| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/22/2006 | US7095083 Methods for making semiconductor structures having high-speed areas and high-density areas |
| 08/22/2006 | US7095081 Semiconductor device and manufacturing method thereof |
| 08/22/2006 | US7095078 Charge trapping memory cell |
| 08/22/2006 | US7095077 Semiconductor memory having two charge storage sections |
| 08/22/2006 | US7095076 Electrically-alterable non-volatile memory cell |
| 08/22/2006 | US7095075 Apparatus and method for split transistor memory having improved endurance |
| 08/22/2006 | US7095074 Semiconductor device with reduced memory leakage current |
| 08/22/2006 | US7095073 High K artificial lattices for capacitor applications to use in Cu or Al BEOL |
| 08/22/2006 | US7095072 Semiconductor device with wiring layers forming a capacitor |
| 08/22/2006 | US7095071 Magnetic random access memory |
| 08/22/2006 | US7095070 Method for fabricating Bi thin film and device using the same |
| 08/22/2006 | US7095069 Magnetoresistive random access memory, and manufacturing method thereof |
| 08/22/2006 | US7095068 Semiconductor memory device having ferroelectric capacitor and method of manufacturing the same |
| 08/22/2006 | US7095067 Oxidation-resistant conducting perovskites |
| 08/22/2006 | US7095065 Varying carrier mobility in semiconductor devices to achieve overall design goals |
| 08/22/2006 | US7095062 Methods of fabricating gallium nitride semiconductor layers on substrates including non-gallium nitride posts, and gallium nitride semiconductor structures fabricated thereby |
| 08/22/2006 | US7095061 Contacting scheme for large and small area semiconductor light emitting flip chip devices |
| 08/22/2006 | US7095059 Group III nitride compound semiconductor device |
| 08/22/2006 | US7095057 Semiconductor laser and method for manufacturing the same |
| 08/22/2006 | US7095054 Semiconductor package having light sensitive chips |
| 08/22/2006 | US7095051 Nitride semiconductor element |
| 08/22/2006 | US7095048 Semiconductor device, electronic circuit array substrate provided with the same and method of manufacturing the electronic circuit array substrate |
| 08/22/2006 | US7095047 Semiconductor device and method of manufacturing the same |
| 08/22/2006 | US7095046 Semiconductor device |
| 08/22/2006 | US7095045 Semiconductor device and manufacturing method thereof |
| 08/22/2006 | US7095044 Field effect transistors and materials and methods for their manufacture |
| 08/22/2006 | US7095043 Semiconductor device, semiconductor circuit module and manufacturing method of the same |
| 08/22/2006 | US7095038 EUV source |
| 08/22/2006 | US7095036 Electron beam lithography apparatus using a patterned emitter and method of fabricating the patterned emitter |
| 08/22/2006 | US7095035 Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatus |
| 08/22/2006 | US7095023 Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device |
| 08/22/2006 | US7095021 Method, apparatus and system for specimen fabrication by using an ion beam |
| 08/22/2006 | US7094994 Heat treatment apparatus and method of semiconductor wafer |
| 08/22/2006 | US7094993 Apparatus and method for heating and cooling an article |
| 08/22/2006 | US7094966 Packaging integrated circuits with adhesive posts |
| 08/22/2006 | US7094924 Method for decreasing surface defects of patterned resist layer |
| 08/22/2006 | US7094844 Waterproof, heat resistance, shockproof; undercoating for semiconductor, flip chips |
| 08/22/2006 | US7094713 Methods for improving the cracking resistance of low-k dielectric materials |
| 08/22/2006 | US7094712 High performance MIS capacitor with HfO2 dielectric |
| 08/22/2006 | US7094711 Micro pipe manufacturing method |
| 08/22/2006 | US7094710 Very low dielectric constant plasma-enhanced CVD films |
| 08/22/2006 | US7094709 Method of synthesizing hybrid metal oxide materials and applications thereof |
| 08/22/2006 | US7094708 Method of CVD for forming silicon nitride film on substrate |
| 08/22/2006 | US7094706 Device and method for etching a substrate by using an inductively coupled plasma |
| 08/22/2006 | US7094705 Multi-step plasma treatment method to improve CU interconnect electrical performance |
| 08/22/2006 | US7094704 Method of plasma etching of high-K dielectric materials |
| 08/22/2006 | US7094703 Method and apparatus for surface treatment |
| 08/22/2006 | US7094702 Layer-by-layer etching apparatus using neutral beam and method of etching using the same |
| 08/22/2006 | US7094701 Manufacturing method of semiconductor device |
| 08/22/2006 | US7094700 forming a sidewall mask over a GexSey chalcogenide layer; plasma etching the chalcogenide layer in the presence of an NH3, N2H4, or CxHy etching gas; layer may be exposed to a fluorine material prior to etching |
