| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/10/2004 | US6690012 Hybridized lead-salt infrared radiation detectors and methods of formation |
| 02/10/2004 | US6690010 Chemical analysis of defects using electron appearance spectroscopy |
| 02/10/2004 | US6690009 Method of determining the charge carrier concentration in materials, notably semiconductors |
| 02/10/2004 | US6690008 Probe and method of manufacturing mounted AFM probes |
| 02/10/2004 | US6689984 Susceptor with built-in electrode and manufacturing method therefor |
| 02/10/2004 | US6689930 Method and apparatus for cleaning an exhaust line in a semiconductor processing system |
| 02/10/2004 | US6689705 Synthetic quartz glass optical material and optical member |
| 02/10/2004 | US6689702 High dielectric constant metal oxide gate dielectrics |
| 02/10/2004 | US6689701 Method of forming a spin on glass film of a semiconductor device |
| 02/10/2004 | US6689700 Chemical fluid deposition method for the formation of metal and metal alloy films on patterned and unpatterned substrates |
| 02/10/2004 | US6689699 Wherein gas is introduced into a vacuum chamber for treating a substrate to be processed |
| 02/10/2004 | US6689698 Method for etching a silicided poly using fluorine-based reactive ion etching and sodium hydroxide based solution immersion |
| 02/10/2004 | US6689697 Method of forming uniformly planarized structure in a semiconductor wafer |
| 02/10/2004 | US6689696 Forming dielectric layer so as to provide an intrinsic etch rate which increases in the direction of thickness or depth of the dielectric layer; selectively etching to form a hole to contact a conductive area underneath; capacitors |
| 02/10/2004 | US6689695 Multi-purpose composite mask for dual damascene patterning |
| 02/10/2004 | US6689693 Methods for utilization of disappearing silicon hard mask for fabrication of semiconductor structures |
| 02/10/2004 | US6689692 Composition for oxide CMP |
| 02/10/2004 | US6689691 Method of simultaneously polishing a plurality of objects of a similar type, in particular silicon wafers, on a polishing installation |
| 02/10/2004 | US6689690 Semiconductor device manufacturing method of forming an etching stopper film on a diffusion prevention film at a higher temperature |
| 02/10/2004 | US6689689 Selective deposition process for allowing damascene-type Cu interconnect lines |
| 02/10/2004 | US6689688 Method and device using silicide contacts for semiconductor processing |
| 02/10/2004 | US6689687 Two-step process for nickel deposition |
| 02/10/2004 | US6689686 System and method for electroplating fine geometries |
| 02/10/2004 | US6689685 Process for forming a diffusion barrier material nitride film |
| 02/10/2004 | US6689684 Cu damascene interconnections using barrier/capping layer |
| 02/10/2004 | US6689683 Method of manufacturing a semiconductor device |
| 02/10/2004 | US6689682 Multilayer anti-reflective coating for semiconductor lithography |
| 02/10/2004 | US6689681 Semiconductor device and a method of manufacturing the same |
| 02/10/2004 | US6689680 Semiconductor device and method of formation |
| 02/10/2004 | US6689679 Semiconductor device having bumps |
| 02/10/2004 | US6689677 CMOS circuit of GaAs/Ge on Si substrate |
| 02/10/2004 | US6689676 Method for forming a semiconductor device structure in a semiconductor layer |
| 02/10/2004 | US6689675 Method for making a semiconductor device having a high-k gate dielectric |
| 02/10/2004 | US6689673 Method for forming a gate with metal silicide |
| 02/10/2004 | US6689672 Buried layer manufacturing method |
| 02/10/2004 | US6689671 Low temperature solid-phase epitaxy fabrication process for MOS devices built on strained semiconductor substrate |
| 02/10/2004 | US6689668 Methods to improve density and uniformity of hemispherical grain silicon layers |
| 02/10/2004 | US6689666 Replacing a first liner layer with a thicker oxide layer when forming a semiconductor device |
| 02/10/2004 | US6689665 Method of forming an STI feature while avoiding or reducing divot formation |
| 02/10/2004 | US6689664 Transistor fabrication method |
| 02/10/2004 | US6689663 Methods of code programming a mask ROM |
| 02/10/2004 | US6689662 Method of forming a high voltage power MOSFET having low on-resistance |
| 02/10/2004 | US6689661 Method for forming minimally spaced MRAM structures |
| 02/10/2004 | US6689660 4 F2 folded bit line DRAM cell structure having buried bit and word lines |
| 02/10/2004 | US6689659 Method of making semiconductor memory device having a floating gate with a rounded edge |
| 02/10/2004 | US6689658 Methods of fabricating a stack-gate flash memory array |
| 02/10/2004 | US6689657 Method of forming a capacitor |
| 02/10/2004 | US6689656 Dynamic random access memory and the method for fabricating thereof |
| 02/10/2004 | US6689655 Method for production process for the local interconnection level using a dielectric conducting pair on pair |
| 02/10/2004 | US6689654 Methods of manufacturing integrated circuit devices having reduced contact resistance between a substrate and a contact pad while maintaining separation of the substrate and the contact pad |
| 02/10/2004 | US6689653 Method of preserving the top oxide of an ONO dielectric layer via use of a capping material |
| 02/10/2004 | US6689652 Method of manufacturing a high electron mobility transistor |
