Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/20/2005US20050233491 Thin-film transistor sheet and manufacturing method thereof
10/20/2005US20050233490 Structure capable of use for generation or detection of electromagnetic radiation, optical semiconductor device, and fabrication method of the structure
10/20/2005US20050233487 Method of fabricating quantum features
10/20/2005US20050233483 Method of manufacturing semiconductor device, acid etching resistance material and copolymer
10/20/2005US20050233482 Method of making contact pin card system
10/20/2005US20050233481 Novel development hastened stability of titanium nitride for APM etching rate monitor
10/20/2005US20050233479 CDA controller and method for stabilizing dome temperature
10/20/2005US20050233478 Structure and method for providing precision passive elements
10/20/2005US20050233477 Substrate processing apparatus, substrate processing method, and program for implementing the method
10/20/2005US20050233476 Method for fabricating ferroelectric capacitive element and ferroelectric capacitive element
10/20/2005US20050233264 Systems and methods for filling voids and improving properties of porous thin films
10/20/2005US20050233259 Resist material and pattern formation method using the same
10/20/2005US20050233257 Forming amorphous carbon layer on semiconductor stack; etching; elimination of intermediate layer
10/20/2005US20050233256 Compositions and methods involving direct write optical lithography
10/20/2005US20050233255 Method for forming pattern
10/20/2005US20050233245 2,4,6-Triisopropylbenzenesulfonate compound capable of generating an acid upon exposure to radiation or electron beams, polymer which changes solubility in alkaline developer under action of acid, and basic compound having high sensitivity, contrast, resolution, storage stability
10/20/2005US20050233242 Photosensitive composition and pattern forming method using the same
10/20/2005US20050233226 Apparatus and method for correcting pattern dimension and photo mask and test photo mask
10/20/2005US20050233225 Ultraviolet exposure irradiates from excimer laser or an fluorine gas laser; contains evaluation section with growable substance
10/20/2005US20050233224 Method of improving polysilicon film crystallinity
10/20/2005US20050233223 Method for using asymmetric OPC structures on line ends of semiconductor pattern layers
10/20/2005US20050233172 Alumina insulation for coating implantable components and other microminiature devices
10/20/2005US20050233159 Method of making a tantalum layer and apparatus using a tantalum layer
10/20/2005US20050233156 System and method for forming multi-component dielectric films
10/20/2005US20050233155 Process for controlling thin film uniformity and products produced thereby
10/20/2005US20050233154 Laser-induced fabrication of metallic interlayers and patterns in polyimide films
10/20/2005US20050233122 Manufacturing method of laminated substrate, and manufacturing apparatus of semiconductor device for module and laminated substrate for use therein
10/20/2005US20050233093 Film formation method and apparatus utilizing plasma CVD
10/20/2005US20050233092 Method of controlling the uniformity of PECVD-deposited thin films
10/20/2005US20050233081 Liquid immersion type exposure apparatus
10/20/2005US20050233079 Introducing a reactive gas into a space near a surface of a substrate to be processed is such a way as to prevent substantial deposition of the metal film, and depositing the metal film on the surface of the substrate from a gaseous phase including a metal carbonyl compound
10/20/2005US20050232749 Method for reciprocating a workpiece through an ion beam
10/20/2005US20050232748 Reciprocating drive for scanning a workpiece
10/20/2005US20050232744 Transport apparatus, control method for the same, and vacuum processing system
10/20/2005US20050232735 Apparatus and method for inspecting an inspection object
10/20/2005US20050232734 Small lot size substrate carriers
10/20/2005US20050232728 Methods and apparatus for transferring conductive pieces during semiconductor device fabrication
10/20/2005US20050232727 Work-piece processing system
10/20/2005US20050232641 Methods for manufacturing lead frame connectors for optical transceiver modules
10/20/2005US20050232493 Pattern search method
10/20/2005US20050232479 Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects
10/20/2005US20050232477 Defect inspection apparatus and defect inspection method
10/20/2005US20050232333 On chip temperature measuring and monitoring circuit and method
10/20/2005US20050232312 Wireless communication apparatus and base station detection method
10/20/2005US20050232053 Semiconductor integrated circuit device
