
| 02/05/2004 | US20040021999 Input protection circuit |
| 02/05/2004 | US20040021968 Filter member manufacturing method, filter member cutting method, filter chip cutting method, and filter chip manufacturing method |
| 02/05/2004 | US20040021943 Method and system for correction of intrinsic birefringence in UV microlithography |
| 02/05/2004 | US20040021856 System for monitoring foreign particles, process processing apparatus and method of electronic commerce |
| 02/05/2004 | US20040021845 Illumination optical system, exposure method and apparatus using the same |
| 02/05/2004 | US20040021843 Quartz substrate is joined to a support body on at least one side; subsequently, from the quartz substrate material is removed to a desired value with a thickness |
| 02/05/2004 | US20040021842 System and method for laser beam expansion without expanding spatial coherence |
| 02/05/2004 | US20040021841 Exposure method and apparatus |
| 02/05/2004 | US20040021840 Lithographic apparatus, device manufacturing method, performance measuring method, calibration method and computer program |
| 02/05/2004 | US20040021801 Exposure mask for fabricating liquid crystal display and method for exposing substrate in fabricating liquid crystal display using the mask |
| 02/05/2004 | US20040021493 Clocked-scan flip-flop for multi-threshold voltage CMOS circuit |
| 02/05/2004 | US20040021485 Semiconductor integrated circuit and circuit designating system |
| 02/05/2004 | US20040021476 Method and apparatus for testing semiconductor circuitry for operability and method of forming apparatus for testing semiconductor circuitry for operability |
| 02/05/2004 | US20040021473 Process for measuring depth of source and drain |
| 02/05/2004 | US20040021401 Method for producing crystal growth substrate and semiconductor light-emitting element |
| 02/05/2004 | US20040021374 Horizontal and vertical transportation system using permanent magnet excited transverse flux linear motors |
| 02/05/2004 | US20040021234 Semiconductor device and manufacturing method thereof |
| 02/05/2004 | US20040021233 Vertical conduction flip-chip device with bump contacts on single surface |
| 02/05/2004 | US20040021231 Semiconductor device and its manufacturing method |
| 02/05/2004 | US20040021228 Method for forming a memory integrated circuit |
| 02/05/2004 | US20040021227 Semiconductor device and method for fabricating the same |
| 02/05/2004 | US20040021226 Contact capping local interconnect |
| 02/05/2004 | US20040021225 Integrated circuits including insulating spacers that extend beneath a conductive line, and methods of fabricating same |
| 02/05/2004 | US20040021224 Enhancing the effects of reducing parasitic capacitance associated with a first-layer wiring pattern |
| 02/05/2004 | US20040021223 Semiconductor device and fabrication method thereof |
| 02/05/2004 | US20040021222 Semiconductor memory device and method for manufacturing the same |
| 02/05/2004 | US20040021221 Method of forming a pattern of a semiconductor device and photomask therefor |
| 02/05/2004 | US20040021218 Module component |
| 02/05/2004 | US20040021216 Semiconductor device |
| 02/05/2004 | US20040021208 Semiconductor integrated circuit |
| 02/05/2004 | US20040021207 Dual gauge lead frame |
| 02/05/2004 | US20040021206 Super self-aligned collector device for mono-and hetero bipolar junction transistors, and method of making same |
| 02/05/2004 | US20040021204 Heteroatom-containing diamondoid transistors |
| 02/05/2004 | US20040021203 Semiconductor power component and a method of producing same |
| 02/05/2004 | US20040021202 Super self-aligned collector device for mono-and hetero bipolar junction transistors and method of making same |
| 02/05/2004 | US20040021201 Apparatus and method for forming a battery in an integrated circuit |
| 02/05/2004 | US20040021200 Edge intensive antifuse and method for making the same |
| 02/05/2004 | US20040021199 Edge intensive antifuse device structure |
| 02/05/2004 | US20040021198 Isolating temperature sensitive components from heat sources in integrated circuits |
| 02/05/2004 | US20040021197 Integrated circuits having adjacent P-type doped regions having shallow trench isolation structures without liner layers therein therebetween |
| 02/05/2004 | US20040021196 Self-aligned vias in an integrated circuit structure |
| 02/05/2004 | US20040021195 Semiconductor device |
| 02/05/2004 | US20040021194 Semiconductor device for isolating a photodiode to reduce junction leakage and method of formation |
| 02/05/2004 | US20040021191 Electrostatic discharge protection of thin-film resonators |
| 02/05/2004 | US20040021190 Methods of forming magnetoresistive memory devices |
| 02/05/2004 | US20040021189 Magnetic memory device having yoke layer, and manufacturing method thereof |
| 02/05/2004 | US20040021188 Insulating cap layer and conductive cap layer for semiconductor devices with magnetic material layers |
| 02/05/2004 | US20040021187 Systems with high density packing of micromachines |
| 02/05/2004 | US20040021186 Used for an acceleration sensor; capable of reducing a stress difference generating between an oxide film on thermal shrinkage |
| 02/05/2004 | US20040021183 Wiring material and a semiconductor device having a wiring using the material, and the manufacturing method thereof |
| 02/05/2004 | US20040021180 Method to increase substrate potential in MOS transistors used in ESD protection circuits |
| 02/05/2004 | US20040021179 Metal oxide semiconductor transistors having a drain punch through blocking region and methods for fabricating metal oxide semiconductor transistors having a drain punch through blocking region |
| 02/05/2004 | US20040021177 Forming a silicon oxide film over a crystalline semiconductor film formed on insulating surface by applying high-frequency power in oxygen or oxygen and rare gas with sputtering using silicon as target; forming silicon nitride film |
| 02/05/2004 | US20040021176 Integrated circuit device and electronic device |
| 02/05/2004 | US20040021174 Vertical MOSFET reduced in cell size and method of producing the same |