Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/27/2005DE102004012818B3 Verfahren zum Herstellen eines Leistungshalbleiterbauelements Method for producing a power semiconductor component
10/27/2005DE102004012618B3 Vorrichtung und Verfahren zum Aufbringen einer Folie auf eine Kontaktfläche eines Wafers Apparatus and method for applying a film to a contact surface of a wafer
10/27/2005DE10052692B4 Bauteilhandhabungsvorrichtung Component handling device
10/27/2005CA2847260A1 Methods for fabricating isolated micro- and nano- structures using soft or imprint lithography
10/27/2005CA2568789A1 Method of three-dimensional microfabrication and high-density three-dimensional fine structure
10/27/2005CA2564124A1 Laser processing apparatus
10/27/2005CA2562428A1 Polymerase chain reaction using metallic glass-coated microwire
10/27/2005CA2549341A1 Methods for fabricating isolated micro- and nano- structures using soft or imprint lithography
10/26/2005EP1589797A2 Manufacturing method of laminated substrate, and manufacturing apparatus of semiconductor device for module and laminated substrate for use therein
10/26/2005EP1589792A2 Light source apparatus and exposure apparatus having the same
10/26/2005EP1589594A1 Cpp-type giant manetoresistance effect element and magnetic component and magnetic device using it
10/26/2005EP1589585A1 Semiconductor device and its manufacturing method
10/26/2005EP1589580A1 Soi wafer and production method therefor
10/26/2005EP1589575A2 Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions
10/26/2005EP1589574A2 Methods of forming capacitators, methods of forming capacitator-over-bit line memory circuitry, and related integrated circuitry constructions
10/26/2005EP1589573A2 Method for patterning cavities and enhanced cavity shapes for semiconductor devices
10/26/2005EP1589572A1 Process of making an integrated circuit comprising shallow trench isolation and corresponding integrated circuit
10/26/2005EP1589571A1 Semiconductor device and method of manufacturing the same
10/26/2005EP1589570A1 Semiconductor device and process for producing the same
10/26/2005EP1589569A2 Injection casting system for encapsulating semiconductor devices and method of use
10/26/2005EP1589568A2 Selective treatment of the surface of a microelectronic workpiece
10/26/2005EP1589567A1 Member for plasma etching device and method for manufacture thereof
10/26/2005EP1589566A2 Ferroelectric capacitor, ferroelectric memory, piezoelectric element, liquid jet head, and printer
10/26/2005EP1589565A1 Apparatus for transporting substrates under controlled environment
10/26/2005EP1589564A1 Transport box comprising a thermophoresis protection effect
10/26/2005EP1589379A2 Optical illumination system, exposure apparatus and device fabrication method
10/26/2005EP1589378A2 Exposure apparatus and exposure method and device manufacturing method using the same
10/26/2005EP1589375A1 Resist composition
10/26/2005EP1589129A1 Controlled cooling of sputter targets
10/26/2005EP1589086A1 Adhesive sheet and layered product
10/26/2005EP1589085A1 Pressure sensitive adhesive sheet, method of protecting semiconductor wafer surface and method of processing work
10/26/2005EP1588665A2 Detector array and assembly method
10/26/2005EP1588500A1 Receiver system and method for reduced swing differential clock
10/26/2005EP1588453A1 Varactor apparatuses and methods
10/26/2005EP1588422A1 Narrow fin finfet
10/26/2005EP1588421A2 Floating gate isolation and method of making
10/26/2005EP1588418A1 Soi structure comprising substrate contacts on both sides of the box, and method for the production of such a structure
10/26/2005EP1588417A2 Method for producing bit lines for ucp flash memories
10/26/2005EP1588416A1 Recycling of a wafer comprising a multi-layer structure after taking-off a thin layer
10/26/2005EP1588415A1 Recycling by mechanical means of a wafer comprising a taking-off structure after taking-off a thin layer thereof
10/26/2005EP1588414A2 Method for producing a semiconductor component
10/26/2005EP1588413A2 Method and apparatus for the use of self-assembled nanowires for the removal of heat from integrated circuits
10/26/2005EP1588412A1 Diffusion barrier and method therefor
10/26/2005EP1588411A2 Repair and restoration of damaged dielectric materials and films
10/26/2005EP1588410A1 A method of improving stability in low k barrier layers
10/26/2005EP1588409A1 Thin-film semiconductor component and production method for said component
10/26/2005EP1588408A1 SiGe STRAIN RELAXED BUFFER FOR HIGH MOBILITY DEVICES AND A METHOD OF FABRICATING IT
10/26/2005EP1588407A2 Area array package with non-electrically connected solder balls
