Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/20/2005US20050230715 Vertical junction field effect transistor and method for fabricating the same
10/20/2005US20050230714 Semiconductor memory device and manufacturing method thereof
10/20/2005US20050230712 Semiconductor device and method of manufacturing the same
10/20/2005US20050230711 [circuit connecting structure and fabricating method thereof]
10/20/2005US20050230709 Semiconductor device
10/20/2005US20050230707 Hetero-junction bipolar transistor and the method for producing the same
10/20/2005US20050230703 LCD with increased pixel opening sizes
10/20/2005US20050230697 Hyperboloid-drum structures and method of fabrication of the same using ion beam etching
10/20/2005US20050230695 Semiconductor light-emitting element and method for manufacturing the same
10/20/2005US20050230691 Integrated getter for vacuum or inert gas packaged LEDs
10/20/2005US20050230688 Nitride semiconductor led and fabrication method thereof
10/20/2005US20050230686 Silicon carbide semiconductor device and method for manufacturing the same
10/20/2005US20050230685 Thin film and manufacturing method of the same
10/20/2005US20050230683 Semiconductor device, method of making the same and liquid crystal display device
10/20/2005US20050230682 Thin film device, integrated circuit, electrooptic device, and electronic device
10/20/2005US20050230677 Structure comprising tunable anti-reflective coating and method of forming thereof
10/20/2005US20050230676 Methods of forming CMOS integrated circuit devices and substrates having buried silicon germanium layers therein and devices so formed
10/20/2005US20050230675 Field-effect transistor, semiconductor device, and photo relay
10/20/2005US20050230672 III-V compound semiconductor crystals
10/20/2005US20050230645 Extreme ultraviolet light source
10/20/2005US20050230643 Reciprocating drive for scanning a workpiece through an ion beam
10/20/2005US20050230637 System and method for electron-beam lithography
10/20/2005US20050230622 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
10/20/2005US20050230618 Defect inspection apparatus, program, and manufacturing method of semiconductor device
10/20/2005US20050230599 Illumination optical system, exposure apparatus, and device manufacturing method using the same
10/20/2005US20050230398 Storage container
10/20/2005US20050230378 Resistive heaters and uses thereof
10/20/2005US20050230365 Methods of drilling through-holes in homogenous and non-homogeneous substrates
10/20/2005US20050230354 Method and composition of post-CMP wetting of thin films
10/20/2005US20050230352 Method and compositions for hardening photoresist in etching processes
10/20/2005US20050230351 Plasma processing method and apparatus
10/20/2005US20050230350 In-situ dry clean chamber for front end of line fabrication
10/20/2005US20050230348 Method for forming organic mask and method for forming pattern using said organic mask
10/20/2005US20050230346 Processing apparatus
10/20/2005US20050230344 Method for cleaning the surface of a substrate
10/20/2005US20050230284 Wafer container with sealable door
10/20/2005US20050230262 Electrochemical methods for the formation of protective features on metallized features
10/20/2005US20050230261 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
10/20/2005US20050230049 Method and apparatus for plasma processing
10/20/2005US20050230048 Liner for use in processing chamber
10/20/2005US20050230046 Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto
10/20/2005US20050230045 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device
10/20/2005US20050230042 Bonding structure and method for bonding members
10/20/2005US20050230035 Thin film forming apparatus and thin film forming method
10/20/2005US20050230013 Methods of making nickel/vanadium structures
10/20/2005US20050229970 Cabinet for chemical delivery with solvent purging and removal
10/20/2005US20050229955 Device for the generating and controlling of the cleaning agent flow in a process chamber
10/20/2005US20050229950 Brush positioning device for a wafer cleaning station
10/20/2005US20050229947 Methods of inserting or removing a species from a substrate
10/20/2005US20050229946 Substrate treating method and apparatus
10/20/2005US20050229914 Workpiece holding jig
10/20/2005US20050229855 Apparatus for thermal treatment of substrates
10/20/2005US20050229854 Method and apparatus for temperature change and control
10/20/2005US20050229853 Multideposition SACVD reactor
10/20/2005US20050229848 Thin-film deposition apparatus
10/20/2005US20050229842 Manufacturing method of silicon wafer
10/20/2005US20050229837 Method of altering the properties of a thin film and substrate implementing said method
