Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2005
06/15/2005EP1540713A1 Defect reduction in semiconductor materials
06/15/2005EP1540712A2 Method for production of a semiconductor structure
06/15/2005EP1540711A2 Memory cells with improved reliability
06/15/2005EP1540710A2 Nanocrystal electron device
06/15/2005EP1540709A2 Multi-zone resitive heater
06/15/2005EP1540708A2 Batch furnace
06/15/2005EP1540707A2 Large area substrate processing system
06/15/2005EP1540706A1 Substrate end effector
06/15/2005EP1540705A2 Liquid flow controller and precision dispense apparatus and system
06/15/2005EP1540695A2 A method and apparatus for the compensation of edge ring wear in a plasma processing chamber
06/15/2005EP1540694A1 Method and apparatus for producing uniform processing rates
06/15/2005EP1540679A1 Process for preparing nano-porous metal oxide semiconductor layers
06/15/2005EP1540665A2 Photolithography mask repair
06/15/2005EP1540558A2 Load lock optimization method and system
06/15/2005EP1540425A1 Method for aligning a substrate on a stage
06/15/2005EP1540423A1 Grating based spectral filter for eliminating out of band radiation in an extreme ultra-violet lithography system
06/15/2005EP1540420A2 Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings
06/15/2005EP1540418A2 Method of forming a pattern on a semiconductor wafer using an attenuated phase shifting reflective mask
06/15/2005EP1540412A1 Tiled silicon wafers on a common glass substrate and method of manufacture thereof
06/15/2005EP1540327A1 System and method for mental residue detection and mapping within a multi-step sequence
06/15/2005EP1540259A2 Thermal process station with heated lid
06/15/2005EP1540258A1 Variable heater element for low to high temperature ranges
06/15/2005EP1540050A1 Lightly doped silicon carbide wafer and use thereof in high power devices
06/15/2005EP1540044A2 Apparatus and method for treating a substrate electrochemically while reducing metal corrosion
06/15/2005EP1540034A2 Method for energy-assisted atomic layer depositon and removal
06/15/2005EP1539898A1 Silicone-based adhesive sheet, method of bonding a semiconductor chip to a chip attachment component, and a semiconductor device
06/15/2005EP1539771A1 Silyl alkyl esters of anthracene- and phenanthrene carboxylic acids
06/15/2005EP1539614A1 Fire retardant wafer carrier
06/15/2005EP1539423A1 A polishing pad support that improves polishing performance and longevity
06/15/2005EP1539371A1 Apparatus and method for thermally controlled processing of microelectronic workpieces
06/15/2005EP1490898A4 System and method of broad band optical end point detection for film change indication
06/15/2005EP1478683A4 Spin-on-glass anti-reflective coatings for photolithography
06/15/2005EP1440349B1 Method for the production of a semiconductor device
06/15/2005EP1427868B1 Vaporizer
06/15/2005EP1341616B1 Patterned deposition using compressed carbon dioxide
06/15/2005EP1120449B1 Adhesive for bonding circuit members, circuit board, and method of producing the same
06/15/2005EP0837940B1 Ftsy expressing gram-positive microorganisms with enhanced secretion properties
06/15/2005CN2704927Y Chip with partly unworked transistors and completely unworked transistors
06/15/2005CN2704863Y Installing structure of semiconductor device, electro-optical device and electronic apparatus
06/15/2005CN1628495A Plasma processing equipment
06/15/2005CN1628494A 有机电致发光器件 Organic electroluminescent devices
06/15/2005CN1628415A Digital electronic circuit with low power consumption
06/15/2005CN1628389A Contact structure of a wires and method manufacturing the same, and thin film transistor substrate including the contact structure and method manufacturing the same
06/15/2005CN1628388A Semiconductor device and a process for forming the same
06/15/2005CN1628387A Enhanced structure and method for buried local interconnects
06/15/2005CN1628386A Capacitor-less 1-transistor dram cell and method for producing the same
06/15/2005CN1628385A Electrostatic discharge protection circuitry and method of operation
06/15/2005CN1628384A Device for connecting an IC terminal to a reference potential
