Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2006
08/24/2006DE102005062935A1 Gerät und Verfahren zur Untersuchung von Metallüberresten auf Halbleiter Wafern Apparatus and method for the examination of metal remains on semiconductor wafers
08/24/2006DE102005008354A1 Semiconductor component e.g. trench transistor, has via arranged above trench areas, such that part of overlapping area contacts part of electrode structure by via, where isolation structure areas overlap with each other
08/24/2006DE102005008321A1 Semiconductor memory unit e.g. electrically EPROM, for e.g. NAND architecture, has charge-trapping memory layer that is made of amorphous silicon carbide and silicon nitride layers and having specific concentration at less impurity region
08/24/2006DE102005006995A1 Semiconductor module component, has plastic housing comprising conducting path, through which lower contact surfaces are electrically connected with upper contact surfaces, where paths comprise contacting path layer
08/24/2006DE102005006825A1 Doping region preparation method, for selection transistor in dynamic RAM memory cells, involves executing ion implantation process, so that impact angle of ions relating to surface of semiconductor substrate amounts to specific value
08/24/2006DE102005006639A1 Erzeugen von SiC-Packs auf Wafer-Ebene Generating SiC-packs at the wafer level
08/24/2006DE102005006281A1 Halbleiterbauteil mit Goldbeschichtungen und Verfahren zur Herstellung desselben Of the same semiconductor device with gold coatings and methods for preparing
08/24/2006DE102005006280A1 Halbleiterbauteil mit einem Druckkontakt durch eine Gehäusemasse und Verfahren zur Herstellung desselben Of the same semiconductor device with a contact pressure by a housing composition and methods for preparing
08/24/2006DE102004063994A1 Chip-size package manufacture involves patterning dielectric layer to form openings exposing conductive lines
08/24/2006DE102004023752B4 Verfahren zur Vermeidung der Verringerung der Dicke der Umverdrahtung A method for avoiding the decrease in the thickness of the rewiring
08/24/2006DE10157452B4 Verfahren zum chemisch-mechanischen Polieren von Wafern A method for chemical mechanical polishing of wafers
08/24/2006DE10047135B4 Verfahren zum Herstellen eines Kunststoff umhüllten Bauelementes und Kunststoff umhülltes Bauelement A method for producing a plastic coated component and plastic component enveloped
08/24/2006CA2598040A1 Method and arrangement for contact-connecting semiconductor chips on a metallic substrate
08/23/2006EP1693961A1 Programmable logic device including multipliers and configurations thereof to reduce resource utilization
08/23/2006EP1693898A1 Floating body cell memory device and a method for the manufacturing thereof
08/23/2006EP1693897A2 Semiconductor device
08/23/2006EP1693896A1 Silicon carbide semiconductor device and its manufacturing method
08/23/2006EP1693892A2 Stacked microelectronic layer and module with three-axis channel T-connects
08/23/2006EP1693891A2 Method of manufacturing a semiconductor device
08/23/2006EP1693890A1 Silicone adhesive agent
08/23/2006EP1693889A2 Method to enhance the initiation of film growth
08/23/2006EP1693888A1 Method to enhance the initiation of film growth
08/23/2006EP1693887A1 Processing method of silicon wafer
08/23/2006EP1693886A1 Substrate treatment device control method and substrate treatment device
08/23/2006EP1693885A1 Light flux conversion element, lighting optical device, exposure system, and exposure method
08/23/2006EP1693884A2 Susceptor
08/23/2006EP1693883A2 A brush assembly apparatus
08/23/2006EP1693840A1 Data recording medium including ferroelectric layer and method of manufacturing the same
08/23/2006EP1693792A1 Method for manufacturing RFID labels
08/23/2006EP1693709A1 Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same
08/23/2006EP1693662A1 Inspection method and inspection assisting device of quartz product in semiconductor processing system
08/23/2006EP1693614A1 Indicator lamp
08/23/2006EP1692728A2 Nrom flash memory devices on ultrathin silicon
08/23/2006EP1692724A1 Semiconductor memory device with increased node capacitance
08/23/2006EP1692723A1 Plastically-deformable irreversible storage medium and method of producing one such medium
08/23/2006EP1692721A1 Pillar cell flash memory technology
08/23/2006EP1692720A2 Bipolar complementary semiconductor device
08/23/2006EP1692719A1 Semiconductor substrate assemblies and methods for preparing and dicing the same
08/23/2006EP1692718A1 Carrier for receiving an object and method for the production of a carrier
08/23/2006EP1692717A1 REDUCTION OF BORON DIFFUSIVITY IN pFETs
08/23/2006EP1692716A2 Method for the molecular bonding of microelectronic components to a polymer film
08/23/2006EP1692715A1 Umbilical cord facilities connection for an ion beam implanter
08/23/2006EP1692714A1 Apparatus and method for reducing electrical noise in a thermally controlled chuck
