Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2005
12/08/2005US20050270648 Projection optical system, exposure apparatus, device manufacturing method, and device manufactured by using the same
12/08/2005US20050270636 Optical element, optical apparatus, film forming method, film forming apparatus and device fabrication method
12/08/2005US20050270613 System and method for dose control in a lithographic system
12/08/2005US20050270595 Solid image pickup apparatus
12/08/2005US20050270517 Supporting system in exposure apparatus
12/08/2005US20050270515 Lithographic apparatus and device manufacturing method
12/08/2005US20050270514 Two-dimensional light-modulating nano/micro aperture array and high-speed nano pattern recording system utilized with the array
12/08/2005US20050270512 Lithographic apparatus and device manufacturing method
12/08/2005US20050270511 Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby
12/08/2005US20050270510 Illumination assembly, method for providing a radiation beam, lithographic projection apparatus and device manufacturing method
12/08/2005US20050270509 Measuring apparatus, exposure apparatus having the same, and device manufacturing method
12/08/2005US20050270506 Lithographic apparatus and device manufacturing method
12/08/2005US20050270504 Measurement method and apparatus, exposure apparatus, and device fabrication method
12/08/2005US20050270470 Contact structure
12/08/2005US20050270469 Contact structure
12/08/2005US20050270434 Liquid crystal display device and fabricating method thereof
12/08/2005US20050270165 Failure analyzing system and method for displaying the failure
12/08/2005US20050270135 Method of making photolithographically-patterned out-of-plane coil structures
12/08/2005US20050270078 Delay value adjusting method and semiconductor integrated circuit
12/08/2005US20050270074 Power-gating system and method for integrated circuit devices
12/08/2005US20050270049 Semiconductor device
12/08/2005US20050270035 Short detection circuit and short detection method
12/08/2005US20050269934 Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby
12/08/2005US20050269732 Support plate for semiconductor components
12/08/2005US20050269731 Method of fabricating element having microstructure
12/08/2005US20050269720 Crack protection for silicon die
12/08/2005US20050269717 Pressure sensitive adhesive sheet for use in semiconductor working and method for producing semiconductor chip
12/08/2005US20050269715 Semiconductor package, mold used in manufacturing the same, and method for manufacturing the same
12/08/2005US20050269714 Semiconductor device components with structures for stabilizing the semiconductor device components upon flip-chip arrangement with high-level substrates
12/08/2005US20050269713 Apparatus and method for wire bonding and die attaching
12/08/2005US20050269712 Semiconductor device including interconnection structure in which lines having different widths are connected with each other
12/08/2005US20050269711 Semiconductor device
12/08/2005US20050269709 Interconnect structure including tungsten nitride and a method of manufacture therefor
12/08/2005US20050269708 Tungsten encapsulated copper interconnections using electroplating
12/08/2005US20050269707 Transparent conductive film
12/08/2005US20050269705 Semiconductor device and method of manufacture thereof with two or more bond pad connections for each input/output cell
12/08/2005US20050269704 Semiconductor device and manufacturing method of the same
12/08/2005US20050269703 PE-ALD OF TaN DIFFUSION BARRIER REGION ON LOW-K MATERIALS
12/08/2005US20050269702 Method for fabricating semiconductor device capable of scribing chips with high yield
12/08/2005US20050269701 Semiconductor device
12/08/2005US20050269700 Semiconductor component and system having thinned, encapsulated dice
12/08/2005US20050269698 Semiconductor device having adhesion increasing film and method of fabricating the same
12/08/2005US20050269697 Semiconductor device, circuit board, and electronic instrument
12/08/2005US20050269696 Semiconductor device and manufacturing method of the same
12/08/2005US20050269694 Ribbon bonding in an electronic package
12/08/2005US20050269692 Stacked semiconductor package having adhesive/spacer structure and insulation
12/08/2005US20050269687 Build-up structures with multi-angle vias for chip to chip interconnects and optical bussing
12/08/2005US20050269686 Method and apparatus for forming modular sockets using flexible interconnects and resulting structures
