Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2005
10/27/2005US20050238993 Nitrogen-containing organic compound, chemically amplified resist composition and patterning process
10/27/2005US20050238992 Exposure latitude and line-edge roughness
10/27/2005US20050238970 Device manufacturing method
10/27/2005US20050238963 causing the low reflective layer to function as a thin inorganic etching mask layer; by the use of a pattern formed in the absorber layer as a mask to thereby form a pattern in the buffer layer
10/27/2005US20050238922 Substrate with a multilayer reflection film, reflection type mask blank for exposure, reflection type mask for exposure and methods of manufacturing them
10/27/2005US20050238905 Vacancy-dominated, defect-free silicon
10/27/2005US20050238889 Layered components, materials, methods of production and uses thereof
10/27/2005US20050238881 Semiconductor assembly using dual-cure die attach adhesive
10/27/2005US20050238878 Device mounting board
10/27/2005US20050238859 Metal member-buried ceramics article and method of producing the same
10/27/2005US20050238809 Device for deposition with chamber cleaner and method for cleaning the chamber
10/27/2005US20050238808 Methods for producing ruthenium film and ruthenium oxide film
10/27/2005US20050238807 Refurbishment of a coated chamber component
10/27/2005US20050238804 Nano-powder-based coating and ink compositions
10/27/2005US20050238747 Injection casting system for encapsulating semiconductor devices and method of use
10/27/2005US20050238504 Flexible tank and a chemical liquid supply apparatus using the same
10/27/2005US20050238476 Apparatus for transporting substrates under a controlled atmosphere
10/27/2005US20050238464 Substrate processing device
10/27/2005US20050238221 Method of manufacturing photo mask, mask pattern shape evaluation apparatus, method of judging photo mask defect corrected portion, photo mask defect corrected portion judgment apparatus, and method of manufacturing a semiconductor device
10/27/2005US20050238044 System and method for utility data collection
10/27/2005US20050237895 Laser irradiation apparatus and method for manufacturing semiconductor device
10/27/2005US20050237850 Method and apparatus for improving stability of a 6T CMOS SRAM cell
10/27/2005US20050237848 Semiconductor memory device and semiconductor device and semiconductor memory device control method
10/27/2005US20050237847 Semiconductor device with source line and fabrication method thereof
10/27/2005US20050237842 Semiconductor integrated circuit device
10/27/2005US20050237825 Data processing apparatus
10/27/2005US20050237817 Semiconductor memory device with MOS transistors, each having a floating gate and a control gate, and memory card including the same
10/27/2005US20050237815 Operation scheme with charge balancing erase for charge trapping non-volatile memory
10/27/2005US20050237808 Semiconductor memory device with MOS transistors, each including floating gate and control gate, and memory card including the same
10/27/2005US20050237807 Bi-directional read/program non-volatile floating gate memory cell and array thereof, and method of formation
10/27/2005US20050237801 Operation scheme with charge balancing for charge trapping non-volatile memory
10/27/2005US20050237797 Memory array
10/27/2005US20050237794 Thin film magnetic memory device capable of conducting stable data read and write operations
10/27/2005US20050237791 Solid-state memory device and method for arrangement of solid-state memory cells
10/27/2005US20050237790 Antiferromagnetically stabilized pseudo spin valve for memory applications
10/27/2005US20050237789 Method and apparatus for testing tunnel magnetoresistive effect element
10/27/2005US20050237788 Magnetic memory and recording method thereof
10/27/2005US20050237786 Semiconductor memories
10/27/2005US20050237779 Nonvolatile ferroelectric perpendicular electrode cell, FeRAM having the cell and method for manufacturing the cell
10/27/2005US20050237778 System with meshed power and signal buses on cell array
10/27/2005US20050237777 Nonvolatile memory device and method for fabricating the same
10/27/2005US20050237726 Semiconductor device and its manufacturing process, electro-optical equipment, and electronic equipment
10/27/2005US20050237685 Thin film circuit substrate, piezoelectric speaker device, display device, and sound-generating display device
10/27/2005US20050237683 Semiconductor integrated circuit device
10/27/2005US20050237637 Lens module and assembling method thereof
10/27/2005US20050237618 Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit
