Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2005
12/08/2005US20050272229 Strained Si formed by anneal
12/08/2005US20050272228 Annealing apparatus, annealing method, and manufacturing method of a semiconductor device
12/08/2005US20050272227 Plasma processing apparatus and method
12/08/2005US20050272226 Semiconductor wafer having electrically connected passive device chips, passive devices and semiconductor package using the same
12/08/2005US20050272225 Semiconductor processing
12/08/2005US20050272224 Method for dividing substrate
12/08/2005US20050272223 Method for dicing substrate
12/08/2005US20050272222 Method for the manufacture of electronic devices on substrates and devices related thereto
12/08/2005US20050272221 Method of reducing alignment measurement errors between device layers
12/08/2005US20050272220 Ultraviolet curing process for spin-on dielectric materials used in pre-metal and/or shallow trench isolation applications
12/08/2005US20050272219 Formation of metal-insulator-metal capacitor simultaneously with aluminum metal wiring level using a hardmask
12/08/2005US20050272218 Method of forming metal lower electrode of a capacitor and method of selectively etching a metal layer for the same
12/08/2005US20050272217 Self-aligned metal electrode to eliminate native oxide effect for metal insulator semiconductor (MIS) capacitor
12/08/2005US20050272216 Method of making a semiconductor device, and semiconductor device made thereby
12/08/2005US20050272215 Methods for enhancing the formation of nickel mono-silicide by reducing the formation of nickel di-silicide
12/08/2005US20050272214 Electrophoretic assembly of electrochemical devices
12/08/2005US20050272213 Method of manufacturing metal-oxide-semiconductor transistor
12/08/2005US20050272212 Method of high precision printing for manufacturing organic thin film transistor
12/08/2005US20050272211 Adjustable shims and washers
12/08/2005US20050272210 Method for manufacturing gate electrode of semiconductor device using aluminium nitride film
12/08/2005US20050272208 Low voltage high density trench-gated power device with uniformly doped channel and its edge termination technique
12/08/2005US20050272207 Complementary analog bipolar transistors with trench-constrained isolation diffusion
12/08/2005US20050272206 NROM memory device with a high-permittivity gate dielectric formed by the low temperature oxidation of metals
12/08/2005US20050272205 Fabrication of dielectric on a gate surface to insulate the gate from another element of an integrated circuit
12/08/2005US20050272204 Method for manufacturing NAND flash device
12/08/2005US20050272203 Modified source/drain re-oxidation method and system
12/08/2005US20050272202 Random access memory
12/08/2005US20050272201 Improved process for forming a buried plate
12/08/2005US20050272200 Bismuth titanium silicon oxide, bismuth titanium silicon oxide thin film, and method for forming the thin film
12/08/2005US20050272199 Method of manufacturing a semiconductor device
12/08/2005US20050272198 Method of manufacturing nonvolatile semiconductor memory device
12/08/2005US20050272197 Semiconductor device
12/08/2005US20050272196 Method of depositing a higher permittivity dielectric film
12/08/2005US20050272195 Integrated circuit having pairs of parallel complementary finfets
12/08/2005US20050272194 Methods of forming integrated circuit devices including raised source/drain structures having different heights
12/08/2005US20050272193 Method for manufacturing semiconductor device
12/08/2005US20050272192 Methods of forming fin field effect transistors using oxidation barrier layers and related devices
12/08/2005US20050272191 Replacement gate process for making a semiconductor device that includes a metal gate electrode
12/08/2005US20050272190 Methods of fabricating fin field-effect transistors having silicide gate electrodes and related devices
12/08/2005US20050272189 Method of manufacturing thin film transistor array panel
12/08/2005US20050272188 Strain balanced structure with a tensile strained silicon channel and a compressive strained silicon-germanium channel for CMOS performance enhancement
12/08/2005US20050272187 Process for ultra-thin body SOI devices that incorporate EPI silicon tips and article made thereby
12/08/2005US20050272186 Method for forming a lightly doped drain in a thin film transistor
12/08/2005US20050272185 Method of fabricating a semiconductor thin film and semiconductor thin film fabrication apparatus
12/08/2005US20050272184 Crystallizing method, thin-film transistor manufacturing method, thin-film transistor, and display device
12/08/2005US20050272183 Arrayed ultrasonic transducer
12/08/2005US20050272182 Methods of making microelectronic packages
12/08/2005US20050272181 Process for producing a flat panel radiation detector and a flat panel radiation detector
12/08/2005US20050272180 Semiconductor photodetecting device and method for fabricating the same
12/08/2005US20050272179 Three-dimensional lithographic fabrication technique
12/08/2005US20050272178 Liquid crystal display device and method for fabricating the same