12/08/2005US20050269684 Semiconductor package including redistribution pattern and method of manufacturing the same
12/08/2005US20050269682 Carrier for stacked type semiconductor device and method of fabricating the same
12/08/2005US20050269681 Component built-in module and method for producing the same
12/08/2005US20050269680 System-in-package (SIP) structure and fabrication thereof
12/08/2005US20050269673 Pure copper-coated copper foil and method of producing the same, and TAB tape and method of producing the same
12/08/2005US20050269672 Gate stack and gate stack etch sequence for metal gate integration
12/08/2005US20050269671 Support for hybrid epitaxy and method of fabrication
12/08/2005US20050269670 Semiconductor device and fabrication method thereof
12/08/2005US20050269669 Capacitor constructions and methods of forming
12/08/2005US20050269668 Method and structure for forming relatively dense conductive layers
12/08/2005US20050269666 Electrical fuses as programmable data storage
12/08/2005US20050269665 Three dimensional integrated circuits
12/08/2005US20050269664 Bipolar transistor with isolation and direct contacts
12/08/2005US20050269663 Semiconductor integrated circuit device and a method of manufacturing the same
12/08/2005US20050269662 Semiconductor device and manufacturing method thereof
12/08/2005US20050269658 Structure for realizing integrated circuit having schottky biode and method of fabricating the same
12/08/2005US20050269656 Color image sensor device and fabrication method thereof
12/08/2005US20050269652 NROM memory device with a high-permittivity gate dielectric formed by the low temperature oxidation of metals
12/08/2005US20050269651 Method for forming a dielectric stack
12/08/2005US20050269650 Semiconductor device having stress and its manufacture method
12/08/2005US20050269649 Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
12/08/2005US20050269648 Gated field effect devices
12/08/2005US20050269647 Flip chip FET device
12/08/2005US20050269646 Memory
12/08/2005US20050269645 Semiconductor device and method for manufacturing semiconductor device
12/08/2005US20050269644 Forming integrated circuits with replacement metal gate electrodes
12/08/2005US20050269643 Semiconductor element and method of manufacturing the same
12/08/2005US20050269642 Semiconductor device
12/08/2005US20050269640 Semiconductor device and manufacturing method thereof
12/08/2005US20050269639 Method for manufacturing an electrooptical device
12/08/2005US20050269638 Liquid crystal display device and fabricating method thereof
12/08/2005US20050269637 Semiconductor device
12/08/2005US20050269636 Insulated gate field-effect transistor and its manufacturing method, and imaging device and its manufacturing method
12/08/2005US20050269635 Selective implementation of barrier layers to achieve threshold voltage control in CMOS device fabrication with high-k dielectrics
12/08/2005US20050269634 Selective implementation of barrier layers to achieve threshold voltage control in CMOS device fabrication with high k dielectrics
12/08/2005US20050269632 [high-voltage mos device and fabrication thereof]
12/08/2005US20050269630 Trench type semiconductor device with reduced Qgd
12/08/2005US20050269629 Fin field effect transistors and methods of fabricating the same
12/08/2005US20050269628 Negative differential resistance pull up element for DRAM
12/08/2005US20050269627 Trench corner effect bidirectional flash memory cell
12/08/2005US20050269626 Vertical NAND flash memory device
12/08/2005US20050269625 Trench corner effect bidirectional flash memory cell
12/08/2005US20050269624 Self-aligned method of forming a semiconductor memory array of floating gate memory cells with buried source line and floating gate
12/08/2005US20050269623 Nonvolatile semiconductor memory device and a method of the same
12/08/2005US20050269622 Semiconductor memory array of floating gate memory cells with program/erase and select gates, and methods of making and operating same
12/08/2005US20050269621 Flash memory devices on silicon carbide
12/08/2005US20050269620 Capacitor structures, and DRAM arrays
12/08/2005US20050269619 MOS capacitor with reduced parasitic capacitance
12/08/2005US20050269618 Capacitor and method for fabricating the same
12/08/2005US20050269617 Semi-conductor component with condensators buried in the substrate and insulated component layer thereof
12/08/2005US20050269615 Dram devices having an increased density layout
12/08/2005US20050269614 Non-junction-leakage 1T-RAM cell
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