10/27/2005US20050237603 Method of manufacturing a semiconductor integrated circuit device and a semiconductor integrated circuit device
10/27/2005US20050237598 Laminated package
10/27/2005US20050237542 Method for the formation of a structure size measured value
10/27/2005US20050237540 Measuring apparatus and exposure apparatus having the same
10/27/2005US20050237529 Wafer rotation device and edge flaw inspection apparataus having the device
10/27/2005US20050237527 Illumination optical system, exposure apparatus and device fabrication method
10/27/2005US20050237520 Apparatus for handling of a disklike member, especially for handling of a wafer
10/27/2005US20050237510 Stage device, exposure apparatus, and method of manufacturing device
10/27/2005US20050237509 System and method for custom-polarized photolithography illumination
10/27/2005US20050237507 Exposure apparatus, focal point detecting method, exposure method and device manufacturing method
10/27/2005US20050237506 Method of optimizing imaging performance
10/27/2005US20050237505 Large field of view 2X magnification projection optical system for FPD manufacture
10/27/2005US20050237503 Exposure apparatus having separately supported first and second shades and method for manufacturing semiconductor device
10/27/2005US20050237502 Exposure apparatus
10/27/2005US20050237464 Liquid crystal display
10/27/2005US20050237442 Electro-optical device and driving method for the same
10/27/2005US20050237409 Solid-state image pickup element and driving method thereof, and camera system
10/27/2005US20050237375 Exposure apparatus, device manufacturing method, pattern generator and maintenance method
10/27/2005US20050237286 Electronic device and method of driving the same
10/27/2005US20050237077 Method for testing using a universal wafer carrier for wafer level die burn-in
10/27/2005US20050237076 Method for testing using a universal wafer carrier for wafer level die burn-in
10/27/2005US20050237075 Method for testing using a universal wafer carrier for wafer level die burn-in
10/27/2005US20050237071 Electronic component test apparatus
10/27/2005US20050237069 Semiconductor device test method and semiconductor device tester
10/27/2005US20050236942 Transport pod with protection by the thermophoresis effect
10/27/2005US20050236739 Step and flash imprint lithography
10/27/2005US20050236720 Semiconductor chip having pads with plural junctions for different assembly methods
10/27/2005US20050236715 Nickel alloy salicide transistor structure and method for manufacturing same
10/27/2005US20050236714 Selectively converted inter-layer dielectric
10/27/2005US20050236713 Semiconductor device
10/27/2005US20050236711 Siloxane epoxy polymers as metal diffusion barriers to reduce electromigration
10/27/2005US20050236709 Multiple chip semiconductor package and method of fabricating same
10/27/2005US20050236706 Semiconductor device and hybrid integrated circuit device
10/27/2005US20050236705 Wire bonding system and method of use
10/27/2005US20050236704 Chip package structure and process for fabricating the same
10/27/2005US20050236701 Leadframe, plastic-encapsulated semiconductor device, and method for fabricating the same
10/27/2005US20050236700 Method of fabricating chips, and an associated support
10/27/2005US20050236696 Fan out type wafer level package structure and method of the same
10/27/2005US20050236694 Silicon oxycarbide and silicon carbonitride based materials for MOS devices
10/27/2005US20050236693 Wafer stabilization device and associated production method
10/27/2005US20050236692 Semiconductor thin film forming method and semiconductor device
10/27/2005US20050236690 Decoupling capacitor design
10/27/2005US20050236688 Fuse regions of a semiconductor memory device and methods of fabricating the same
10/27/2005US20050236687 Strained silicon CMOS on hybrid crystal orientations
10/27/2005US20050236684 Image sensor packaging structure and method
10/27/2005US20050236680 EEPROM and method of fabricating the same
10/27/2005US20050236679 Semiconductor device, and method and apparatus for manufacturing the same
10/27/2005US20050236678 Semiconductor device and method of fabricating the same
10/27/2005US20050236677 Semiconductor device layout and channeling implant process
10/27/2005US20050236676 Semiconductor device
10/27/2005US20050236675 Semiconductor device and manufacturing method thereof
10/27/2005US20050236672 MOS type semiconductor device having electrostatic discharge protection arrangement
10/27/2005US20050236670 Soi single crystalline chip structure
10/27/2005US20050236669 Dual-thickness active device layer SOI chip structure