H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2006
08/29/2006	US7098046 Alignment method and exposure apparatus using the method
08/29/2006	US7098045 Processing method utilizing an apparatus to be sealed against workpiece
08/29/2006	US7098044 Method of forming an etched metal trace with reduced RF impedance resulting from the skin effect
08/29/2006	US7098043 PCMO spin-coat deposition
08/29/2006	US7097960 Dissolving gaseous molecule having oxidizing properties or reducing properties in an aqueous alkaline solution; semiconductor manufacturing; reducing solution is an aqueous solution containing at least one of hydrogen, hydrogen sulfide, nitric acid, and sulfurous acid
08/29/2006	US7097949 Phase edge phase shift mask enforcing a width of a field gate image and fabrication method thereof
08/29/2006	US7097946 For use insemiconductor manufacturing; lithography
08/29/2006	US7097945 by forming the virtual pattern around the isolation pattern, the flare effect of the isolation pattern is close to that of the dense pattern, thus the CD bias between a dense pattern and an isolation pattern is reduced, and the process windows of both patterns are not reduced
08/29/2006	US7097923 Method for forming thin film heads using a tri-layer anti-reflection coating for photolithographic applications and a structure thereof
08/29/2006	US7097920 Group III nitride based semiconductor substrate and process for manufacture thereof
08/29/2006	US7097886 Deposition process for high aspect ratio trenches
08/29/2006	US7097784 Etching method and apparatus for semiconductor wafers
08/29/2006	US7097782 Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly
08/29/2006	US7097781 Method for manufacturing porous structure and method for forming pattern
08/29/2006	US7097779 Processing system and method for chemically treating a TERA layer
08/29/2006	US7097755 Electrochemical mechanical processing with advancible sweeper
08/29/2006	US7097735 Plasma processing device
08/29/2006	US7097718 Single crystal silicon wafer having an epitaxial layer substantially free from grown-in defects
08/29/2006	US7097714 Particulate removal from an electrostatic chuck
08/29/2006	US7097712 Apparatus for processing a semiconductor
08/29/2006	US7097708 Substituted donor atoms in silicon crystal for quantum computer
08/29/2006	US7097707 GaN boule grown from liquid melt using GaN seed wafers
08/29/2006	US7097686 Generating an aerosol including a liquid comprising a nickel precursor and a reducing agent and moving the droplets through a heating zone by means of a carrier gas to form nickel particles having small particle size, narrow size distribution, spherical morphology and high crystallinity; pyrometallurgy
08/29/2006	US7097550 Chemical mechanical polishing pad
08/29/2006	US7097549 Polishing pad
08/29/2006	US7097544 Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
08/29/2006	US7097541 CMP method for noble metals
08/29/2006	US7097535 Method and configuration for conditioning a polishing pad surface
08/29/2006	US7097410 Methods and apparatus for controlled-angle wafer positioning
08/29/2006	US7097091 Friction stir welding method and component part welded by the method
08/29/2006	US7097090 Solder ball
08/29/2006	US7096914 Apparatus for bonding a chip using an insulating adhesive tape
08/29/2006	US7096912 Bonding apparatus
08/29/2006	US7096873 Method for manufacturing a group III nitride compound semiconductor device
08/29/2006	US7096819 Inductive plasma processor having coil with plural windings and method of controlling plasma density
08/29/2006	US7096716 Integration of thermal regulation and electronic fluid sensing
08/29/2006	US7096581 Method for providing a redistribution metal layer in an integrated circuit
08/29/2006	US7096548 Manufacturing method of integrated capacitor
08/29/2006	CA2295248C Power devices in wide bandgap semiconductor
08/29/2006	CA2212751C Bandgap tuning of semiconductor well structure
08/24/2006	WO2006089296A2 Low cost, high volume lead frame production
08/24/2006	WO2006089291A1 Use of phosphorescent materials for two-dimensional wafer mapping in a chemical mechanical polishing
08/24/2006	WO2006089134A2 Apparatus and method for surface preparation using energetic and reactive cluster beams
08/24/2006	WO2006089072A2 Generation and applications of negative dielectric constant material
08/24/2006	WO2006088881A2 Advanced low dielectric constant organosilicon plasma chemical vapor deposition films
08/24/2006	WO2006088766A2 Highly conductive shallow junction formation
08/24/2006	WO2006088713A2 Enhanced wafer cleaning method
08/24/2006	WO2006088689A2 Method for patterning submicron pillars
08/24/2006	WO2006088564A1 Flexible active matrix display backplane and method
08/24/2006	WO2006088534A1 Interconnect structures with encasing cap and methods of making thereof
08/24/2006	WO2006088527A2 A semiconductor substrate processing method
08/24/2006	WO2006088448A1 Wafer carrier for growing gan wafers
