Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/19/2005EP1586119A2 An enhancement mode metal-oxide-semiconductor field effect transistor and method for forming the same
10/19/2005EP1586118A2 Embedded capacitor associated with a sram cell
10/19/2005EP1586117A1 Method for producing microsystems
10/19/2005EP1586116A1 Method of manufacturing semiconductor device and cutting apparatus for cutting semiconductor wafer
10/19/2005EP1586115A1 A layer transfer method
10/19/2005EP1586114A2 Manipulation of objects with fluid droplets
10/19/2005EP1586113A1 Method for producing a defined doping region in a semiconductor material
10/19/2005EP1586112A2 Binder diffusion patterning of a thick film paste layer
10/19/2005EP1586111A1 Wirebonding method and apparatus
10/19/2005EP1586110A2 Feedthrough design and method for a hermetically sealed microdevice
10/19/2005EP1586109A2 Semiconductor photodetector with internal reflector
10/19/2005EP1586108A1 Finfet sram cell using inverted finfet thin film transistors
10/19/2005EP1586008A2 Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same
10/19/2005EP1586007A2 Electron beam processing for mask repair
10/19/2005EP1552526A4 Magnetic element utilizing spin transfer and an mram device using the magnetic element
10/19/2005EP1348134B1 Weighted random pattern test using pre-stored weights
10/19/2005EP1299210B1 Polishing pad grooving method and apparatus
10/19/2005EP1289834A4 Peroxide preservation
10/19/2005EP1284842B1 Polishing pads for chemical mechanical planarization
10/19/2005EP1210734B1 Capacitor-over-bit line memory circuitry
10/19/2005EP1183735B1 Non-volatile semiconductor memory cell, comprising a metal-oxide dielectric and a method for producing the same
10/19/2005EP1171920A4 Electrically programmable memory element with improved contacts
10/19/2005EP1166363A4 Trench dmos transistor structure having a low resistance path to a drain contact located on an upper surface
10/19/2005EP1166343B1 Improvements relating to annealing
10/19/2005EP1121205B1 Method for cleaning low k dielectric polymer wafer surfaces
10/19/2005EP1118867B1 Method for testing a CMOS integrated circuit
10/19/2005EP1118104B1 Assembly device
10/19/2005EP1105880B1 Method and apparatus for providing an embedded flash-eeprom technology
10/19/2005EP1080170B1 Cleaning composition and method for removing residues
10/19/2005EP1050070B1 Exposure apparatus with holding device for a substrate
10/19/2005CN2735539Y 成膜装置 Film forming apparatus
10/19/2005CN2735356Y Double-probe 3D micromotion coupling test bench for optoelectronic device die
10/19/2005CN1685599A Electrostatic holding device
10/19/2005CN1685532A Zn semiconductor light-emitting device and method for manufacturing same
10/19/2005CN1685526A Spin transistor using spin filter effect and nonvolatile memory using spin transistor
10/19/2005CN1685525A Dielectric storage memory cell having high permittivity top dielectric and method therefor
10/19/2005CN1685524A Semiconductor device and its manufacturing method
10/19/2005CN1685523A Finfet having improved carrier mobility and method of its formation
10/19/2005CN1685522A Integrated field-effect transistor comprising two control regions and method for producing the same
10/19/2005CN1685520A MOSFETs incorporating nickel germanosilicided gate and methods of their formation
10/19/2005CN1685517A Indium-boron dual halo implant for MOSFET
10/19/2005CN1685515A Semiconductor integrated device and method for manufacturing same
10/19/2005CN1685514A Solid state imaging device and manufacturing method therefor
10/19/2005CN1685512A Method for fabricating ferroelectric capacitor
10/19/2005CN1685511A Semiconductor device including a field effect transistor and a passive capacitor having reduced leakage current and an improved capacitance per unit area
10/19/2005CN1685507A Method for producing a component comprising a conductor structure that is suitable for use at high frequencies
10/19/2005CN1685501A Resin-made adhesive for assembling semiconductor device
10/19/2005CN1685497A Rapid annealing process for wafers in semiconductor material
10/19/2005CN1685496A Recycling a wafer comprising a buffer layer, after having separated a thin layer therefrom
10/19/2005CN1685495A Method and apparatus for controlling a fabrication process based on a measured electrical characteristic
10/19/2005CN1685494A Process control at an interconnect level