| 08/22/2006 | US7094699 Etch aided by electrically shorting upper and lower sidewall portions during the formation of a semiconductor device |
| 08/22/2006 | US7094698 Method for dry etching a semiconductor wafer |
| 08/22/2006 | US7094697 Method for preparing a deep trench and an etching mixture for the same |
| 08/22/2006 | US7094696 Method for TMAH etching of CMOS integrated circuits |
| 08/22/2006 | US7094695 Apparatus and method for conditioning a polishing pad used for mechanical and/or chemical-mechanical planarization |
| 08/22/2006 | US7094694 Semiconductor device having MOS varactor and methods for fabricating the same |
| 08/22/2006 | US7094693 Method of manufacturing semiconductor device and semiconductor device |
| 08/22/2006 | US7094692 Semiconductor device and method of manufacturing the same |
| 08/22/2006 | US7094691 MOCVD of tungsten nitride thin films using W(CO)6 and NH3 for copper barrier applications |
| 08/22/2006 | US7094690 Deposition methods and apparatuses providing surface activation |
| 08/22/2006 | US7094689 Air gap interconnect structure and method thereof |
| 08/22/2006 | US7094688 Method for manufacturing semiconductor device |
| 08/22/2006 | US7094687 Reduced dry etching lag |
| 08/22/2006 | US7094686 Contact hole printing by packing and unpacking |
| 08/22/2006 | US7094685 Integration of titanium and titanium nitride layers |
| 08/22/2006 | US7094684 Manufacturing method of semiconductor device |
| 08/22/2006 | US7094683 Dual damascene method for ultra low K dielectrics |
| 08/22/2006 | US7094682 Coating of copper and silver air bridge structures to improve electromigration resistance and other applications |
| 08/22/2006 | US7094681 Semiconductor device fabrication method |
| 08/22/2006 | US7094680 Formation of a tantalum-nitride layer |
| 08/22/2006 | US7094679 Carbon nanotube interconnect |
| 08/22/2006 | US7094678 Electrostatic discharge protection of thin-film resonators |
| 08/22/2006 | US7094677 Method of forming a penetration electrode and substrate having a penetration electrode |
| 08/22/2006 | US7094676 Semiconductor chip assembly with embedded metal pillar |
| 08/22/2006 | US7094675 Structure having spatially separated photo-excitable electron-hole pairs and method of manufacturing same |
| 08/22/2006 | US7094674 Method for production of contacts on a wafer |
| 08/22/2006 | US7094673 Etch stop layer in poly-metal structures |
| 08/22/2006 | US7094672 Method for forming self-aligned contact in semiconductor device |
| 08/22/2006 | US7094671 Transistor with shallow germanium implantation region in channel |
| 08/22/2006 | US7094670 doping film comprising semiconductors, by placing electrostatic chuck in reactors, charging doping precursors into the reactor and applying radio frequency power to generate gases, and applying voltage to an electrode of the electrostatic chuck |
| 08/22/2006 | US7094669 Structure and method of liner air gap formation |
| 08/22/2006 | US7094668 Annealing process and device of semiconductor wafer |
| 08/22/2006 | US7094667 Smooth thin film layers produced by low temperature hydrogen ion cut |
| 08/22/2006 | US7094666 Method and system for fabricating strained layers for the manufacture of integrated circuits |
| 08/22/2006 | US7094665 Exfoliating method, transferring method of thin film device, and thin film device, thin film integrated circuit device, and liquid crystal display device produced by the same |
| 08/22/2006 | US7094664 Method for fabricating semiconductor photodetector |
| 08/22/2006 | US7094663 Semiconductor device and method of manufacturing the same |
| 08/22/2006 | US7094662 Overlay mark and method of fabricating the same |
| 08/22/2006 | US7094661 Single and dual damascene techniques utilizing composite polymer dielectric film |
| 08/22/2006 | US7094660 Method of manufacturing trench capacitor utilizing stabilizing member to support adjacent storage electrodes |
| 08/22/2006 | US7094659 Method of forming deep trench capacitors |
| 08/22/2006 | US7094658 3-stage method for forming deep trench structure and deep trench capacitor |
| 08/22/2006 | US7094657 Method for protecting against oxidation of a conductive layer in said device |
| 08/22/2006 | US7094656 Method of forming poly-silicon thin film transistors |
| 08/22/2006 | US7094655 Method of fabricating semiconductor device |
| 08/22/2006 | US7094654 Manufacture of electronic devices comprising thin-film transistors |
| 08/22/2006 | US7094653 Method for forming STI structures with controlled step height |
| 08/22/2006 | US7094652 Semiconductor device and method of manufacturing the same |
| 08/22/2006 | US7094651 Hydrazine-free solution deposition of chalcogenide films |
| 08/22/2006 | US7094650 Gate electrode for FinFET device |