Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2004
05/27/2004WO2004044992A1 Double gate semiconductor device having separate gates
05/27/2004WO2004044991A1 Thin film transistor array panel and manufacturing method thereof
05/27/2004WO2004044990A1 One transistor dram cell structure and method for forming
05/27/2004WO2004044989A1 Grounded gate and isolation techniques for reducing dark current in cmos image sensors
05/27/2004WO2004044983A1 Semiconductor device and method therefor
05/27/2004WO2004044981A1 Semiconductor integrated device and method for manufacturing same
05/27/2004WO2004044980A2 Hermetically encapsulated component and waferscale method for the production thereof
05/27/2004WO2004044979A1 Side wall passivation films for damascene cu/low k electronic devices
05/27/2004WO2004044978A1 Reliable low-k interconnect structure with hybrid dielectric
05/27/2004WO2004044977A1 Semiconductor device channel termination
05/27/2004WO2004044976A1 Method for forming a brittle zone in a substrate by co-implantation
05/27/2004WO2004044975A1 Semiconductor structure, and methods for fabricating same
05/27/2004WO2004044974A2 Method and apparatus employing integrated metrology for improved dielectric etch efficiency
05/27/2004WO2004044973A1 Planarizing gate material to improve gate critical dimension in semiconductor devices
05/27/2004WO2004044972A1 Composition for porous film formation, porous films, process for production of the films, interlayer dielectrics, and semiconductor devices
05/27/2004WO2004044971A1 Method and device for polishing plasma chamber cathode holes
05/27/2004WO2004044969A1 Valve unit and heat treatment system
05/27/2004WO2004044968A1 Exposure device, exposure method, and semiconductor device manufacturing method
05/27/2004WO2004044967A1 Method for manufacturing transfer mask substrate, transfer mask substrate, and transfer mask
05/27/2004WO2004044965A2 Method of producing semiconductor device
05/27/2004WO2004044964A1 Advanced mask cleaning and handling
05/27/2004WO2004044963A2 Atomic layer deposition methods
05/27/2004WO2004044962A1 Forced convection assisted rapid thermal furnace
05/27/2004WO2004044961A1 Apparatus and method for reducing stray light in substrate processing chambers
05/27/2004WO2004044960A2 Thermal interface composite structure and method of making same
05/27/2004WO2004044958A2 Composition and method for low temperature deposition of silicon-containing films
05/27/2004WO2004044956A2 Rear interconnect blade for rack mounted systems
05/27/2004WO2004044954A2 Gcib processing of integrated circuit interconnect structures
05/27/2004WO2004044953A2 High pressure compatible vacuum check for semiconductor wafer including lift mechanism
05/27/2004WO2004044921A2 Nonvolatile memory array using unified cell structure in divided-well allowing write operation with no disturb
05/27/2004WO2004044918A1 Semiconductor storage device
05/27/2004WO2004044917A2 A combination nonvolatile memory using unified technology with byte, page and block write and simultaneous read and write operations
05/27/2004WO2004044898A2 Nitridation of high-k dielectrics
05/27/2004WO2004044660A2 Probability constrained optimization for electrical fabrication control
05/27/2004WO2004044655A1 Method for the bulk machining of fluoropolymer substrates
05/27/2004WO2004044596A2 Defect analyzer
05/27/2004WO2004044500A1 Gas heating method and gas heating device
05/27/2004WO2004044273A1 Electropolishing system and process
05/27/2004WO2004044263A1 Device for carrying out a surface treatment of substrates under vacuum
05/27/2004WO2004044092A1 Fluorinated surfactants for aqueous acid etch solutions
05/27/2004WO2004044091A1 Fluorinated surfactants for buffered acid etch solutions
05/27/2004WO2004044081A1 Organic acid containing compositions and methods for use thereof
05/27/2004WO2004044076A1 A slurry composition and a polishing method using the same
05/27/2004WO2004044075A2 Copper chemical mechanical polishing solutions using sulfonated amphiprotic agents
05/27/2004WO2004044074A1 Composition for porous film formation, porous film, process for producing the same, interlayer insulation film and semiconductor device
05/27/2004WO2004044073A1 Composition for porous film formation, porous film, process for producing the same, interlayer insulation film and semiconductor device
05/27/2004WO2004044072A1 Composition for porous film formation, porous film, process for producing the same, interlayer insulation film and semiconductor device
05/27/2004WO2004044053A1 Toughened epoxy/polyanhydride no- flow underfill encapsulant composition
