Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2004
06/01/2004US6743697 Thin silicon circuits and method for making the same
06/01/2004US6743696 Apparatus and method for leadless packaging of semiconductor devices
06/01/2004US6743695 Shallow trench isolation method and method for manufacturing non-volatile memory device using the same
06/01/2004US6743694 Method of wafer marking for multi-layer metal processes
06/01/2004US6743693 Method of manufacturing semiconductor memory
06/01/2004US6743692 Semiconductor device manufacturing method
06/01/2004US6743691 Semiconductor device and method for fabricating the same
06/01/2004US6743690 Method of forming a metal-oxide semiconductor transistor
06/01/2004US6743689 Method of fabrication SOI devices with accurately defined monocrystalline source/drain extensions
06/01/2004US6743688 High performance MOSFET with modulated channel gate thickness
06/01/2004US6743687 Abrupt source/drain extensions for CMOS transistors
06/01/2004US6743686 Sacrificial polysilicon sidewall process and rapid thermal spike annealing for advance CMOS fabrication
06/01/2004US6743685 Semiconductor device and method for lowering miller capacitance for high-speed microprocessors
06/01/2004US6743684 Method to produce localized halo for MOS transistor
06/01/2004US6743683 Polysilicon opening polish
06/01/2004US6743682 Method of manufacturing a semiconductor device
06/01/2004US6743681 Methods of Fabricating Gate and Storage Dielectric Stacks having Silicon-Rich-Nitride
06/01/2004US6743680 Process for manufacturing transistors having silicon/germanium channel regions
06/01/2004US6743679 Integrated circuit devices with high and low voltage components and processes for manufacturing these devices
06/01/2004US6743678 Methods for manufacturing semiconductor memory devices
06/01/2004US6743677 Method for fabricating nitride memory cells using a floating gate fabrication process
06/01/2004US6743676 Method of forming a floating gate in a flash memory device
06/01/2004US6743675 Floating gate memory fabrication methods comprising a field dielectric etch with a horizontal etch component
06/01/2004US6743674 Method of forming a semiconductor array of floating gate memory cells and strap regions, and a memory array and strap regions made thereby
06/01/2004US6743673 Semiconductor integrated circuitry and method for manufacturing the circuitry
06/01/2004US6743672 Method for manufacturing a capacitor
06/01/2004US6743671 Metal-on-metal capacitor with conductive plate for preventing parasitic capacitance and method of making the same
06/01/2004US6743670 High dielectric constant materials forming components of DRAM such as deep-trench capacitors and gate dielectric (insulators) for support circuits
06/01/2004US6743669 Method of reducing leakage using Si3N4 or SiON block dielectric films
06/01/2004US6743668 Process for forming a metal oxy-nitride dielectric layer by varying the flow rate of nitrogen into the chamber
06/01/2004US6743667 Method of manufacturing an active matrix type device
06/01/2004US6743666 Selective thickening of the source-drain and gate areas of field effect transistors
06/01/2004US6743665 Method for forming isolation layer in semiconductor device
06/01/2004US6743663 Method for producing a hybrid frame or hybrid housing and corresponding hybrid frame or hybrid housing
06/01/2004US6743662 Silicon-on-insulator wafer for RF integrated circuit
06/01/2004US6743661 Method of fabricating an integrated circuit package utilizing an interposer surrounded by a flexible dielectric material with conductive posts
06/01/2004US6743660 Method of making a wafer level chip scale package
06/01/2004US6743659 Method for manufacturing multi-layer package substrates
06/01/2004US6743656 MEMS wafer level package
06/01/2004US6743651 Method of forming a SiGe-on-insulator substrate using separation by implantation of oxygen
06/01/2004US6743650 Method of manufacturing an electro-optical device
06/01/2004US6743649 Semiconductor device and manufacturing method thereof
06/01/2004US6743648 Method for fabricating a set of distributed feedback semiconductor lasers
06/01/2004US6743647 Semiconductor memory device manufacturing method
06/01/2004US6743646 Balancing planarization of layers and the effect of underlying structure on the metrology signal
06/01/2004US6743645 Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor device
06/01/2004US6743644 Method of making a metallization line layout
06/01/2004US6743643 Stacked memory cell having diffusion barriers
06/01/2004US6743641 Method of improving surface planarity prior to MRAM bit material deposition
06/01/2004US6743565 Positive resist composition with (bis-tri fluoromethyl) methyl substituted styrene
06/01/2004US6743563 Photoresist compositions
06/01/2004US6743562 Positive photoresist composition
06/01/2004US6743554 Photomask for aberration measurement, aberration measurement method unit for aberration measurement and manufacturing method for device
06/01/2004US6743553 Which can enhance a resolution of a transfer pattern by utilizing an interference action caused to occur among light waves in a phase shifter
06/01/2004US6743499 Metal filling method and member with filled metal sections
06/01/2004US6743495 Thermal annealing process for producing silicon wafers with improved surface characteristics
06/01/2004US6743476 Method for producing indium tin oxide film
06/01/2004US6743474 High purity and low porosity, which may be more effective as barrier layers.
