Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2005
06/23/2005US20050138592 Apparatuses and methods to route line to line
06/23/2005US20050138591 Layout device
06/23/2005US20050138581 Semiconductor circuit device simulation method and semiconductor circuit device simulator
06/23/2005US20050138577 Method, apparatus, and article of manufacture for manufacturing high frequency balanced circuits
06/23/2005US20050138510 Scan test circuit
06/23/2005US20050138509 Systems and methods for circuit testing
06/23/2005US20050138507 Semiconductor device and display device
06/23/2005US20050138445 Logic circuit system and method of changing operating voltage of a programmable logic circuit
06/23/2005US20050138262 Flash memory having a high-permittivity tunnel dielectric
06/23/2005US20050137837 Management system and apparatus method therefor, and device manufacturing method
06/23/2005US20050137751 Auto-diagnostic method and apparatus
06/23/2005US20050137736 Fuzzy reasoning model for semiconductor process fault detection using wafer acceptance test data
06/23/2005US20050137734 Method of operating a lithographic apparatus or lithographic processsing cell, lithographic apparatus and lithographic processing cell
06/23/2005US20050137155 RNA interference mediated treatment of Parkinson disease using short interfering nucleic acid (siNA)
06/23/2005US20050137103 Stripper for cured negative-tone isoprene-based photoresist and bisbenzocyclobutene coatings
06/23/2005US20050136850 Wireless communication apparatus and semiconductor device
06/23/2005US20050136806 Apparatus for polishing a semiconductor wafer and method therefor
06/23/2005US20050136804 Method for polishing workpiece, polishing apparatus and method for manufacturing semiconductor device
06/23/2005US20050136801 Cutting machine for plate-shaped material
06/23/2005US20050136762 Laminates of a textile material and a polymer film having regions of differing translucency made by selectively compressing regions of the polymer film; breathable and/or waterproof for garments, tents
06/23/2005US20050136740 Premolded housing
06/23/2005US20050136695 Thin film oxide interface
06/23/2005US20050136694 Method and apparatus for forming thin film
06/23/2005US20050136693 Thermal processing unit and thermal processing method
06/23/2005US20050136692 Material for forming silica based film
06/23/2005US20050136690 Defect control in gate dielectrics
06/23/2005US20050136689 Systems and methods for forming metal oxides using alcohols
06/23/2005US20050136688 Method of inhibiting degradation of gate oxide film
06/23/2005US20050136687 Porous silica dielectric having improved etch selectivity towards inorganic anti-reflective coating materials for integrated circuit applications, and methods of manufacture
06/23/2005US20050136686 Gap-fill method using high density plasma chemical vapor deposition process and method of manufacturing integrated circuit device
06/23/2005US20050136685 Chips, and apparatus and method for reaction analysis
06/23/2005US20050136684 Gap-fill techniques
06/23/2005US20050136683 Method for fabricating semiconductor device without damaging hard mask during contact formation process
06/23/2005US20050136682 Method for plasma etching using periodic modulation of gas chemistry
06/23/2005US20050136681 Method and apparatus for removing photoresist from a substrate
06/23/2005US20050136680 Plasma treatment and etching process for ultra-thin dielectric films
06/23/2005US20050136679 Hydrogen free integration of high-k gate dielectrics
06/23/2005US20050136678 Wet cleaning method to eliminate copper corrosion
06/23/2005US20050136677 Method for making a semiconductor device that includes a metal gate electrode
06/23/2005US20050136676 Method of forming a floating gate for a split-gate flash memory device
06/23/2005US20050136675 Method for forming sublithographic features during the manufacture of a semiconductor device and a resulting in-process apparatus
06/23/2005US20050136674 Method for forming contact hole
06/23/2005US20050136673 CMP slurry
06/23/2005US20050136672 Etching solution composition for metal films
06/23/2005US20050136671 Compositions and methods for low downforce pressure polishing of copper
06/23/2005US20050136670 Compositions and methods for controlled polishing of copper
06/23/2005US20050136669 Slurry for color photoresist planarization
06/23/2005US20050136666 Method and apparatus for etching an organic layer
06/23/2005US20050136665 Method of forming an insulator between features of a semiconductor device
06/23/2005US20050136664 Novel process for improved hot carrier injection
