| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/08/2004 | US6746959 Liquid crystal display and method |
| 06/08/2004 | US6746958 Method of controlling the duration of an endpoint polishing process in a multistage polishing process |
| 06/08/2004 | US6746957 Manufacture of semiconductor device with copper wiring |
| 06/08/2004 | US6746956 Hermetic seal for silicon die with metal feed through structure |
| 06/08/2004 | US6746955 Method of manufacturing a semiconductor device including a heat treatment procedure |
| 06/08/2004 | US6746954 Method of reworking tungsten particle contaminated semiconductor wafers |
| 06/08/2004 | US6746953 Method of forming backside bus vias |
| 06/08/2004 | US6746952 Borane doped titanium nitride |
| 06/08/2004 | US6746951 Bond pad of semiconductor device and method of fabricating the same |
| 06/08/2004 | US6746950 Low temperature aluminum planarization process |
| 06/08/2004 | US6746949 A stronger mechanical connection between a semiconductor device and the device package by adding one or more bumps to the gate connection without adding more gate pad area; added bumps are not electrically connected to either the |
| 06/08/2004 | US6746947 Post-fuse blow corrosion prevention structure for copper fuses |
| 06/08/2004 | US6746945 Method of forming a via hole in a semiconductor device |
| 06/08/2004 | US6746944 Low nisi/si interface contact resistance with preamorphizing and laser thermal annealing |
| 06/08/2004 | US6746943 Semiconductor device and method of fabricating the same |
| 06/08/2004 | US6746942 Semiconductor thin film and method of fabricating semiconductor thin film, apparatus for fabricating single crystal semiconductor thin film, and method of fabricating single crystal thin film, single crystal thin film substrate, and semiconductor device |
| 06/08/2004 | US6746941 Semiconductor wafer and production method therefor |
| 06/08/2004 | US6746940 Integrated structure comprising a patterned feature substantially of single grain polysilicon |
| 06/08/2004 | US6746939 Production method for solid imaging device |
| 06/08/2004 | US6746938 Manufacturing method for semiconductor device using photo sensitive polyimide etching mask to form viaholes |
| 06/08/2004 | US6746936 Method for forming isolation film for semiconductor devices |
| 06/08/2004 | US6746935 MOS transistor in an integrated circuit and active area forming method |
| 06/08/2004 | US6746934 Atomic layer doping apparatus and method |
| 06/08/2004 | US6746933 Pitcher-shaped active area for field effect transistor and method of forming same |
| 06/08/2004 | US6746932 Method of reducing the thickness of a silicon substrate |
| 06/08/2004 | US6746931 Capacitor for semiconductor memory device and method of manufacturing the same |
| 06/08/2004 | US6746930 Oxygen barrier for cell container process |
| 06/08/2004 | US6746929 Semiconductor device having capacitor and method of manufacturing the same |
| 06/08/2004 | US6746928 Method for opening a semiconductor region for fabricating an HBT |
| 06/08/2004 | US6746927 Semiconductor device having a polysilicon line structure with increased metal silicide portions and method for forming the polysilicon line structure of a semiconductor device |
| 06/08/2004 | US6746926 MOS transistor with highly localized super halo implant |
| 06/08/2004 | US6746925 High-k dielectric bird's beak optimizations using in-situ O2 plasma oxidation |
| 06/08/2004 | US6746924 Method of forming asymmetric extension mosfet using a drain side spacer |
| 06/08/2004 | US6746923 Method of fabricating a vertical quadruple conduction channel insulated gate transistor |
| 06/08/2004 | US6746922 Method and composite for decreasing charge leakage |
| 06/08/2004 | US6746921 Method of forming an array of FLASH field effect transistors and circuitry peripheral to such array |
| 06/08/2004 | US6746920 Fabrication method of flash memory device with L-shaped floating gate |
| 06/08/2004 | US6746918 Methods of fabbricating a stack-gate non-volatile memory device and its contactless memory arrays |
| 06/08/2004 | US6746917 Semiconductor processing methods of forming a plurality of capacitors on a substrate, bit line contacts and method of forming bit line contacts |
| 06/08/2004 | US6746916 Method for forming a multilayer electrode for a ferroelectric capacitor |
| 06/08/2004 | US6746915 Stack-type DRAM memory structure and its manufacturing method |
| 06/08/2004 | US6746914 Metal sandwich structure for MIM capacitor onto dual damascene |
| 06/08/2004 | US6746913 Method of manufacturing semiconductor integrated circuit device comprising a memory cell and a capacitor |
| 06/08/2004 | US6746912 MIM capacitor and manufacturing method therefor |
| 06/08/2004 | US6746911 Miniaturization; multilayer stacks; heat treatment to connect elements |
| 06/08/2004 | US6746909 Transistor, semiconductor device and manufacturing method of semiconductor device |
| 06/08/2004 | US6746908 Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device |
| 06/08/2004 | US6746906 Transistor with ultra-short gate feature and method of fabricating the same |
| 06/08/2004 | US6746905 Thin film transistor and manufacturing process therefor |
| 06/08/2004 | US6746904 Electronic devices comprising thin film transistors |
