| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/03/2004 | US20040106363 Substrate processing apparatus |
| 06/03/2004 | US20040106355 High selectivity slurry delivery system |
| 06/03/2004 | US20040106335 Semiconductor device and method of manufacturing the same |
| 06/03/2004 | US20040106334 Microparticle arrangement film, electrical connection film, electrical connection structure, and microparticle arrangement method |
| 06/03/2004 | US20040106303 Method for minimizing slip line faults on a semiconductor wafer surface |
| 06/03/2004 | US20040106302 Method for forming PE-TEOS layer of semiconductor integrated circuit device |
| 06/03/2004 | US20040106301 Film lamination apparatus and method and a manufacturing method of a semiconductor apparatus |
| 06/03/2004 | US20040106300 Soft-landing etching method using doping level control |
| 06/03/2004 | US20040106299 Sacrificial self-aligned interconnect structure and method of making |
| 06/03/2004 | US20040106298 Development apparatus for manufacturing semiconductor device |
| 06/03/2004 | US20040106297 Etching method, semiconductor and fabricating method for the same |
| 06/03/2004 | US20040106296 Method of removing silicon oxide from a surface of a substrate |
| 06/03/2004 | US20040106295 CMP assisted liftoff micropatterning |
| 06/03/2004 | US20040106294 Side-bonding method of flip-chip semiconductor device, MEMS device package and package method using the same |
| 06/03/2004 | US20040106293 Method for etching organic insulating film and dual damasene process |
| 06/03/2004 | US20040106292 Method of manufacturing a semiconductor integrated circuit device and a semiconductor integrated circuit device |
| 06/03/2004 | US20040106290 Process for forming a buried cavity in a semiconductor material wafer and a buried cavity |
| 06/03/2004 | US20040106289 Method for manufacturing semiconductor integrated circuit device |
| 06/03/2004 | US20040106288 Method for manufacturing circuit devices |
| 06/03/2004 | US20040106287 Method for making a semiconductor device having a high-k gate dielectric |
| 06/03/2004 | US20040106286 Method of etching uniform silicon layer |
| 06/03/2004 | US20040106284 Signal layer for generating characteristic optical plasma emissions |
| 06/03/2004 | US20040106283 Comparison of chemical-mechanical polishing processes |
| 06/03/2004 | US20040106282 Method for forming silicide at source and drain |
| 06/03/2004 | US20040106281 Re-oxidation process of semiconductor device |
| 06/03/2004 | US20040106280 Bitline structure for DRAM and method of forming the same |
| 06/03/2004 | US20040106279 Method and system for eliminating extrusions in semiconductor vias |
| 06/03/2004 | US20040106278 Method of eliminating photoresist poisoning in damascene applications |
| 06/03/2004 | US20040106277 Integrated process flow to improve copper filling in a damascene structure |
| 06/03/2004 | US20040106276 Method and structure for reducing contact aspect ratios |
| 06/03/2004 | US20040106275 Method of manufacturing an electronic device |
| 06/03/2004 | US20040106274 Gate structure with independently tailored vertical doping profile |
| 06/03/2004 | US20040106272 Method of manufacturing a semiconductor device |
| 06/03/2004 | US20040106271 Processing method of forming MRAM circuitry |
| 06/03/2004 | US20040106270 Method for constructing a metal oxide semiconductor field effect transistor |
| 06/03/2004 | US20040106268 Thermally stable crystalline defect-free germanium boned to silicon and silicon dioxide |
| 06/03/2004 | US20040106267 Oxynitride shallow trench isolation and method of formation |
| 06/03/2004 | US20040106266 Novel method to fabricate high reliable metal capacitor within copper back-end process |
| 06/03/2004 | US20040106264 Structure and method of making a high performance semiconductor device having a narrow doping profile |
| 06/03/2004 | US20040106263 System and method to reduce noise in a substrate |
| 06/03/2004 | US20040106262 Method of making transistors |
| 06/03/2004 | US20040106261 Method of forming an electrode with adjusted work function |
| 06/03/2004 | US20040106260 Process of utilizing CF4 plasma pretreatment to improve high-k dielectric materials |
| 06/03/2004 | US20040106259 High coupling split-gate transistor |
| 06/03/2004 | US20040106258 TTO nitride liner for improved collar protection and TTO reliability |
| 06/03/2004 | US20040106257 Method for fabricating semiconductor device |
| 06/03/2004 | US20040106256 Method of manufacturing a flash memory cell |
| 06/03/2004 | US20040106255 Manufacturing method of flash memory device |
| 06/03/2004 | US20040106254 Semiconductor device and its manufacturing method |
| 06/03/2004 | US20040106253 Semiconductor processing methods of forming integrated circuitry |
| 06/03/2004 | US20040106252 Method of manufacturing capacitor of semiconductor device by simplifying process of forming dielectric layer and apparatus therefor |
| 06/03/2004 | US20040106251 Technique to control tunneling currents in DRAM capacitors, cells, and devices |
| 06/03/2004 | US20040106250 Method of fabricating semiconductor integrated circuit device |
