Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2005
06/30/2005DE102004033057A1 Wafer-Level-Package-Struktur vom Fan-Out-Typ und Verfahren zur Herstellung derselben Wafer-level package structure of the fan-out type and method of making same
06/30/2005DE102004031896A1 Verfahren zur Herstellung eines Halbleiterbauelements A process for producing a semiconductor device
06/30/2005DE102004031140A1 Speichervorrichtung Memory device
06/30/2005DE102004012856A1 Semiconductor structure, produced by forming an oxygen diffusion layer on a substrate, followed by a dielectric layer which is thermally oxidised
06/30/2005DE102004012630A1 FET comprises a source, a drain, and a canal region located in a substrate, and a barrier layer which separates the source and/or drain regions from the canal region
06/30/2005DE102004010244A1 High leakage current trench capacitor cells detecting method for use in dynamic RAM, involves comparing measure of leakage current of capacitor cells to recognize those cells having high leakage current
06/30/2005CA2532864A1 Langmuir-blodgett nanostructure monolayers
06/29/2005EP1549116A2 Extreme ultraviolet source
06/29/2005EP1548855A2 System and method for moving an object employing piezo actuators
06/29/2005EP1548852A2 Top-emitting nitride-based light emitting device and method of manufacturing the same
06/29/2005EP1548849A1 Light emitting diode
06/29/2005EP1548842A2 Non-volatile multibit memory cell and method of manufacturing thereof
06/29/2005EP1548841A2 Low voltate EEPROM/NVRAM transistors and making method
06/29/2005EP1548839A1 Semiconductor device, method for manufacturing the same, apparatus and method for forming high-dielectric-constant film
06/29/2005EP1548838A1 Source/drain electrode for flat panel display device and method of fabricating the same
06/29/2005EP1548837A2 Thin film electronic device and methods for fabricating an electronic device
06/29/2005EP1548835A1 Thin film transistor for OLED and method of manufacturing the same
06/29/2005EP1548834A1 Soi wafer manufacturing method
06/29/2005EP1548833A1 Ferroelectric memory and its manufacturing method
06/29/2005EP1548832A1 Magnetoresistive random-access memory device
06/29/2005EP1548831A1 Semiconductor storage device and its manufacturing method
06/29/2005EP1548829A2 Power semiconductor module and method for its manufacture
06/29/2005EP1548826A1 Chip pad layout
06/29/2005EP1548825A2 Semiconductor device, manufacturing method thereof and electronic equipment
06/29/2005EP1548823A1 Reliable high voltage gate dielectric layers using a dual nitridation process
06/29/2005EP1548822A1 Method for manufacturing soi wafer
06/29/2005EP1548821A2 Dicing die-bonding film
06/29/2005EP1548820A1 Substrate-storing container
06/29/2005EP1548818A1 Semiconductor device and method for manufacturing semiconductor device
06/29/2005EP1548817A1 Method of eliminating boron contamination of annealed wafer
06/29/2005EP1548816A2 Composition for cleaning semiconductor device
06/29/2005EP1548815A1 Semiconductor device and its manufacturing method
06/29/2005EP1548814A2 Method for producing silicon nitride films and process for fabricating semiconductor devices using said method
06/29/2005EP1548813A1 Gas supply system and treatment system
06/29/2005EP1548812A1 High-purity alkali etching solution for silicon wafers and alkali etching method of silicon wafer
06/29/2005EP1548811A2 Member which includes porous silicon region, and method of manufacturing member which contains silicon
06/29/2005EP1548810A2 Processing of semiconductor components with dense processing fluids and ultrasonic energy
06/29/2005EP1548809A1 Heat treatment method and heat treatment apparatus
06/29/2005EP1548808A1 High frequency plasma generator and high frequency plasma generating method
06/29/2005EP1548807A1 Method for depositing a group III-nitride material on a silicon substrate and device thereof
06/29/2005EP1548806A1 Alignment method, alignment substrate, production method for alignment substrate, exposure method, exposure system and mask producing method
06/29/2005EP1548805A1 Complementary division mask having alignment mark, method for forming alignment mark of the complementary division mask, semiconductor device manufactured by using the complementary division mask, and its manufacturing method
06/29/2005EP1548804A1 Illuminating optical system, exposure system and exposure method
06/29/2005EP1548803A1 Optical integrator, illumination optical device, exposure apparatus, and exposure method
06/29/2005EP1548802A1 Light conducting device
06/29/2005EP1548801A1 Method for fabricating semiconductor wafer
06/29/2005EP1548762A2 Magnetoresistive element, magnetic head, magnetic reproducing apparatus, and magnetic memory
06/29/2005EP1548619A2 Method and device for automated layer generation for double-gate finFET designs
06/29/2005EP1548536A1 Metal-oxide-semiconductor device having integrated bias circuit