10/20/2005US20050232051 Dual-level stacked flash memory cell with a MOSFET storage transistor
10/20/2005US20050232045 Semiconductor device having a low-resistance bus interconnect, method of manufacturing same, and display apparatus employing same
10/20/2005US20050232044 Semiconductor memory device
10/20/2005US20050232040 Test method for a semiconductor memory
10/20/2005US20050232026 Ultraviolet erasable semiconductor memory device
10/20/2005US20050232016 Flash memory cell structure and operating method thereof
10/20/2005US20050232015 Non-volatile semiconductor memory and manufacturing method thereof
10/20/2005US20050232009 CMIS semiconductor nonvolatile storage circuit
10/20/2005US20050232008 Semiconductor integrated circuit and nonvolatile memory element
10/20/2005US20050232006 Magnetic random access memory
10/20/2005US20050232003 MRAM including unit cell formed of one transistor and two magnetic tunnel junctions (MTJs) and method for fabricating the same
10/20/2005US20050232001 Semiconductor integrated circuit device and magnetic memory device capable of maintaining data integrity
10/20/2005US20050231993 Multi-bit ROM cell, for storing one of n>4 possible states and having bi-directional read, an array of such cells, and a method for making the array
10/20/2005US20050231991 Semiconductor device having a power down mode
10/20/2005US20050231990 Semiconductor device
10/20/2005US20050231925 Semiconductor device and method for manufacturing the same
10/20/2005US20050231911 Interface module-mounted LSI package
10/20/2005US20050231887 Electrostatic chucks having barrier layer
10/20/2005US20050231886 Substrate attaching device and method
10/20/2005US20050231867 Electrostatic protection circuit
10/20/2005US20050231863 Data carrier comprising an integrated circuit with an esd protection circuit
10/20/2005US20050231814 Refractive projection objective for immersion lithography
10/20/2005US20050231733 Non-destructive testing system
10/20/2005US20050231732 Method of measuring overlay
10/20/2005US20050231721 Wafer pre-alignment apparatus and method
10/20/2005US20050231719 Optical inspection equipment for semiconductor wafers with precleaning
10/20/2005US20050231707 Removable reticle window and support frame using magnetic force
10/20/2005US20050231704 Device manufacturing method
10/20/2005US20050231703 Exposure apparatus, and device manufacturing method
10/20/2005US20050231702 Exposure apparatus and exposure method, and device manufacturing method using the same
10/20/2005US20050231701 Lithographic apparatus and device manufacturing method
10/20/2005US20050231699 Lithographic apparatus,control system and device manufacturing method
10/20/2005US20050231698 Method of measuring alignment of a substrate with respect to a reference alignment mark
10/20/2005US20050231697 Exposure apparatus and device manufacturing method including gas purging of a space containing optical components
10/20/2005US20050231695 Method and system for immersion lithography using high PH immersion fluid
10/20/2005US20050231694 Lithographic apparatus and device manufacturing method
10/20/2005US20050231671 Vertically aligned mode liquid crystal display
10/20/2005US20050231668 Liquid crystal display and fabricating method thereof
10/20/2005US20050231536 Device with gates configured in loop structures
10/20/2005US20050231405 Semiconductor integrated circuit
10/20/2005US20050231372 Device for remote identification of parts
10/20/2005US20050231304 Integrated passive devices fabricated utilizing multi-layer, organic laminates
10/20/2005US20050231302 Coupler detector
10/20/2005US20050231268 Threshold voltage detector for process effect compensation
10/20/2005US20050231262 Semiconductor integrated circuit and a burn-in method thereof
10/20/2005US20050231226 Low-current probe card
10/20/2005US20050231225 Semiconductor probe with resistive tip and method of fabricating the same, and information recording apparatus, information reproducing apparatus, and information measuring apparatus having the semiconductor probe
10/20/2005US20050231223 Membrane probing system with local contact scrub
10/20/2005US20050231190 [auto-recovery wafer testing apparatus and wafer testing method]
10/20/2005US20050231141 Moving apparatus, exposure apparatus, and device manufacturing method
10/20/2005US20050231043 Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method
10/20/2005US20050230892 Semiconductor workpiece apparatus
10/20/2005US20050230853 Led chip mounting structure and image reader having same
10/20/2005US20050230851 Display device
10/20/2005US20050230848 Component built-in module and method for producing the same
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