| 06/03/2004 | US20040106249 Method to fabricate dual metal CMOS devices |
| 06/03/2004 | US20040106248 Method of fabricating a semiconductor device |
| 06/03/2004 | US20040106247 Method for forming semiconductor device |
| 06/03/2004 | US20040106246 Laser anneal method of a semiconductor layer |
| 06/03/2004 | US20040106245 Method and structure for contacting an overlying electrode for a magnetoelectronics element |
| 06/03/2004 | US20040106244 Method of crystallizing amorphous silicon and device fabricated using the same |
| 06/03/2004 | US20040106243 Method for controlling electrical conductivity |
| 06/03/2004 | US20040106242 Method for fabricating semiconductor film and semiconductor device and laser processing apparatus |
| 06/03/2004 | US20040106241 Mask for polycrystallization and method of manufacturing thin film transistor using polycrystallization mask |
| 06/03/2004 | US20040106240 Process for forming polysilicon layer and fabrication of thin film transistor by the process |
| 06/03/2004 | US20040106239 Method of fabricating semiconductor device |
| 06/03/2004 | US20040106238 [pixel structure and fabricating method thereof] |
| 06/03/2004 | US20040106237 Method for fabricating semiconductor device |
| 06/03/2004 | US20040106236 Method to manufacture LDMOS transistors with improved threshold voltage control |
| 06/03/2004 | US20040106235 Method for manufacturing circuit devices |
| 06/03/2004 | US20040106234 Electrical leadframes, surface mountable semiconductor components, leadframe strips, and their method of manufacture |
| 06/03/2004 | US20040106233 Integrated circuit packaging for improving effective chip-bonding area |
| 06/03/2004 | US20040106232 Method of making electrode-to-electrode bond structure and electrode-to-electrode bond structure made thereby |
| 06/03/2004 | US20040106228 Substrate based ESD network protection method for flip chip design |
| 06/03/2004 | US20040106227 Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells |
| 06/03/2004 | US20040106226 [method of fabricating organic light emitting diode device] |
| 06/03/2004 | US20040106221 Integrated driver process flow |
| 06/03/2004 | US20040106217 Method to detect surface metal contamination |
| 06/03/2004 | US20040106130 Bioarray chip reaction apparatus and its manufacture |
| 06/03/2004 | US20040106073 Forming method of resist pattern for improving accuracy of dimension of pattern, manufacturing method of semiconductor apparatus using the same and heat treatment apparatus for the same |
| 06/03/2004 | US20040106072 Pretreatment; determination, calibration of photoresist dissolving concentration of developer, speed; for semiconductors |
| 06/03/2004 | US20040106071 Uniformity of pattern |
| 06/03/2004 | US20040106069 Process for producing a tool insert for injection molding a part with two-stage microstructures |
| 06/03/2004 | US20040106068 Lithographic apparatus and device manufacturing method |
| 06/03/2004 | US20040106067 Miniaturization of electrical and electronic apparatus by forming patterns on photoresists containing acid generators, then exposing, developing and heating, to diffuse acids formed and to equalize glass transition temperature |
| 06/03/2004 | US20040106066 Pattern-forming process using photosensitive resin composition |
| 06/03/2004 | US20040106048 Modular containment cell arrangements |
| 06/03/2004 | US20040105990 Backing, adhesive layer, and protective member, where the adhesive layer comprises a phenolic hydroxyl radical-bearing polyimide resin, an epoxy resin, and an epoxy resin curing agent; improved adhesion, heat resistance, low modulus of elasticity |
| 06/03/2004 | US20040105986 excels in dielectric properties, adhesion, film consistency, mechanical strength, easily thinned; made from an amorphous polymer made by hydrolyzing and condensing an silane compoundl, and and a zeolite sol made with a quaternary ammonium hydroxide |
| 06/03/2004 | US20040105936 robot transfers wet substrate which has been developed and rinsed to supercritical drying unit; prevents air drying |
| 06/03/2004 | US20040105935 repeated purging; for integrated ciruits/semiconductor wafers |
| 06/03/2004 | US20040105934 Ruthenium layer formation for copper film deposition |
| 06/03/2004 | US20040105918 a power control circuit that can manage and control both the active and standby modes of each circuit block of a chip |
| 06/03/2004 | US20040105909 Resin molding machine |
| 06/03/2004 | US20040105750 Method for picking semiconductor chips from a foil |
| 06/03/2004 | US20040105749 Work arrangement apparatus |
| 06/03/2004 | US20040105742 Semiconductor manufacturing system |
| 06/03/2004 | US20040105738 Substrate processing apparatus and method of processing substrate while controlling for contamination in substrate transfer module |
| 06/03/2004 | US20040105737 Vacuum process system |
| 06/03/2004 | US20040105671 Method for semiconductor wafer etching |
| 06/03/2004 | US20040105670 Photoirradiation thermal processing apparatus and thermal processing susceptor employed therefor |
| 06/03/2004 | US20040105578 Pattern inspection apparatus |