Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/13/2005WO2005096354A1 Exposure apparatus, exposure method, device manufacturing method, and surface shape detecting device
10/13/2005WO2005096353A1 Alignment condition decision method and device, and exposure method and device
10/13/2005WO2005096352A2 Silicon-germanium thin layer semiconductor structure with variable silicon-germanium composition and method of fabrication
10/13/2005WO2005096351A2 Fabrication and use of superlattice
10/13/2005WO2005096349A1 Device for separating and positioning module bridges
10/13/2005WO2005096321A1 Patterned substrate and method for producing same
10/13/2005WO2005096312A1 Mram based on vertical current writing and its control method
10/13/2005WO2005096101A1 Exposure equipment
10/13/2005WO2005096100A1 Radiation-sensitive composition, laminate, process for producing the sane and electronic part
10/13/2005WO2005096047A1 Silicon optoelectronic device
10/13/2005WO2005096006A1 Sensor and inspection device using the sensor
10/13/2005WO2005095936A1 An integrated electronic sensor
10/13/2005WO2005095679A2 Sequential lithographic methods to reduce stacking fault nucleation sites and structures having reduced stacking fault nucleation sites
10/13/2005WO2005095670A2 Remote chamber methods for removing surface deposits
10/13/2005WO2005095669A1 Apparatus and process for producing thin films and devices
10/13/2005WO2005095056A1 Cmp conditioner
10/13/2005WO2005095023A1 Pouring apparatus for molten metal and casting method
10/13/2005WO2005094534A2 A semiconductor device having a silicided gate electrode and method of manufacture therefor
10/13/2005WO2005094515A2 Structure and method for contact pads having an overcoat-protected bondable metal plug over copper-metallized integrated circuits
10/13/2005WO2005094482A2 Tray for storing and transporting semi-conductor and other microelectronic components
10/13/2005WO2005094398A2 Method and system for correcting a fault in a semiconductor manufacturing system
10/13/2005WO2005094320A2 Method of separating layers of material using a laser beam
10/13/2005WO2005094316A2 Low optical overlap mode (loom) waveguiding system and method of making same
10/13/2005WO2005094299A2 Improved cmos transistors and methods of forming same
10/13/2005WO2005094254A2 Crystalline-type device and approach therefor
10/13/2005WO2005094244A2 System, method and apparatus for self-cleaning dry etch
10/13/2005WO2005094240A2 Reconfigurable processor module with stacked die elements
10/13/2005WO2005081066A8 Rectangular contact lithography for circuit performance improvement
10/13/2005WO2005076165A9 Method of automatically generating the structures from mask layout
10/13/2005WO2005075339A3 Novel nanostructures and method for selective preparation
10/13/2005WO2005069379A3 Method for depinning the fermi level of a semiconductor at an electrical junction and devices incorporating such junctions
10/13/2005WO2005065255A3 Semiconductor chip package
10/13/2005WO2005057663A3 Method and apparatus for fabrication of metal-oxide semiconductor integrated circuit devices
10/13/2005WO2005057662A3 Method and apparatus for fabricating ultra-shallow junction metal-oxide semiconductor integrated circuit devices.
10/13/2005WO2005050729A9 Rapid thermal processing system
10/13/2005WO2005048316A3 Teardrop shaped lead frames
10/13/2005WO2005042810A3 Membrane -mediated electropolishing
10/13/2005WO2004105086A3 Schotty-barrier tunneling transistor
10/13/2005WO2004061948A3 Method for forming a semiconductor device and structure thereof
10/13/2005WO2003032369A3 Correction of overlay offset between inspection layers
10/13/2005US20050229146 Data storage method and data storage device
10/13/2005US20050229121 Verification of integrated circuit tests using test simulation and integrated circuit simulation with simulated failure
10/13/2005US20050229067 Semiconductor integrated circuit
10/13/2005US20050229065 Semiconductor integrated ciruit which properly executes an operational test of a circuit under test in the semiconductor integrated circuit
10/13/2005US20050229063 Fault position identification system for a semiconductor device and method of identifying a fault position of a semiconductor device
10/13/2005US20050229058 Semiconductor intergrated circuit
10/13/2005US20050229050 Semiconductor device
10/13/2005US20050228606 Method in an integrated circuit (IC) manufacturing process for identifying and redirecting ICs mis-processed during their manufacture
10/13/2005US20050228542 Auto-calibration method and device for wafer handler robots
10/13/2005US20050228530 Automatic N2 purge system for 300mm full automation fab
10/13/2005US20050228166 Anomalous expansion materials
10/13/2005US20050227888 Ammonium hydroxide and N,N'-Bis(o-hydroxyphenyl)ethylenediiminodiacetic acid and optionally H2O2, H2O, and a surfactant; removes aluminum and iron contamination efficiently without etching too much oxide.
