Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2014
03/18/2014US8673784 Method for producing silicon epitaxial wafer
03/18/2014US8673783 Metal conductor chemical mechanical polish
03/18/2014US8673782 Methods of manufacturing NAND flash memory devices
03/18/2014US8673781 Plasma etching method
03/18/2014US8673780 Methods of processing semiconductor substrates in forming scribe line alignment marks
03/18/2014US8673779 Interconnect with self-formed barrier
03/18/2014US8673778 Tungsten film forming method
03/18/2014US8673777 In-line deposition system and process for deposition of a thin film layer
03/18/2014US8673776 Method for manufacturing semiconductor device having interlayer dielectric layers and a gate contact
03/18/2014US8673775 Methods of forming semiconductor structures
03/18/2014US8673774 Method for forming a via in a substrate
03/18/2014US8673773 Method for producing a nanoporous layer
03/18/2014US8673772 Biosensor chip and a method of manufacturing the same
03/18/2014US8673771 Pattern forming method
03/18/2014US8673770 Methods of forming conductive structures in dielectric layers on an integrated circuit device
03/18/2014US8673769 Methods and apparatuses for three dimensional integrated circuits
03/18/2014US8673768 Fabrication method for improving surface planarity after tungsten chemical mechanical polishing
03/18/2014US8673767 Manufacturing method for semiconductor device
03/18/2014US8673766 Methods of forming copper-based conductive structures by forming a copper-based seed layer having an as-deposited thickness profile and thereafter performing an etching process and electroless copper deposition
03/18/2014US8673765 Method and apparatus for back end of line semiconductor device processing
03/18/2014US8673764 Method and system for making and cleaning semiconductor device
03/18/2014US8673763 Stacked digital/RF system-on-chip with integral isolation layer
03/18/2014US8673762 Solder, soldering method, and semiconductor device
03/18/2014US8673760 Methods of forming structures on an integrated circuit product
03/18/2014US8673759 Dry etch polysilicon removal for replacement gates
03/18/2014US8673758 Structure of metal gate and fabrication method thereof
03/18/2014US8673757 Structure and method for using high-k material as an etch stop layer in dual stress layer process
03/18/2014US8673756 Out-of-plane spacer defined electrode
03/18/2014US8673755 Semiconductor device having metal gate and manufacturing method thereof
03/18/2014US8673754 Method of forming gate dielectric layer and method of fabricating semiconductor device
03/18/2014US8673753 Multi-energy ion implantation
03/18/2014US8673752 Method of forming epitaxial based integrated circuit
03/18/2014US8673751 Laser crystallization system and method of manufacturing display apparatus using the same
03/18/2014US8673750 Single crystal silicon TFTs made by lateral crystallization from a nanowire seed
03/18/2014US8673749 Semiconductor device manufacturing method
03/18/2014US8673748 Method for fabricating semiconductor thin film using substrate irradiated with focused light, apparatus for fabricating semiconductor thin film using substrate irradiated with focused light, method for selectively growing semiconductor thin film using substrate irradiated with focused light, and semiconductor element using substrate irradiated with focused light
03/18/2014US8673747 Method of fabricating semiconductor device
03/18/2014US8673746 Ammonium sulfide passivation of semiconductors
03/18/2014US8673745 Method of cutting object to be processed
03/18/2014US8673744 Wiring substrate, manufacturing method thereof, and semiconductor package
03/18/2014US8673743 Wafer dividing method
03/18/2014US8673742 Method for manufacturing semiconductor device
03/18/2014US8673741 Etching a laser-cut semiconductor before dicing a die attach film (DAF) or other material layer
03/18/2014US8673740 Method for formation of an electrically conducting through via
03/18/2014US8673739 Method of manufacturing semiconductor device
03/18/2014US8673738 Shallow trench isolation structures
03/18/2014US8673737 Array and moat isolation structures and method of manufacture
03/18/2014US8673736 Method of forming SOI-like structure in a bulk semiconductor substrate by annealing a lower portion of a trench while protecting an upper portion of the trench
03/18/2014US8673735 Semiconductor device and method for making same
