Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2005
12/01/2005US20050266633 Method for fabricating capacitor
12/01/2005US20050266632 Integrated circuit with strained and non-strained transistors, and method of forming thereof
12/01/2005US20050266631 Semiconductor device fabricating method
12/01/2005US20050266630 Fabrication process of a semiconductor integrated circuit device
12/01/2005US20050266629 Fabrication method for organic semiconductor transistor having organic polymeric gate insulating layer
12/01/2005US20050266628 Substrate isolation in integrated circuits
12/01/2005US20050266627 Vertical field effect transistors incorporating semiconducting nanotubes grown in a spacer-defined passage
12/01/2005US20050266626 Method of fabricating heteroepitaxial microstructures
12/01/2005US20050266625 CMOS image sensor and fabricating method thereof
12/01/2005US20050266624 Boron incorporated diffusion barrier material
12/01/2005US20050266623 Trench power MOSFET in silicon carbide and method of making the same
12/01/2005US20050266622 Method for forming a low thermal budget spacer
12/01/2005US20050266621 Gate electrodes of semiconductor devices and methods of manufacturing the same
12/01/2005US20050266620 Semiconductor device, electro-optic device, integrated circuit, and electronic apparatus
12/01/2005US20050266619 Method for making a semiconductor device with a high-k gate dielectric and a conductor that facilitates current flow across a P/N junction
12/01/2005US20050266618 Plasma processing method and method for fabricating electronic component module using the same
12/01/2005US20050266617 Module with multiple power amplifiers and power sensors
12/01/2005US20050266616 Method for balancing molding flow during the assembly of semiconductor packages with defective carrying units
12/01/2005US20050266614 Method of manufacturing semiconductor device and method of manufacturing electronic device
12/01/2005US20050266613 Integrated circuit packages with reduced stress on die and associated methods
12/01/2005US20050266612 Top layers of metal for high performance IC's
12/01/2005US20050266611 Flip chip packaging method and flip chip assembly thereof
12/01/2005US20050266610 Manufacturing methods for semiconductor structures having stacked semiconductor devices
12/01/2005US20050266609 Method of fabricating a built-in chip type substrate
12/01/2005US20050266608 Packaging substrate without plating bar and a method of forming the same
12/01/2005US20050266607 Package warpage control
12/01/2005US20050266606 Method of producing an n-type diamond with high electrical conductivity
12/01/2005US20050266605 Process for patterning nanocarbon material, semiconductor device, and method for manufacturing semiconductor device
12/01/2005US20050266603 Image sensor comprising a pixel array having an optical element positioned relative to each pixel
12/01/2005US20050266602 Encapsulated chip and method of fabrication thereof
12/01/2005US20050266601 [photoelectric device grinding process and device grinding process]
12/01/2005US20050266600 Low temperature nano particle preparation and deposition for phase-controlled compound film formation
12/01/2005US20050266599 Method of manufacturing a micro-electrical-mechanical system
12/01/2005US20050266598 Method for fabricating vertical offset structure
12/01/2005US20050266597 Charge sweep operation for reducing image lag
12/01/2005US20050266596 Method of manufacturing electro-optical device
12/01/2005US20050266595 Liquid crystal display device having GOLDD type TFT and LDD type TFT and method of making same
12/01/2005US20050266594 Manufacturing method for display device
12/01/2005US20050266593 Wiring and manufacturing method thereof, semiconductor device comprising said wiring, and dry etching method
12/01/2005US20050266592 Method of fabricating an encapsulated chip and chip produced thereby
12/01/2005US20050266591 Manufacturing process for ultra slim electrooptic display device unit
12/01/2005US20050266590 Electrophoretic display device
12/01/2005US20050266589 Formation method of electroconductive pattern, and production method of electron-emitting device, electron source, and image display apparatus using this
12/01/2005US20050266587 Substrate support method
12/01/2005US20050266586 Stylus system for modifying small structures
12/01/2005US20050266495 Method and program for library generation
12/01/2005US20050266478 Biochips including ion transport detecting structures and methods of use
12/01/2005US20050266356 lower and upper photoresists; selectively implanting silicon ions in upper photoresist pattern to form a silylated layer only in upper portions of upper photoresist; simultaneously oxidizing silylated layer in an oxygen plasma and anisotropically ashing lower photoresist; etching lower; photolithography
