H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2004
11/17/2004	EP1034082A4 A method for minimizing the critical dimension growth of a feature on a semiconductor wafer
11/17/2004	EP1005664B1 Lithographic apparatus comprising a dedicated mirror projection system
11/17/2004	EP0963573B1 Alignment device and lithographic apparatus comprising such a device
11/17/2004	CN2657149Y Electrooptical device and electronic equipment
11/17/2004	CN2656396Y Low light electronic mechanical system air fight packaging clamping device
11/17/2004	CN1547778A Process for producing microelectromechanical components
11/17/2004	CN1547777A Field-effect transistor constituting channel by carbon nano tubes
11/17/2004	CN1547776A Vertical dual gate field effect transistor
11/17/2004	CN1547775A Integrated circuit structure for mixed-signal RF applications and circuits
11/17/2004	CN1547774A Integrated circuit package with a capacitor
11/17/2004	CN1547772A Interconnect module with reduced power distribution impedance
11/17/2004	CN1547770A Enhancement of an interconnect
11/17/2004	CN1547769A Method of forming a raised contact for a substrate
11/17/2004	CN1547768A Cluster tool and method for controlling transport
11/17/2004	CN1547767A Semiconductor epitaxial wafer and method for measuring withstand voltage thereof
11/17/2004	CN1547766A Silicide process using high K-dielectrics
11/17/2004	CN1547765A Trench dmos transistor with embedded trench schottky rectifier
11/17/2004	CN1547764A Production method for anneal wafer and anneal wafer
11/17/2004	CN1547763A Dummy structures to reduce metal recess in electropolishing process
11/17/2004	CN1547761A United method and apparatus to prevent lateral oxidation in a transistor utilizing an ultra thin oxygen-diffusion barrier
11/17/2004	CN1547760A Heater module for semiconductor manufacturing device
11/17/2004	CN1547759A Substrate processing apparatus
11/17/2004	CN1547758A Wafer level underfill and interconnect process
11/17/2004	CN1547757A System and method of fast ambient switching for rapid thermal processing
11/17/2004	CN1547684A Phase-shift-moire focus monitor
11/17/2004	CN1547683A 光敏性树脂组合物 The photosensitive resin composition of the
11/17/2004	CN1547682A An integrated circuit using a reflective mask
11/17/2004	CN1547680A An etchant for a wire, a method for manufacturing the wire and a method for manufacturing a thin film transistor array panel including the method
11/17/2004	CN1547669A Method of manufacturing a probe card
11/17/2004	CN1547626A A method to increase device-to-device uniformity for polycrystalline thin-film transistors by deliberately mis-aligning the microstructure relative to the channel region
11/17/2004	CN1547624A Film formation method for semiconductor processing
11/17/2004	CN1547323A Programmable logic device structure modeling method
11/17/2004	CN1547263A Thin-film solar cell substrate preparing technology
11/17/2004	CN1547256A Technique integration method for improving hot carrier effect in CMOS manufacture
11/17/2004	CN1547255A Technique integration method for deep sub-micron CMOS source-drain manufacture technology
11/17/2004	CN1547254A Process for forming silicide at twice in active area of transistor
11/17/2004	CN1547253A Technology for forming side-wall of flash memory control grid cumulate texture
11/17/2004	CN1547252A Integrated circuit layout plan and buffer plan integrated layout method
11/17/2004	CN1547251A A method for reducing dimension differences between isolated contact aperture and dense contact aperture
11/17/2004	CN1547250A Hierarchy type programmable interconnecting line structure
11/17/2004	CN1547249A 可编程逻辑器件结构 Programmable logic device structure
11/17/2004	CN1547248A Aggregate of semiconductor devices
11/17/2004	CN1547247A Method for manufacturing image sensor
11/17/2004	CN1547246A Manufacturing method of ceramic packaging substrate
11/17/2004	CN1547245A Preprocessing technique for removing oxide film from surface of copper seed crystal and reinforcing copper layer adhesion
11/17/2004	CN1547244A Process for eliminating photoresist poison of photo-etching in integrated circuit manufacture technology
11/17/2004	CN1547243A Wet etching method for lead zirconate titanate ferroelectric film
11/17/2004	CN1547242A Two-stage step structured wet chemical corrosion method for silicon semiconductor device
11/17/2004	CN1547241A A method for preventing side lobe from being transferred to substrate when etching
11/17/2004	CN1547240A Ion implantation machine
11/17/2004	CN1547239A Method for preparing selenide or sulfide semiconductor film material of copper-indium-gallium
