Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2005
11/01/2005US6960834 Semiconductor device having multi-layer interconnection structure and method of manufacturing the same
11/01/2005US6960832 Semiconductor device and its production process
11/01/2005US6960830 Semiconductor integrated circuit device with dummy bumps
11/01/2005US6960829 Method for producing a semiconductor wafer, semiconductor chip, and intermediate semiconductor product
11/01/2005US6960828 Electronic structures including conductive shunt layers
11/01/2005US6960823 Semiconductor device and method of manufacturing the same
11/01/2005US6960821 Method and apparatus on (110) surfaces of silicon structures with conduction in the <110> direction
11/01/2005US6960820 Bipolar transistor self-alignment with raised extrinsic base extension and methods of forming same
11/01/2005US6960818 Recessed shallow trench isolation structure nitride liner and method for making same
11/01/2005US6960815 Magnetic memory device having yoke layer, and manufacturing method thereof
11/01/2005US6960813 Method and apparatus for cutting devices from substrates
11/01/2005US6960812 Method of forming an oxide film
11/01/2005US6960810 Self-aligned body tie for a partially depleted SOI device structure
11/01/2005US6960809 Polysilicon thin film transistor and method of forming the same
11/01/2005US6960808 Semiconductor device having a lower parasitic capacitance
11/01/2005US6960806 Double gated vertical transistor with different first and second gate materials
11/01/2005US6960805 Flash memory cell and method of manufacturing the same, and programming/erasing/reading method in the flash memory cell
11/01/2005US6960804 Semiconductor device having a gate structure surrounding a fin
11/01/2005US6960803 Landing pad for use as a contact to a conductive spacer
11/01/2005US6960802 Performing passive voltage contrast on a silicon on insulator semiconductor device
11/01/2005US6960801 High density single transistor ferroelectric non-volatile memory
11/01/2005US6960800 Semiconductor device and method for fabricating the same
11/01/2005US6960799 Image sensor with a photodiode array
11/01/2005US6960798 High-voltage semiconductor component
11/01/2005US6960797 Semiconductor device
11/01/2005US6960795 Pixel sensor cell for use in an imaging device
11/01/2005US6960793 Semiconductor integrated circuit
11/01/2005US6960789 Layout of a thin film transistor and the forming method thereof
11/01/2005US6960788 Image recognition device and liquid crystal display apparatus having the same
11/01/2005US6960787 Semiconductor device and method for manufacturing the same
11/01/2005US6960786 Display device
11/01/2005US6960785 MOSFET and method of fabricating the same
11/01/2005US6960782 Electronic devices with fullerene layers
11/01/2005US6960781 Shallow trench isolation process
11/01/2005US6960775 first illumination system for beam of ultraviolet radiation, support structure for patterning device, projection system and second illumination system for a compensating beam; critical dimension profile correction; integrated circuit maufacture
11/01/2005US6960767 Apparatus for measuring features of a semiconductor device
11/01/2005US6960765 Probe driving method, and probe apparatus
11/01/2005US6960764 Method of measuring the performance of a scanning electron microscope
11/01/2005US6960743 Ceramic substrate for semiconductor manufacturing, and method of manufacturing the ceramic substrate
11/01/2005US6960739 Scribing sapphire substrates with a solid state UV laser
11/01/2005US6960541 Process for fabrication of a semiconductor component having a tungsten oxide layer
11/01/2005US6960540 Film formation method, semiconductor element and method thereof, and method of manufacturing a disk-shaped storage medium
11/01/2005US6960539 Substrate for electronic devices, manufacturing method therefor, and electronic device
11/01/2005US6960538 Composite dielectric forming methods and composite dielectrics
11/01/2005US6960537 Incorporation of nitrogen into high k dielectric film
11/01/2005US6960536 Method for producing integrated microsystems
11/01/2005US6960535 Dual damascene etching process
11/01/2005US6960534 Method for controlling the temperature of a gas distribution plate in a process reactor
11/01/2005US6960533 Method of processing a sample surface having a masking material and an anti-reflective film using a plasma
11/01/2005US6960532 Suppressing lithography at a wafer edge
