| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/14/2004 | CA2436759A1 Method for modifying the impedance of semiconductor devices using a focused heating source |
| 02/14/2004 | CA2398166A1 Method for modifying the impedance of semiconductor devices using a focused heating source |
| 02/12/2004 | WO2004015779A1 Method of creating a high performance organic semiconductor device |
| 02/12/2004 | WO2004014114A1 Method for manufacturing board with built-in device and board with built-in device, and method for manufacturing printed wiring board and printed wiring board |
| 02/12/2004 | WO2004013928A1 Transmission line and semiconductor integrated circuit device |
| 02/12/2004 | WO2004013922A2 Organic electronic devices |
| 02/12/2004 | WO2004013919A1 Magnetoresistance effect element and magnetic memory unit |
| 02/12/2004 | WO2004013913A1 Thin film transistor array panel |
| 02/12/2004 | WO2004013912A1 Iii group nitride semiconductor substrate and method for preparation thereof, and iii group nitride semiconductor element and method for preparation thereof |
| 02/12/2004 | WO2004013908A1 Method of manufacturing multi-level contacts by sizing of contact sizes in integrated circuits |
| 02/12/2004 | WO2004013907A1 Dual damascene trench depth monitoring |
| 02/12/2004 | WO2004013906A1 Ozone processing apparatus |
| 02/12/2004 | WO2004013905A1 Etching method |
| 02/12/2004 | WO2004013904A1 Complementary division mask having alignment mark, method for forming alignment mark of the complementary division mask, semiconductor device manufactured by using the complementary division mask, and its manufacturing method |
| 02/12/2004 | WO2004013903A2 Wafer batch processing system and method |
| 02/12/2004 | WO2004013902A2 Hot plate annealing |
| 02/12/2004 | WO2004013901A2 Batch furnace |
| 02/12/2004 | WO2004013900A2 System and method for manufacturing embedded conformal electronics |
| 02/12/2004 | WO2004013867A2 An optical device for directing x-rays having a plurality of optical crystals |
| 02/12/2004 | WO2004013861A2 Magnetic element utilizing spin transfer and an mram device using the magnetic element |
| 02/12/2004 | WO2004013723A2 Model and parameter selection for optical metrology |
| 02/12/2004 | WO2004013715A1 Method, system, and medium for handling misrepresentative metrology data within an advanced process control system |
| 02/12/2004 | WO2004013698A1 High-density interconnection of temperature sensitive electronic devices |
| 02/12/2004 | WO2004013697A2 Micro-contact printing method |
| 02/12/2004 | WO2004013696A1 Pattern size correcting device and pattern size correcting method |
| 02/12/2004 | WO2004013695A1 Photomask |
| 02/12/2004 | WO2004013694A1 Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device |
| 02/12/2004 | WO2004013674A1 Method and system for correction of intrinsic birefringence in uv microlithography |
| 02/12/2004 | WO2004013656A2 Uniform thin films produced by magnetorheological finishing |
| 02/12/2004 | WO2004013381A2 Insoluble anode loop in copper electrodeposition cell for interconnect formation |
| 02/12/2004 | WO2004013375A1 Installation for the vacuum treatment of substrates |
| 02/12/2004 | WO2004013371A2 Method and apparatus for plasma implantation without deposition of a layer of byproduct |
| 02/12/2004 | WO2004013242A2 Polishing slurry system and metal poslishing and removal process |
| 02/12/2004 | WO2004013038A2 Etch stop control for mems device formation |
| 02/12/2004 | WO2004012996A1 Automatic refill system for ultra pure or contamination sensitive chemicals |
| 02/12/2004 | WO2004012896A1 Method and appartus for high volume assembly of radio frequency identification tags |
| 02/12/2004 | WO2004001841A3 Method and system for realtime critical dimention microloading control |
| 02/12/2004 | WO2004001797A9 Sensitized chemically amplified photoresist for use in photomask fabrication and semiconductor processing |
| 02/12/2004 | WO2003103041A3 Semiconductor device and method of manufacturing same |
| 02/12/2004 | WO2003100843A3 Etching gas and method for dry etching |
| 02/12/2004 | WO2003096234A3 Optimization of die placement on wafers |
| 02/12/2004 | WO2003095940A3 Compensation for geometric effects of beam misalignments in plane mirror interferometers |
| 02/12/2004 | WO2003094234A3 Component |
| 02/12/2004 | WO2003092337A3 Method and apparatus for shaping thin films in the near-edge regions of in-process semiconductor substrates |
| 02/12/2004 | WO2003090253A8 Single axis manipulator with controlled compliance |
| 02/12/2004 | WO2003088310A3 Substrate and method for producing a substrate |
| 02/12/2004 | WO2003086958A3 Method for producing a product having a structured surface |
| 02/12/2004 | WO2003085674A3 Synthetic-ferrimagnet sense-layer for high density mram applications |
| 02/12/2004 | WO2003077305B1 Method for making a semiconductor device by variable chemical mechanical polish downforce |
| 02/12/2004 | WO2003075319A3 Self-aligned transistor and diode topologies |