10/13/2005US20050227591 Processing tool, method of producing processing tool, processing method and processing apparatus
10/13/2005US20050227570 Cold cathode field emission device and process for the production thereof, and cold cathode field emission display and process for the production thereof
10/13/2005US20050227504 Method for crystallizing semiconductor with laser beams
10/13/2005US20050227503 Method and device for conditioning semiconductor wafers and/or hybrids
10/13/2005US20050227502 Method for forming an ultra low dielectric film by forming an organosilicon matrix and large porogens as a template for increased porosity
10/13/2005US20050227501 Method for fabricating semiconductor integrated circuit device
10/13/2005US20050227500 Method for producing material of electronic device
10/13/2005US20050227499 Oxide-like seasoning for dielectric low k films
10/13/2005US20050227498 Method for fabricating strained silicon-on-insulator structures and strained silicon-on insulator structures formed thereby
10/13/2005US20050227497 Light transparent substrate imprint tool with light blocking distal end
10/13/2005US20050227496 Phase change memory elements and methods of fabricating phase change memory elements having a confined portion of phase change material on a recessed contact
10/13/2005US20050227495 Method for forming isolation layer in semiconductor device
10/13/2005US20050227494 Processing system and method for treating a substrate
10/13/2005US20050227492 Mask pattern for semiconductor device fabrication, method of forming the same, and method of fabricating finely patterned semiconductor device
10/13/2005US20050227491 Methods of forming integrated circuit devices having polished tungsten metal layers therein
10/13/2005US20050227490 Methods for planarization of dielectric layer around metal patterns for optical efficiency enhancement
10/13/2005US20050227489 Polishing pad and method of manufacturing semiconductor devices
10/13/2005US20050227488 Capping of copper structures in hydrophobic ILD using aqueous electro-less bath
10/13/2005US20050227487 Methods of forming a reaction product and methods of forming a conductive metal silicide by reaction of metal with silicon
10/13/2005US20050227486 Method of improving residue and thermal characteristics of semiconductor device
10/13/2005US20050227485 Method of forming metallic wiring layer, method of selective metallization, apparatus for selective metallization and substrate apparatus
10/13/2005US20050227484 System for modifying small structures
10/13/2005US20050227483 Planar metal electroprocessing
10/13/2005US20050227482 Composition useful for removal of bottom anti-reflection coatings from patterned ion-implanted photoresist wafers
10/13/2005US20050227481 Solid-state circuit assembly
10/13/2005US20050227480 Low dielectric semiconductor device and process for fabricating the same
10/13/2005US20050227479 Post ECP multi-step anneal/H2 treatment to reduce film impurity
10/13/2005US20050227478 Method for fabricating semiconductor devices
10/13/2005US20050227477 Method for fabricating semiconductor device and acceleration sensor
10/13/2005US20050227476 Method for fabricating a semiconductor device
10/13/2005US20050227475 Method of conductive particles dispersing
10/13/2005US20050227474 Method of connecting base materials
10/13/2005US20050227473 Etching composition and method for etching a substrate
10/13/2005US20050227472 Group III-V Crystal and Manufacturing method thereof
10/13/2005US20050227471 Post metal chemical mechanical polishing dry cleaning
10/13/2005US20050227470 Method for manufacturing a semiconductor device having a W/WN/polysilicon layered film
10/13/2005US20050227469 Method of manufacturing semiconductor device
10/13/2005US20050227468 Semiconductor device with spacer having batch and non-batch layers
10/13/2005US20050227467 Semiconductor device and method of manufacture thereof
10/13/2005US20050227466 Transistor, method for producing an integrated circuit and a method of producing a metal silicide layer
10/13/2005US20050227465 Triarylamine compounds, compositions and uses therefor
10/13/2005US20050227464 Apparatus and method for optimizing the efficiency of germanium junctions in multi-junction solar cells
10/13/2005US20050227463 Doping method and manufacturing method for a semiconductor device
10/13/2005US20050227462 Method for manufacturing silicon-on insulator wafer
10/13/2005US20050227461 Semiconductor device having increased switching speed
10/13/2005US20050227460 Method and apparatus for crystallizing semiconductor with laser beams
10/13/2005US20050227459 Film formation method and apparatus for semiconductor process
10/13/2005US20050227458 Method for producing structured substrate, structured substrate, method for producing semiconductor light emitting device, semiconductor light emitting device, method for producing semiconductor device, semiconductor device, method for producing device, and device