11/01/2005US6960531 Method of manufacturing electronic device
11/01/2005US6960530 Method of reducing the aspect ratio of a trench
11/01/2005US6960529 Methods for sidewall protection of metal interconnect for unlanded vias using physical vapor deposition
11/01/2005US6960528 Method of forming a nanotip array in a substrate by forming masks on portions of the substrate and etching the unmasked portions
11/01/2005US6960527 Method for fabricating non-volatile memory device having sidewall gate structure and SONOS cell structure
11/01/2005US6960526 Method of fabricating sub-100 nanometer field emitter tips comprising group III-nitride semiconductors
11/01/2005US6960525 Method of forming metal plug
11/01/2005US6960524 Method for production of a metallic or metal-containing layer
11/01/2005US6960523 Method of reducing erosion of a nitride gate cap layer during reactive ion etch of nitride liner layer for bit line contact of DRAM device
11/01/2005US6960522 Method for making damascene interconnect with bilayer capping film
11/01/2005US6960521 Method and apparatus for polishing metal and dielectric substrates
11/01/2005US6960520 Method for forming metal lines in a semiconductor device
11/01/2005US6960519 Interconnect structure improvements
11/01/2005US6960518 Buildup substrate pad pre-solder bump manufacturing
11/01/2005US6960517 N-gate transistor
11/01/2005US6960516 Semiconductor device and fabrication process thereof
11/01/2005US6960515 Method of forming a metal gate
11/01/2005US6960514 Pitcher-shaped active area for field effect transistor and method of forming same
11/01/2005US6960513 Capacitor having an electrode formed from a transition metal or a conductive metal-oxide, and method of forming same
11/01/2005US6960512 Method for manufacturing a semiconductor device having an improved disposable spacer
11/01/2005US6960511 Semiconductor device and method of manufacturing the same
11/01/2005US6960510 Method of making sub-lithographic features
11/01/2005US6960509 Method of fabricating three dimensional gate structure using oxygen diffusion
11/01/2005US6960508 MOS transistor and method of manufacturing the same
11/01/2005US6960507 Vertical double-channel silicon-on-insulator transistor and method of manufacturing the same
11/01/2005US6960506 Method of fabricating a memory device having a self-aligned contact
11/01/2005US6960505 Method for manufacturing a multi-bit memory cell
11/01/2005US6960504 Method for fabricating capacitor
11/01/2005US6960503 Method for fabricating a trench capacitor
11/01/2005US6960502 Semiconductor device fabrication method
11/01/2005US6960501 Method of manufacturing a semiconductor memory device having a non-volatile memory cell portion with single misfet transistor type memory cells and a peripheral circuit portion with misfets
11/01/2005US6960500 Semiconductor device and method of manufacturing the same including forming metal silicide gate lines and source lines
11/01/2005US6960499 Dual-counterdoped channel field effect transistor and method
11/01/2005US6960498 Doping method, doping apparatus, and control system for doping apparatus
11/01/2005US6960497 Method for forming pi-type assistant electrode
11/01/2005US6960496 Method of damascene process flow
11/01/2005US6960495 Method for making contacts in a high-density memory
11/01/2005US6960494 Semiconductor package and method of manufacturing the same
11/01/2005US6960493 Semiconductor device package
11/01/2005US6960492 Semiconductor device having multilayer wiring and manufacturing method therefor
11/01/2005US6960491 Integrated circuit packaging for improving effective chip-bonding area
11/01/2005US6960490 Method and resulting structure for manufacturing semiconductor substrates
11/01/2005US6960489 Method for structuring an OFET
11/01/2005US6960487 Method for manufacturing a dynamic quantity detection device
11/01/2005US6960484 Method of manufacturing liquid crystal display device
11/01/2005US6960482 Method of fabricating nitride semiconductor and method of fabricating semiconductor device
11/01/2005US6960481 Evaluation method
11/01/2005US6960480 Method of forming a magnetic tunneling junction (MTJ) MRAM device and a tunneling magnetoresistive (TMR) read head
11/01/2005US6960479 Stacked ferroelectric memory device and method of making same
11/01/2005US6960420 Photosensitive resin composition, process for forming relief pattern, and electronic component
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