Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2005
06/28/2005US6911705 MISFET which constitutes a semiconductor integrated circuit improved in integration
06/28/2005US6911704 Memory cell array with staggered local inter-connect structure
06/28/2005US6911703 Semiconductor integrated circuit device operating with low power consumption
06/28/2005US6911702 Integrated circuitry
06/28/2005US6911700 Semiconductor integrated circuit device including digital and analog circuits comprising electrostatic destruction protection circuits
06/28/2005US6911699 MOS transistor
06/28/2005US6911698 Crystalline semiconductor thin film, method of fabricating the same, semiconductor device, and method of fabricating the same
06/28/2005US6911697 Semiconductor device having a thin fin and raised source/drain areas
06/28/2005US6911695 Transistor having insulating spacers on gate sidewalls to reduce overlap between the gate and doped extension regions of the source and drain
06/28/2005US6911694 Semiconductor device and method for fabricating such device
06/28/2005US6911691 Nonvolatile semiconductor memory device
06/28/2005US6911690 Flash memory cell, flash memory cell array and manufacturing method thereof
06/28/2005US6911689 Versatile system for chromium based diffusion barriers in electrode structures
06/28/2005US6911688 Semiconductor display device and manufacturing method thereof
06/28/2005US6911686 Semiconductor memory device having planarized upper surface and a SiON moisture barrier
06/28/2005US6911685 Thermally-assisted magnetic memory structures
06/28/2005US6911684 Image sensor having micro-lens array separated with trench structures and method of making
06/28/2005US6911683 Semiconductor integrated circuit device
06/28/2005US6911681 Method of base formation in a BiCMOS process
06/28/2005US6911680 Self-aligned thin capacitively-coupled thyristor structure
06/28/2005US6911675 Active matrix display device and manufacturing method thereof
06/28/2005US6911672 Method and apparatus for preparing a plurality of dice in wafers
06/28/2005US6911669 Thin film transistor array panel
06/28/2005US6911668 Array substrate for in-plane switching mode liquid crystal display device
06/28/2005US6911667 Encapsulation for organic electronic devices
06/28/2005US6911666 Flexible metal foil substrate display and method for forming same
06/28/2005US6911665 Superconducting integrated circuit and method for fabrication thereof
06/28/2005US6911663 Transmission circuit and semiconductor device
06/28/2005US6911662 Chemical-mechanical polishing apparatus and method for controlling the same
06/28/2005US6911661 Electron beam exposure apparatus
06/28/2005US6911622 Laser processing
06/28/2005US6911606 Electronic component for adhesion of a plurality of electrodes and method of mounting the same
06/28/2005US6911405 Semiconductor device and method of manufacturing the same
06/28/2005US6911404 Transistor element having an anisotropic high-k gate dielectric
06/28/2005US6911403 Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics
06/28/2005US6911402 Deposition method of a dielectric layer
06/28/2005US6911401 Method for CVD process control for enhancing device performance
06/28/2005US6911400 Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same
06/28/2005US6911399 Method of controlling critical dimension microloading of photoresist trimming process by selective sidewall polymer deposition
06/28/2005US6911398 Method of sequentially processing a plurality of lots each including semiconductor substrates
06/28/2005US6911397 Method of forming dual damascene interconnection using low-k dielectric
06/28/2005US6911396 Method of producing metallic film
06/28/2005US6911395 Method of making borderless contacts in an integrated circuit
06/28/2005US6911394 Semiconductor devices and methods of manufacturing such semiconductor devices
06/28/2005US6911393 Slurries useful in modifying exposed surfaces of wafers for semiconductor fabrication
06/28/2005US6911392 Process for making contact with and housing integrated circuits
06/28/2005US6911391 Integration of titanium and titanium nitride layers
06/28/2005US6911390 Fabrication method for an interconnect on a substrate
06/28/2005US6911389 Self aligned vias in dual damascene interconnect, buried mask approach
06/28/2005US6911387 Bump forming method and apparatus for heating and compressing bump materials inserted in positioning holes
06/28/2005US6911386 Integrated process for fuse opening and passivation process for CU/LOW-K IMD
06/28/2005US6911385 Interface layer for the fabrication of electronic devices
06/28/2005US6911384 Gate structure with independently tailored vertical doping profile
06/28/2005US6911383 Hybrid planar and finFET CMOS devices