10/19/2005CN1685493A A hollow microprobe using a mems technique and a method of manufacturing the same
10/19/2005CN1685492A Comprehensive integrated lithographic process control system based on product design and yield feedback system
10/19/2005CN1685491A Joining apparatus
10/19/2005CN1685490A Bonding device and method
10/19/2005CN1685489A Method for forming bumps, semiconductor device and method for manufacturing same, substrate processing apparatus, and semiconductor manufacturing apparatus
10/19/2005CN1685488A Method of manufacturing an electronic device comprising a thin film transistor
10/19/2005CN1685487A Methods to planarize semiconductor device and passivation layer
10/19/2005CN1685486A Methods for producing silicon nitride films and silicon oxynitride films by thermal chemical vapor deposition
10/19/2005CN1685485A Substrate processing apparatus
10/19/2005CN1685484A Substrate processing apparatus
10/19/2005CN1685483A 蚀刻方法 Etching method
10/19/2005CN1685482A 抛光方法 Polishing method
10/19/2005CN1685481A Equipment and method for manufacturing semiconductor device
10/19/2005CN1685480A Control of contact resistance in quantum well intermixed devices
10/19/2005CN1685479A Linearly focused laser-annealing of buried species
10/19/2005CN1685478A Two layer LTO backside seal for a wafer
10/19/2005CN1685477A Heat treatment apparatus
10/19/2005CN1685476A Heat treatment system and heat treatment method
10/19/2005CN1685475A MIM capacitor structures and fabrication methods in dual-damascene structures
10/19/2005CN1685474A Process and system for laser crystallization processing of film regions on a substrate to minimize edge areas, and structure of such film regions
10/19/2005CN1685473A Electrostatic chuck having a low level of particle generation and method of fabricating same
10/19/2005CN1685472A System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold
10/19/2005CN1685471A Methods and systems for processing a substrate using a dynamic liquid meniscus
10/19/2005CN1685470A Device and method for applying semiconductor chips to carriers
10/19/2005CN1685465A Method and apparatus for an improved deposition shield in a plasma processing system
10/19/2005CN1685450A Current-carrying electronic component and method of manufacturing same
10/19/2005CN1685443A Novel monolithic, combo nonvolatile memory
10/19/2005CN1685442A Contactless uniform-tunneling separate P-well (CUSP) non-volatile memory array architecture, fabrication and operation
10/19/2005CN1685284A Multi-image reticles
10/19/2005CN1685180A 气体加热方法和气体加热设备 Gas heating method and gas heating equipment
10/19/2005CN1685090A Ⅲ-v化合物半导体晶体 Ⅲ-v compound semiconductor crystals
10/19/2005CN1685089A Method and apparatus for forming epitaxial layers
10/19/2005CN1685088A Process and system for laser crystallization processing of film regions on a substrate to provide substantial uniformity within areas in such regions and edge areas thereof, and a structure of such fi
10/19/2005CN1685086A Electropolishing and electroplating methods
10/19/2005CN1685082A Thin film of oxidic materials having a high dielectric constant
10/19/2005CN1685081A 无电解镀方法 Electroless plating method
10/19/2005CN1685080A Substrate processing apparatus and substrate processing method
10/19/2005CN1684803A Automatic reference position teaching method, automatic positioning method, and automatic carrying method for disk-like object, automatic reference position teaching device, automatic positioning devi
10/19/2005CN1684800A Polishing apparatus, polishing head, and polishing method
10/19/2005CN1684799A Polishing pad for planarization
10/19/2005CN1684798A Polishing pad with window for planarization
10/19/2005CN1684573A Mounting substrate and mounting method of electronic part
10/19/2005CN1684557A 光发射装置及其制造方法 A light emitting device and manufacturing method
10/19/2005CN1684351A Voltage detection circuit, power supply unit and semiconductor device
10/19/2005CN1684282A Silicon light emitting device and method of manufacturing the same
10/19/2005CN1684276A Serial tellurium-cadmium-mercury infrared material and its preparing method and use
10/19/2005CN1684275A Thin film material for sunlight blind area ultraviolet detector and its producing method
10/19/2005CN1684274A Method for using drain coupling to suppress the second bit effect of localized split floating gate devices
10/19/2005CN1684273A Thin film transistor and its producing method