05/27/2004WO2004043850A2 An integrated structure and method for fabricating the same
05/27/2004WO2004043673A1 Resin seal device
05/27/2004WO2004043653A1 Device for correcting reference position for transfer mechanism, and correction method
05/27/2004WO2004043648A1 Polishing apparatus
05/27/2004WO2004038783A3 Pecvd of organosilicate thin films
05/27/2004WO2004034476A3 Flip chip imaging sensor
05/27/2004WO2004034468A9 Flash memory array with increased coupling between floating and control gates
05/27/2004WO2004033158A3 Substrate handling system for aligning and orienting substrates during a transfer operation
05/27/2004WO2004030029A3 Conducting polymer devices for inter-converting light and electricity
05/27/2004WO2004026531A3 Device and method for connecting objects
05/27/2004WO2004019373A3 Nanocrystal electron device
05/27/2004WO2004017071A3 Method for joining surfaces, semiconductor with joined surfaces, bio-chip and bio-sensor
05/27/2004WO2004009861A8 Method to form ultra high quality silicon-containing compound layers
05/27/2004WO2004009299B1 Loading and unloading device for a coating unit
05/27/2004WO2004008816A8 Method and device for substrate etching with very high power inductively coupled plasma
05/27/2004WO2004008503A9 Workpiece chuck with temperature control assembly having spacers between layers providing clearance for thermoelectric modules
05/27/2004WO2004008496A3 Non-oriented optical character recognition of a wafer mark
05/27/2004WO2004008493A3 Method and apparatus for supporting semiconductor wafers
05/27/2004WO2004007793A3 Method and apparatus for providing gas to a processing chamber
05/27/2004WO2004006315A3 Semiconductor capacitor and mosfet fitted therewith
05/27/2004WO2004006306A3 Method for controlling the extent of notch or undercut in an etched profile using optical reflectometry
05/27/2004WO2004006300B1 Organic contact-enhancing layer for organic field effect transistors
05/27/2004WO2004001808A3 Method and system for atomic layer removal and atomic layer exchange
05/27/2004WO2003100823A3 Control of contact resistance in quantum well intermixed devices
05/27/2004WO2003098706A3 Method for fixing a semiconductor chip in a plastic housing body, optoelectronic semiconductor component
05/27/2004WO2003094200A3 Low voltage high density trench-gated power device with uniformly doped channel and its edge termination technique
05/27/2004WO2003088340A3 Method for the production of structured layers on substrates
05/27/2004WO2003087431B1 Deposition methods utilizing phased array microwave excitation, and deposition apparatuses
05/27/2004WO2003076891A3 Moiré method and measuring system for measuring the distortion of an optical imaging system
05/27/2004WO2003069658B1 Strained si based layer made by uhv-cvd, and devices therein
05/27/2004WO2003062139A3 Activation effect on carbon nanotubes
05/27/2004WO2003049178A3 Semiconductor power device metal structure and method of formation
05/27/2004WO2003042072A8 A bag
05/27/2004WO2003041154A3 A method of manufacturing a plurality of assemblies
05/27/2004WO2003036387A3 Method of forming a pattern of sub-micron broad features
05/27/2004WO2003034500A3 Trench-gate semiconductor devices and their manufacture
05/27/2004WO2003030214A3 Method of manufacturing an integrated circuit, integrated circuit obtained in accordance with said method, wafer provided with an integrated circuit obtained in accordance with the method, and system comprising an integrated circuit obtained by means of the method
05/27/2004WO2003023863A3 Trench-gate semiconductor devices and their manufacture
05/27/2004WO2003023820A8 Boat for ball attach manufacturing process and method of fabricating reliable flip-chip assembly
05/27/2004WO2003015152A3 Method of manufacturing a semiconductor non-volatile memory
05/27/2004WO2003001584A8 A non-self-aligned sige heterojunction bipolar transistor
05/27/2004WO2002101784B1 Plasma processor
05/27/2004WO2002097145B1 Compositions, methods and devices for high temperature lead-free solder
05/27/2004WO2002046975A9 Routing method and apparatus
05/27/2004WO2000066969A3 Interferometry system having a dynamic beam-steering assembly for measuring angle and distance
05/27/2004US20040103388 First approximation for OPC significant speed-up
05/27/2004US20040103385 Method of ITO layout to make IC bear the high-volt electrostatic discharge
05/27/2004US20040103384 Parasitic element extraction apparatus
05/27/2004US20040103382 Master slice semiconductor integrated circuit
05/27/2004US20040103357 Semiconductor testing device
05/27/2004US20040103353 Failure analysis method
05/27/2004US20040102912 Automatic calibration of a masking process simulator