Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2005
12/08/2005DE102004002464B4 Verfahren zum Füllen von Kontaktlöchern A method for filling of contact holes
12/08/2005DE10019489B4 Gehäuse für ein oberflächenmontierbares elektronisches Bauelement A housing for a surface-mountable electronic component
12/08/2005DE10009656B4 Verfahren zur Herstellung einer Halbleiterscheibe A process for producing a semiconductor wafer
12/08/2005CA2508190A1 Process for producing a flat panel radiation detector and a flat panel radiation detector
12/07/2005EP1603374A1 Method and device for mounting conductive ball
12/07/2005EP1603168A1 Field-effect transistor with spin-dependent transmission characteristic and nonvolatile memory using same
12/07/2005EP1603164A2 Memory device and its manufacturing method
12/07/2005EP1603163A2 Three-dimensional semiconductor device
12/07/2005EP1603159A2 Semiconductor integrated circuit, method for designing semiconductor integrated circuit and system for designing semiconductor integrated circuit
12/07/2005EP1603156A2 Integrated circuit wafer packaging system and method
12/07/2005EP1603155A1 Semiconductor device and radiation detector employing it
12/07/2005EP1603154A2 Apparatus and method for surface finishing a silicon film
12/07/2005EP1603153A1 Detection method of optimal position detection equation, positioning method, exposure method, device manufacturing method, and device
12/07/2005EP1603152A2 Methods of forming capacitor-over-bit line memory circuitry
12/07/2005EP1603151A2 Workpiece holder for semiconductor manufacturing apparatus
12/07/2005EP1603137A2 Program/erase method for p-channel charge trapping memory device
12/07/2005EP1602983A1 Water soluble resin composition, method of pattern formation and method of inspecting resist pattern
12/07/2005EP1602980A2 Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby
12/07/2005EP1602979A2 Lithography apparatus and pattern forming method using the same
12/07/2005EP1602978A1 Exposure apparatus for liquid crystal panel and exposure apparatus
12/07/2005EP1602977A1 Positive resist composition and compound used therein
12/07/2005EP1602752A1 AlGalnN single-crystal wafer
12/07/2005EP1602747A1 Copper alloy sputtering target, process for producing the same and semiconductor element wiring
12/07/2005EP1602745A1 Hafnium alloy target and process for producing the same
12/07/2005EP1602714A1 Post-dry etching cleaning liquid composition and process for fabricating semiconductor device
12/07/2005EP1602636A2 Precursor composition, method for manufacturing precursor composition, method for manufacturing ferroelectric film, piezoelectric element, semiconductor device, piezoelectric actuator, ink jet recording head, and ink jet printer
12/07/2005EP1602635A1 Manufacturing method for sintered body with buried metallic member
12/07/2005EP1602266A1 Method and device for the extraction of electronic components from tubes
12/07/2005EP1602265A2 Solder on a sloped surface
12/07/2005EP1602157A1 Light-emitting semiconductor device and a method of manufacturing it
12/07/2005EP1602132A2 Surface modification of silicon nitride for thick film silver metallization of solar cell
12/07/2005EP1602131A1 Via and trench structures for semiconductor substrates bonded to metallic substrates
12/07/2005EP1602129A1 Split fin heat sink
12/07/2005EP1602128A2 Surface-coating method, production of microelectronic interconnections using said method and integrated circuits
12/07/2005EP1602127A2 Plating apparatus
12/07/2005EP1602126A1 A method of forming an element of a microelectronic circuit
12/07/2005EP1602125A2 Shallow trench isolation process
12/07/2005EP1602124A2 Micromachined assembly with a multi-layer cap defining cavity
12/07/2005EP1602007A2 A method of patterning photoresist on a wafer using a reflective mask with a multi-layer arc
12/07/2005EP1601822A1 Method of electroplating a workpiece having high-aspect ratio holes
12/07/2005EP1601813A1 Method for depositing silicon
12/07/2005EP1601735A1 Method of polishing a silicon-containing dielectric
12/07/2005EP1601471A2 Gas gate for isolating regions of differing gaseous pressure
12/07/2005EP1579497A3 Method for forming a semiconductor device and structure thereof
12/07/2005EP1550162A4 Multilayer substrate
12/07/2005EP1509944A4 Automotive code reader
12/07/2005EP1430525B1 Dual-damascene interconnects without an etch stop layer by alternating ilds
12/07/2005EP1360034B1 Fixed abrasive article for use in modifying a semiconductor wafer