06/28/2005US6911382 Method of forming a contact in a semiconductor device utilizing a plasma treatment
06/28/2005US6911381 Boron incorporated diffusion barrier material
06/28/2005US6911380 Method of forming silicon on insulator wafers
06/28/2005US6911379 Method of forming strained silicon on insulator substrate
06/28/2005US6911378 Stabilization of fluorine-containing dielectric materials in a metal insulator wiring structure
06/28/2005US6911377 Wafer cutting using laser marking
06/28/2005US6911376 Selective heating using flash anneal
06/28/2005US6911375 Method of fabricating silicon devices on sapphire with wafer bonding at low temperature
06/28/2005US6911374 Fabrication method for shallow trench isolation region
06/28/2005US6911373 Ultra-high capacitance device based on nanostructures
06/28/2005US6911372 Method of fabricating storage capacitor in semiconductor memory device, and storage capacitor structure
06/28/2005US6911371 Capacitor forming methods with barrier layers to threshold voltage shift inducing material
06/28/2005US6911370 Flash memory device having poly spacers
06/28/2005US6911369 Discontinuity prevention for SiGe deposition
06/28/2005US6911368 Arrangement for preventing short-circuiting in a bipolar double-poly transistor and a method of fabricating such an arrangement
06/28/2005US6911367 Methods of forming semiconductive materials having flattened surfaces; methods of forming isolation regions; and methods of forming elevated source/drain regions
06/28/2005US6911366 Method for forming contact openings on a MOS integrated circuit
06/28/2005US6911365 Capacitor and method for fabricating the same and semiconductor device
06/28/2005US6911364 One-cylinder stack capacitor and method for fabricating the same
06/28/2005US6911363 Semiconductor device and manufacturing method thereof
06/28/2005US6911362 Methods for forming electronic devices including capacitor structures
06/28/2005US6911359 Method for manufacturing a semiconductor device, semiconductor device, display device, and electronic device
06/28/2005US6911358 Method for manufacturing semiconductor device
06/28/2005US6911354 Polymer thin-film transistor with contact etch stops
06/28/2005US6911352 Semiconductor device and method of manufacturing same
06/28/2005US6911351 Method of fabricating nitride semiconductor, method of fabricating nitride semiconductor device, nitride semiconductor device, semiconductor light emitting device and method of fabricating the same
06/28/2005US6911350 Real-time in-line testing of semiconductor wafers
06/28/2005US6911348 Device and method for determining the lateral undercut of a structured surface layer
06/28/2005US6911347 Method to detect surface metal contamination
06/28/2005US6911310 Hybridization of polynucleotides conjugated with chromophores and fluorophores to generate donor-to-donor energy transfer system
06/28/2005US6911297 Comprises acid generator for relief imaging; improved resolution, photospeed, and depth of focus with decreasing line width and film thickness in manufacturing of semiconductors
06/28/2005US6911293 Photoresist compositions comprising acetals and ketals as solvents
06/28/2005US6911292 Novolak resin with 3-27 mol % of the hydroxyl group hydrogens are substituted with 1,2-naphthoquinonediazidosulfonyl ester groups, a methyl vinyl ether-monoalkyl maleate copolymer and optionally, an alkali-soluble cellulose
06/28/2005US6911287 Method and apparatus for measuring process errors and method and apparatus for measuring overlay using the same
06/28/2005US6911286 Photolithographic process used in semiconductor manufacturing
06/28/2005US6911229 Structure comprising an interlayer of palladium and/or platinum and method for fabrication thereof
06/28/2005US6911157 Plasma processing method and apparatus using dynamic sensing of a plasma environment
06/28/2005US6911156 Methods for fabricating MRAM device structures
06/28/2005US6911136 Method for regulating the electrical power applied to a substrate during an immersion process
06/28/2005US6911127 Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces
06/28/2005US6911124 Bombarding tantalum nitride (TaN) layer with voltage forming alpha-tantalum; sputtering; microelectronics; miniaturization; semiconductors
06/28/2005US6911123 Facing-targets-type sputtering apparatus and method
06/28/2005US6911112 Method of and apparatus for performing sequential processes requiring different amounts of time in the manufacturing of semiconductor devices
06/28/2005US6911111 Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning
06/28/2005US6911107 Piezoelectric film type actuator, liquid discharge head, and method of manufacturing the same
06/28/2005US6911101 ACF tape feeder machine, and method for feeding ACF tape