03/18/2014US8673734 Semiconductor device and method for fabricating the same
03/18/2014US8673733 Methods of transferring layers of material in 3D integration processes and related structures and devices
03/18/2014US8673732 Method for fabricating micro-electro-mechanical systems (MEMS) device
03/18/2014US8673730 Manufacturing method of charging capacity structure
03/18/2014US8673728 Complementary stress liner to improve DGO/AVT devices and poly and diffusion resistors
03/18/2014US8673727 Flexible non-volatile memory
03/18/2014US8673726 Transistor structure with a sidewall-defined intrinsic base to extrinsic base link-up region and method of forming the transistor
03/18/2014US8673724 Methods of fabricating semiconductor devices
03/18/2014US8673723 Methods of forming isolation regions for FinFET semiconductor devices
03/18/2014US8673722 Strained channel field effect transistor and the method for fabricating the same
03/18/2014US8673721 Three-dimensional semiconductor memory device and method for manufacturing the same
03/18/2014US8673720 Structure and fabrication of field-effect transistor having nitrided gate dielectric layer with tailored vertical nitrogen concentration profile
03/18/2014US8673719 DRAM with a nanowire access transistor
03/18/2014US8673718 Methods of forming FinFET devices with alternative channel materials
03/18/2014US8673717 Self-aligned process to fabricate a memory cell array with a surrounding-gate access transistor
03/18/2014US8673716 Memory manufacturing process with bitline isolation
03/18/2014US8673715 Memory device and method of fabricating thereof
03/18/2014US8673714 Semiconductor device and method of forming the same
03/18/2014US8673713 Method for forming a transistor with recessed drain and source areas and non-conformal metal silicide regions
03/18/2014US8673712 Power transistor with high voltage counter implant
03/18/2014US8673711 Methods of fabricating a semiconductor device having a high-K gate dielectric layer and semiconductor devices fabricated thereby
03/18/2014US8673710 Formation of a channel semiconductor alloy by a nitride hard mask layer and an oxide mask
03/18/2014US8673709 FinFETs with multiple fin heights
03/18/2014US8673708 Replacement gate ETSOI with sharp junction
03/18/2014US8673707 Method for forming metal gate
03/18/2014US8673706 Methods of forming layers comprising epitaxial silicon
03/18/2014US8673705 Method of producing thin film transistor and thin film transistor
03/18/2014US8673704 FinFET and method for manufacturing the same
03/18/2014US8673703 Fabrication of graphene nanoelectronic devices on SOI structures
03/18/2014US8673702 Field shield dielectric as a mask during semiconductor ink jet printing
03/18/2014US8673701 Semiconductor structure and method for manufacturing the same
03/18/2014US8673700 Superjunction structures for power devices and methods of manufacture
03/18/2014US8673699 Semiconductor structure having NFET extension last implants
03/18/2014US8673698 Generation of multiple diameter nanowire field effect transistors
03/18/2014US8673697 Thin film transistor, method of fabricating the same and organic light emitting diode display device having the same
03/18/2014US8673696 SOI semiconductor device comprising a substrate diode with reduced metal silicide leakage
03/18/2014US8673695 Sapphire wafer dividing method
03/18/2014US8673692 Charging controlled RRAM device, and methods of making same
03/18/2014US8673691 Method for manufacturing a semiconductor device
03/18/2014US8673690 Method for manufacturing a semiconductor device and a semiconductor device
03/18/2014US8673689 Single layer BGA substrate process
03/18/2014US8673688 Semiconductor package and method of manufacturing the same
03/18/2014US8673687 Etched hybrid die package
03/18/2014US8673686 Chip package structure and manufacturing method thereof
03/18/2014US8673685 Electronic component mounting line and electronic component mounting method
03/18/2014US8673684 Semiconductor device and manufacturing method thereof
03/18/2014US8673683 Graphene field effect transistor
03/18/2014US8673681 Electrical device fabrication
03/18/2014US8673680 Nanoneedle plasmonic photodetectors and solar cells
03/18/2014US8673679 Enhanced vision system for screen printing pattern alignment
03/18/2014US8673678 Process of making a thin-film photovoltaic device and thin-film photovoltaic device