11/17/2004	CN1547238A Method for preparing CdSe quantum point
11/17/2004	CN1546743A Single slice three chambers type infrared heating superhigh vacuum CVD epitaxial system
11/17/2004	CN1546742A Method of preparing ZnO crystal whisker adopting atmosphere open type MOCVD and apparatus therefor
11/17/2004	CN1546741A Method of preparing one-dimensional array material adopting atmosphere open type MOCVD and apparatus therefor
11/17/2004	CN1546740A Method of depositing big grain polycrystalline silicon thin film on ceramic substrate
11/17/2004	CN1546283A Optical grinding machine and method for processing sapphire crystal substrate for semiconductor use
11/17/2004	CN1176502C Manufacturing method of single-crystal GaN base and single-crystal GaN base
11/17/2004	CN1176498C Aluminium nitride and aluminum oxide/nitride grid laminated FET and forming method thereof
11/17/2004	CN1176497C 半导体装置 Semiconductor device
11/17/2004	CN1176495C Non-volatile memory element and its manufacture
11/17/2004	CN1176494C Ultra compact DRAM cell and method of making thereof
11/17/2004	CN1176493C Flash memory cell and its preparing process
11/17/2004	CN1176492C Formation of inductance in integrated circuit and structure for blocking parasitic current by using P-N element
11/17/2004	CN1176491C Mixed medium structure used for improving stability of rear production line structure
11/17/2004	CN1176490C Method for preventing short circuit between metal wires
11/17/2004	CN1176489C Method for generating capacitor on substrate with automatically aligned contact window mechanism
11/17/2004	CN1176488C Method for testing intensity of dielectric layer between metal layers
11/17/2004	CN1176487C Structure with several metal convex blocks having insulating side walls and its making method
11/17/2004	CN1176486C Polishing method with parallelism of less than 1 second and geometric center of crystal deviated from engine shaft center
11/17/2004	CN1176485C Method for washing semiconductor wafer and washing system therefor
11/17/2004	CN1176484C Method for preparing Si base ferroelectric thin/thick film type micro-thermo-insulation structure array
11/17/2004	CN1176483C Process for preparing self-supporting gallium nitride substrate by laser stripping method
11/17/2004	CN1176405C Emission photoetching method and device using transmitter with pattern
11/17/2004	CN1176245C Method for preparing rthenium or rthenium oxide film
11/17/2004	CN1176199C Acidic composition containing fluoride for removal of photoresists and etch residues
11/16/2004	US6820246 Pattern layout method of semiconductor device
11/16/2004	US6820241 Semiconductor device with voltage down circuit changing power supply voltage to operating voltage
11/16/2004	US6820028 Method and apparatus for monitoring integrated circuit fabrication
11/16/2004	US6819975 Production controlling method
11/16/2004	US6819969 Chemical vapor deposition process and apparatus for performing the same
11/16/2004	US6819968 Apparatus and method for manufacturing integrated circuit devices
11/16/2004	US6819845 Optical devices with engineered nonlinear nanocomposite materials
11/16/2004	US6819695 Dopant diffusion barrier layer for use in III-V structures
11/16/2004	US6819626 Semiconductor integrated circuit device
11/16/2004	US6819619 Semiconductor memory device allowing reduction of an area loss
11/16/2004	US6819597 Row decoder in flash memory and erase method of flash memory cell using the same
11/16/2004	US6819594 Electrically erasable programmable logic device
11/16/2004	US6819592 Semiconductor memory
11/16/2004	US6819590 Semiconductor memory
11/16/2004	US6819586 Thermally-assisted magnetic memory structures
11/16/2004	US6819585 Magnetic random access memory
11/16/2004	US6819581 Ferroelectric nonvolatile semiconductor memory
11/16/2004	US6819580 Semiconductor chip selectively providing a predetermined potential to a dead pin
11/16/2004	US6819543 Multilayer capacitor with multiple plates per layer
11/16/2004	US6819542 Interdigitated capacitor structure for an integrated circuit
11/16/2004	US6819532 Magnetoresistance effect device exchange coupling film including a disordered antiferromagnetic layer, an FCC exchange coupling giving layer, and a BCC exchange coupling enhancement layer
11/16/2004	US6819493 Illumination apparatus with light shielding near an exit plane of an optical pipe and projection exposure apparatus using same
11/16/2004	US6819434 Multi-axis interferometer
11/16/2004	US6819433 Exposure apparatus including interferometer system

1 ... 4086 4087 4088 4089 4090 4091 4092 4093 4094 4095 4096 4097 4098 4099 4100 4101 4102 4103 4104 4105 4106 ... 6590