Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2005
06/22/2005EP1544914A2 Semiconductor device and method of manufacturing thereof
06/22/2005EP1544913A2 Semiconductor device and method of manufacturing thereof
06/22/2005EP1544911A2 Adjusting device
06/22/2005EP1544910A1 Wafer rotating device and edge flaw inspection device rpovided therewith
06/22/2005EP1544909A1 Probe method,prober,and electrode recucing/plasma-etching process mechanism
06/22/2005EP1544908A1 Process for mounting a semiconductor device
06/22/2005EP1544907A1 Transistor device having p-type delafossite channel
06/22/2005EP1544906A1 Method and device for laser beam processing of silicon substrate, and method and device for laser beam cutting of silicon wiring
06/22/2005EP1544905A1 Electric circuit, thin film transistor, method for manufacturing electric circuit and method for manufacturing thin film transistor
06/22/2005EP1544904A1 Substrate processing apparatus
06/22/2005EP1544903A1 Substrate processing apparatus
06/22/2005EP1544902A1 Rotary silicon wafer cleaning apparatus
06/22/2005EP1544901A1 Polishing compound composition, method for producing same and polishing method
06/22/2005EP1544900A1 Heat treatment apparatus
06/22/2005EP1544899A2 Nonvolatile capacitor of a semiconductor memory device, and method of operating the same
06/22/2005EP1544898A1 Wafer holder and semiconductor manufacturing apparatus
06/22/2005EP1544897A2 Surface inspection apparatus
06/22/2005EP1544896A2 Chemical solution coating method and chemical solution coating apparatus
06/22/2005EP1544895A2 Exposure apparatus, exposure method and semiconductor device production method
06/22/2005EP1544874A1 Solid material comprising a structure of almost-completely-polarised electronic orbitals, method of obtaining same and use thereof in electronics and nanoelectronics
06/22/2005EP1544740A2 Self-reparable semiconductor
06/22/2005EP1544682A2 Exposure apparatus, alignment method and device manufacturing method
06/22/2005EP1544681A2 Exposure apparatus
06/22/2005EP1544680A2 Feature optimisation using interference mapping lithography
06/22/2005EP1544679A2 Optimized polarization illumination
06/22/2005EP1544678A1 Lithographic apparatus and device manufacturing method
06/22/2005EP1544677A1 Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby
06/22/2005EP1544676A2 Refractive projection objective for immersion lithography
06/22/2005EP1544624A1 Method for testing dies utilising a machine grooved storage tray
06/22/2005EP1544324A1 Remover solution
06/22/2005EP1544172A1 Mechanical scribe device
06/22/2005EP1544164A2 Hermetic wafer-level packaging for MEMS devices with low-temperature metallurgy
06/22/2005EP1544163A2 Method for producing semiconductor device and a semiconductor device, more especially a membrane sensor
06/22/2005EP1544130A1 Packaging container for power semiconductor modules
06/22/2005EP1544122A2 Lid unit for a thin-plate supporting container
06/22/2005EP1543921A1 Method and apparatus for polishing a substrate
06/22/2005EP1543565A1 Heterojunction field effect transistors using silicon-germanium and silicon-carbon alloys
06/22/2005EP1543562A1 Integrated field-effect transistor comprising two control regions, use of said field-effect transistor and method for producing the same
06/22/2005EP1543561A1 Method for depinning the fermi level of a semiconductor at an electrical junction and devices incorporating such junctions
06/22/2005EP1543560A1 Capacitor over plug structure
06/22/2005EP1543556A2 Taped lead frames and methods of making and using the same in semiconductor packaging
06/22/2005EP1543554A1 Trench schottky barrier diode
06/22/2005EP1543553A1 A layer transfer method
06/22/2005EP1543552A1 Formation of a relaxed useful layer from a wafer with no buffer layer
06/22/2005EP1543551A2 Method for quantifying uniformity patterns and inclusion of expert knowledge for tool development and control
06/22/2005EP1543550A2 User interface for quantifying wafer non-uniformities and graphically explore significance
06/22/2005EP1543549A1 Interlayer adhesion promoter for low k materials
06/22/2005EP1543548A2 Method of patterning capacitors and capacitors made thereby
06/22/2005EP1543547A2 Apparatus and method for controlling etch depth
06/22/2005EP1543546A1 Isolated complementary mos devices in epi-less substrate
