H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2006
08/17/2006	US20060183281 Method for manufacturing non-volatile memory devices integrated in a semiconductor substrate
08/17/2006	US20060183280 Metal-insulator-metal capacitors and methods of forming the same
08/17/2006	US20060183279 Method for selectively stressing mosfets to improve charge carrier mobility
08/17/2006	US20060183278 Field effect device having a channel of nanofabric and methods of making same
08/17/2006	US20060183277 Method for making a semiconductor device with a metal gate electrode that is formed on an annealed high-k gate dielectric layer
08/17/2006	US20060183276 Method of manufacturing a semiconductor device
08/17/2006	US20060183275 Method and system for implementing film grain insertion
08/17/2006	US20060183274 Transparent oxide semiconductor thin film transistors
08/17/2006	US20060183273 Thin film transistor and method of fabricating the same
08/17/2006	US20060183272 Atomic layer deposition of Zr3N4/ZrO2 films as gate dielectrics
08/17/2006	US20060183271 High density stepped, non-planar nitride read only memory
08/17/2006	US20060183270 Tools and methods for forming conductive bumps on microelectronic elements
08/17/2006	US20060183269 Method for producing a semiconductor component with a plastic housing and carrier plate for performing the method
08/17/2006	US20060183268 Salicide process for image sensor
08/17/2006	US20060183267 Process for manufacturing a schottky contact on a semiconductor substrate
08/17/2006	US20060183266 Method of fabricating CMOS image sensor
08/17/2006	US20060183265 Image sensor having improved sensitivity and method for making same
08/17/2006	US20060183264 Photodiode with fiber mode dispersion compensation
08/17/2006	US20060183263 Structure and Manufacturing Method of An Image TFT Array
08/17/2006	US20060183262 Thin film encapsulation of MEMS devices
08/17/2006	US20060183261 Method of forming a biological sensor
08/17/2006	US20060183260 P-type nitride semiconductor and method of manufacturing the same
08/17/2006	US20060183259 Method of forming a wear-resistant dielectric layer
08/17/2006	US20060183258 Imaging system and method for producing semiconductor structures on a wafer by imaging a mask on the wafer with a dipole diaphragm
08/17/2006	US20060183257 Method for analyzing electrolytic copper plating solution, and analyzing device therefor and production method for semi-conductor product
08/17/2006	US20060183256 Method of piping defect detection
08/17/2006	US20060183255 Capacitance probe for thin dielectric film characterization
08/17/2006	US20060183254 Method of fabricating and/or repairing a light emitting device
08/17/2006	US20060183253 Repairing method of a thin film transistor array
08/17/2006	US20060183252 Ferroelectric memory devices
08/17/2006	US20060183251 Double density MRAM with planar processing
08/17/2006	US20060183250 Methods of fabricating ferroelectric capacitors utilizing a partial chemical mechanical polishing process
08/17/2006	US20060183249 Thin films of ferroelectric materials and a method for preparing same
08/17/2006	US20060183248 Semiconductor cleaning using superacids
08/17/2006	US20060183240 Substrate processing apparatus
08/17/2006	US20060183070 Substrate processing device and method of producing substrates
08/17/2006	US20060183056 Method for isotropic etching of copper
08/17/2006	US20060183050 Process for forming an ultra fine pattern using a bottom anti-reflective coating film containing an acid generator
08/17/2006	US20060183048 Positive photoresist composition and resist pattern formation
08/17/2006	US20060183030 Photomask, method of generating mask pattern, and method of manufacturing semiconductor device
08/17/2006	US20060182973 Resin composition and ceramic/polymer composite for embedded capacitors having excellent TCC property
08/17/2006	US20060182879 Microelectronic workpiece for electrochemical deposition processing and methods of manufacturing and using such microelectronic workpieces
08/17/2006	US20060182605 Method for transferring and loading a reticle
08/17/2006	US20060182589 Plate support having movable ribs for adjusting and guiding a wafer
08/17/2006	US20060182585 Method and apparatus for mounting components
08/17/2006	US20060182542 Manufacturing system and operative method thereof
08/17/2006	US20060182541 Semiconductor container opening/closing apparatus and semiconductor device manufacturing method
08/17/2006	US20060182540 Cluster device having dual structure
08/17/2006	US20060182539 Vacuum process system
