| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/16/2005 | US20050126423 Aseismatic device |
| 06/16/2005 | US20050126315 Sensor device for non-intrusive diagnosis of a semiconductor processing system |
| 06/16/2005 | US20050126314 Surface inspection apparatus |
| 06/16/2005 | US20050126080 Semiconductor polishing compound, process for its production and polishing method |
| 06/16/2005 | US20050126030 Rotary silicon wafer cleaning apparatus |
| 06/16/2005 | US20050126028 Aligning apparatus |
| 06/16/2005 | US20050126003 Method of manufacturing electronic component and member to be used in the same method |
| 06/16/2005 | US20050126002 Method of manufacturing electronic component and member to be used in the same method |
| 06/16/2005 | US20050125999 Manufacturing method of a modularized leadframe |
| 06/16/2005 | US20050125996 Apparatus for separating cull of semiconductor package molding system |
| 06/16/2005 | US20050125994 Socket and/or adapter device, and an apparatus and process for loading a socket and/or adapter device with a corresponding semi-conductor component |
| 06/16/2005 | DE202005000351U1 End effector used in the manufacture of integrated circuits comprises a gripper bearing rail for attaching to an arm of a pod opener, a pair of gripper arms arranged on opposite ends of the gripper bearing rail |
| 06/16/2005 | DE19818529B4 Photoresistbeschichtungsverfahren und Vorrichtung zur Durchführung dieses Verfahrens Photoresist coating method and apparatus for carrying out this method |
| 06/16/2005 | DE10392595T5 Verfahren und System zum Erwärmen von Halbleitersubstraten in einer Behandlungskammer, welche eine Aufnahme enthält A method and system for heating semiconductor substrates in a treatment chamber containing a receptacle |
| 06/16/2005 | DE10353648A1 Verfahren zum Fixieren eines Chipmoduls A method of fixing a chip module |
| 06/16/2005 | DE10352946A1 Halbleiterbauteil mit Halbleiterchip und Umverdrahtungslage sowie Verfahren zur Herstellung desselben Of the same semiconductor device with the semiconductor chip and rewiring and methods for preparing |
| 06/16/2005 | DE10352730A1 Semiconductor component used as a MOSFET comprises an active semiconductor region and an insulating region which laterally delimits the active semiconductor region |
| 06/16/2005 | DE10352667A1 Production of a semiconductor structure used as a DRAM memory cell comprises forming a first barrier layer in a lower trench region in a trench in a substrate and filling with a first filler, and further processing |
| 06/16/2005 | DE10351932A1 MOS-Feldeffekttransistor mit kleiner Miller-Kapazität MOS field-effect transistor with small Miller capacitance |
| 06/16/2005 | DE10351349A1 Production of a luminescent diode chip applies a radiation decoupling surface and a semiconductor body with an epitaxial-grown sequence of semiconductor layers with an active zone |
| 06/16/2005 | DE10351237A1 Verbesserte Technik zur Herstellung eines Transistors mit erhöhten Drain- und Sourcegebieten Improved technique for manufacturing a transistor with a raised drain and source regions |
| 06/16/2005 | DE10351100A1 Einstellung des Phosphorprofils durch in-situ-Dotierung mit Kohlenstoff für vertikale Hochleistungs-PNP-Transistoren Setting the phosphorus profile by in-situ doping with carbon for high performance vertical PNP transistors |
| 06/16/2005 | DE10351006A1 Technik zur Herstellung eines Transistors mit erhöhten Drain- und Source-Gebieten, wobei eine reduzierte Anzahl von Prozessschritten erforderlich ist Technique for manufacturing a transistor with a raised drain and source regions, wherein a reduced number of process steps is required |
| 06/16/2005 | DE10351005A1 Barrierenschicht mit einer Titannitridbeschichtung für eine Kupfermetallsierungsschicht, die ein Dielektrikum mit kleinem ε aufweist Barrier layer with a titanium nitride coating for a Kupfermetallsierungsschicht having a dielectric having a small ε |
| 06/16/2005 | DE10348715A1 Verfahren zur Herstellung und Vorrichtung zur Verbesserung der Haftung zwischen einem Kunststoff und einem Metall Process for the preparation and apparatus for improving the adhesion between a plastic and a metal |
| 06/16/2005 | DE10203164B4 Leistungshalbleiterbauelement und Verfahren zu dessen Herstellung Power semiconductor device and process for its preparation |