08/24/2006	WO2006088261A1 METHOD FOR FORMING InGaN LAYER AND SEMICONDUCTOR DEVICE
08/24/2006	WO2006088228A1 Semiconductor luminous element and method for manufacture thereof
08/24/2006	WO2006088180A1 Semiconductor device manufacturing method
08/24/2006	WO2006088166A1 Semiconductor oxidation apparatus and method of producing semiconductor element
08/24/2006	WO2006088141A1 Electron beam device
08/24/2006	WO2006088114A1 Plasma treatment apparatus
08/24/2006	WO2006088098A1 Xy stage
08/24/2006	WO2006088074A1 Semiconductor wafer surface protecting sheet and semiconductor wafer protecting method using such protecting sheet
08/24/2006	WO2006088062A1 Production method for semiconductor device and substrate processing device
08/24/2006	WO2006088036A1 Process for producing modified porous silica film, modified porous silica film obtained by the process, and semiconductor device employing the modified porous silica film
08/24/2006	WO2006088015A1 Method for forming organosilicon film, semiconductor device having such organosilicon film and method for manufacturing same
08/24/2006	WO2006088005A1 Semiconductor device
08/24/2006	WO2006087990A1 Gas type precise silicon wafer cleaning and drying apparatus
08/24/2006	WO2006087978A1 Projection optical system, exposure equipment and device manufacturing method
08/24/2006	WO2006087966A1 Method of removing organic coating and photolithographic process
08/24/2006	WO2006087958A1 Nitride semiconductor material and method for manufacturing nitride semiconductor crystal
08/24/2006	WO2006087957A1 Semiconductor device manufacturing method and semiconductor device
08/24/2006	WO2006087955A1 Temperature setting method for heat treating plate, temperature setting device for heat treating plate, program and computer-readable recording medium recording program
08/24/2006	WO2006087942A1 Seal material for semiconductor production apparatus
08/24/2006	WO2006087938A1 Temperature setting method for heat treating plate, temperature setting device for heat treating plate, program and computer-readable recording medium recording program
08/24/2006	WO2006087894A1 Fixation carrier, production method of fixation carrier, use method of fixation carrier, and substrate reception container
08/24/2006	WO2006087893A1 Substrate processing method and substrate processing apparatus
08/24/2006	WO2006087873A1 Barrier film for flexible copper substrate and sputtering target for barrier film formation
08/24/2006	WO2006087865A1 Positive resist composition and method of forming resist pattern
08/24/2006	WO2006087833A1 Hydrogen atom generation source in vacuum treatment apparatus, and hydrogen atom transportation method
08/24/2006	WO2006087822A1 Electronic tag chip
08/24/2006	WO2006087798A1 Storage element matrix, method for manufacturing such storage element matrix and semiconductor storage device using such storage element matrix
08/24/2006	WO2006087796A1 Nonvolatile semiconductor storage device
08/24/2006	WO2006087777A1 Pressurizing type lamp annealing device, pressurizing type lamp annealing method, thin-film, and electronic component
08/24/2006	WO2006087679A2 Embedded dram with increased capacitance and method of manufacturing same
08/24/2006	WO2006087381A1 Trench-gate electrode for finfet device
08/24/2006	WO2006087044A1 Integrated circuit arrangement comprising a field effect transistor, especially a tunnel field effect transistor
08/24/2006	WO2006086996A1 Wafer cleaning after via-etching
08/24/2006	WO2006079104A3 Encapsulation of circuit components to reduce thermal cycling stress
08/24/2006	WO2006072238A3 Electrical determination of the connection quality of a bonded wafer connection
08/24/2006	WO2006068805A9 Method and apparatus for controlling spatial temperature distribution
08/24/2006	WO2006055984A3 Substrate processing apparatus using a batch processing chamber
08/24/2006	WO2006049853A3 Method of connecting a semiconductor package to a printed wiring board
08/24/2006	WO2006039633A3 Structure and method of making interconnect element, and multilayer wiring board including the interconnect element
08/24/2006	WO2006036644A3 Lamp array for thermal processing exhibiting improved radial uniformity
08/24/2006	WO2006034683A3 Method for separating surface-mountable semiconductor components and for fitting external contacts to said components
08/24/2006	WO2006032963A3 Methods for producing noble metal films, noble metal oxide films, and noble metal silicide films
08/24/2006	WO2006025035A3 Vertical semiconductor devices and methods of manufacturing such devices
08/24/2006	WO2006022780A3 Method for fabricating crystalline silicon
08/24/2006	WO2006017009A3 Surface lubrication microstructures
08/24/2006	WO2006011991A3 Apparatus for an optimized plasma chamber top piece
08/24/2006	WO2005122284A3 Semiconductor-on-diamond devices and methods of forming
08/24/2006	WO2005112100A3 Stacked module systems and methods

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