| 06/08/2004 | US6746903 Method for forming crystalline semiconductor layers, a method for fabricating thin film transistors, and a method for fabricating solar cells and active matrix liquid crystal devices |
| 06/08/2004 | US6746902 Method to form relaxed sige layer with high ge content |
| 06/08/2004 | US6746901 Semiconductor device and method of fabricating thereof |
| 06/08/2004 | US6746900 Method for forming a semiconductor device having high-K gate dielectric material |
| 06/08/2004 | US6746898 Integrated chip package structure using silicon substrate and method of manufacturing the same |
| 06/08/2004 | US6746897 Fabrication process of semiconductor package and semiconductor package |
| 06/08/2004 | US6746896 Process and material for low-cost flip-chip solder interconnect structures |
| 06/08/2004 | US6746895 Method for encapsulating a multi-chip substrate array |
| 06/08/2004 | US6746894 Ball grid array interposer, packages and methods |
| 06/08/2004 | US6746893 Transistor with variable electron affinity gate and methods of fabrication and use |
| 06/08/2004 | US6746891 Trilayered beam MEMS device and related methods |
| 06/08/2004 | US6746888 Display and fabricating method thereof |
| 06/08/2004 | US6746887 Method of preventing a data pad of an array substrate from overetching |
| 06/08/2004 | US6746881 Method and device for controlling the thickness of a layer of an integrated circuit in real time |
| 06/08/2004 | US6746880 Method for making electrical contact with a rear side of a semiconductor substrate during its processing |
| 06/08/2004 | US6746879 Guard filter methodology and automation system to avoid scrap due to reticle errors |
| 06/08/2004 | US6746878 Semiconductor device and method of manufacturing the same |
| 06/08/2004 | US6746877 Encapsulation of ferroelectric capacitors |
| 06/08/2004 | US6746876 Capacitor manufacturing method having dielectric formed before electrode |
| 06/08/2004 | US6746875 Magnetic memory and method of its manufacture |
| 06/08/2004 | US6746826 Method for an improved developing process in wafer photolithography |
| 06/08/2004 | US6746822 Use of surface coupling agent to improve adhesion |
| 06/08/2004 | US6746821 Polymer with molecular groups convertible into alkali soluble groups at a given temperature by acid-catalyzed cleavage reactions; allowing base to diffuse into the photoresist layer and heating; greater steepness and less roughness |
| 06/08/2004 | US6746819 Article comprising photostructurable polyimide or polyimide mixture for adhesive layer with thickness of <1 mu m between photostructurable epoxy resin and metal or silicon |
| 06/08/2004 | US6746818 (Meth)acrylates having lactone structure, polymers, photoresist compositions and patterning process |
| 06/08/2004 | US6746813 Negative resist composition |
| 06/08/2004 | US6746806 Lithography mask blank and method of manufacturing the same |
| 06/08/2004 | US6746777 Substrate including base supporting interfacial bonding layer and thin film adaptive crystalline layer which can expand or contract its lattice constant along direction parallel to substrate surface when bonding layer is in liquid-like form |
| 06/08/2004 | US6746726 Method for forming film |
| 06/08/2004 | US6746722 Fluorine-containing phenylmaleimide derivative, polymer, chemically amplified resist composition, and method for pattern formation using the composition |
| 06/08/2004 | US6746714 Pyrolysis of polysilazane-aluminum polymer |
| 06/08/2004 | US6746616 Method and apparatus for providing etch uniformity using zoned temperature control |
| 06/08/2004 | US6746615 Methods of achieving selective etching |
| 06/08/2004 | US6746591 ECP gap fill by modulating the voltate on the seed layer to increase copper concentration inside feature |
| 06/08/2004 | US6746589 Plating method and plating apparatus |
| 06/08/2004 | US6746565 Semiconductor processor with wafer face protection |
| 06/08/2004 | US6746559 Method and apparatus for separating composite member using fluid |
| 06/08/2004 | US6746544 Simultaneously rinsing and drying a semiconductor substrate by the marongoni drying effect |
| 06/08/2004 | US6746543 Cleaning bath; drying enclosure; sliding door closure |
| 06/08/2004 | US6746540 Wafer support plate assembly having recessed upper pad and vacuum processing apparatus comprising the same |
| 06/08/2004 | US6746539 Scanning deposition head for depositing particles on a wafer |
| 06/08/2004 | US6746319 Measuring apparatus |
| 06/08/2004 | US6746318 Workpiece carrier with adjustable pressure zones and barriers |
| 06/08/2004 | US6746317 Methods and apparatuses for making and using planarizing pads for mechanical and chemical mechanical planarization of microelectronic substrates |
| 06/08/2004 | US6746316 Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads |
| 06/08/2004 | US6746314 Nitride CMP slurry having selectivity to nitride |
| 06/08/2004 | US6746312 Polishing method and polishing apparatus |
| 06/08/2004 | US6746310 Uniform thin films produced by magnetorheological finishing |
| 06/08/2004 | US6746309 Generating block from silicon particles collected during waste water treatment; melting for recycling |
| 06/08/2004 | US6746308 Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing same |