| 06/16/2005 | DE102004055491A1 Semiconductor device, e.g. dynamic random access memory, includes semiconductor substrate, and storage node having bottom portion and sidewall with recessed portion |
| 06/16/2005 | DE102004054561A1 Verfahren zur Fertigung eines Halbleiterbauelements und Verfahren zur Behandlung einer Halbleiteroberfläche A method of manufacturing a semiconductor device and method for treating a semiconductor surface |
| 06/16/2005 | DE102004054286A1 Siliziumkarbid-Halbleitervorrichtung mit Sperrschicht-Feldeffekttransistor, sowie Verfahren zu deren Herstellung Silicon carbide semiconductor device having insulated gate field effect transistor, and methods for their preparation |
| 06/16/2005 | DE102004051153A1 Resin solution for forming protection layer for semiconductor device, e.g. dynamic random access memory cell, comprises organic solvent and resol resin or novolac resin |
| 06/16/2005 | DE102004050116A1 Comb-shaped holder for semiconductor wafers, consisting of slots with vertical and oblique support faces, with semiconductor wafers and support faces of slots contacting at holding points, etc |
| 06/16/2005 | DE102004044958A1 Struktur zum Unterdrücken von Kerbwirkung in einer Ecke Structure for suppressing stress concentration at a corner |
| 06/16/2005 | DE102004044394A1 Drying apparatus for e.g. semiconductor wafer, has vent unit that controls flow of drying material to uniformly or substantially uniformly dry semiconductor wafer in drying chamber |
| 06/16/2005 | DE102004029103A1 Wärmebehandlungseinrichtung und Wärmebehandlungsverfahren Heat treatment device and heat treatment process |
| 06/16/2005 | DE102004027067A1 Method for manufacturing gate structure for use in semiconductor device |
| 06/16/2005 | DE102004027065A1 Verfahren zur Herstellung einer übereinander geschichteten Gate-Struktur sowie eines damit ausgestatteten Feldeffekttransistors A process for producing a stacked gate structure and a field effect transistor equipped therewith |
| 06/16/2005 | DE10150809B4 Substrathalter Substrate holder |
| 06/16/2005 | DE10123464B4 Verfahren, Computerprogramm und Computerprogrammprodukt zur Prüfung von Layoutstrukturen von integrierten elektrischen Schaltungen A method, computer program and computer program product for testing of layout structures of integrated electrical circuits |
| 06/16/2005 | DE10035430B4 Verfahren und Vorrichtung zur thermischen Behandlung einer Fotolackschicht auf einem Schaltungssubstrat, insbesondere Halbleiterwafer Method and apparatus for thermal treatment of a photoresist layer on a circuit substrate, in particular semiconductor wafers |
| 06/16/2005 | CA2589168A1 Removal of mems sacrificial layers using supercritical fluid/chemical formulations |
| 06/15/2005 | EP1542520A1 Method for forming bump on electrode pad with use of double-layered film |
| 06/15/2005 | EP1542519A1 Method for manufacturing board with built-in device and board with built-in device, and method for manufacturing printed wiring board and printed wiring board |
| 06/15/2005 | EP1542506A1 Wafer holder and system for producing semiconductor |
| 06/15/2005 | EP1542294A1 Organic semiconductor polymer for organic thin film transistor containing quinoxaline ring in the backbone chain |
| 06/15/2005 | EP1542288A1 Method for manufacturing compound semiconductor wafer and compound semiconductor device |
| 06/15/2005 | EP1542284A1 Magnetic non-volatile memory element |
| 06/15/2005 | EP1542282A1 Low-power semiconductor chip with separated power ring, method for manufacturing the same, and method for controlling the same |
| 06/15/2005 | EP1542279A2 Semiconductor device and the method of producing the same |
| 06/15/2005 | EP1542277A2 Electrodes for RRAM memory cells |
| 06/15/2005 | EP1542276A2 Memory cell with a layer having colossal magnetoresistance and an asymmetric area |
| 06/15/2005 | EP1542275A1 A method for improving the quality of a heterostructure |
| 06/15/2005 | EP1542274A1 Protective structure of semiconductor wafer, method for protecting semiconductor wafer, multilayer protective sheet used therein, and method for processing semiconductor wafer |
| 06/15/2005 | EP1542273A1 Circuit-connecting material and circuit terminal connected structure and connecting method |
| 06/15/2005 | EP1542272A2 Semiconductor device and method for manufacturing the same |
