Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2006
08/22/2006US7094649 Method for forming multi-level mask ROM cell and NAND multi-level mask ROM
08/22/2006US7094648 Method for fabricating an NROM memory cell array
08/22/2006US7094646 Flash memory device having a split gate and method of manufacturing the same
08/22/2006US7094645 Programming and erasing structure for a floating gate memory cell and method of making
08/22/2006US7094644 Method for manufacturing a semiconductor device
08/22/2006US7094643 Method of forming gate of flash memory cell
08/22/2006US7094642 Method of fabricating semiconductor device
08/22/2006US7094641 Method for forming wiring pattern, method for manufacturing semiconductor device, electro-optic device and electronic equipment
08/22/2006US7094640 Method of making a trench MOSFET device with improved on-resistance
08/22/2006US7094639 Method for fabricating semiconductor device
08/22/2006US7094638 Method of forming gate structure
08/22/2006US7094637 Method for minimizing the vapor deposition of tungsten oxide during the selective side wall oxidation of tungsten-silicon gates
08/22/2006US7094636 Method of forming a conductive line
08/22/2006US7094635 Method of fabricating a light emitting device
08/22/2006US7094634 Structure and method for manufacturing planar SOI substrate with multiple orientations
08/22/2006US7094633 Method for efficiently producing removable peripheral cards
08/22/2006US7094632 Low profile chip scale stacking system and method
08/22/2006US7094631 Methods for designing bond pad rerouting elements for use in stacked semiconductor device assemblies and for assembling semiconductor devices
08/22/2006US7094630 Method of fabricating semiconductor device having a chip, reinforcing plate, and sealing material sharing a common rear surface
08/22/2006US7094629 Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument
08/22/2006US7094628 Underfill compounds including electrically charged filler elements, microelectronic devices having underfill compounds including electrically charged filler elements, and methods of underfilling microelectronic devices
08/22/2006US7094627 Process for the manufacture of large area arrays of discrete components
08/22/2006US7094626 Method for encapsulating an electrical component
08/22/2006US7094625 Field effect transistor and method of producing the same
08/22/2006US7094624 Active matrix organic electroluminescent display device and fabricating method thereof
08/22/2006US7094623 Method for producing semiconductor nanoparticles and semiconductor nanoparticles produced by the same
08/22/2006US7094622 Polymer based tunneling sensor
08/22/2006US7094621 Fabrication of diaphragms and “floating” regions of single crystal semiconductor for MEMS devices
08/22/2006US7094620 Semiconductor device manufacturing method
08/22/2006US7094619 Method of fabricating a light emitting device
08/22/2006US7094618 Methods for marking a packaged semiconductor die including applying tape and subsequently marking the tape
08/22/2006US7094617 Optoelectronic device having dual-structural nano dot and method for manufacturing the same
08/22/2006US7094616 High resolution cross-sectioning of polysilicon features with a dual beam tool
08/22/2006US7094615 Method of controlling probe tip sanding in semiconductor device testing equipment
08/22/2006US7094614 In-situ monitoring of chemical vapor deposition process by mass spectrometry
08/22/2006US7094613 Method for controlling accuracy and repeatability of an etch process
08/22/2006US7094612 Method of controlling a potential difference between a stencil mask and a substrate of semiconductor device
08/22/2006US7094611 Method of producing ferroelectric capacitor
08/22/2006US7094522 Developing method, substrate treating method, and substrate treating apparatus
08/22/2006US7094521 irradiating photoresist film with exposing light while supplying, between projection lens and resist film, a circulating solution of water including antifoaming agent (silicone oil), baking, then developing; for production of semiconductors
08/22/2006US7094519 Method of manufacturing a CMOS image sensor
08/22/2006US7094515 Stimulus sensitive compound and stimulus sensitive composition containing the same
08/22/2006US7094506 Lithographic apparatus and device manufacturing method
08/22/2006US7094504 Faster, lower cost production of phase shift device
08/22/2006US7094440 Substrate treatment method and substrate treatment apparatus
08/22/2006US7094355 Local dry etching method
08/22/2006US7094315 Chamber configuration for confining a plasma
08/22/2006US7094314 Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads
08/22/2006US7094312 Focused particle beam systems and methods using a tilt column
08/22/2006US7094291 Semiconductor processing apparatus
08/22/2006US7094288 Method for producing a positively doped semiconductor with large forbidden band
