Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2014
03/06/2014WO2014033110A1 Device for handling components, such as electronic components, and method of producing same
03/06/2014WO2014032970A1 Method for laying a wire conductor onto a substrate and for connecting it to a chip
03/06/2014WO2014032887A1 Reticle cleaning by means of sticky surface
03/06/2014WO2014032467A1 Method for preparing low-stress gan film
03/06/2014WO2014032361A1 Method for preparing independent bigrid finfet on bulk silicon
03/06/2014WO2014032346A1 Method for preparing ultrathin on-insulator material using adsorption of doped ultrathin layer
03/06/2014WO2014032338A1 Semiconductor structure and manufacturing method therefor
03/06/2014WO2014032300A1 Storage system for glass substrates and storage method for glass substrates
03/06/2014WO2014032228A1 Bridge ball wire bonding
03/06/2014WO2014032192A1 Processing arrangement with temperature conditioning arrangement and method of processing a substrate
03/06/2014WO2014032144A1 Solar cell production method with silicon wafer quality optimisation during aluminium diffusion
03/06/2014WO2014032143A1 Surface cleaning method with isotropic etching for textured silicon wafers
03/06/2014WO2014022619A8 Dual solder layer for fluidic self assembly and electrical component substrate and method employing same
03/06/2014WO2014017977A8 Method and apparatus for determining coplanarity in integrated circuit packages
03/06/2014WO2013192012A3 Laser crystal degradation compensation
03/06/2014WO2013190358A3 Plasma processing system with movable plasma chamber housing parts
03/06/2014WO2013178786A3 Apparatus for and method of aligning and transporting workpieces
03/06/2014US20140065844 Amino Vinylsilane Precursors for Stressed SiN Films
03/06/2014US20140065843 Method of Forming a Photoresist Layer
03/06/2014US20140065842 Methods And Apparatus For Forming Tantalum Silicate Layers On Germanium Or III-V Semiconductor Devices
03/06/2014US20140065841 ATOMIC LAYER DEPOSITION OF GeO2
03/06/2014US20140065840 Method for manufacturing semiconductor device and substrate processing apparatus
03/06/2014US20140065839 Method of pattern formation
03/06/2014US20140065838 Thin film dielectric layer formation
03/06/2014US20140065837 Method of bonding layers for thin film deposition
03/06/2014US20140065836 Texturing of monocrystalline semiconductor substrates to reduce incident light reflectance
03/06/2014US20140065835 Protective coating for a plasma processing chamber part and a method of use
03/06/2014US20140065834 Method of manufacturing mold for nano-imprint and substrate fabricating method
03/06/2014US20140065833 Method for manufacturing semiconductor device
03/06/2014US20140065832 Enhanced finfet process overlay mark
03/06/2014US20140065831 Patterned thin film dielectric layer formation
03/06/2014US20140065830 Patterned thin film dielectric stack formation
03/06/2014US20140065829 Trench formation method and method for manufacturing semiconductor device
03/06/2014US20140065828 Selective fin cut process
03/06/2014US20140065827 Gas distribution showerhead for inductively coupled plasma etch reactor
03/06/2014US20140065826 Polishing slurry for metal films and polishing method
03/06/2014US20140065825 Polishing slurry for cmp and polishing method
03/06/2014US20140065824 Maintaining mask integrity to form openings in wafers
03/06/2014US20140065823 Methods of forming patterns, and methods of forming integrated circuitry
03/06/2014US20140065822 Method for forming pattern
03/06/2014US20140065821 Latch-up suppression and substrate noise coupling reduction through a substrate back-tie for 3d integrated circuits
03/06/2014US20140065820 Pattern structures in semiconductor devices and methods of forming pattern structures in semiconductor devices
03/06/2014US20140065819 Methods and Systems for Low Resistance Contact Formation
03/06/2014US20140065818 Method of semiconductor integrated circuit fabrication
03/06/2014US20140065817 High performance on-chip vertical coaxial cable, method of manufacture and design structure
03/06/2014US20140065816 Dielectric formation
03/06/2014US20140065815 Beol integration scheme for copper cmp to prevent dendrite formation
03/06/2014US20140065814 Manufacturing method for micro bump structure
03/06/2014US20140065813 Size-filtered multimetal structures
03/06/2014US20140065812 Manufacturing method of semiconductor storage device
03/06/2014US20140065809 Semiconductor device and method for fabricating the same