12/01/2005US20050266355 Method of manufacturing semiconductor device
12/01/2005US20050266351 a copolymer of an adamantanecarbonyloxyalkyl acrylic acid ester and a 2-furanone ester of acrylc acid; acid generator is triphenylsulfonium 1-(3-hydroxymethyl-adamantane)methoxycarbonyldifluoromethanesulfonate or triphenylsulfonium 4-oxo-1-adamantyloxycarbonyldifluoromethanesulfonate;
12/01/2005US20050266346 Method for forming photoresist pattern and photoresist laminate
12/01/2005US20050266340 Positive resist composition and compound used therein
12/01/2005US20050266336 Photosensitive composition and pattern-forming method using the photosensitive composition
12/01/2005US20050266323 Conveying the substrate to an exposing position of a lithographic apparatus, exposing the substrate at the exposing position to a beam of radiation, conveying the exposed substrate from the exposing position toward a processing position
12/01/2005US20050266321 Mask for proximity field optical exposure, exposure apparatus and method therefor
12/01/2005US20050266320 Pattern support layer having a thin thickness wherein a time-dependent change in stress is small; excellent membrane quality
12/01/2005US20050266318 Reticle manufacturing method
12/01/2005US20050266265 Multiple stage electroless deposition of a metal layer
12/01/2005US20050266214 Wiring substrate and method of fabricating the same
12/01/2005US20050266174 Methods and apparatus for reducing arcing during plasma processing
12/01/2005US20050265818 Methods and apparatus for supporting substrates
12/01/2005US20050265814 Substrate handling system for aligning and orienting substrates during a transfer operation
12/01/2005US20050265812 Load port for clean system
12/01/2005US20050265662 Optical device having optical waveguide and method for manufacturing the same
12/01/2005US20050265595 Size checking method and apparatus
12/01/2005US20050265413 Nitride semiconductor laser device
12/01/2005US20050265113 Data storage device and magnetic disk drive in hermetically sealed condition
12/01/2005US20050265112 Nonvolatile semiconductor memory device and method of manufacturing the same
12/01/2005US20050265109 Nonvolatile semiconductor memory
12/01/2005US20050265107 Semiconductor memory device
12/01/2005US20050265100 Semiconductor device
12/01/2005US20050265096 Semiconductor integrated circuit device
12/01/2005US20050265093 Non-volatile semiconductor memory device and method of fabricating thereof
12/01/2005US20050265077 Circuit layout and structure for a non-volatile memory
12/01/2005US20050265076 Method of forming a vertical NAND flash memory array
12/01/2005US20050265070 SRAM cell for soft-error rate reduction and cell stability improvement
12/01/2005US20050265069 Merged mos-bipolar capacitor memory cell
12/01/2005US20050265068 Semiconductor memory device
12/01/2005US20050265067 Ferroelectric memory device and method of making the same
12/01/2005US20050265063 4F2 EEPROM NROM memory arrays with vertical devices
12/01/2005US20050264976 Silicon nanocrystal capacitor and process for forming same
12/01/2005US20050264971 Semiconductor integrated circuit apparatus having overheat protection circuit and overheat protection method
12/01/2005US20050264965 Semiconductor integrated circuit device and method for fabricating the same
12/01/2005US20050264963 Electrostatic discharge protective circuit and semiconductor integrated circuit using the same
12/01/2005US20050264862 Optical modulator module
12/01/2005US20050264827 Interferometric measuring device and projection exposure installation comprising such measuring device
12/01/2005US20050264824 Method for crystallizing semiconductor with laser beams
12/01/2005US20050264814 Alignment method and parameter selection method
12/01/2005US20050264802 Method and apparatus for inspecting defects and a system for inspecting defects
12/01/2005US20050264799 Particle detecting system and method of detecting particles using the same
12/01/2005US20050264797 Method and apparatus for detecting defects
12/01/2005US20050264791 Wafer handling method for use in lithography patterning
12/01/2005US20050264790 Lithographic apparatus and device manufacturing method
12/01/2005US20050264788 Lithography apparatus and pattern forming method using the same
12/01/2005US20050264786 Projection lens and microlithographic projection exposure apparatus
12/01/2005US20050264785 Compact pulse stretcher
12/01/2005US20050264784 Lithographic apparatus and device manufacturing method
12/01/2005US20050264782 System and method utilizing a lithography tool having modular illumination, pattern generator, and projection optics portions
12/01/2005US20050264781 Position detection method and apparatus
12/01/2005US20050264779 Assembly and adjusting method of optical system, exposure apparatus having the optical system
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