08/22/2006US7094273 melting a low aluminum content alloy, adding calcium prior to the addition of the remaining aluminum then casting; calcium additions deoxidize the melt; by product inhibition
08/22/2006US7094139 Retaining ring with flange for chemical mechanical polishing
08/22/2006US7094134 Off-line tool for breaking in multiple pad conditioning disks used in a chemical mechanical polishing system
08/22/2006US7094131 Microelectronic substrate having conductive material with blunt cornered apertures, and associated methods for removing conductive material
08/22/2006US7094108 Apparatus for forming modular sockets using flexible interconnects and resulting structures
08/22/2006US7094046 Mold assembly for a package stack via bottom-leaded plastic (BLP) packaging
08/22/2006US7093975 Semiconductor integrated circuit with simply configured temperature detection circuit
08/22/2006US7093777 Jet clean nozzle with multiple spray openings
08/22/2006US7093744 Recognition device, bonding device, and method of manufacturing a circuit device
08/22/2006US7093560 Techniques for reducing arcing-related damage in a clamping ring of a plasma processing system
08/22/2006US7093559 Method for PECVD deposition of selected material films
08/22/2006US7093375 Apparatus and method for utilizing a meniscus in substrate processing
08/22/2006US7093356 Method for producing wiring substrate
08/22/2006CA2364498C Ic-compatible parylene mems technology and its application in integrated sensors
08/21/2006WO2006088209A1 Production method for 3-d mold, production method for finely machined product, production method for fine-pattern molded product, 3-d mold, finely machined product, fine-pattern molded product and optical component
08/17/2006WO2006086420A1 Single wafer dryer and drying methods
08/17/2006WO2006086337A1 A low temperature method for fabricating high-aspect ratio vias and devices fabricated by said method
08/17/2006WO2006086300A2 Control of process gases in specimen surface treatment system using plasma
08/17/2006WO2006086281A2 Methods and devices for improved charge management for three-dimensional and color sensing
08/17/2006WO2006086265A2 Method and composition for polishing a substrate
08/17/2006WO2006086024A1 Relaxation of a strained layer using a molten layer
08/17/2006WO2006085917A2 A method of fabricating a nano-wire
08/17/2006WO2006085912A2 Large-scale synthesis of perovskite nanostructures
08/17/2006WO2006085903A1 Method of growing semiconductor nanowires with uniform cross-sectional area using chemical vapor deposition
08/17/2006WO2006085731A1 Method for transporting a fluid containing unstable gas through bundles of tubes
08/17/2006WO2006085681A1 Photosensitive composition removing liquid
08/17/2006WO2006085678A1 Photosensitive composition removing liquid
08/17/2006WO2006085670A1 Electrode and compound semiconductor element
08/17/2006WO2006085637A1 Semiconductor device and manufacturing method thereof
08/17/2006WO2006085634A1 Semiconductor device and manufacturing method of the same
08/17/2006WO2006085626A1 Exposure method and system, and method for fabricating device
08/17/2006WO2006085614A2 Cushioning material for polishing pad
08/17/2006WO2006085611A1 N-type transistor, production methods for n-type transistor and n-type transistor-use channel, and production method of nanotube structure exhibiting n-type semiconductor-like characteristics
08/17/2006WO2006085608A1 Semiconductor device and semiconductor device design method
08/17/2006WO2006085582A1 Semiconductor device having silicon nitride-containing film derived from polysilazane and method for manufacturing same
08/17/2006WO2006085573A1 Interposer, probe card and method for manufacturing interposer
08/17/2006WO2006085559A1 Structure for holding fine structure, semiconductor device, tft driving circuit, panel, display, sensor and their manufacturing methods
08/17/2006WO2006085556A1 Image forming device and image forming method
08/17/2006WO2006085545A1 Toggle magnetic random access memory and toggle magnetic random access memory write method
08/17/2006WO2006085527A1 Temperature setting method for heat treating plate, temperature setting device for heat treating plate, program and computer-readable recording medium recording program
08/17/2006WO2006085524A1 Exposure equipment
08/17/2006WO2006085489A1 Heat treatment apparatus and heat treatment method
08/17/2006WO2006085462A1 Component mounting apparatus and substrate transfer method
08/17/2006WO2006085448A1 Semiconductor element
08/17/2006WO2006085427A1 Method for manufacturing capacitor, method for manufacturing semiconductor device and apparatus for manufacturing semiconductor device
08/17/2006WO2006085425A1 Method of forming film and film forming apparatus
08/17/2006WO2006085423A1 Cmp method, cmp apparatus, method for manufacturing laminated board having sti structure and method for manufacturing semiconductor device
08/17/2006WO2006085419A1 Positive resist composition and method of forming resist pattern
08/17/2006WO2006085367A1 Process for producing semiconductor device