| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/10/2006 | US20060178012 Method of Forming Semiconductor Compound Film for Fabrication of Electronic Device and Film Produced By Same |
| 08/10/2006 | US20060178011 Method of forming SI tip by single etching process and its application for forming floating gate |
| 08/10/2006 | US20060178010 Member having plasma-resistance for semiconductor manufacturing apparatus and method for producing the same |
| 08/10/2006 | US20060178009 Wafer stage with wafer positioning and alignment |
| 08/10/2006 | US20060178008 Post etch copper cleaning using dry plasma |
| 08/10/2006 | US20060178007 Method of forming copper wiring layer |
| 08/10/2006 | US20060178006 Supercritical fluid-assisted deposition of materials on semiconductor substrates |
| 08/10/2006 | US20060178005 Pattern formation method |
| 08/10/2006 | US20060178004 Method of obtaining release-standing micro structures and devices by selective etch removal of protective and sacrificial layer using the same |
| 08/10/2006 | US20060178003 Use of germanium dioxide and/or alloys of GeO2 with silicon dioxide for semiconductor dielectric applications |
| 08/10/2006 | US20060178002 Methods for forming dual damascene wiring for semiconductor devices using protective via capping layer |
| 08/10/2006 | US20060178001 Method for fabricating interconnection in an insulating layer on a wafer and structure thereof |
| 08/10/2006 | US20060178000 Epitaxial growth process |
| 08/10/2006 | US20060177999 Microelectronic workpieces and methods for forming interconnects in microelectronic workpieces |
| 08/10/2006 | US20060177998 Fully silicided gate structure for finfet devices |
| 08/10/2006 | US20060177997 Methods of forming semiconductor devices with high-k gate dielectric |
| 08/10/2006 | US20060177996 Doping method and method of manufacturing field effect transistor |
| 08/10/2006 | US20060177995 Voltage sustaining layer with opposite-doped islands for semiconductor power devices |
| 08/10/2006 | US20060177994 Methods and apparatuses for manufacturing ultra thin device layers for integrated circuit devices |
| 08/10/2006 | US20060177993 Method for manufacturing SOI substrate |
| 08/10/2006 | US20060177992 Backside coating for MEMS wafer |
| 08/10/2006 | US20060177991 SOI wafer production method |
| 08/10/2006 | US20060177990 Methods for selective integration of airgaps and devices made by such methods |
| 08/10/2006 | US20060177989 Substrate before insulation, method of manufacturing substrate, method of manufacturing surface acoustic wave transducer, surface acoustic wave device, and electronic equipment |
| 08/10/2006 | US20060177988 Semiconductor fabrication processes |
| 08/10/2006 | US20060177987 Methods for forming thin oxide layers on semiconductor wafers |
| 08/10/2006 | US20060177986 High fT and fmax bipolar transistor and method of making same |
| 08/10/2006 | US20060177985 Source/drain extension implant process for use with short time anneals |
| 08/10/2006 | US20060177984 Method for manufacturing semiconductor elemental device |
| 08/10/2006 | US20060177983 Method for forming a notched gate |
| 08/10/2006 | US20060177982 Method of forming an EPROM cell and structure therefor |
| 08/10/2006 | US20060177981 Capacitors and methods of manufacture thereof |
| 08/10/2006 | US20060177980 Capacitorless 1-transistor DRAM cell and fabrication method |
| 08/10/2006 | US20060177979 Method of manufacturing a capacitor and a metal gate on a semiconductor device |
| 08/10/2006 | US20060177978 Manufacturing method of semiconductor device |
| 08/10/2006 | US20060177977 Method for patterning fins and gates in a FinFET device using trimmed hard-mask capped with imaging layer |
| 08/10/2006 | US20060177976 MOS transistor forming method |
| 08/10/2006 | US20060177975 Atomic layer deposition of CeO2/Al2O3 films as gate dielectrics |
| 08/10/2006 | US20060177974 Semiconductor thin film, thin film transistor, method for manufacturing same, and manufacturing equipment of semiconductor thin film |
| 08/10/2006 | US20060177973 Generation method of light intensity distribution, generation apparatus of light intensity distribution, and light modulation element assembly |
| 08/10/2006 | US20060177972 Thin-film transistor and method for manufacturing the same |
| 08/10/2006 | US20060177971 Anisotropically conductive connector, production process thereof and application product thereof |
| 08/10/2006 | US20060177970 Methods of Adhering Microfeature Workpieces, Including A Chip, To A Support Member |
| 08/10/2006 | US20060177969 Method for interconnecting semiconductor components with substrates and contact means |
| 08/10/2006 | US20060177968 Method for fabricating semiconductor packages with semiconductor chips |
| 08/10/2006 | US20060177967 Manufacturing method of semiconductor device |
| 08/10/2006 | US20060177966 Package or pre-applied foamable underfill for lead-free process |
| 08/10/2006 | US20060177965 Semiconductor device and process for producing the same |
| 08/10/2006 | US20060177964 Semiconductor module and method for producing a semiconductor module |
| 08/10/2006 | US20060177963 Process for producing copy protection for an electronic circuit |
| 08/10/2006 | US20060177962 Process for producing n-type semiconductor diamond and n-type semiconductor diamond |
| 08/10/2006 | US20060177960 Control module assembly |
| 08/10/2006 | US20060177959 Microfeature workpieces having microlenses and methods of forming microlenses on microfeature workpieces |