06/22/2005EP1543545A1 Two layer low temperature oxide backside seal for a wafer
06/22/2005EP1543544A2 Modular substrate gas panel having manifold connections in a common plane
06/22/2005EP1543543A2 Deterministically doped field-effect devices and methods of making same
06/22/2005EP1543542A2 Device and method for applying semiconductor chips to carriers
06/22/2005EP1543541A2 Notch-free etching of high aspect soi structures using alternating deposition and etching and pulsed plasma
06/22/2005EP1543537A1 Plasma apparatus with device for reducing polymer deposition on a substrate and method for reducing polymer deposition
06/22/2005EP1543454A2 Extracting wiring parasitics for filtered interconnections in an integrated circuit
06/22/2005EP1543451A2 Method and system for context-specific mask writing
06/22/2005EP1543316A1 Eddy current based measurement capabilities
06/22/2005EP1543177A1 Vapor deposition of tungsten nitride
06/22/2005EP1543084A2 Process for reducing dishing and erosion during chemical mechanical planarization
06/22/2005EP1543080A2 Method of coating a surface with an organic film
06/22/2005EP1542869A4 Molecular scale electronic devices
06/22/2005EP1542869A2 Molecular scale electronic devices
06/22/2005EP1542832A1 Polishing pad with window for planarization
06/22/2005EP1542831A1 Polishing pad for planarization
06/22/2005EP1393371B1 Electronic module and method for assembling same
06/22/2005EP1360476B1 Automated control of metal thickness during film deposition
06/22/2005EP1325177B1 Method for depositing, in particular, crystalline layers, a gas inlet element, and device for carrying out said method
06/22/2005EP1311190A4 Apparatus and method for collecting data useful for determining the parameters of an alert window for timing delivery of etc signals to a heart under varying cardiac conditions
06/22/2005EP1116269A4 Complementary bipolar/cmos epitaxial structure and process
06/22/2005EP1111667A4 Semiconductor device and method for manufacturing the same
06/22/2005CN2705891Y Laminated structure with good interface adhesiveness
06/22/2005CN2705890Y Ball lattice type integrated circuit pulling device
06/22/2005CN1631068A Device for selectively displacing holding devices and fitting head for transporting components
06/22/2005CN1631067A Transfer carrier for flexible printed circuit board and electronic parts mounting method to flexible printed circuit board
06/22/2005CN1631064A System and methods for conveying and transporting levitated articles
06/22/2005CN1630947A Electric signal transmission line
06/22/2005CN1630945A Semiconductor device package and lead frame with die overhanging lead frame pad
06/22/2005CN1630943A Semiconductor device and its manufacturing method
06/22/2005CN1630942A Port structure in semiconductor processing system
06/22/2005CN1630941A Method of calibrating and using a semiconductor processing system
06/22/2005CN1630940A Polarization analyzing method
06/22/2005CN1630939A Forming printed circuit board structure using piezoelectric micro-coating method
06/22/2005CN1630938A Semiconductor device and a method for forming patterns
06/22/2005CN1630937A Self-aligned NPN transistor with raised extrinsic base
06/22/2005CN1630936A Device for producing inductively coupled plasma and method thereof
06/22/2005CN1630935A Vapor phase epitaxy device
06/22/2005CN1630934A Manufacturing apparatus and method for a semiconductor device, and cleaning method for a semiconductor manufacturing device
06/22/2005CN1630933A Strained si based layer made by UHV-CVD, and devices therein
06/22/2005CN1630932A Heated substrate support
06/22/2005CN1630931A High pressure processing chamber for semiconductor substrate including flow enhancing features
06/22/2005CN1630930A Substrate transport container
06/22/2005CN1630921A Method for homogeneously magnetizing an exchange-coupled layer system of a digital magnetic memory location device
06/22/2005CN1630917A Etching solution for forming an embedded resistor
06/22/2005CN1630840A Method and apparatus for embedded process control framework in tool systems
06/22/2005CN1630739A Apparatus and method for electroplating a wafer surface
06/22/2005CN1630735A Method for the deposition of materials from mesomorphous films
06/22/2005CN1630697A Anionic abrasive particles treated with positively charged polyelectrolytes for cmp
06/22/2005CN1630607A Disk carrier