08/23/2006EP1692560A2 Variable optical arrays and variable manufacturing methods
08/23/2006EP1692557A2 Optical device for led-based lamp
08/23/2006EP1692457A2 Implantable pressure sensors
08/23/2006EP1691940A2 Method and apparatus for rotation of a workpiece in supercritical fluid solutions for removing photo resist, residues and particles therefrom
08/23/2006EP1691939A1 Method and device for cleaning at least one process chamber used for coating at least one substrate
08/23/2006EP1691938A2 Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon
08/23/2006EP1402571B1 Method and apparatusof transferring a substantially disc-shaped workpiece
08/23/2006EP1388167B1 Method of removing oxide from copper bond pads
08/23/2006EP1356476B1 Narrow-band spectral filter and the use thereof
08/23/2006EP1268079B1 Drip manifold for uniform chemical delivery
08/23/2006EP1218796A4 Extreme ultraviolet soft x-ray projection lithographic method and mask devices
08/23/2006EP1214718A4 Extreme ultraviolet soft x-ray projection lithographic method system and lithography elements
08/23/2006EP1184897B1 Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method
08/23/2006EP1153336B1 Chemical filtering for optimising the light transmittance of a gas
08/23/2006EP1049813B1 Cvd reactor and process
08/23/2006EP0658276B1 METHOD FOR PREPARING A CuInSe2 COMPOUND
08/23/2006CN2809871Y Disk spring clamping mechanism for thyristor installation
08/23/2006CN2808933Y Combiner of remote plasma reactor
08/23/2006CN1823554A Plasma processing apparatus and method for producing same
08/23/2006CN1823427A Thin film transistor and method for manufacturing same
08/23/2006CN1823425A Organic thin-film transistor and process for fabricating the same, active matrix type display employing it and radio identification tag
08/23/2006CN1823424A Semiconductor device manufacturing method and semiconductor device
08/23/2006CN1823423A Semiconductor device and its manufacturing method
08/23/2006CN1823422A Insulated gate power semiconductor devices
08/23/2006CN1823420A Trenched DMOS devices and methods and processes for making same
08/23/2006CN1823419A 半导体器件 Semiconductor devices
08/23/2006CN1823418A Stacked 1T-nmemory cell structure
08/23/2006CN1823414A PECVD silicon-rich oxide layer for reduced UV charging in an EEPROM
08/23/2006CN1823413A Semiconductor device having electrical contact from opposite sides and method therefor
08/23/2006CN1823412A Array of nanoscopic MOSFET transistors and fabrication methods
08/23/2006CN1823411A Plasma processing apparatus
08/23/2006CN1823410A Metal bump with an insulation for the side walls and method of fabricating a chip with such a metal bump
08/23/2006CN1823409A Packaging method and system of electric component
08/23/2006CN1823408A ESD protection device and method of making the same
08/23/2006CN1823407A Vertical boat for heat treatment
08/23/2006CN1823406A Low-permittivity film, and production method therefor, and electronic component using it
08/23/2006CN1823405A System, method and apparatus for improved local dual-damascene planarization
08/23/2006CN1823404A Process for producing semiconductor device and substrate treating apparatus
08/23/2006CN1823403A Electrolytic processing apparatus and electrolytic processing method
08/23/2006CN1823402A Substrate-treating apparatus
08/23/2006CN1823401A Micellar technology for post-etch residues
08/23/2006CN1823400A Nitride semiconductor element and method for manufacturing thereof
08/23/2006CN1823399A Component mounting apparatus and component mounting method
08/23/2006CN1823304A Material for forming fine pattern and method for forming fine pattern using the same
08/23/2006CN1823268A Integrated resistor network for multi-functional use in constant current or constant voltage operation of a pressure sensor
08/23/2006CN1823136A Phosphorus-containing silazane composition, phosphorus-containing siliceous film, phosphorus-containing siliceous filler, method for producing phosphorus-containing siliceous film, and semiconductor d
08/23/2006CN1823108A Positive photoresist composition and method of forming resist pattern
08/23/2006CN1823107A Positive photoresist composition and method of forming resist pattern
08/23/2006CN1822748A Method of forming film pattern, method of manufacturing device, electro-optical device, and electronic apparatus
08/23/2006CN1822745A Plasma generation apparatus
08/23/2006CN1822397A Non-volatile semiconductor memory device and its manufacturing method
08/23/2006CN1822395A Semiconductor device, driver circuit and manufacturing method of semiconductor device
08/23/2006CN1822394A Semiconductor device and manufacture method thereof
08/23/2006CN1822393A Semiconductor device and method of manufacturing same
08/23/2006CN1822391A Superjunction semiconductor device structure and method
08/23/2006CN1822390A Semiconductor device edge termination structure and method
08/23/2006CN1822389A Semiconductor device having deep trench charge compensation regions and method