| 06/15/2005 | EP1542271A1 Submount and semiconductor device |
| 06/15/2005 | EP1542270A1 Vertical junction field effect transistor and method for fabricating the same |
| 06/15/2005 | EP1542269A1 High-resistance silicon wafer and process for producing the same |
| 06/15/2005 | EP1542268A1 Method of dry etching, dry etching gas and process for producing perfluoro-2-pentyne |
| 06/15/2005 | EP1542267A1 Method and apparatus for polishing wafer |
| 06/15/2005 | EP1542266A1 Semiconductor abrasive, process for producing the same and method of polishing |
| 06/15/2005 | EP1542265A1 Mask and production method therefor and production method for semiconductor device |
| 06/15/2005 | EP1542264A1 Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas |
| 06/15/2005 | EP1542262A1 Processing method and apparatus for removing oxide film |
| 06/15/2005 | EP1542261A1 Method of producing an element comprising an electrical conductor encircled by magnetic material |
| 06/15/2005 | EP1542241A1 Composition for forming organic insulating film and organic insulating film formed from the same |
| 06/15/2005 | EP1542236A2 Apparatus and method of analyzing magnetic random access memory |
| 06/15/2005 | EP1542080A1 Photoresist residue remover composition |
| 06/15/2005 | EP1542079A1 Coating forming agent for reducing pattern dimension and method of forming fine pattern therewith |
| 06/15/2005 | EP1542078A1 Composition for antireflection coating and method for forming pattern |
| 06/15/2005 | EP1542077A1 Process for preventing development defect and composition for use in the same |
| 06/15/2005 | EP1542076A2 Lithographic apparatus and device manufacturing method |
| 06/15/2005 | EP1542075A1 Composition for antireflection film formation |
| 06/15/2005 | EP1542006A1 Impurity measuring method for GE substrates |
| 06/15/2005 | EP1541960A2 Parametric optimization of optical metrology model |
| 06/15/2005 | EP1541709A1 Arrangement for the control of the flow rate of cleaning agents in a recirculation dispositive |
| 06/15/2005 | EP1541686A1 CONSTRUCTION OF ANTIBODY USING MRL/lPR MOUSE |
| 06/15/2005 | EP1541667A1 Technique on ozone water for use in cleaning semiconductor substrate |
| 06/15/2005 | EP1541653A1 High selectivity colloidal silica slurry |
| 06/15/2005 | EP1541524A2 Nanoparticle deposition process |
| 06/15/2005 | EP1541319A1 Device and method for processing carrier tape |
| 06/15/2005 | EP1541284A1 Planarization method |
| 06/15/2005 | EP1540999A1 Capillary tubing |
| 06/15/2005 | EP1540749A2 Organic thin film zener diodes |
| 06/15/2005 | EP1540738A2 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 06/15/2005 | EP1540737A2 Mosfet device having geometry that permits frequent body contact |
| 06/15/2005 | EP1540734A2 Integrated circuit including field effect transistor and method of manufacture |
| 06/15/2005 | EP1540731A2 N-p butting connections on soi substrates |
| 06/15/2005 | EP1540728A2 Forming a multi segment integrated circuit with isolated substrates |
| 06/15/2005 | EP1540727A1 Method for sealing a microcavity and package comprising at least one microcavity |
| 06/15/2005 | EP1540725A1 Semi-conductor component with condensators buried in the substrate and insulated component layer thereof |
| 06/15/2005 | EP1540724A1 Method for forming conductive material in opening and structure regarding same |
| 06/15/2005 | EP1540723A1 A method of increasing the area of a useful layer of material transferred onto a support |
| 06/15/2005 | EP1540721A2 Method for the production of electrodes on a type ii or vi semiconductor material or on a compound of said material |
| 06/15/2005 | EP1540720A2 A semiconductor device and method of fabricating a semiconductor device |
| 06/15/2005 | EP1540719A1 Transistor structure including a metal silicide gate and channel implants and method of manufacturing the same |
| 06/15/2005 | EP1540718A2 Method of forming and/or modifying a dielectric film on a semiconductor surface |
| 06/15/2005 | EP1540717A2 Method for oxidation of a layer and corresponding holder device for a substrate |
| 06/15/2005 | EP1540716A2 Replication and transfer of microstructures and nanostructures |
| 06/15/2005 | EP1540715A1 Formation of lattice-tuning semiconductor substrates |
| 06/15/2005 | EP1540714A2 Barrier coatings produced by atmospheric glow discharge |