06/01/2004US6743473 Semiconductor devices, method for depositing metal and metal nitride layers by chemical vapor deposition of a precursor, cyclopentaidenely complex
06/01/2004US6743471 Preparing a porous interlayer insulating film having low dielectric constant containing pores with a size of a few nanometers or less.
06/01/2004US6743395 Composite metallic ultrafine particles and process for producing the same
06/01/2004US6743389 Resin molding machine and method of resin molding
06/01/2004US6743368 Nano-size imprinting stamp using spacer technique
06/01/2004US6743331 Component bonder and bonding tool
06/01/2004US6743329 Sealing mechanism of multi-chamber load-locking device
06/01/2004US6743316 Multilayered ceramic substrate and production method therefor
06/01/2004US6743310 Method of forming nitride capped Cu lines with improved adhesion and reduced electromigration along the Cu/nitride interface
06/01/2004US6743297 For processing a substrate to be processed, such as semiconductor wafer, by using liquid, for example, chemical liquid, pure water, etc.
06/01/2004US6743296 Apparatus and method for self-centering a wafer in a sputter chamber
06/01/2004US6743293 Cruicible and growth method for polycrystal silicon using same
06/01/2004US6743292 Biaxial molecular orientation
06/01/2004US6743289 Thermal annealing process for producing low defect density single crystal silicon
06/01/2004US6743268 Acidic slurry of an oxidizer, deionized water, a corrosion inhibitor and a surfactant
06/01/2004US6743267 Boron surface-modified colloids
06/01/2004US6743078 Methods, apparatus and slurries for chemical mechanical planarization
06/01/2004US6743076 Dicing machine
06/01/2004US6743075 Method for determining chemical mechanical polishing time
06/01/2004US6743069 Facilitating the spread of encapsulant between surfaces of electronic devices
06/01/2004US6743033 Contactor for semiconductor device and contact method
06/01/2004US6742993 Method and apparatus for dispensing fluids
06/01/2004US6742981 IC handler
06/01/2004US6742980 Method for aligning conveying position of object processing system, and object processing system
06/01/2004US6742978 Wafer indexing device
06/01/2004US6742977 Substrate processing device, substrate conveying device, and substrate processing method
06/01/2004US6742944 Alkaline solution and manufacturing method, and alkaline solution applied to pattern forming method, resist film removing method, solution application method, substrate treatment method, solution supply method, and semiconductor device manufacturing method
06/01/2004US6742884 Apparatus for printing etch masks using phase-change materials
06/01/2004US6742762 Display device having a pixel portion
06/01/2004US6742701 Bump forming method, presoldering treatment method, soldering method, bump forming apparatus, presoldering treatment device and soldering apparatus
06/01/2004US6742695 Soldering machine for tape carrier package outer leads
06/01/2004US6742581 Heat sink and fin module
06/01/2004US6742561 Apparatus for die bonding
06/01/2004US6742532 Cleaning container and method for cleaning LP furnace thermocouple sleeves
06/01/2004US6742530 Semi-aqueous solvent cleaning of paste processing residue from substrates
06/01/2004US6742393 Vibration control apparatus, vibration control method, exposure apparatus, and device manufacturing method
06/01/2004US6742281 Apparatus for drying semiconductor wafer using vapor dry method
06/01/2004US6742279 Apparatus and method for rinsing substrates
06/01/2004US6742249 Method of manufacture of ceramic composite wiring structures for semiconductor devices
05/2004
05/27/2004WO2004045262A1 Multi-layer circuit assembly and process for preparing the same
05/27/2004WO2004045002A1 Organic light emitting materials and devices
05/27/2004WO2004044994A2 Monolithically integrated vertical pin photodiode used in bicmos technology