12/08/2005US20050272177 Method and structure for fabricating smooth mirrors for liquid crystal on silicon devices
12/08/2005US20050272176 Method for forming LED by a substrate removal process
12/08/2005US20050272175 Laser structuring for manufacture of thin film silicon solar cells
12/08/2005US20050272174 Test structures in unused areas of semiconductor integrated circuits and methods for designing the same
12/08/2005US20050272173 Method for testing contact open in semiconductor device
12/08/2005US20050272172 Method of temporarily securing a die to a burn-in carrier
12/08/2005US20050272171 Method for manufacturing ferroelectric capacitor, method for manufacturing ferroelectric memory, ferroelectric capacitor and ferroelectric memory
12/08/2005US20050272170 Method of manufacturing ferroelectric film capacitor
12/08/2005US20050271985 Method, apparatus and system for rinsing substrate with pH-adjusted rinse solution
12/08/2005US20050271978 Resist polymer, making method, and chemically amplified positive resist composition
12/08/2005US20050271977 Photosensitive polymer and chemically amplified photoresist composition including the same
12/08/2005US20050271971 Photoresist base material, method for purification thereof, and photoresist compositions
12/08/2005US20050271957 Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method
12/08/2005US20050271956 Administering drug aerosol in fluid propellant carrier using a pressurized metered dose inhaler, taking into consideration inspiratory flow rate and volume; diabetes, immune deficiency, asthma, and/or pain treatment
12/08/2005US20050271954 Alignment mark, alignment apparatus and method, exposure apparatus, and device manufacturing method
12/08/2005US20050271953 Optical proximity correction method utilizing phase-edges as sub-resolution assist features
12/08/2005US20050271952 hexagonal dot pattern, improving the crystallization characteristics; use for thin film transistor (TFT) arrays such as for liquid crystal displays
12/08/2005US20050271951 Plasma etching apparatus and method of fabricating photomask using the same
12/08/2005US20050271831 Surface treating method for substrate
12/08/2005US20050271830 Chemical vapor deposition method
12/08/2005US20050271828 Wiring board and production method thereof, and semiconductor apparatus
12/08/2005US20050271823 Mixing a sol-gel raw material including a hydrolysis-condensation product of a metal alkoxide (metals are Pb, Ta or Nb, and Zr, Ti, V, W, or Hf) and polycarboxylic acid or ester, and an organic solvent; and forming a salt from the sol-gel
12/08/2005US20050271814 High speed, concurrent processing of multiple wafers using multi-stations separated by gas curtains where platens support and rotates wafers into specific deposition positions and where reactant gases are supplied through single- or multi-zone gas dispensing nozzles; atomic layer deposition
12/08/2005US20050271570 Cerium-based abrasive and production process thereof
12/08/2005US20050271558 Processing apparatus, measuring apparatus, and device manufacturing method
12/08/2005US20050271382 Resist pattern forming apparatus and method thereof
12/08/2005US20050271330 Three-dimensional mounted assembly and optical transmission device
12/08/2005US20050271262 Method and apparatus for inspecting a mura defect, and method of manufacturing a photomask
12/08/2005US20050271261 Apparatus and method for detecting defects of pattern on object
12/08/2005US20050271116 Method and apparatus for measuring temperature of substrate
12/08/2005US20050271106 Surface emitting semiconductor laser, its manufacturing method, and manufacturing method of electron device
12/08/2005US20050271097 Laser irradiation method, laser irradiation apparatus, and semiconductor device
12/08/2005US20050270889 Dynamic random access memory (DRAM) capable of canceling out complimentary noise development in plate electrodes of memory cell capacitors
12/08/2005US20050270887 Magnetic random access memory
12/08/2005US20050270886 Ferroelectric memory device and read control method thereof
12/08/2005US20050270871 Semiconductor integrated circuit device, and adjustment method of semiconductor integrated circuit device
12/08/2005US20050270867 Intermediate suction support and its utilisation for producing a thin film structure
12/08/2005US20050270864 Memory cell arrangement having dual memory cells
12/08/2005US20050270857 Semiconductor manufacturing apparatus
12/08/2005US20050270851 Data processing device
12/08/2005US20050270849 Program/erase method for p-channel charge trapping memory device
12/08/2005US20050270846 Nonvolatile semiconductor memory
12/08/2005US20050270845 Nonvolatile semiconductor memory device and manufacturing method thereof
12/08/2005US20050270828 Magnetic memory device and manufacturing method thereof
12/08/2005US20050270824 Nanotube-based switching elements with multiple controls
12/08/2005US20050270823 Standard cell, semiconductor integrated circuit device of standard cell scheme and layout design method for semiconductor integrated circuit device
12/08/2005US20050270821 Semiconductor device and manufacturing method for same
12/08/2005US20050270819 Semiconductor storage device
12/08/2005US20050270650 Light irradiator