03/06/2014US20140065808 Method of forming a material layer in a semiconductor structure
03/06/2014US20140065807 PARTIALLY-BLOCKED WELL IMPLANT TO IMPROVE DIODE IDEALITY WITH SiGe ANODE
03/06/2014US20140065806 Electronic devices including barium strontium titanium oxide films
03/06/2014US20140065805 Manufacturing method of semiconductor device and semiconductor manufacturing apparatus
03/06/2014US20140065804 Low temperature polysilicon thin film and manufacturing method thereof
03/06/2014US20140065803 Patterned thin film dielectric stack formation
03/06/2014US20140065802 Techniques for metal gate workfunction engineering to enable multiple threshold voltage finfet devices
03/06/2014US20140065801 Group III-V Substrate Material With Particular Crystallographic Features And Methods Of Making
03/06/2014US20140065800 Method for manufacturing silicon carbide semiconductor device
03/06/2014US20140065799 Methods and Systems for Low Resistance Contact Formation
03/06/2014US20140065798 METHOD AND APPARATUS FOR FORMING GATE STACK ON Si, SiGe or Ge CHANNELS
03/06/2014US20140065797 In-situ deposited mask layer for device singulation by laser scribing and plasma etch
03/06/2014US20140065795 Method for forming trench isolation
03/06/2014US20140065794 Method for Forming a Buried Dielectric Layer Underneath a Semiconductor Fin
03/06/2014US20140065793 Methods of manufacturing a semiconductor device
03/06/2014US20140065788 Combinatorial Approach for Screening of ALD Film Stacks
03/06/2014US20140065783 Oxygen scavenging spacer for a gate electrode
03/06/2014US20140065782 Method of making a finfet device
03/06/2014US20140065779 Method for manufacturing finfet
03/06/2014US20140065775 Fabrication method for semiconductor devices
03/06/2014US20140065771 Double solder bumps on substrates for low temperature flip chip bonding
03/06/2014US20140065770 Package interface plate for package isolation structures
03/06/2014US20140065768 Method for processing a wafer and method for dicing a wafer
03/06/2014US20140065767 Method of manufacturing semiconductor device
03/06/2014US20140065766 Method for fabricating well-aligned zinc oxide microrods and nanorods and application thereof
03/06/2014US20140065759 Method for molecular adhesion bonding at low pressure
03/06/2014US20140065749 Thin film transistor array panel and manufacturing method thereof
03/06/2014US20140065738 Leakage measurement of through silicon vias
03/06/2014US20140065737 Ion implantation method and ion implantation apparatus
03/06/2014US20140065735 Imprint apparatus, imprint method, and manufacturing method of semiconductor device
03/06/2014US20140065734 Method and system for determining overlap process windows in semiconductors by inspection techniques
03/06/2014US20140065733 Discrete sampling based nonlinear control system
03/06/2014US20140065732 Semiconductor manufacturing process system and method
03/06/2014US20140065731 In-line metrology system
03/06/2014US20140065730 Implant-induced damage control in ion implantation
03/06/2014US20140065729 Semiconductor apparatus having tsv and testing method thereof
03/06/2014US20140065728 Method for post decomposition density balancing in integrated circuit layouts, related system and program product
03/06/2014US20140065553 Chuck and semiconductor process using the same
03/06/2014US20140065552 Methods For Small Trench Patterning Using Chemical Amplified Photoresist Compositions
03/06/2014US20140065524 Photomask and method for forming pattern of semiconductor device using the same
03/06/2014US20140065393 Carrier substrate, method of manufacturing the same, and method of manufacturing flexible display device using the carrier substrate
03/06/2014US20140064901 Transporting device
03/06/2014US20140064886 System, architecture and method for simultaneous transfer and process of substrates
03/06/2014US20140064885 Cover opening/closing apparatus, thermal processing apparatus using the same, and cover opening/closing method
03/06/2014US20140064658 Thermal management for photonic integrated circuits
03/06/2014US20140064314 Emitting Device with Compositional and Doping Inhomogeneities in Semiconductor Layers
03/06/2014US20140064312 Epitaxial growth of in-plane nanowires and nanowire devices
03/06/2014US20140064006 Junctionless semiconductor device having buried gate, apparatus including the same, and method for manufacturing the semiconductor device
03/06/2014US20140063978 Non-volatile memory devices and methods of manufacturing the same
1 ... 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 ... 6590