06/15/2005CN1628383A Method and structure for a heterojunction bipolar transistor
06/15/2005CN1628382A Test wafer and method for investigating elecrostatic discharge induced wafer defects
06/15/2005CN1628380A Monitoring of contact hole production
06/15/2005CN1628379A Semiconductor device and its producing method
06/15/2005CN1628378A Process for forming fusible links
06/15/2005CN1628377A Field effect transistor having lateral depletion structure
06/15/2005CN1628376A Fluoropolymer interlayer dielectric by chemical vapor deposition
06/15/2005CN1628375A Etching method and etching apparatus
06/15/2005CN1628374A Polishing pad, polishing device, and polishing method
06/15/2005CN1628373A Aerosol cleaning apparatus and method for control thereof
06/15/2005CN1628372A Method for producing a memory cell
06/15/2005CN1628371A Vapor phase epitaxial apparatus and vapor phase epitaxial method
06/15/2005CN1628370A Methods of treating a silicon carbide substrate for improved epitaxial deposition and resulting structures and devices
06/15/2005CN1628369A Method for the production of a capacitor in a dielectric layer
06/15/2005CN1628368A Reactor assembly and processing method
06/15/2005CN1628358A Charge injection
06/15/2005CN1628273A Specialization of active software agents in an automated manufacturing environment
06/15/2005CN1628269A Antireflective composition
06/15/2005CN1628268A Sulfonate derivatives and the use therof as latent acids
06/15/2005CN1628264A Thin film transistor array panel for a liquid crystal display
06/15/2005CN1628245A X-ray topographic system
06/15/2005CN1628000A Methods for cleaning microelectronic structures
06/15/2005CN1627999A Cleaning sheet, cleaning functional carrier member, and method for cleaning substrate processors comprising them
06/15/2005CN1627993A Nozzle device and substrate processing device with nozzle device
06/15/2005CN1627885A Semiconductor packing and solder filler for printed circuit board, and its mfg. method
06/15/2005CN1627884A Manufacturing method of ceramic substrate and electronic component modular using such substrate
06/15/2005CN1627873A Pixel array of electroluminescent cell
06/15/2005CN1627615A 负电荷泵 Negative charge pump
06/15/2005CN1627562A Apparatus and methods for constructing antennas using vias as radiating elements formed in a substrate
06/15/2005CN1627546A Field emission phase change diode memory
06/15/2005CN1627536A 半导体器件 Semiconductor devices
06/15/2005CN1627535A Diamond semiconductor device and method for manufacturing the same
06/15/2005CN1627534A Semiconductor device and method for manufacturing semiconductor device
06/15/2005CN1627533A Dynamic threshold voltage MOSFET on SOI
06/15/2005CN1627532A I/O NMOS parts for reducing hot carrier's effect
06/15/2005CN1627531A Sectional field effect transistor and method of fabrication
06/15/2005CN1627530A Bipolar junction transistor and methods of manufacturing the same
06/15/2005CN1627523A 3D polysilicon read only memory and preparation method
06/15/2005CN1627522A Semiconductor device and fabrication method thereof
06/15/2005CN1627520A Decoupling capacitors and semiconductor integrated circuit
06/15/2005CN1627519A Semiconductor and inverter structure and method for forming semiconductor structure
06/15/2005CN1627518A Semiconductor assembly and its mfg.method
06/15/2005CN1627517A Thin film transistor array panel and its mfg.method
06/15/2005CN1627516A Test module and test method in use for electrical erasable memory built in chip
06/15/2005CN1627515A Semiconductor assembly and its mfg.method
06/15/2005CN1627514A Semiconductor device and electronic device, and methods for manufacturing thereof
06/15/2005CN1627513A Semiconductor device and electronic device, and methods for manufacturing thereof
06/15/2005CN1627512A Semiconductor device and its mfg.method
06/15/2005CN1627508A Method for local reduction of compliant thermally conductive material layer thickness on chips
06/15/2005CN1627505A 半导体晶片 Semiconductor wafer
06/15/2005CN1627504A Method for improving contact resistance value of bit line
06/15/2005CN1627503A Memory device and method of manufacturing the same
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