| 02/12/2004 | WO2003060977A3 Method for preventing undesirable etching of contact hole sidewalls in a preclean etching step |
| 02/12/2004 | WO2003052800B1 Semiconductor wafer carrier mapping sensor |
| 02/12/2004 | WO2003050615A3 Photomask and method for qualifying the same with a prototype specification |
| 02/12/2004 | WO2003049156A3 System and method for micro electro mechanical etching |
| 02/12/2004 | WO2003046977A3 Insulation trench for an integrated circuit and method for production thereof |
| 02/12/2004 | WO2003041157A3 Large area silicon carbide devices and manufacturing methods therefor |
| 02/12/2004 | WO2003030254A3 Process for assembling systems and structure thus obtained |
| 02/12/2004 | WO2003030220A3 Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands |
| 02/12/2004 | WO2003029515A3 Formation of composite tungsten films |
| 02/12/2004 | WO2003026001A3 Integrated equipment set for forming an interconnect on a substrate |
| 02/12/2004 | WO2003003470A3 Field effect transistor and method for the production thereof |
| 02/12/2004 | WO2002099881A3 Heatsink assembly and method of manufacturing the same |
| 02/12/2004 | WO2002091190A3 Memory with a bit line block and/or a word line block for preventing reverse engineering |
| 02/12/2004 | WO2002076666A3 A laser machining system and method |
| 02/12/2004 | WO2002075808A3 Self-aligned mram contact and method of fabrication |
| 02/12/2004 | WO2002062680A9 Conveyorized storage and transportation system |
| 02/12/2004 | US20040031011 Method for designing interconnects in an LSI |
| 02/12/2004 | US20040031010 Wire layout design apparatus and method for integrated circuits |
| 02/12/2004 | US20040031007 Automatic placement and routing apparatus automatically inserting a capacitive cell |
| 02/12/2004 | US20040031006 Layout data saving method, layout data converting device and graphic verifying device |
| 02/12/2004 | US20040031005 Electronic cad system and layout data producing method therefor |
| 02/12/2004 | US20040031004 Semiconductor integrated circuit device and fabrication method thereof |
| 02/12/2004 | US20040030999 Method and system for debugging using replicated logic |
| 02/12/2004 | US20040030978 Semiconductor integrated circuit device having operation test function |
| 02/12/2004 | US20040030517 Descriptor for identifying a defective die site and methods of formation |
| 02/12/2004 | US20040030437 Process recipe modification in an integrated circuit fabrication apparatus |
| 02/12/2004 | US20040030430 Waferless metrology recipe generator and generating method |
| 02/12/2004 | US20040030079 Radiation transparent; bonding strength; lithography |
| 02/12/2004 | US20040029992 Mixture of polymer and filler |
| 02/12/2004 | US20040029753 Resist stripping liquid containing fluorine compound |
| 02/12/2004 | US20040029495 Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same |
| 02/12/2004 | US20040029494 Post-CMP cleaning of semiconductor wafer surfaces using a combination of aqueous and CO2 based cryogenic cleaning techniques |
| 02/12/2004 | US20040029493 Uniform thin films produced by magnetorheological finishing |
| 02/12/2004 | US20040029483 Electroluminescent display device manufacturing method |
| 02/12/2004 | US20040029413 Film material comprising spikes and method for the production thereof |
| 02/12/2004 | US20040029404 High performance system-on-chip passive device using post passivation process |
| 02/12/2004 | US20040029403 Method of fabricating annealed wafer |
| 02/12/2004 | US20040029402 Use of linear injectors to deposit uniform selective ozone TEOS oxide film by pulsing reactants on and off |
| 02/12/2004 | US20040029401 Organic insulating film forming method, semiconductor device manufacture method, and TFT substrate manufacture method |
| 02/12/2004 | US20040029400 Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition |
| 02/12/2004 | US20040029399 Dielectric device and method of manufacturing dielectric device |
| 02/12/2004 | US20040029398 Methods of forming gate oxide films in integrated circuit devices using wet or dry oxidization processes with reduced chloride |
| 02/12/2004 | US20040029397 Method for fabricating semiconductor device |
| 02/12/2004 | US20040029394 Method and structure for preventing wafer edge defocus |
| 02/12/2004 | US20040029393 Method for removal of residue from a magneto-resistive random access memory (MRAM) film stack using a sacrificial mask layer |
| 02/12/2004 | US20040029392 Methods using a peroxide-generating compound to remove group VIII metal-containing residue |
| 02/12/2004 | US20040029391 Method for improving a physical property defect value of a gate dielectric |
| 02/12/2004 | US20040029390 Method for evaluating a crystalline semiconductor substrate |
| 02/12/2004 | US20040029389 Method of forming shallow trench isolation structure with self-aligned floating gate |
| 02/12/2004 | US20040029388 Method and apparatus for dissolving a gas into a liquid for single wet wafer processing |