12/07/2005EP1295139B1 Arrangement for calibrating timing of an integrated circuit wafer tester and method
12/07/2005EP1279180B1 Tunable devices incorporating bicu3 ti3 feo12
12/07/2005EP1260125A4 Thermal management system
12/07/2005EP1156903B1 Apparatus for performing chemical-mechanical planarization
12/07/2005EP1129482B1 Method for producing a DRAM Cell System
12/07/2005EP1091811B8 Selective treatment of the surface of a microelectronic workpiece
12/07/2005CN1706048A Delta doped silicon carbide metal-semiconductor field effect transistors and methods of fabricating them
12/07/2005CN1706047A Ballistic semiconductor device
12/07/2005CN1706045A Integrated circuit arrangement comprising capacitors and preferably planar transistors, and production method
12/07/2005CN1706044A Semiconductor apparatus and fabrication method of the same
12/07/2005CN1706041A Method for producing a stepped edge profile comprised of a layered construction
12/07/2005CN1706040A Non-contact ID card and the like and method for manufacturing same
12/07/2005CN1706039A Backside contact for integrated circuit and method of forming same
12/07/2005CN1706038A Semiconductor device with tensile strain silicon introduced by compressive material in a buried oxide layer
12/07/2005CN1706037A Manufacturing process of using scatterometry to obtain optimization of circuit structures
12/07/2005CN1706036A Field-effect transistors with weakly coupled layered inorganic semiconductors
12/07/2005CN1706035A Methods and apparatus for electrical, mechanical and/or chemical removal of conductive material from a microelectronic substrate
12/07/2005CN1706034A Process for depositing film, process for fabricating semiconductor device, semiconductor device and system for depositing film
12/07/2005CN1706033A Production method for thin-film crystal wafer, semiconductor device using it and production method therefor
12/07/2005CN1706032A Method for manufacturing semiconductor device
12/07/2005CN1706030A Substrate for nitride semiconductor growth
12/07/2005CN1706029A Production method for thin-film semiconductor
12/07/2005CN1706028A Method of producing thin-film semiconductor and production device
12/07/2005CN1706027A Integrated circuit arrangement comprising a capacitor, and production method
12/07/2005CN1706026A Electrostatic chuck wafer port and top plate with edge shielding and gas scavenging
12/07/2005CN1706025A Method for lifting glass substrate without center lift pins
12/07/2005CN1706024A Device and method for transporting wafer-shaped articles
12/07/2005CN1705948A Method and apparatus for providing first-principles feed-forward manufacturing control
12/07/2005CN1705915A Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same
12/07/2005CN1705912A Pattern forming materials and pattern formation method using the materials
12/07/2005CN1705774A Integrated plating and planarization process and apparatus therefor
12/07/2005CN1705770A Stabilized aluminum laminate having aluminum and stabilizing layer laminated thereon
12/07/2005CN1705768A Apparatus and method for depositing an oxide film
12/07/2005CN1705733A Slurry for chemical-mechanical polishing copper damascene structures
12/07/2005CN1705725A Corrosion retarding polishing slurry for the chemical mechanical polishing of copper surfaces
12/07/2005CN1705597A Storage container for receiving precision substrates such as wafers
12/07/2005CN1705231A Switching circuit and semiconductor device
12/07/2005CN1705177A Optical modulator module
12/07/2005CN1705138A Method of manufacturing a micro-electrical-mechanical system
12/07/2005CN1705137A Semiconductor device
12/07/2005CN1705136A Insulated gate semiconductor device
12/07/2005CN1705130A Semiconductor device and method of manufacturing the same
12/07/2005CN1705129A Semiconductor device with flowable insulation layer formed on capacitor and method for fabricating the same
12/07/2005CN1705128A Semiconductor device and method of manufacturing the same
12/07/2005CN1705124A Semiconductor device and method of fabricating the same
12/07/2005CN1705116A Semiconductor device
12/07/2005CN1705108A 电路装置及其制造方法 Circuit device and manufacturing method thereof
12/07/2005CN1705107A Circuit device
12/07/2005CN1705106A 电路装置及其制造方法 Circuit device and manufacturing method thereof
12/07/2005CN1705105A 电路装置及其制造方法 Circuit device and manufacturing method thereof
12/07/2005CN1705102A 半导体器件 Semiconductor devices
12/07/2005CN1705101A Program/erase method for p-channel charge trapping memory device
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