10/20/2005US20050229725 Buffer system for a wafer handling system
10/20/2005US20050229427 Reduced pressure drying apparatus and reduced pressure drying method
10/20/2005US20050229426 Single wafer dryer and drying methods
10/20/2005US20050229393 Methods of forming a contact pin assembly
10/20/2005US20050229389 Heat sink fins processing installation
10/20/2005US20050229370 Dicing tape applying apparatus and back-grinding/dicing tape applying system
10/20/2005US20050229369 Systems including differential pressure application apparatus
10/20/2005US20050229341 Multi-scraper structure for cleaning a panel
10/20/2005DE10393793T5 Strahlungsschutz in integrierten Schaltungen Radiation protection in integrated circuits
10/20/2005DE10393777T5 Halbleitervorrichtung und elektrischer Leistungswandler, Ansteuerungsinverter, Mehrzweckinverter und Höchstleistungs-Hochfrequenz-Kommunikationsgerät unter Verwendung der Halbleitervorrichtung Semiconductor device and electric power converter, inverter control, multi-purpose inverter and high-power radio frequency communication device using the semiconductor device
10/20/2005DE10393635T5 Verfahren zur Herstellung eines Siliziumwafers A method for producing a silicon wafer
10/20/2005DE10393371T5 Verfahren und Vorrichtung zum Steuern eines Fertigungsprozesses auf der Grundlage einer gemessenen elektrischen Eigenschaft Method and apparatus for controlling a manufacturing process on the basis of a measured electrical property
10/20/2005DE10297823T5 Verfahren zum Kapseln intergrierter Schaltungen und über das Verfahren hergestellte integrierte Schaltungsbausteine Method for encapsulating intergrated circuits and integrated circuit chips produced on the procedure
10/20/2005CA2563085A1 The surface treatment of nanoparticles to control interfacial properties and method of manufacture
10/20/2005CA2561618A1 Improved thick film dielectric structure for thick dielectric electroluminescent displays
10/20/2005CA2560701A1 Roll-to-roll fabricated light sheet and encapsulated semiconductor circuit devices
10/19/2005EP1587350A1 Method for metallizing an electric component on a flexible circuit support and flexible circuit support with an electric component metallized thereon
10/19/2005EP1587153A1 Organic el device and method of manufacturing the same
10/19/2005EP1587150A2 Silicon light emitting device and method of manufacturing the same
10/19/2005EP1587146A2 Metal thin film and method of manufacturing the same, dielectric capacitor and method of manufacturing the same, and semiconductor memory device
10/19/2005EP1587145A2 Set of integrated capacitor arrangements, especially integrated grid capacitors
10/19/2005EP1587142A1 Electronic component, mounted structure, electro-optical device, and electronic device
10/19/2005EP1587140A2 Electronic device which accommodates an electronic circuit provided with a gel layer and method for producing said device
10/19/2005EP1587139A2 Method of making a tantalum layer and apparatus using a tantalum layer
10/19/2005EP1587138A2 Apparatus for mounting of semi-conductor chips and method for stripping of a semi-conductor chip from a film
10/19/2005EP1587137A1 Deposition process for non-volatile resistance switching memory
10/19/2005EP1587136A1 Steam oxidization apparatus
10/19/2005EP1587135A1 Helical inductor
10/19/2005EP1587113A2 Stylus system for modifying small structures
10/19/2005EP1587029A2 RFID-tag
10/19/2005EP1586950A2 Illumination optical system, exposure apparatus, and device manufacturing method using the same
10/19/2005EP1586949A2 Exposure apparatus and exposure method using EUV light
10/19/2005EP1586948A1 Lithographic apparatus and device manufacturing method
10/19/2005EP1586947A1 Lithographic apparatus, control system and device manufacturing method
10/19/2005EP1586946A2 Optical system of a microlithographic projection exposure apparatus
10/19/2005EP1586945A1 Alkali-soluble gap filling material forming composition for lithography
10/19/2005EP1586912A1 Laser beam inspection equipment
10/19/2005EP1586674A1 Coatings, and methods and devices for the manufacture thereof
10/19/2005EP1586673A1 Component for film forming device and method of washing the component
10/19/2005EP1586615A1 Adhesive, adhesive member, interconnecting substrate for semiconductor mounting having adhesive member, and semiconductor device containing the same
10/19/2005EP1586544A1 Optical element made from silica glass, method of its manufacture and its use
10/19/2005EP1586406A1 Laser processing apparatus with polygon mirror
10/19/2005EP1586127A2 Organic electronic component and method for producing organic electronic devices
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