10/26/2005EP1588406A2 Semiconductor structures with structural homogeneity
10/26/2005EP1588405A2 Carrier, holder, laser cutting device and method for separating semiconductor products using laser light
10/26/2005EP1588404A2 Wafer handling apparatus
10/26/2005EP1588403A2 Low-gidl mosfet structure and method for fabrication
10/26/2005EP1588402A1 Chip transfer method and apparatus
10/26/2005EP1588401A2 Cooling apparatus having low profile extrusion and method of manufacture therefore
10/26/2005EP1588362A1 Method of manufacturing an optical data storage medium, optical data storage medium and apparatus for performing said method
10/26/2005EP1588254A2 Analysis and monitoring of stresses in embedded lines and vias integrated on substrates
10/26/2005EP1588219A2 Semiconductor fabrication method for making small features
10/26/2005EP1587604A1 Process for decomposing fluorine compounds
10/26/2005EP1549357A4 Workpiece processing system
10/26/2005EP1532193A4 Organosiloxanes
10/26/2005EP1488426B1 Method for producing a reference layer and an mram memory cell provided with said type of reference layer
10/26/2005EP1485724B1 Scatterometry structure with embedded ring oscillator, and methods of using same
10/26/2005EP1483637B1 System for brokering fault detection data
10/26/2005EP1425754B1 Compensation of a bias magnetic field in a storage surface of a magnetoresistive storage cell
10/26/2005EP1393133B1 Projection system for euv lithography
10/26/2005EP1316108A4 Low-dielectric silicon nitride film and method of forming the same, semiconductor device and fabrication process thereof
10/26/2005EP1311368B1 Polishing apparatus and methods controlling the polishing pressure as a function of the overlapping area between the polishing head and the semiconductor substrate
10/26/2005EP1264329B1 Plasma deposition method and system
10/26/2005EP1242557B1 Method of polishing or planarizing a substrate
10/26/2005EP1074041B1 A high temperature multi-layered alloy heater assembly
10/26/2005EP1031166B1 Method and apparatus for chemical mechanical polishing
10/26/2005EP0963606B1 An integrated circuit which uses a recessed local conductor for producing staggered interconnect lines
10/26/2005EP0932907B1 A stabilized polysilicon resistor and a method of manufacturing it
10/26/2005EP0902968B1 Stabilization of the interface between tin and al alloys
10/26/2005EP0813243B1 Material for a semiconductor device carrier substrate and method of producing the same
10/26/2005CN2736934Y SRAM and semiconductor component
10/26/2005CN2736921Y Reverse bias architecture of standard component unit
10/26/2005CN1689181A Fixtures and methods for facilitating the fabrication of devices having thin film materials
10/26/2005CN1689169A Heterojunction field effect transistors using silicon-germanium and silicon-carbon alloys
10/26/2005CN1689167A Insulated gate field-effect transistor and its manufacturing method, and imaging device and its manufacturing method
10/26/2005CN1689165A Non-volatile memory device and method for forming
10/26/2005CN1689164A CMOS APS with stacked avalanche multiplication layer and low voltage readout electronics
10/26/2005CN1689162A High-density NROM-FINFET
10/26/2005CN1689160A Semiconductor storage device and its manufacturing method
10/26/2005CN1689159A Semiconductor integrated circuit device and method for controlling semiconductor integrated circuit device
10/26/2005CN1689155A Discrete semiconductor component
10/26/2005CN1689152A Method for forming metal-metal oxide etch stop/electric transfer screen for integrated circut interconnects and device
10/26/2005CN1689151A Method of manufacturing a semiconductor device with field isolation regions consisting of grooves filled with isolating material
10/26/2005CN1689150A Method for eliminating voiding in plated solder
10/26/2005CN1689149A Field effect transistor with local source/drain insulation and associated method of production
10/26/2005CN1689148A Annealed wafer and annealed wafer manufacturing method
10/26/2005CN1689147A Method for forming high dielectric film
10/26/2005CN1689146A Semiconductor device and method for fabricating the same
10/26/2005CN1689145A Laser machinining
10/26/2005CN1689144A Isolated complementary MOS devices in epi-less substrate
10/26/2005CN1689143A Atomic layer deposition of CMOS gates
10/26/2005CN1689142A Method and compositions for hardening photoresist in etching processes
10/26/2005CN1689141A Substrate carrier having door latching and substrate clamping mechanisms
10/26/2005CN1689140A Method and apparatus for supplying substrates to a processing tool
10/26/2005CN1689139A Atomic layer deposition methods and atomic layer deposition device
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