06/23/2005US20050136663 Single-crystal-silicon 3D micromirror
06/23/2005US20050136662 Method to remove fluorine residue from bond pads
06/23/2005US20050136661 Method for fabricating semiconductor device
06/23/2005US20050136660 Method of forming titanium film by CVD
06/23/2005US20050136659 Method of forming cobalt disilicide layer and method of manufacturing semiconductor device using the same
06/23/2005US20050136658 Manufacture of semiconductor device having insulation film of high dielectric constant
06/23/2005US20050136657 Film-formation method for semiconductor process
06/23/2005US20050136656 Process for depositing composite coating on a surface
06/23/2005US20050136655 Method to manufacture silicon quantum islands and single-electron devices
06/23/2005US20050136654 Multiple stage electroless deposition of a metal layer
06/23/2005US20050136653 Non-adhesive semiconductor wafer holder and assembly
06/23/2005US20050136652 Semiconductor interconnection structure with TaN and method of forming the same
06/23/2005US20050136651 Metal interconnection structure of semiconductor device and method of forming the same
06/23/2005US20050136650 Method of manufacturing semiconductor integrated circuit
06/23/2005US20050136649 Method and fabricating semiconductor device
06/23/2005US20050136648 Method and system for forming a contact in a thin-film device
06/23/2005US20050136647 Methods of fabricating contact interfaces
06/23/2005US20050136645 Semiconductor device and fabrication method thereof
06/23/2005US20050136644 Method of fabricating a semiconductor device having metal wiring
06/23/2005US20050136643 Dielectric film forming method for semiconductor device and semiconductor device
06/23/2005US20050136642 Method for fabricating semiconductor device
06/23/2005US20050136641 Solder structures for out of plane connections and related methods
06/23/2005US20050136639 Pin-deposition of conductive inks for microelectrodes and contact via filling
06/23/2005US20050136637 Indium oxide conductive film structures
06/23/2005US20050136636 Method for manufacturing metal structure having different heights
06/23/2005US20050136633 Blocking layer for silicide uniformity in a semiconductor transistor
06/23/2005US20050136632 Implementation of split gate transistor technology with high-k gate dielectrics
06/23/2005US20050136631 Methods for forming vertical gate transistors providing improved isolation and alignment of vertical gate contacts
06/23/2005US20050136630 Methods of forming a pattern for a semiconductor device
06/23/2005US20050136629 Manufacturing method of semiconductor device
06/23/2005US20050136628 Method for implanting ions in semiconductor process and method for fabricating semiconductor device using the same
06/23/2005US20050136627 Method to reduce crystal defects particularly in group III-nitride layers and substrates
06/23/2005US20050136626 Methods of forming a high germanium concentration silicon germanium alloy by epitaxial lateral overgrowth and structures formed thereby
06/23/2005US20050136625 Ultra-thin glass devices
06/23/2005US20050136624 Method for semiconductor device fabrication
06/23/2005US20050136623 Shallow amorphizing implant for gettering of deep secondary end of range defects
06/23/2005US20050136622 Methods and apparatus for laser dicing
06/23/2005US20050136619 Semiconductor devices and methods of forming a trench in a semiconductor device
06/23/2005US20050136618 Method for forming isolation layer of semiconductor device
06/23/2005US20050136617 MOS transistor having protruded-shape channel and method of fabricating the same
06/23/2005US20050136616 Method of fabricating a recess channel array transistor using a mask layer with a high etch selectivity with respect to a silicon substrate
06/23/2005US20050136615 Methods of forming polished material and methods of forming isolation regions
06/23/2005US20050136614 Methods of forming shallow trench isolation
06/23/2005US20050136613 Forming of the periphery of a schottky diode with MOS trenches
06/23/2005US20050136612 Method of forming poly-silicon crystallization
06/23/2005US20050136611 Manufacturing device for buried insulating layer type single crystal silicon carbide substrate
06/23/2005US20050136610 Process for forming oxide film, apparatus for forming oxide film and material for electronic device
06/23/2005US20050136609 Capacitor having an anodic metal oxide substrate
06/23/2005US20050136608 Capacitor having an anodic metal oxide substrate
06/23/2005US20050136607 Methods of fabricating semiconductor devices
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