| 02/10/2004 | US6689651 Laser processing method |
| 02/10/2004 | US6689650 Fin field effect transistor with self-aligned gate |
| 02/10/2004 | US6689649 Methods of forming transistors |
| 02/10/2004 | US6689648 Semiconductor device having silicon on insulator and fabricating method therefor |
| 02/10/2004 | US6689647 Forming an amorphous silicon thin-film on a glass substrate, crystallizing the amorphous silicon of the thin-film transistor according to a scanning method using a linear light beam |
| 02/10/2004 | US6689646 Plasma method for fabricating oxide thin films |
| 02/10/2004 | US6689645 Method of surface treatment on the improvement of electrical properties for doped silicon oxides (SiO2) films |
| 02/10/2004 | US6689643 Adjustable 3D capacitor |
| 02/10/2004 | US6689640 Chip scale pin array |
| 02/10/2004 | US6689639 Method of making semiconductor device |
| 02/10/2004 | US6689637 Method of manufacturing a multi-chip semiconductor package |
| 02/10/2004 | US6689635 Apparatus and method for face-to-face connection of a die to a substrate with polymer electrodes |
| 02/10/2004 | US6689633 Optical detector with a filter layer made of porous silicon and method for the production thereof |
| 02/10/2004 | US6689630 Method of forming an amorphous aluminum nitride emitter including a rare earth or transition metal element |
| 02/10/2004 | US6689629 Array substrate for display, method of manufacturing array substrate for display and display device using the array substrate |
| 02/10/2004 | US6689628 Method for dense pixel fabrication |
| 02/10/2004 | US6689627 Process for manufacturing micromechanical components in a semiconductor material wafer with reduction in the starting wafer thickness |
| 02/10/2004 | US6689625 Method for correcting a design data of a layout pattern of a photomask, photomask manufactured by said method, and semiconductor device method using said photomask |
| 02/10/2004 | US6689624 Method of forming self-aligned, trenchless mangetoresitive random-access memory (MRAM) structure with sidewall containment of MRAM structure |
| 02/10/2004 | US6689623 Method for forming a capacitor |
| 02/10/2004 | US6689622 Magnetoresistive memory or sensor devices having improved switching properties and method of fabrication |
| 02/10/2004 | US6689540 Polymeric backbone having grafted thereon at least one element selected from the group consisting of silicon, germanium, tin and mixtures thereof; and a protecting group. |
| 02/10/2004 | US6689538 Thermal mass transfer donor element |
| 02/10/2004 | US6689536 Transmittance of a chemically amplified resist against light of a wavelength shorter than a 180 nm band is improved when polymer includes a polyhydroxystyrene derivative having hexafluoroisopropyl alcohol on its side chain |
| 02/10/2004 | US6689535 A novalak resin crosslinking agent having hydroxyalkyl and/or alkoxyalkyl groups and an acidic compound; undercoatings; a rectangular cross-sectional profile without causing footing, undercutting, etc. at the bottom |
| 02/10/2004 | US6689529 Method for measuring diffusion of photogenerated catalyst in chemically amplified resists |
| 02/10/2004 | US6689521 Preventing plasma induced electrical charge damage |
| 02/10/2004 | US6689520 Exposure method for correcting dimension variation in electron beam lithography |
| 02/10/2004 | US6689519 Methods and systems for lithography process control |
| 02/10/2004 | US6689516 Cutting, flattening silicon oxyfluoride glass tube |
| 02/10/2004 | US6689492 Incorporating insulating film with blocking effect against heat, moisture and alkaline metals; high performance and reliability electroluminescence display device |
| 02/10/2004 | US6689419 Method for manufacturing semiconductor device |
| 02/10/2004 | US6689418 Apparatus for wafer rinse and clean and edge etching |
| 02/10/2004 | US6689412 Method for making connection balls on electronic circuits or components |
| 02/10/2004 | US6689283 Dry etching method, microfabrication process and dry etching mask |
| 02/10/2004 | US6689264 Semiconductor wafer clamp retainer |
| 02/10/2004 | US6689258 Electrochemically generated reactants for chemical mechanical planarization |
| 02/10/2004 | US6689257 Substrate processing apparatus and substrate plating apparatus |
| 02/10/2004 | US6689249 Shield or ring surrounding semiconductor workpiece in plasma chamber |
| 02/10/2004 | US6689245 Die bonding sheet sticking apparatus and method of sticking die bonding sheet |
| 02/10/2004 | US6689222 Sealable surface method and device |
| 02/10/2004 | US6689221 Cooling gas delivery system for a rotatable semiconductor substrate support assembly |
| 02/10/2004 | US6689220 Plasma enhanced pulsed layer deposition |
| 02/10/2004 | US6689216 Filling copper into recesses for interconnects formed on a semiconductor and removing a plating liquid remaining on the substrate-contacting portion with suction |
| 02/10/2004 | US6689215 Method and apparatus for mitigating cross-contamination between liquid dispensing jets in close proximity to a surface |
| 02/10/2004 | US6689211 Etch stop layer system |
| 02/10/2004 | US6689186 Silver-containing particles, method and apparatus of manufacture, silver-containing devices made therefrom |
| 02/10/2004 | US6688969 Method for planarizing a dielectric layer of a flash memory device |