| 08/10/2006 | US20060177958 Method for producing an imaging device |
| 08/10/2006 | US20060177957 Micromirror array device with a small pitch size |
| 08/10/2006 | US20060177956 Method of manufacturing a hermetic chamber with electrical feedthroughs |
| 08/10/2006 | US20060177955 Process for making a CMOS image sensor |
| 08/10/2006 | US20060177954 Dicing tape attaching unit that can attach pre-cut dicing tape and general dicing tape to wafer and in-line system having the dicing tape attaching unit |
| 08/10/2006 | US20060177953 Method of fabricating semiconductor device |
| 08/10/2006 | US20060177952 Process to make nano-structurated components |
| 08/10/2006 | US20060177951 Method of forming film pattern, device, method of manufacturing the same, electro-optical apparatus, and electronic apparatus |
| 08/10/2006 | US20060177950 Method of manufacturing optical interferance color display |
| 08/10/2006 | US20060177949 Method for monitoring oxide film deposition |
| 08/10/2006 | US20060177948 Airtight terminal and method for producing the same, a piezoelectric vibrator and a method for producing the same, an oscillator, an electronic unit and a wave timepiece |
| 08/10/2006 | US20060177947 Magnetoresistive random-access memory device |
| 08/10/2006 | US20060177946 Method to assemble structures from nano-materials |
| 08/10/2006 | US20060177747 Semiconductors, liquid crystal displays; patterning any size or shape by exposure using only one photomask; the mask pattern has a light-shielding film and a phase shifter |
| 08/10/2006 | US20060177746 Half-tone stacked film, photomask-blank, photomask and fabrication method thereof |
| 08/10/2006 | US20060177743 Photomask, photomask fabrication method, and semiconductor device fabrication method |
| 08/10/2006 | US20060177697 Ceramic substrate, one side thereof having wafer-retaining face having resistive heating element provided either superficially or interiorly in the substrate and a recess formed in wafer-retaining face with room to carry semiconductor manufacturing wafer |
| 08/10/2006 | US20060177583 Method for the formation of a metal film |
| 08/10/2006 | US20060177579 Plasma enhanced atomic layer deposition using an apparatus of reaction chamber having a rotary disk, susceptors; spraying a first reactive gas, a second reactive gas of H2, N2, O2, N2O or NH3 excited by plasma and an inert gas |
| 08/10/2006 | US20060177361 Crystallized film and process for production thereof |
| 08/10/2006 | US20060177289 Unified frame for semiconductor material handling system |
| 08/10/2006 | US20060177287 Universal reticle transfer system |
| 08/10/2006 | US20060176739 Novel monolithic, combo nonvolatile memory allowing byte, page and block write with no disturb and divided-well in the cell array using a unified cell structure and technology with a new scheme of decoder and layout |
| 08/10/2006 | US20060176738 Novel monolithic, combo nonvolatile memory allowing byte, page and block write with no disturb and divided-well in the cell array using a unified cell structure and technology with a new scheme of decoder and layout |
| 08/10/2006 | US20060176736 Flash Memory Cell Arrays Having Dual Control Gates Per Memory Cell Charge Storage Element |
| 08/10/2006 | US20060176588 Optical element holder, exposure apparatus, and device fabricating method |
| 08/10/2006 | US20060176585 Optical unit, exposure unit and optical devices |
| 08/10/2006 | US20060176573 Lithographic objective having a first lens group including only lenses having a positive refractive power |
| 08/10/2006 | US20060176459 Off-axis levelling in lithographic projection apparatus |
| 08/10/2006 | US20060176458 Lithographic apparatus and device manufacturing method |
| 08/10/2006 | US20060176454 Exposure apparatus for liquid crystal panel and exposure apparatus |
| 08/10/2006 | US20060176415 Display device and method for repairing line disconnection thereof |
| 08/10/2006 | US20060176101 Semiconductor integrated circuit |
| 08/10/2006 | US20060176083 Single ended three transistor quasi-static ram cell |
| 08/10/2006 | US20060176066 Device for measurement and analysis of electrical signals of an integrated circuit component |
| 08/10/2006 | US20060175935 Transducer assembly for megasonic processing of an article |
| 08/10/2006 | US20060175772 Substrate holding mechanism using electrostaic chuck and method of manufacturing the same |
| 08/10/2006 | US20060175714 Semiconductor device |
| 08/10/2006 | US20060175712 High performance IC package and method |
| 08/10/2006 | US20060175711 Structure and method for bonding an IC chip |
| 08/10/2006 | US20060175709 Integrated circuits and interconnect structure for integrated circuits |
| 08/10/2006 | US20060175708 Semiconductor device and method of manufacturing the same |
| 08/10/2006 | US20060175703 Thermally responsive pressure relief plug and method of making the same |
| 08/10/2006 | US20060175697 Semiconductor device having semiconductor chips stacked and mounted thereon and manufacturing method thereof |
| 08/10/2006 | US20060175692 Substrate structure with embedded semiconductor chip and fabrication method thereof |
| 08/10/2006 | US20060175689 Multi-leadframe semiconductor package and method of manufacture |
| 08/10/2006 | US20060175685 Composition for forming low-dielectric constant film comprising fullerene, low-dielectric constant film formed from the composition and method for forming the low-dielectric constant film |