08/17/2006	US20060182538 Wafer transfer apparatus having two independently movable transfer modules
08/17/2006	US20060182537 Apparatus and process for placing a FOUP on a loadport
08/17/2006	US20060182536 Cartesian robot cluster tool architecture
08/17/2006	US20060182535 Cartesian robot design
08/17/2006	US20060182534 Gate valve apparatus of vacuum processing system
08/17/2006	US20060182533 Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus
08/17/2006	US20060182531 Methods and apparatus for identifying small lot size substrate carriers
08/17/2006	US20060182530 Wafer loadlock chamber and wafer holder
08/17/2006	US20060182529 Transfer device and semiconductor processing system
08/17/2006	US20060182335 System and method for process variation monitor
08/17/2006	US20060181923 Nonvolatile semiconductor memory device
08/17/2006	US20060181690 Exposure apparatus, exposure method, and method for producing device
08/17/2006	US20060181665 High quality and ultra large screen liquid crystal display device and production method thereof
08/17/2006	US20060181655 Transmission liquid crystal display and method of forming the same
08/17/2006	US20060181339 Semiconductor device with resistor element
08/17/2006	US20060181220 Apparatus and method of fabricating emitter using arc
08/17/2006	US20060181095 Ultra low contact area end effector
08/17/2006	US20060180969 Jig for adjusting curvature of substrate
08/17/2006	US20060180942 Semiconductor device
08/17/2006	US20060180940 Semiconductor devices and in-process semiconductor devices having conductor filled vias
08/17/2006	US20060180937 Electronic module, methods of manufacturing and driving the same, and electronic instrument
08/17/2006	US20060180936 Fluoropolymer dielectric composition for use in circuitized substrates and circuitized substrate including same
08/17/2006	US20060180933 Semiconductor device and manufacturing method of the same
08/17/2006	US20060180922 Dielectric material
08/17/2006	US20060180921 Method for producing an FBGA component and substrate for carrying out the method
08/17/2006	US20060180920 Semiconductor device and manufacturing method thereof
08/17/2006	US20060180916 Ground arch for wirebond ball grid arrays
08/17/2006	US20060180915 Semiconductor package using terminals formed on a conductive layer of a circuit board
08/17/2006	US20060180908 Resin composition, heat-resistant resin paste and semiconductor device using these and method of preparing the same
08/17/2006	US20060180907 Packaged microelectronic devices with pressure release elements and methods for manufacturing and using such packaged microelectonic devices
08/17/2006	US20060180903 Semiconductor device and process for fabrication thereof
08/17/2006	US20060180900 Organo-silsesquioxane polymers for forming low-k dielectrics
08/17/2006	US20060180898 Hybrid type semiconductor integrated circuit and method of manufacturing the same
08/17/2006	US20060180897 Silicon-based RF system and method of manufacturing the same
08/17/2006	US20060180896 Sensor system
08/17/2006	US20060180893 Device isolation for semiconductor devices
08/17/2006	US20060180891 Semiconductor storage device, semiconductor device, and manufacturing method therefor
08/17/2006	US20060180883 Micro-oscillating element and method of making the same
08/17/2006	US20060180882 MEMS device and manufacturing method of MEMS device
08/17/2006	US20060180881 Probe head and method of fabricating the same
08/17/2006	US20060180879 Method to enhance the initiation of film growth
08/17/2006	US20060180878 Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode
08/17/2006	US20060180877 Semiconductor device, process for producing the same and process for producing metal conmpound thin film
08/17/2006	US20060180875 Ohmic layer, semiconductor device including an ohmic layer, method of forming an ohmic layer and method of forming a semiconductor device including an ohmic layer
08/17/2006	US20060180874 Etching metal silicides and germanides
08/17/2006	US20060180872 Semiconductor device and method of manufacturing the same
08/17/2006	US20060180867 Field effect transistor and method of fabricating the same
08/17/2006	US20060180865 Semiconductor device
08/17/2006	US20060180862 Semiconductor device, driver circuit and manufacturing method of semiconductor device
08/17/2006	US20060180861 Semiconductor device and method for manufacturing semiconductor device
08/17/2006	US20060180859 Metal gate carbon nanotube transistor

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