06/29/2005EP1548507A1 Method of measurement and a substrate
06/29/2005EP1548506A1 Lithographic apparatus and methods for use thereof
06/29/2005EP1548505A1 Lithographic projection apparatus and device manufacturing method
06/29/2005EP1548504A1 Thermal deformation of a wafer in a lithographic process
06/29/2005EP1548503A2 Lithographic apparatus and device manufacturing mehtod
06/29/2005EP1548502A1 Lithographic apparatus and device manufacturing method
06/29/2005EP1548501A2 Laser unit, exposure apparatus for micro-lithiographie and associated method
06/29/2005EP1548500A2 Patterning apparatus and method for fabricating continuous patterns using the same
06/29/2005EP1548499A1 Photosensitive composition for interlayer dielectric and method of forming patterned interlayer dielectric
06/29/2005EP1548450A2 Probe card and method of testing wafer having a plurality of semiconductor devices
06/29/2005EP1548150A1 Plasma processing system and its substrate processing process, plasma enhanced chemical vapor deposition system and its film deposition process
06/29/2005EP1548076A1 Compositions and methods for low downforce pressure polishing of copper
06/29/2005EP1548075A2 Compositons and methods for barrier removal
06/29/2005EP1547975A1 Method for modifying porous film, modified porous film and use of same
06/29/2005EP1547968A2 Process for producing a movable structure and etchant for silicon oxide film
06/29/2005EP1547943A1 Overhead travelling carriage system
06/29/2005EP1547780A1 Method and device for positioning electronic components
06/29/2005EP1547719A2 Laser irradiation apparatus, laser irradiation method, and method for manufacturing crystalline semiconductor film
06/29/2005EP1547216A1 High power semiconductor laser diode and method for making such a diode
06/29/2005EP1547157A2 Dielectric storage memory cell (monos) having high permittivity top dielectric and method therefor
06/29/2005EP1547156A1 Finfet having improved carrier mobility and method of its formation
06/29/2005EP1547154A1 Indium-boron dual halo implant for mosfet
06/29/2005EP1547153A2 Quantum dots, nanocomposite materials with quantum dots, optical devices with quantum dots, and related fabrication methods
06/29/2005EP1547152A2 A cmos aps with stacked avalanche multiplication layer and low voltage readout electronics
06/29/2005EP1547151A2 Series memory architecture
06/29/2005EP1547148A2 Spacer integration scheme in mram technology
06/29/2005EP1547147A1 Method of manufacturing a semiconductor device and a semiconductor device obtained by means of said method
06/29/2005EP1547146A1 Method of transferring of a layer of strained semiconductor material
06/29/2005EP1547145A2 Method for the production of a composite sicoi-type substrate comprising an epitaxy stage
06/29/2005EP1547143A2 A method of preparing a thin layer, the method including a step of correcting thickness by sacrificial oxidation, and an associated machine
06/29/2005EP1547142A1 Selective connection in ic packaging
06/29/2005EP1547140A1 Method of manufacturing an electronic device comprising a thin film transistor
06/29/2005EP1547139A2 Large-area nanoenabled macroelectronic substrates and uses therefor
06/29/2005EP1547138A1 Methods for producing silicon nitride films and silicon oxynitride films by thermal chemical vapor deposition
06/29/2005EP1547137A1 Method for reducing wafer arcing
06/29/2005EP1547136A2 Method for making a wire nanostructure in a semiconductor film
06/29/2005EP1547135A1 Semi-conductor dielectric component with a praseodymium oxide dielectric
06/29/2005EP1547134A1 Linearly focused laser-annealing of buried species
06/29/2005EP1547133A2 Mim capacitor structures and fabrication methods in dual-damascene structures
06/29/2005EP1547132A1 Surface processing method
06/29/2005EP1547131A1 Large-diameter sic wafer and manufacturing method thereof
06/29/2005EP1547130A1 System and method for performing simultaneous precision die bond of photonic components onto a single substrate
06/29/2005EP1547129A2 Methods and systems for processing a substrate using a dynamic liquid meniscus
06/29/2005EP1547126A2 System and method for manufacturing embedded conformal electronics
06/29/2005EP1547101A1 Amorphous alloys for magnetic devices
06/29/2005EP1547092A1 Chain memory architecture
06/29/2005EP1547090A1 Magnetic random access memory having a vertical write line
06/29/2005EP1546947A2 Method and system for debugging using replicated logic
06/29/2005EP1546946A2 Integrated circuit devices and methods and apparatuses for designing integrated circuit devices
06/29/2005EP1546876A2 Method and system for dynamic modeling and recipe optimization of semiconductor etch processes
06/29/2005EP1546828A1 Method, system, and medium for handling misrepresentative metrology data within an advanced process control system
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